CN103604390A - Interference objective driving device - Google Patents
Interference objective driving device Download PDFInfo
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- CN103604390A CN103604390A CN201310596733.1A CN201310596733A CN103604390A CN 103604390 A CN103604390 A CN 103604390A CN 201310596733 A CN201310596733 A CN 201310596733A CN 103604390 A CN103604390 A CN 103604390A
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- interference objective
- jackscrew
- metal framework
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- piezoelectric ceramics
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Abstract
The invention discloses an interference objective driving device. The interference objective driving device comprises a body, a mounting rack and a fixing rack. A through chamber is formed in the body, and an amplifying mechanism is arranged in the chamber and comprises arc metal frames arranged oppositely and metal plate frames which are integrally formed with the arc metal frames and arranged oppositely. The metal plate frames are arranged between the arc metal frames and are perpendicular to the arc metal frames. A piezoelectric ceramic element, a pre-tensioning jackscrew and a roll ball are also arranged in the chamber. The piezoelectric ceramic element is integrally connected between the metal plate frames, the pre-tensioning jackscrew is in threaded connection with the body, the roll ball is matched with the pre-tensioning jackscrew, and the roll ball abuts against the wall face of one side, integrally connected with the metal plate frames, of the piezoelectric ceramic element. According to the interference objective driving device, the amplifying mechanism is used for amplifying infinitesimal displacement of the piezoelectric ceramic element, and therefore a larger displacement range is obtained for the interference objective driving device.
Description
Technical field
The present invention relates to micro-driving application, be specifically related to a kind of interference objective drive unit.
Background technology
The surface quality of mechanical component not only directly affects the usability of part, but also affects quality, reliability and the life-span of product.Along with the develop rapidly of state-of-the-art, a lot of high, refined, peak products effects on surface crudies require more and more higher, and Ultraprecision Machining has become the forward position of modern science and technology.And ultraprecise detection technique is a high-tech technology with Ultraprecision Machining Parallel Development, the microscopic appearance of accurately measuring reliably superfinish has now become in ultraprecise manufacture field one key issue to be solved.
Interference objective is to utilize optical interference principle to detect the instrument of machinery part surface quality, and it has surface information intuitively and measuring accuracy advantages of higher.At present, above-mentioned interference object lens in use, need to position it, make to keep between itself and measured object suitable distance.Therefore, need objective lens device to drive it, but existing objective lens device have in order to guarantee high-accuracy displacement output, and can not meet the application scenario that has larger micrometric displacement output to require.
Therefore,, for the problems referred to above, be necessary the interference objective drive unit that provides a kind of.
Summary of the invention
In view of this, the invention provides a kind of interference objective drive unit.
To achieve these goals, the technical scheme that the embodiment of the present invention provides is as follows:
An interference objective drive unit, it comprises:
Body, is formed with the chamber of perforation on described body, a side of described chamber is integrally formed symmetrical four-bar mechanism, and described symmetrical four-bar mechanism is formed by flexible hinge;
Erecting frame and fixed mount, described erecting frame is arranged on described symmetrical four-bar mechanism, and one-body molded with described symmetrical four-bar mechanism, and described fixed mount and described erecting frame are relatively arranged at the other end of described body;
Enlarger, it is arranged in described chamber, described enlarger comprises curved metal framework and the sheet metal framework one-body molded with described curved metal framework and that be oppositely arranged being oppositely arranged, and described sheet metal framework is arranged between described curved metal framework, and perpendicular with described curved metal framework, the curved metal framework of a described side is connected with described symmetrical four-bar mechanism by a support member, and the curved metal framework of described opposite side is connected with described body by another support member;
Piezoelectric ceramics, pretension jackscrew, ball, in described piezoelectric ceramics, be connected between described sheet metal framework, described pretension jackscrew and described body bolt, described ball matches with described pretension jackscrew, and the wall that described ball and described piezoelectric ceramics and described sheet metal framework connect a side in mutually leans.
As further improvement of the present invention, described enlarger amplifies 5～14 times by the displacement of described piezoelectric ceramics.
As further improvement of the present invention, ball is partly embedded in described pretension jackscrew.
As further improvement of the present invention, described pretension jackscrew comprises the first jackscrew and the second jackscrew, and described the first jackscrew and the second jackscrew are by screw thread and the described body bolt of opposite direction.
As further improvement of the present invention, the screw thread of described pretension jackscrew and described body bolt is M6X0.75 fine thread.
As further improvement of the present invention, between described ball and piezoelectric ceramics, be also provided with wolfram steel sheet, described wolfram steel sheet is fixed and is connected with one end of described piezoelectric ceramics, and described ball is resisted against on described wolfram steel sheet.
As further improvement of the present invention, restoring force during described flexible hinge largest deformation amount is less than the maximum driving force of piezoelectric ceramics interactional with it.
