CN103594403B - Film magazine transmits device and has its semiconductor devices - Google Patents
Film magazine transmits device and has its semiconductor devices Download PDFInfo
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- CN103594403B CN103594403B CN201210290300.9A CN201210290300A CN103594403B CN 103594403 B CN103594403 B CN 103594403B CN 201210290300 A CN201210290300 A CN 201210290300A CN 103594403 B CN103594403 B CN 103594403B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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Abstract
The present invention discloses a kind of film magazine transmission device, comprising: film magazine, the pallet carrying wafer for placing in described film magazine, and the outer bottom of described film magazine is provided with the first guide member; Cavity, has the room, chamber for holding described film magazine in described cavity, the diapire of room, described chamber is provided with the 2nd guide member for coordinating with described first guide member; And mobile platform, the upper surface of described mobile platform is provided with the 3rd guide member, described 3rd guide member is for coordinating described film magazine is supported on described mobile platform with described first guide member, and the opened front that described mobile platform is movable to room, described chamber is sentenced toilet and stated the 2nd guide member and described 3rd guide member is adjacent each other and described film magazine can pass in and out room, described chamber along the described 2nd and the 3rd guide member. Film magazine transmission device according to the present invention, can facilitate, pick and place film magazine efficiently, fast. The invention also discloses a kind of semiconductor devices.
Description
Technical field
The present invention relates to field of semiconductor devices, especially relate to a kind of film magazine transmission device and there is its semiconductor devices.
Background technology
In LED industry, being generally placed on pallet by multiple wafer to be processed, pallet is placed in film magazine, is then placed in transmission chamber by the film magazine placing multiple pallet and carries out passing the subsequent techniques such as sheet. Owing to the pallet in film magazine placed multiple wafer, therefore film magazine can be heavier, like this film magazine is placed on transmission chamber in or from transmission chamber in take out film magazine all seem particularly inconvenience, and in current LED industry, normally by portable mode, film magazine is put in transmission chamber at present, but very heavy owing to placed the film magazine of wafer, all inconvenient for portable transport and placement film magazine, being not easy to operation, efficiency is low.
Summary of the invention
The present invention is intended to one of technical problem at least solving existence in prior art.
For this reason, it is an object of the present invention to propose a kind of film magazine transmission device, described film magazine transmission device is convenient when depositing wafer and transport film magazine.
Another object of the present invention is to propose a kind of semiconductor devices.
The film magazine transmission device of embodiment, comprising: film magazine, the pallet carrying wafer for placing in described film magazine according to a first aspect of the present invention, and the outer bottom of described film magazine is provided with the first guide member; Cavity, has the room, chamber for holding described film magazine in described cavity, the diapire of room, described chamber is provided with the 2nd guide member for coordinating with described first guide member; And mobile platform, the upper surface of described mobile platform is provided with the 3rd guide member, described 3rd guide member is for coordinating described film magazine is supported on described mobile platform with described first guide member, and the opened front that described mobile platform is movable to room, described chamber is sentenced toilet and stated the 2nd guide member and described 3rd guide member is adjacent each other and described film magazine can pass in and out room, described chamber along the described 2nd and the 3rd guide member.
Film magazine transmission device according to embodiments of the present invention, by arranging mobile platform, when mobile platform moves to opened front place of cavity, 2nd guiding part is adjacent each other with the 3rd guide member and coordinates with the first guide member respectively, the film magazine thus filling wafer conveniently can enter room, chamber under the guide function of guide member, easy to operate, time saving and energy saving, improve transmission efficiency, facilitate follow-up the carrying out getting blade technolgy.
In addition, film magazine according to the above embodiment of the present invention transmission device also has following additional technical feature:
In one embodiment of the invention, described first guide member is the line channel extended along the longitudinal direction, described 2nd and the 3rd guide member is the line slideway extended along the longitudinal direction, and the 2nd and the 3rd guide member described in when described mobile platform is movable to opened front place of room, described chamber is in the longitudinal direction on the same line.
