CN103604390B - Interference objective driving means - Google Patents
Interference objective driving means Download PDFInfo
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- CN103604390B CN103604390B CN201310596733.1A CN201310596733A CN103604390B CN 103604390 B CN103604390 B CN 103604390B CN 201310596733 A CN201310596733 A CN 201310596733A CN 103604390 B CN103604390 B CN 103604390B
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- driving means
- interference objective
- piezoelectric ceramics
- jackscrew
- objective driving
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Abstract
The invention discloses a kind of interference objective driving means, comprising: body, described body is formed with through chamber；Installing rack and fixed mount；Enlarger, it is positioned in described chamber, described enlarger includes the curved metal framework being oppositely arranged and sheet metal frame that is one-body molded with described curved metal framework and that be oppositely arranged, and described sheet metal frame is arranged between described curved metal framework and perpendicular with described curved metal framework；Piezoelectric ceramics, pretension jackscrew, ball, it is connected in described piezoelectric ceramics between described sheet metal frame, described pretension jackscrew and described body bolt, described ball matches with described pretension jackscrew, and described ball and described piezoelectric ceramics and described sheet metal frame mutually in connect the wall of side and lean.The micro-displacement of piezoelectric ceramics is amplified by the interference objective driving means of the present invention by enlarger, so that interference objective driving means obtains bigger displacement range.
Description
Technical field
The present invention relates to micro-move device application, be specifically related to a kind of interference objective driving means.
Background technology
The surface quality of machine components not only directly affects the serviceability of part, but also affects product
The quality of product, reliability and life-span.Along with developing rapidly of state-of-the-art, a lot of high, refined, peak products
Requiring more and more higher to suface processing quality, Ultraprecision Machining has become as the forward position of modern science and technology.
And ultraprecise detection technique is a high-tech technology with Ultraprecision Machining Parallel Development, accurately may be used
Measure the microscopic appearance on superfinishing surface by ground to have become in Ultra-precision Turning field one and have pass to be solved
Key problem.
Interference objective is the instrument utilizing principle of optical interference to detect machinery surface quality of workpieces, and it has
Surface information is directly perceived and certainty of measurement advantages of higher.At present, above-mentioned interference object lens in use, need
It is positioned so that it is and between measured object, keep suitable distance.Accordingly, it would be desirable to object lens drive
It is driven by dynamic device, but existing objective lens device have in order to ensure that high-accuracy displacement exports,
And the application scenario having the output of bigger micrometric displacement to require can not be met.
Therefore, for the problems referred to above, it is necessary to provide a kind of interference objective driving means.
Summary of the invention
In view of this, the invention provides a kind of interference objective driving means.
To achieve these goals, the technical scheme that the embodiment of the present invention provides is as follows:
A kind of interference objective driving means, comprising:
Body, described body is formed through chamber, and the side of described chamber is integrally formed symmetrical four
Linkage, described symmetrical four-bar mechanism is formed by flexible hinge；
Installing rack and fixed mount, described installing rack is arranged on described symmetrical four-bar mechanism, and right with described
Claiming four-bar mechanism one-body molded, it is another that described fixed mount and described installing rack are oppositely disposed in described body
One end；
Enlarger, it is positioned in described chamber, and described enlarger includes the curved metal being oppositely arranged
Framework and sheet metal frame that is one-body molded with described curved metal framework and that be oppositely arranged, and described gold
Belong to plate framework to be arranged between described curved metal framework, and perpendicular with described curved metal framework, institute
State the curved metal framework of side to be connected with described symmetrical four-bar mechanism by a support member, described another
The curved metal framework of side is connected with described body by another support member；
Piezoelectric ceramics, pretension jackscrew, ball, be connected in described piezoelectric ceramics between described sheet metal frame,
Described pretension jackscrew and described body bolt, described ball matches with described pretension jackscrew, and described
Ball and described piezoelectric ceramics and described sheet metal frame mutually in connect the wall of side and lean.
As the further improvement of the present invention, described enlarger is by the displacement equations of described piezoelectric ceramics
5～14 times.
As the further improvement of the present invention, ball part is embedded in described pretension jackscrew.