As further improvement of the present invention, the material of described flexible hinge is ultralumin.
As further improvement of the present invention, the chamber of described perforation has the opening being oppositely arranged, described in the opening that is oppositely arranged by upper cover plate and lower cover, sealed respectively.
As further improvement of the present invention, on described erecting frame, be formed with the screw thread that interference objective is installed.
Compared with prior art, the invention has the beneficial effects as follows: interference objective drive unit of the present invention amplifies the micro-displacement of piezoelectric ceramics by enlarger, thereby make interference objective drive unit obtain larger displacement range.The symmetrical four-bar mechanism that interference objective drive unit simultaneously of the present invention adopts flexible hinge to form is done transmission, and piezoelectric ceramics does not exist friction force while driving flexible hinge motion, damages probability and reduce while installing fixedly, and cost is low.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, the accompanying drawing the following describes is only some embodiment that record in the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the schematic perspective view of interference objective drive unit one embodiment of the present invention;
Fig. 2 is the cut-open view of the part-structure of interference objective drive unit one embodiment of the present invention.
Embodiment
In order to make those skilled in the art person understand better the technical scheme in the present invention, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Embodiment based in the present invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, should belong to the scope of protection of the invention.
As shown in Figure 1, interference objective drive unit 100 of the present invention comprises body 10, is formed with the chamber 101 of perforation on this body 10, and this chamber 101 has upper shed and the under shed relative with upper shed.Above-mentioned upper shed, lower opening are respectively arranged with corresponding upper cover plate A and lower cover B, and upper cover plate A and lower cover B are fixed on body 10 and respectively upper shed and under shed are sealed by screw.Further, a side of above-mentioned body 10 is formed with symmetrical four-bar mechanism 20, and this symmetry four-bar mechanism 20 is formed by flexible hinge.When symmetrical four-bar mechanism 20 is subject to the acting force perpendicular with it, the flexible hinge of both sides all produces cross-couplings displacement.In the situation that not considering mismachining tolerance, in symmetrical four-bar mechanism 20 structures, in the situation of full symmetric, it can produce strict unidirectional rectilinear motion, thus the displacement defect of having avoided asymmetric four bar structure generations to cause because of cross-couplings displacement.Above-mentioned symmetrical four-bar mechanism and this body by integral forming, thereby its compact conformation, in the situation that physical dimension is limited and driving force is definite, it can obtain maximum displacement output ratio.In addition, its drive connection clear and definite, without transmission idle running, without friction, precision is high, intensity good.
Interference objective drive unit 100 also comprises erecting frame 30 and fixed mount 40, and wherein erecting frame 30, for fixedly interference objective is installed, as a kind of embodiment, is formed with screw thread on erecting frame 30, and erecting frame 30 is spirally connected with the above-mentioned screw thread that passes through of interference objective.In addition, above-mentioned erecting frame 30 is positioned on above-mentioned symmetrical four-bar mechanism 20, preferably, and erecting frame 30 and symmetrical four-bar mechanism 20 one machine-shapings.Thereby, when deformation occurs symmetrical four-bar mechanism 20, can drive erecting frame 30 to produce displacement.Further, above-mentioned fixed mount 40 is oppositely arranged with erecting frame 30, and fixed mount 40 is positioned at the other end of body.Particularly, on fixed mount 40, offer some threaded holes 401, when measurement thing is carried out to surface quality measurement, can be connected in above-mentioned threaded hole 401 measuring thing.Preferably, when fixed mount 40 is rectangle, above-mentioned some threaded holes 401 are distributed in the corner location place of fixed mount 40, thereby can make full use of the area of fixed mount 40.
As shown in Figure 2, in above-mentioned chamber 101, be provided with enlarger 50, this enlarger 50 comprises curved metal framework 501 and the sheet metal framework 502 one-body molded with curved metal framework 501 and that be oppositely arranged being oppositely arranged, above-mentioned sheet metal framework 502 is arranged between described curved metal framework 501, and perpendicular with curved metal framework 501.The end of the above-mentioned sheet metal framework 502 being oppositely arranged is connected with the end of curved metal framework 501, and between the two, is formed with and has certain distance.When the outside of sheet metal framework 502 is applied to the acting force of a directions X, curved metal framework 501 can amplify the deformational displacement of sheet metal framework 502 in Y-direction.In the present invention, the displacement enlargement ratio of enlarger is 5～14 times.
In addition, the curved metal framework 501 of an above-mentioned side is connected with symmetrical four-bar mechanism 20 by a support member 102, and the curved metal framework 501 of opposite side is connected with body 10 by another support member 102.Thereby the displacement that enlarger 50 can produce curved metal framework 501 is passed on symmetrical four-bar mechanism 20.