In one embodiment of the invention, described line channel be two and in left-right direction between separate, described line slideway be two and in left-right direction between separate.
In another embodiment of the present invention, described first guide member is be located on the outer bottom of described film magazine the line slideway extended along the longitudinal direction, described 2nd and the 3rd guide member is the line channel extended along the longitudinal direction, and the 2nd and the 3rd guide member described in when described mobile platform is movable to opened front place of room, described chamber is in the longitudinal direction on the same line.
In one embodiment of the invention, described film magazine transmission device also comprises positioning element, and described positioning element is for connecting and locates the 2nd and the 3rd adjacent each other guide member. Thus, by the connection of positioning element, positioning action, thus realize the 2nd guide member and the adjacent cooperation of the 3rd guide member, namely the front end of the 2nd guide member and the rear end in contact of the 3rd guide member and the 2nd guide member and the 3rd guide member place are on the same line, thus substantially increasing transmission efficiency, convenient film magazine enters indoor, chamber.
In one embodiment of the invention, described positioning element is steady brace.
In one embodiment of the invention, indoor, described chamber are also provided with the limiting component for described film magazine is fixed on indoor, described chamber. Thus, the backstop to film magazine, position-limiting action can be realized after film magazine enters room, chamber, place the film magazine mobile rear wall touching cavity too backward, damage cavity.
In one embodiment of the invention, described limiting component is block.
In another embodiment of the present invention, described film magazine transmission device also comprises film magazine lifting member, and described film magazine lifting member is used for the film magazine being placed on it in chamber interior lifting.
In one embodiment of the invention, the upper surface of described film magazine lifting member is provided with the 4th guide member for coordinating with described first guide member, and described 4th guide member and described 2nd guide member are positioned on same level straight line when described film magazine enters described room, chamber.
Film magazine transmission device according to embodiments of the present invention, film magazine can be placed on a mobile platform always, mobile platform can move to the front of room, chamber easily and by guiding the guiding function of part convenient be pushed away by film magazine into indoor, chamber, thus avoid manual lifting, transport the inconvenience filled the film magazine of wafer and bring, it is time saving and energy saving not only to operate, and effectively reduces labour intensity, also improves transmission efficiency simultaneously, facilitate the carrying out of subsequent technique, thus realization is efficient, quick, labour-saving picks and places film magazine.
The semiconductor devices of embodiment according to a second aspect of the present invention, comprises film magazine according to the above embodiment of the present invention transmission device.
In one embodiment of the invention, described semiconductor devices is that LED etches machine.
The additional aspect of the present invention and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by the practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or the additional aspect of the present invention and advantage from accompanying drawing below combining to the description of embodiment becoming obviously and it should be readily understood that wherein:
Fig. 1 is the vertical view of the transmission device of film magazine according to embodiments of the present invention;
Fig. 2 be shown in Fig. 1 film magazine transmission device film magazine to the schematic diagram of cavity moving process;
The film magazine that Fig. 3 is the transmission device of the film magazine shown in Fig. 1 moves to the schematic diagram of indoor, chamber; With
Fig. 4 is the vertical view of film magazine transmission device according to another embodiment of the present invention;
Fig. 5 be shown in Fig. 4 film magazine transmission device film magazine to the schematic diagram of cavity moving process;
The film magazine that Fig. 6 is the transmission device of the film magazine shown in Fig. 4 moves to the schematic diagram of indoor, chamber.
Embodiment
Being described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish. It is exemplary below by the embodiment being described with reference to the drawings, it is intended to for explaining the present invention, and limitation of the present invention can not be interpreted as.
In describing the invention, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " clockwise ", it is based on orientation shown in the drawings or position relation that the orientation of the instruction such as " counterclockwise " or position are closed, it is only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device referred to or element must have specific orientation, with specific orientation structure and operation, therefore limitation of the present invention can not be interpreted as.