As the further improvement of the present invention, described pretension jackscrew includes the first jackscrew and the second jackscrew,
Described first jackscrew and the second jackscrew are by screw thread in opposite direction and described body bolt.
As the further improvement of the present invention, described pretension jackscrew with the screw thread of described body bolt is
M6X0.75 fine thread.
As the further improvement of the present invention, between described ball and piezoelectric ceramics, it is additionally provided with wolfram steel sheet,
Described wolfram steel sheet is fixedly connected with one end of described piezoelectric ceramics, and described ball is resisted against described wolfram steel
On sheet.
As the further improvement of the present invention, restoring force during described flexible hinge largest deformation amount is less than
Interact therewith the maximum driving force of piezoelectric ceramics.
As the further improvement of the present invention, the material of described flexible hinge is superduralumin.
As the further improvement of the present invention, described through chamber has the opening being oppositely arranged, institute
State the opening being oppositely arranged to be closed by upper cover plate and lower cover respectively.
As the further improvement of the present invention, described installing rack is formed with the screw thread installing interference objective.
Compared with prior art, the invention has the beneficial effects as follows: the interference objective driving means of the present invention is led to
Cross enlarger to be amplified by the micro-displacement of piezoelectric ceramics, so that interference objective driving means obtains
Bigger displacement range.The interference objective driving means of the present invention uses the right of flexible hinge formation simultaneously
Claiming four-bar mechanism to do transmission, there is not frictional force when driving flexible hinge motion in piezoelectric ceramics, installs fixing
Time damage probability reduce, low cost.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to reality
Execute the required accompanying drawing used in example or description of the prior art to be briefly described, it should be apparent that below,
Accompanying drawing in description is only some embodiments described in the present invention, for those of ordinary skill in the art
From the point of view of, on the premise of not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the schematic perspective view of interference objective driving means one detailed description of the invention of the present invention；
Fig. 2 is the sectional view of the part-structure of interference objective driving means one detailed description of the invention of the present invention.
Detailed description of the invention
For the technical scheme making those skilled in the art be more fully understood that in the present invention, below in conjunction with
Accompanying drawing in the embodiment of the present invention, clearly and completely retouches the technical scheme in the embodiment of the present invention
State, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole enforcement
Example.Based on the embodiment in the present invention, those of ordinary skill in the art are not before making creative work
Put the every other embodiment obtained, all should belong to the scope of protection of the invention.
As it is shown in figure 1, the interference objective driving means 100 of the present invention includes body 10, on this body 10
Being formed with through chamber 101, this chamber 101 has upper shed and the under shed relative with upper shed.
Above-mentioned upper shed, lower opening be respectively arranged with corresponding upper cover plate A and lower cover B, upper cover plate A and
Lower cover B is fixed on body 10 by screw and closes upper shed and under shed respectively.Further
Ground, the side of above-mentioned body 10 is formed with symmetrical four-bar mechanism 20, this symmetry four-bar mechanism 20 by
Flexible hinge is formed.When symmetrical four-bar mechanism 20 is subject to the active force perpendicular with it, the flexibility of both sides
Hinge all produces cross-couplings displacement.In the case of not considering mismachining tolerance, symmetrical four-bar mechanism 20 is tied
On structure full symmetric in the case of, it can produce strict unidirectional linear motion, thus avoid non-right
Four bar structures are claimed to produce the displacement defect caused because of cross-couplings displacement.Above-mentioned symmetrical four-bar mechanism and body
One-body molded, thus its compact conformation, in the case of overall dimensions is limited and driving force determines, its energy
Enough displacement output ratios obtaining maximum.Additionally, its drive connection clearly, without transmission idle running, without rubbing,
Precision is high, intensity is good.