In above-mentioned chamber 101, be also provided with piezoelectric ceramics 60, pretension jackscrew 70 and ball 80.Wherein, pretension jackscrew 70 is connected by engage thread with body 10, on body 10, offer the threaded hole that pretension jackscrew 70 is installed, and this threaded hole is opened on the sidewall perpendicular with symmetrical four-bar mechanism place wall, thereby be installed on the side that pretension jackscrew 70 in threaded hole is positioned at symmetrical four-bar mechanism 20.In addition, due to after pretension jackscrew 70 matches with body 10, between pretension jackscrew 70 and body 10, must there is certain thread pitch and loosening, thereby cause the piezoelectric ceramics 60 cannot pretension, for this reason, the screw thread of above-mentioned installation pretension jackscrew 70 is M6X0.75 fine thread.Meanwhile, in order further to make pretension jackscrew 70 tighten, above-mentioned pretension jackscrew 70 comprises the first jackscrew 701 and the second jackscrew 702, and wherein the first jackscrew 701 and the second jackscrew 702 by screw thread and body 10 bolts of opposite direction.So, can be by regulating the first jackscrew 701 and the second jackscrew 702 to provide enough pretightning forces for piezoelectric ceramics 60.
In addition, in above-mentioned piezoelectric ceramics 60, be connected between sheet metal framework 502, above-mentioned ball 80 can match with pretension jackscrew 70, and lean with piezoelectric ceramics 60, particularly, wherein ball 80 parts are embedded in pretension jackscrew 70, and the wall that the part that ball 80 convexedly stretches in pretension jackscrew 70 and piezoelectric ceramics 60 and sheet metal framework 502 connect a side in mutually leans.Above-mentioned ball 80 is that a some face contacts with the way of contact of piezoelectric ceramics 60; the advantage so arranging is; even if the threaded hole of above-mentioned installation pretension jackscrew 70 does not keep definitely vertical with piezoelectric ceramics 60; also can guarantee that piezoelectric ceramics 60 can not be subject to the power except vertical direction; protect to a certain extent piezoelectric ceramics, reduced the loss of piezoelectric ceramics.Thereby when piezoelectric ceramics 60 produces micrometric displacement, enlarger 50 can amplify 5～14 times by the micrometric displacement of piezoelectric ceramics 60.
Preferably, between above-mentioned ball 80 and piezoelectric ceramics 60, be also provided with wolfram steel sheet 90, this wolfram steel sheet 90 is fixed and is connected with one end of piezoelectric ceramics 60, and the other end and ball 80 lean.Wolfram steel sheet 90 can be fixed and be connected by epoxy glue with the connected mode of piezoelectric ceramics 60.Because wolfram steel sheet 90 has higher hardness, thereby the acting force that 80 pairs of wolfram steel sheets 90 of ball apply can act on piezoelectric ceramics 60 uniformly, thereby uniform pretightning force is provided.
It is that elastic deformation by symmetrical four-bar mechanism 20 self realizes that above-mentioned symmetrical four-bar mechanism 20 drives erecting frames 30 to produce displacements.Generally, the elastic modulus E of the elastic deformation of material and power output and material with and yield limit Sy be directly proportional.Therefore, in order to increase the range of movement of the symmetrical four-bar mechanism 20 being formed by flexible hinge, the elastic modulus E of selected flexible hinge and yield limit Sy should be larger, but need to meet simultaneously: 1) restoring force during maximum distortion of flexible hinge is less than the maximum driving force of piezoelectric ceramics 60; 2) maximum stress during flexible hinge maximum distortion is less than the permissible stress of himself.Based on above-mentioned consideration, in the present invention, the material of flexible hinge is preferably ultralumin.
In addition, the material of above-mentioned piezoelectric ceramics 60 is preferably lead zirconate titanate (PZT); The material of pretension jackscrew 70 is preferably the common iron Q235 through blackening process; The material of wolfram steel sheet 90 is wolfram steel, it has, and hardness is high, wear-resisting, intensity and toughness better, heat-resisting, corrosion-resistant etc. a little.
While using interference objective drive unit of the present invention, first interference objective is installed in the screw thread of erecting frame, then measured object is connected on the threaded hole of fixed mount.When piezoelectric ceramics is applied to a driving voltage, piezoelectric ceramics can increase deformation, in as mentioned above, be connected between sheet metal framework, thereby after piezoelectric ceramics generation deformation, the displacement that enlarger can cause this deformation is amplified, and in Y-direction, driving symmetrical four-bar mechanism to produce displacement, symmetrical four-bar mechanism further drives mounting bracket to move.After mounting bracket motion, the interference objective on it and the distance between measured object change.