In addition, term " first ", " the 2nd " are only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technology feature. Thus, be limited with " first ", the feature of " the 2nd " can express or implicit comprise one or more these features. In describing the invention, unless otherwise explanation, the implication of " multiple " is two or more.
In the present invention, unless otherwise clearly defined and limited, the term such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and such as, it is possible to be fixedly connected with, it is also possible to be removably connect, or connects integratedly; Can be mechanically connected, it is also possible to be electrical connection; Can be directly be connected, it is also possible to be indirectly connected by intermediary, it is possible to be the connection of two element internals. For the ordinary skill in the art, it is possible to understand above-mentioned term concrete implication in the present invention according to particular case.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature it " on " or D score can comprise the first and second features and directly contact, it is also possible to comprise the first and second features be not directly contact but by the other characterisation contact between them. And, fisrt feature second feature " on ", " top " and " above " comprise fisrt feature directly over second feature and oblique upper, or only represent that fisrt feature level height is higher than second feature. Fisrt feature second feature " under ", " lower section " and " below " comprise fisrt feature immediately below second feature and tiltedly lower section, or only represent that fisrt feature level height is less than second feature.
With reference first to Fig. 1-Fig. 3, the transmission device 100 of film magazine according to embodiments of the present invention is described below. Film magazine transmission device 100 according to embodiments of the present invention can be used for the biography blade technolgy deposited film magazine 1 and complete film magazine 1.
Film magazine transmission device 100 according to embodiments of the present invention, comprises film magazine 1, cavity 2 and mobile platform 3.
As shown in Figure 1, in film magazine 1, comprise the pallet carrying wafer for placing, specifically, at least one pallet can be placed with in film magazine 1, pallet can have been deposited multiple wafer. The outer bottom of film magazine 1 is provided with the first guide member 11. Having room, chamber 22 in cavity 2, room, chamber 22 is for holding film magazine 1, and the diapire of room, chamber 22 is provided with the 2nd guide member 21 for coordinating with the first guide member 11, and wherein the front side of cavity 2 is opened wide to form opened front. Here, coordinating and can be understood as the first guide member 11 and the 2nd guide member 21 can coordinate generation relative movement, that is, by coordinating of the first guide member 11 and the 2nd guide member 21, film magazine 1 acts on that room, chamber 22 is interior to be moved horizontally along the 2nd guide member 21.
The upper surface of mobile platform 3 is provided with the 3rd guide member 31,3rd guide member 31 is for coordinating with the first guide member 11 to be supported on mobile platform 3 by film magazine 1 and with the effect that coordinates of the 3rd guide member 31, film magazine 1 can be moved horizontally by the first guide member 11 along the 3rd guide member 31, and the opened front that mobile platform 3 itself is movable to room, chamber 22 sentences that just the 2nd guide member 21 and the 3rd guide member 31 be adjacent each other and film magazine 1 can pass in and out room, chamber 22 along the 2nd guide member 21 and the 3rd guide member 31. Specifically, mobile platform 3 is movable to opened front place of room, chamber 22, the now front end of the 2nd guide member 21 and the rear end in contact of the 3rd guide member 31, thus form a guide member and coordinate with the first guide member 11, thus film magazine 1 can be conveniently mobile on mobile platform 3 and in room, chamber 22.
Owing to multiple pallet can be placed in film magazine 1, wafer is deposited in pallet, therefore film magazine 1 can become heavy after filling wafer, be inconvenient to move, film magazine transmission device 100 according to embodiments of the present invention, by arranging mobile platform 3, when mobile platform 3 moves to opened front place of cavity 1, 2nd guiding part 21 is adjacent each other with the 3rd guide member 31 and coordinates with the first guide member 11 respectively, the film magazine 1 thus filling wafer conveniently can enter room, chamber 22 under the guide function of guide member, easy to operate, time saving and energy saving, improve transmission efficiency, facilitate follow-up the carrying out getting blade technolgy.