Interference objective driving means 100 also includes installing rack 30 and fixed mount 40, and wherein installing rack 30 is used
In installing fixing interference objective, as a kind of embodiment, installing rack 30 is formed with screw thread, installing rack
30 with being spirally connected by above-mentioned screw thread of interference objective.Additionally, above-mentioned installing rack 30 is positioned at above-mentioned symmetry
On four-bar mechanism 20, it is preferable that installing rack 30 is integrally machined molding with symmetrical four-bar mechanism 20.Thus,
When symmetrical four-bar mechanism 20 deforms upon, installing rack 30 can be driven to produce displacement.Further, on
State fixed mount 40 to be oppositely arranged with installing rack 30, and fixed mount 40 is positioned at the other end of body.Specifically,
Offer some screwed holes 401 on fixed mount 40, when to measure thing carry out surface quality measure time, can be by
Measure thing to be connected in above-mentioned screwed hole 401.Preferably, when fixed mount 40 is rectangle, above-mentioned some spiral shells
Pit 401 is distributed at the corner location of fixed mount 40, thus can make full use of the area of fixed mount 40.
As in figure 2 it is shown, be provided with enlarger 50 in above-mentioned chamber 101, this enlarger 50 includes phase
To the curved metal framework 501 arranged and gold that is one-body molded with curved metal framework 501 and that be oppositely arranged
Belonging to plate framework 502, above-mentioned sheet metal frame 502 is arranged between described curved metal framework 501, and with
Curved metal framework 501 is perpendicular.The end of the above-mentioned sheet metal frame 502 being oppositely arranged and arc gold
The end belonging to framework 501 is connected, and is formed therebetween and has certain distance.When to metal sheet frame
When the outside of frame 502 applies the active force of an X-direction, curved metal framework 501 can be by sheet metal frame
The deformational displacement of 502 is amplified in the Y direction.In the present invention, the displacement equations multiplying power of enlarger is
5～14 times.
Additionally, the curved metal framework 501 of above-mentioned side is by a support member 102 and symmetrical four-bar mechanism
20 are connected, and the curved metal framework 501 of opposite side is connected with body 10 by another support member 102.
Thus, the displacement that curved metal framework 501 produces can be transferred to symmetrical four-bar mechanism 20 by enlarger 50
On.
Above-mentioned chamber 101 is additionally provided with piezoelectric ceramics 60, pretension jackscrew 70 and ball 80.Wherein,
Pretension jackscrew 70 is threadedly connected with body 10, and body 10 offers installation pretension jackscrew
The screwed hole of 70, and this screwed hole is opened on the sidewall perpendicular with symmetrical four-bar mechanism place wall,
Thus the pretension jackscrew 70 being installed in screwed hole is positioned at the side of symmetrical four-bar mechanism 20.Additionally, by
After pretension jackscrew 70 matches with body 10, inherently exist between pretension jackscrew 70 and body 10
Certain thread pitch and loosen, thus cause piezoelectric ceramics 60 cannot pretension, to this end, above-mentioned installation is pre-
The screw thread pressing closer silk 70 is M6X0.75 fine thread.Meanwhile, in order to make pretension jackscrew 70 energy further
Enough tightening, above-mentioned pretension jackscrew 70 includes the first jackscrew 701 and the second jackscrew 702, and wherein the first top
Silk 701 and the second jackscrew 702 are by screw thread in opposite direction and body 10 bolt.So, can pass through
Regulate the first jackscrew 701 and the second jackscrew 702 and provide enough pretightning force for piezoelectric ceramics 60.
Additionally, be connected between sheet metal frame 502 in above-mentioned piezoelectric ceramics 60, above-mentioned ball 80 can be with
Pretension jackscrew 70 matches, and leans with piezoelectric ceramics 60, specifically, and wherein ball 80 part
Be embedded in pretension jackscrew 70, ball 80 convexedly stretch in the part of pretension jackscrew 70 and piezoelectric ceramics 60 with
The wall connecing side in sheet metal frame 502 phase leans.Above-mentioned ball 80 connects with piezoelectric ceramics 60
The mode of touching is some face contact, and the advantage being arranged such is, though the screw thread of above-mentioned installation pretension jackscrew 70
Kong Buyu piezoelectric ceramics 60 keeps absolute upright, it is possible to ensure that piezoelectric ceramics 60 will not be by except Vertical Square
To power in addition, protect piezoelectric ceramics to a certain extent, decrease the loss of piezoelectric ceramics.Thus,
When piezoelectric ceramics 60 produces micrometric displacement, the micrometric displacement of piezoelectric ceramics 60 can be amplified by enlarger 50
5～14 times.