Compared with prior art, interference objective drive unit of the present invention amplifies the micro-displacement of piezoelectric ceramics by enlarger, thereby makes interference objective drive unit obtain larger displacement range.The symmetrical four-bar mechanism that interference objective drive unit simultaneously of the present invention adopts flexible hinge to form is done transmission, and piezoelectric ceramics does not exist friction force while driving flexible hinge motion, damages probability and reduce while installing fixedly, and cost is low.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and in the situation that not deviating from spirit of the present invention or essential characteristic, can realize the present invention with other concrete form.Therefore, no matter from which point, all should regard embodiment as exemplary, and be nonrestrictive, scope of the present invention is limited by claims rather than above-mentioned explanation, is therefore intended to include in the present invention dropping on the implication that is equal to important document of claim and all changes in scope.Any Reference numeral in claim should be considered as limiting related claim.
In addition, be to be understood that, although this instructions is described according to embodiment, but not each embodiment only comprises an independently technical scheme, this narrating mode of instructions is only for clarity sake, those skilled in the art should make instructions as a whole, and the technical scheme in each embodiment also can, through suitably closing, form other embodiments that it will be appreciated by those skilled in the art that.
Claims (9)
1. an interference objective drive unit, is characterized in that, described interference objective drive unit comprises:
Body, is formed with the chamber of perforation on described body, a side of described chamber is integrally formed symmetrical four-bar mechanism, and described symmetrical four-bar mechanism is formed by flexible hinge;
Erecting frame and fixed mount, described erecting frame is arranged on described symmetrical four-bar mechanism, and one-body molded with described symmetrical four-bar mechanism, and described fixed mount and described erecting frame are relatively arranged at the other end of described body;
Enlarger, it is arranged in described chamber, described enlarger comprises curved metal framework and the sheet metal framework one-body molded with described curved metal framework and that be oppositely arranged being oppositely arranged, and described sheet metal framework is arranged between described curved metal framework, and perpendicular with described curved metal framework, the curved metal framework of a described side is connected with described symmetrical four-bar mechanism by a support member, and the curved metal framework of described opposite side is connected with described body by another support member;
Piezoelectric ceramics, pretension jackscrew, ball, in described piezoelectric ceramics, be connected between described sheet metal framework, described pretension jackscrew and described body bolt, described ball matches with described pretension jackscrew, and the wall that described ball and described piezoelectric ceramics and described sheet metal framework connect a side in mutually leans.
2. interference objective drive unit according to claim 1, is characterized in that, described enlarger amplifies 5～14 times by the displacement of described piezoelectric ceramics.
3. interference objective drive unit according to claim 1, is characterized in that, ball is partly embedded in described pretension jackscrew.
4. interference objective drive unit according to claim 1, is characterized in that, described pretension jackscrew comprises the first jackscrew and the second jackscrew, and described the first jackscrew and the second jackscrew are by screw thread and the described body bolt of opposite direction.
5. interference objective drive unit according to claim 1, is characterized in that, is also provided with wolfram steel sheet between described ball and piezoelectric ceramics, and described wolfram steel sheet is fixed and is connected with one end of described piezoelectric ceramics, and described ball is resisted against on described wolfram steel sheet.
6. interference objective drive unit according to claim 1, is characterized in that, restoring force during described flexible hinge largest deformation amount is less than the maximum driving force of piezoelectric ceramics interactional with it.
7. interference objective drive unit according to claim 6, is characterized in that, the material of described flexible hinge is ultralumin.
8. interference objective drive unit according to claim 1, is characterized in that, the chamber of described perforation has the opening being oppositely arranged, described in the opening that is oppositely arranged by upper cover plate and lower cover, sealed respectively.
9. interference objective drive unit according to claim 1, is characterized in that, is formed with the screw thread that interference objective is installed on described erecting frame.
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| CN201310596733.1A CN103604390B (en) | 2013-11-21 | 2013-11-21 | Interference objective driving means |
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| CN201310596733.1A CN103604390B (en) | 2013-11-21 | 2013-11-21 | Interference objective driving means |
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| CN103604390A true CN103604390A (en) | 2014-02-26 |
| CN103604390B CN103604390B (en) | 2017-01-04 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2015196741A1 (en) * | 2014-06-27 | 2015-12-30 | 华南理工大学 | Precise-locating drive end pre-tightening device |
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2013
- 2013-11-21 CN CN201310596733.1A patent/CN103604390B/en active Active
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Cited By (2)
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| WO2015196741A1 (en) * | 2014-06-27 | 2015-12-30 | 华南理工大学 | Precise-locating drive end pre-tightening device |
| US10030962B2 (en) | 2014-06-27 | 2018-07-24 | South China University Of Technology | Precision-positioning drive pre-tightening device |
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| Publication number | Publication date |
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| CN103604390B (en) | 2017-01-04 |
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