It should be noted that, preferably, above-mentioned mobile platform 3 can also be the workplatform of film magazine 1, that is, mobile platform 3 has the effect of film magazine 1 workplatform simultaneously, therefore film magazine 1 can be placed on mobile platform 3 in advance, and then pallet is placed on film magazine 1 li, can carry out lower step operation after putting pallet well.
In one embodiment of the invention, first guide member 11 is the line channel extended along the longitudinal direction, 2nd guide member 21 and the 3rd guide member 31 are the line slideway extended along the longitudinal direction, and the 2nd guiding part 21 and the 3rd guides part 31 in the longitudinal direction on same level straight line when mobile platform 3 moves to opened front place of room, chamber 22. Thus, when mobile film magazine 1, only need first to be moved to by mobile platform 3 opened front place of cavity 1, now coordinate before and after the 2nd guide member 21 and the 3rd guide member 31, film magazine 1 is promoted towards the 2nd guiding part 21 along the 3rd guiding part 31, film magazine 1 can enter in room, chamber 22, and it is laborsaving, convenient to operate, and efficiently solves the traditional manual transport unhandy problem of film magazine 1.
Further, for improving film magazine 1 from mobile platform 3 to the balance moving process in room, chamber 22, line channel can be two and in left-right direction between separate, accordingly, line slideway be also two and in left-right direction between separate, that is, the 2nd guide member 21 and the 3rd guide member 31 are respectively two line slideways at interval in left-right direction. Thus, when film magazine 1 moves on line slideway, balance can be kept on the one hand better, on the other hand can more smooth and easyly into and out of, in room, chamber 22, practicality be good.
, it is necessary to explanation, wherein, in the above-described embodiments the 2nd guide member 21 and the 3rd guide member 31 can be two independent line slideways. Certainly, the 2nd guide member 21 and the 3rd guide member 31 can also be line slideways, and specifically, the 2nd guide member 21 can be driven to front stretching predetermined length to form the 3rd guide member 31. Such as, when mobile platform 3 moves to opened front place of room, chamber 22,2nd guide member 21 can to front stretching predetermined length, namely the bottom (film magazine 1 can in advance frame above mobile platform 3) being retractable to film magazine 1 is to replace the 3rd rail guide piece 31, can selection of land, 2nd guide member 21 can be driven flexible by miniature motor, thus also can conveniently be placed in cavity 2 by film magazine 1.
When mobile platform 3 moves to opened front place of room, chamber 22, by positioning element (not shown go out), mobile platform 3 is fixed location, that is, positioning element can be used for connecting and location is adjacent each other the 2nd guide member 21 and the 3rd guide member 31. Specifically, positioning element is steady brace, steady brace can be established on a mobile platform, such as extend downwards from the lower surface at mobile platform 3 rear portion or extend backward from mobile platform 3 aft end face, steady brace can be multiple, positioning precision can be improved like this, thus make that the 2nd guide member 21 and the 3rd guide member 31 coordinate more tight, facilitate film magazine 1 to slide thereon. Certainly, the present invention is not limited to this, and in other embodiments of the present invention, steady brace also can be located on cavity 2, thus can realize equally locating fixing function. It can be appreciated that when steady brace is located on mobile platform 3, cavity 2 can form location pin-and-hole accordingly.
When mobile platform 3 moves to opened front place of room, chamber 22, by the connection of positioning element, positioning action, thus realize the 2nd guide member 21 and the adjacent cooperation of the 3rd guide member 31, namely the front end of the 2nd guide member 21 and the rear end in contact of the 3rd guide member 31 and the 2nd guide member 21 and the 3rd guide member 31 place are on the same line, thus substantially increasing transmission efficiency, convenient film magazine 1 enters in room, chamber 22.