Preferably, between above-mentioned ball 80 and piezoelectric ceramics 60, it is additionally provided with wolfram steel sheet 90, this wolfram steel sheet
90 are fixedly connected with one end of piezoelectric ceramics 60, and the other end leans with ball 80.Wolfram steel sheet 90
Can be fixedly connected by epoxy glue with the connected mode of piezoelectric ceramics 60.Owing to wolfram steel sheet 90 has
There is higher hardness, thus the active force that wolfram steel sheet 90 is applied by ball 80 can act on piezoelectricity uniformly
On pottery 60, thus provide uniform pretightning force.
It is by symmetrical four-bar mechanism 20 certainly that above-mentioned symmetrical four-bar mechanism 20 drives installing rack 30 to produce displacement
The elastic deformation of body realizes.Under normal circumstances, the elasticity of the elastic deformation of material and power output and material
Modulus E and its yield limit Sy are directly proportional.Therefore, in order to increase the symmetry four formed by flexible hinge
The range of movement of linkage 20, the elastic modulus E of selected flexible hinge and yield limit Sy are the biggest,
But need to meet: 1 simultaneously) maximum distortion of flexible hinge time restoring force be less than piezoelectric ceramics 60
Large driving force；2) maximum stress during flexible hinge maximum distortion is less than the allowable stress of himself.Base
In above-mentioned consideration, in the present invention, the material of flexible hinge is preferably superduralumin.
Additionally, the material of above-mentioned piezoelectric ceramics 60 is preferably lead zirconate titanate (PZT)；Pretension jackscrew 70
Material is preferably past the common iron Q235 of blackening process；The material of wolfram steel sheet 90 is wolfram steel, its tool
Have that hardness is high, wear-resisting, intensity and toughness preferable, heat-resisting, corrosion-resistant etc. a little.
When using the interference objective driving means of the present invention, first interference objective is installed on the screw thread of installing rack
In, then measured object is connected on the screwed hole of fixed mount.When piezoelectric ceramics is applied a driving voltage
Piezoelectric ceramics i.e. can occur to increase deformation, is connected between sheet metal frame, thus presses in as mentioned above
After electroceramics deforms upon, the displacement equations that this deformation can be caused by enlarger, and drive in Y-direction
Symmetrical four-bar mechanism produces displacement, and symmetrical four-bar mechanism is further driven to mounting bracket and moves.Install
After support motion, the distance between interference objective thereon and measured object changes.
Compared with prior art, the interference objective driving means of the present invention passes through enlarger by piezoelectric ceramics
Micro-displacement be amplified, so that interference objective driving means obtains bigger displacement range.With
Time the present invention interference objective driving means use flexible hinge formed symmetrical four-bar mechanism do transmission, pressure
There is not frictional force when driving flexible hinge motion in electroceramics, damages probability and reduce when installing fixing, cost
Low.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment,
And without departing from the spirit or essential characteristics of the present invention, it is possible to real in other specific forms
The existing present invention.Therefore, no matter from the point of view of which point, embodiment all should be regarded as exemplary, and
Being nonrestrictive, the scope of the present invention is limited by claims rather than described above, therefore purport
All changes in falling in the implication of equivalency and scope of claim are included in the present invention.
Should not be considered as limiting involved claim by any reference in claim.
Moreover, it will be appreciated that although this specification is been described by according to embodiment, but the most each reality
Mode of executing only comprises an independent technical scheme, and this narrating mode of description is only for understand
Seeing, those skilled in the art should be using description as an entirety, and the technical scheme in each embodiment is also
Other embodiments that it will be appreciated by those skilled in the art that can be formed through suitably closing.