When film magazine 1 moves in room, chamber 22, too move backward in room, chamber 22 to limit film magazine 1, film magazine transmission device 100 also can comprise limiting component (not shown go out), limiting component is located in room, chamber 22 for being fixed in room, chamber 22 by film magazine 1, such as in one embodiment of the invention, limiting component is block, and block can be multiple and upwards extends from the diapire of room, chamber 22 respectively, and the rear end that multiple block can be close to the 2nd guide member 21 arranges and is spaced apart from each other in left-right direction. Thus, after film magazine 1 enters room, chamber 22 certain distance, block can continue to move backward by backstop film magazine 1, it is achieved spacing, backstop function, prevents film magazine 1 from touching the rear wall of cavity 2, damages cavity 2, and impact passes the carrying out of sheet operation.
In another embodiment of the present invention, the line slideway that first guide member 11 extends along the longitudinal direction for being located on the outer bottom of film magazine 1,2nd guide member 21 and the 3rd guide member 31 are the line channel extended along the longitudinal direction, and when mobile platform 3 moves to opened front place of room, chamber 22, the 2nd guide member 21 and the 3rd guide member 31 are in the longitudinal direction on the same line. For the present embodiment, it is understandable that, 2nd guide member 21 and the 3rd guide member 31 can be two independent line channels, it can certainly be a line channel with Telescopic, wherein for convenience of the location of mobile platform 3, it is possible to arrange steady brace on mobile platform 3 or cavity 2, multiple block backstop film magazine 1 also can be set in room, chamber 22 simultaneously and too move backward, that is, these features all can be arranged according to the mode described in above-described embodiment.
The film magazine 1 simply described in the transmission device 100 of film magazine according to embodiments of the present invention below with reference to Fig. 1-Fig. 3 moves to the process in room, chamber 22.
1) pallet having filled wafer being put in film magazine 1, be then placed on mobile platform 3 by film magazine 1, the first guide member 11 bottom film magazine 1 coordinates with the 3rd guide member 31 on mobile platform 3, as shown in Figure 1;
2) mobile platform 3 moves to the front opening place of room, chamber 22, and mobile platform 3 is positioned at the right on of room, chamber 22 by positioning element, now coordinates before and after the 2nd guide member 21 and the 3rd guide member 31;
3) film magazine 1 by the first guide member 11 respectively with the 3rd guide member 31 and the 2nd guide member 21 coordinate effect, mobile on the 3rd guide member 31 and the 2nd guide member 21 finally enter in room, chamber 22, as shown in Figure 2;
4) after film magazine 1 moves into room, chamber 22 certain distance backward, in room, chamber 22, limiting component contacts with film magazine 1, thus backstop film magazine 1 continues to move backward, it is achieved to spacing, the backstop action of film magazine 1, as shown in Figure 3;
5) mobile platform 3 is moved away, and the door body of film magazine transmission device 100 is closed, and carries out subsequent technique.
Wherein, when needing to take out film magazine 1 after subsequent technique terminates, its process taking out film magazine 1, with above-mentioned to enter process contrary, is not described in detail here.
Film magazine transmission device 100 according to embodiments of the present invention, film magazine 1 can be placed on mobile platform 3 always, mobile platform 3 can move to the front of room, chamber 22 easily and by guiding the guiding function of part convenient push away in room, chamber 22 by film magazine 1, thus avoid manual lifting, transport the inconvenience filled the film magazine 1 of wafer and bring, it is time saving and energy saving not only to operate, effectively reduce labour intensity, also improve transmission efficiency simultaneously, facilitate the carrying out of subsequent technique, thus realization is efficient, quick, labour-saving picks and places film magazine 1.
Goodly, as another kind of embodiment, as Figure 4-Figure 6, the film magazine transmission device 100 of the present invention, comprising: film magazine 1, cavity 2, mobile platform 3 and film magazine lifting member 23.