Claims (9)
1. an interference objective driving means, it is characterised in that described interference objective driving means includes:
Body, described body is formed through chamber, and the side of described chamber is integrally formed symmetrical four bars
Mechanism, described symmetrical four-bar mechanism is formed by flexible hinge；
Installing rack and fixed mount, described installing rack is arranged on described symmetrical four-bar mechanism, and with described symmetry
Four-bar mechanism is one-body molded, and described fixed mount and described installing rack are oppositely disposed in the other end of described body；
Enlarger, it is positioned in described chamber, and described enlarger includes the curved metal frame being oppositely arranged
Frame and sheet metal frame that is one-body molded with described curved metal framework and that be oppositely arranged, and described metallic plate
Framework is arranged between described curved metal framework, and perpendicular with described curved metal framework, described arc
The side of metal framework is connected with described symmetrical four-bar mechanism by a support member, described curved metal framework
Opposite side be connected with described body by another support member；
Piezoelectric ceramics, pretension jackscrew and ball, be connected in described piezoelectric ceramics between described sheet metal frame,
Described pretension jackscrew and described body bolt, described ball matches with described pretension jackscrew, and described rolling
Pearl be resisted against described piezoelectric ceramics and sheet metal frame mutually in connect the wall of side.
Interference objective driving means the most according to claim 1, it is characterised in that described enlarger
By the displacement equations 5 of described piezoelectric ceramics～14 times.
Interference objective driving means the most according to claim 1, it is characterised in that ball part is inlayed
In described pretension jackscrew.
Interference objective driving means the most according to claim 1, it is characterised in that described pretension jackscrew
Including the first jackscrew and the second jackscrew, described first jackscrew and the second jackscrew by screw thread in opposite direction and institute
State body bolt.
Interference objective driving means the most according to claim 1, it is characterised in that described ball and pressure
Being additionally provided with wolfram steel sheet between electroceramics, described wolfram steel sheet is fixedly connected with one end of described piezoelectric ceramics,
Described ball is resisted against on described wolfram steel sheet.
Interference objective driving means the most according to claim 1, it is characterised in that described flexible hinge
Restoring force during largest deformation amount is less than the maximum driving force interacting therewith piezoelectric ceramics.
Interference objective driving means the most according to claim 6, it is characterised in that described flexible hinge
Material be superduralumin.
Interference objective driving means the most according to claim 1, it is characterised in that described through chamber
Room has the opening being oppositely arranged, described in the opening that is oppositely arranged closed by upper cover plate and lower cover respectively.
Interference objective driving means the most according to claim 1, it is characterised in that on described installing rack
It is formed with the screw thread installing interference objective.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201310596733.1A CN103604390B (en) | 2013-11-21 | 2013-11-21 | Interference objective driving means |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310596733.1A CN103604390B (en) | 2013-11-21 | 2013-11-21 | Interference objective driving means |
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| CN103604390A CN103604390A (en) | 2014-02-26 |
| CN103604390B true CN103604390B (en) | 2017-01-04 |
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| CN201310596733.1A Active CN103604390B (en) | 2013-11-21 | 2013-11-21 | Interference objective driving means |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104088871B (en) | 2014-06-27 | 2016-03-02 | 华南理工大学 | A kind of precision positioning drive end pre-tightening apparatus |
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|---|---|---|---|---|
| CN2580470Y (en) * | 2002-11-18 | 2003-10-15 | 哈尔滨工业大学博实精密测控有限责任公司 | Three freedom super fine positioning platform |
| CN101625231A (en) * | 2009-04-14 | 2010-01-13 | 华中科技大学 | White light interference profile meter |
| CN103022339A (en) * | 2012-12-28 | 2013-04-03 | 东南大学 | Orthogonal piezoelectric displacement amplifying mechanism |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203687889U (en) * | 2013-11-21 | 2014-07-02 | 苏州大学 | Interference objective lens drive unit |
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2013
- 2013-11-21 CN CN201310596733.1A patent/CN103604390B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2580470Y (en) * | 2002-11-18 | 2003-10-15 | 哈尔滨工业大学博实精密测控有限责任公司 | Three freedom super fine positioning platform |
| CN101625231A (en) * | 2009-04-14 | 2010-01-13 | 华中科技大学 | White light interference profile meter |
| CN103022339A (en) * | 2012-12-28 | 2013-04-03 | 东南大学 | Orthogonal piezoelectric displacement amplifying mechanism |
Non-Patent Citations (1)
| Title |
|---|
| 大量程纳米级垂直扫描系统研究;王淑珍等;《中国机械工程》;20101231;第387-390页 * |
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