Multiple pallet can be placed with in film magazine 1, pallet has been deposited wafer. The outer bottom of film magazine 1 is provided with the first guide member 11. Having room, chamber 22 in cavity 2, room, chamber 22 is for holding film magazine 1, and the diapire of room, chamber 22 is provided with the 2nd guide member 21 coordinated with the first guide member 11. Film magazine lifting member 23 for the film magazine 1 placed on it in the inner lifting in room, chamber 22 with cooperative mechanical hand (not shown go out) pallet of taking, and the upper surface of film magazine lifting member 23 is provided with the 4th guide member 41 for coordinating with the first guide member 11, and described 4th guide member 41 and the 2nd guide member 21 are positioned on same level straight line when described film magazine 1 enters room 22, chamber. Wherein the front side of cavity 2 is opened wide to form opened front. Here, cooperation can be understood as the first guide member 11 and the 2nd guide member 21 can coordinate generation relative movement, first guide member 11 and the 4th guide member 41 can coordinate generation relative movement, that is, the first guide member 11 bottom film magazine 1 can be moved horizontally to the upper surface of film magazine lifting member 23 along the 2nd guide member 21 and the 4th guide member 41 in room, chamber 22.
The upper surface of mobile platform 3 is provided with the 3rd guide member 31,3rd guide member 31 is for coordinating with the first guide member 11 to be supported on mobile platform 3 by film magazine 1 and with the effect that coordinates of the 3rd guide member 31, film magazine 1 can be moved horizontally by the first guide member 11 along the 3rd guide member 31, and the opened front that mobile platform 3 itself is movable to room, chamber 22 sentences that just the 2nd guide member 21 and the 3rd guide member 31 be adjacent each other and film magazine 1 can pass in and out room, chamber 22 along the 2nd guide member 21 and the 3rd guide member 31. Specifically, mobile platform 3 is movable to opened front place of room, chamber 22, now the 2nd guide member 21, the 3rd guide member 31 and the 4th guide member 41 jointly form a guide member and coordinate with the first guide member 11, thus film magazine 1 can enter in room, chamber 22 conveniently by mobile platform 3 and directly arrive the upper surface of film magazine lifting member 23, and then the film magazine 1 placed on it in the inner lifting in room, chamber 22 by film magazine lifting member 23 is come, and cooperative mechanical is hand-held gets pallet.
Owing to multiple pallet can be placed in film magazine 1, wafer is deposited in pallet, therefore film magazine can become heavy after filling wafer, be inconvenient to move, adopt the film magazine transmission device 100 of the embodiment of the present invention, by arranging mobile platform 3 and film magazine lifting member 23, when mobile platform 3 moves to opened front place of cavity 1, 2nd guiding part 21, 3rd guide member 31 and the 4th guide member 41 are adjacent each other and coordinate with the first guide member 11 respectively, the film magazine 1 thus filling wafer conveniently can enter room, chamber 22 under the guide function of guide member and carry out lifting, namely achieve film magazine simultaneously and enter the horizontal transport of room, chamber and the lifting transmission under the support of film magazine lifting member by mobile platform, easy to operate, time saving and energy saving, improve transmission efficiency, facilitate follow-up the carrying out getting blade technolgy.
Semiconductor devices according to embodiments of the present invention, comprises according to the film magazine transmission device 100 described in the above embodiment of the present invention. Wherein semiconductor devices is LED(LightEmittingDiode, light emitting diode) etch machine.
Other formation and operation etc. of semiconductor devices according to embodiments of the present invention, for prior art and known by one of ordinary skilled in the art, are not described in detail here.
In the description of this specification sheets, at least one embodiment that the description of reference term " embodiment ", " some embodiments ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means to be contained in the present invention in conjunction with concrete feature, structure, material or feature that this embodiment or example describe or example. In this manual, the schematic representation of above-mentioned term is not necessarily referred to identical embodiment or example. And, the concrete feature of description, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.
Although it has been shown and described that embodiments of the invention, it will be understood by those skilled in the art that: these embodiments can be carried out multiple change, amendment, replacement and modification when not departing from principle and the objective of the present invention, the scope of the present invention by claim and etc. jljl limit.
Claims (12)
1. a film magazine transmission device, it is characterised in that, comprising:
Film magazine, for placing the pallet carrying wafer, the outer bottom of described film magazine is provided with the first guide member;
Cavity, has the room, chamber for holding described film magazine in described cavity, the diapire of room, described chamber is provided with the 2nd guide member coordinated with described first guide member; With
Mobile platform, the upper surface of described mobile platform is provided with the 3rd guide member, described 3rd guide member is for coordinating described film magazine is supported on described mobile platform with described first guide member, and the opened front that described mobile platform can move to room, described chamber is sentenced toilet and stated the 2nd guide member and described 3rd guide member is adjacent each other and described film magazine passes in and out room, described chamber along described 2nd guide member and the 3rd guide member.
2. film magazine according to claim 1 transmission device, it is characterized in that, described first guide member is the line channel extended along the longitudinal direction, described 2nd guide member and the 3rd guide member are the line slideway extended along the longitudinal direction, and the 2nd guide member described in when described mobile platform moves to opened front place of room, described chamber and the 3rd guide member are in the longitudinal direction on the same line.
3. film magazine according to claim 2 transmission device, it is characterised in that, described line channel be two and in left-right direction between separate, described line slideway be two and in left-right direction between separate.
4. film magazine according to claim 1 transmission device, it is characterized in that, described first guide member is be located on the outer bottom of described film magazine the line slideway extended along the longitudinal direction, described 2nd guide member and the 3rd guide member are the line channel extended along the longitudinal direction, and the 2nd guide member described in when described mobile platform moves to opened front place of room, described chamber and the 3rd guide member are in the longitudinal direction on the same line.
5. film magazine according to claim 1 transmission device, it is characterised in that, also comprise positioning element, described positioning element is for connecting and locates the 2nd adjacent each other guide member and the 3rd guide member.
6. film magazine according to claim 5 transmission device, it is characterised in that, described positioning element is steady brace.
7. film magazine according to claim 1 transmission device, it is characterised in that, indoor, described chamber are also provided with the limiting component for described film magazine is fixed on indoor, described chamber.
8. film magazine according to claim 7 transmission device, it is characterised in that, described limiting component is block.
9. film magazine transmission device according to any one of claim 1-8, it is characterised in that, also comprise film magazine lifting member, described film magazine lifting member is used at the chamber interior film magazine that is placed on it of lifting.
10. film magazine according to claim 9 transmission device, it is characterized in that, the upper surface of described film magazine lifting member is provided with the 4th guide member for coordinating with described first guide member, and described 4th guide member and described 2nd guide member are positioned on same level straight line when described film magazine enters described room, chamber.
11. 1 kinds of semiconductor devicess, it is characterised in that, comprise the transmission device of the film magazine as according to any one of claim 1-10.
12. semiconductor devicess according to claim 11, it is characterised in that, described semiconductor devices is that LED etches machine.
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| CN201210290300.9A CN103594403B (en) | 2012-08-15 | 2012-08-15 | Film magazine transmits device and has its semiconductor devices |
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| CN110211914A (en) * | 2019-07-11 | 2019-09-06 | 中威新能源(成都)有限公司 | A kind of bearing method of semiconductor article, transmission method, manufacturing method and application thereof |
| CN111312614A (en) * | 2019-11-29 | 2020-06-19 | 福建省福联集成电路有限公司 | Etching and spin-drying integrated machine table and spin-drying mechanism |
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| JP4071227B2 (en) * | 2004-09-28 | 2008-04-02 | 株式会社新川 | Bonding equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101855718A (en) * | 2007-09-06 | 2010-10-06 | 村田自动化机械有限公司 | Transport system with buffering |
| CN102282664A (en) * | 2009-01-15 | 2011-12-14 | 周星工程股份有限公司 | Substrate-processing system and substrate transfer method |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |