CN103594403A - Water transmission device and semiconductor device provided with same - Google Patents
Water transmission device and semiconductor device provided with same Download PDFInfo
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- CN103594403A CN103594403A CN201210290300.9A CN201210290300A CN103594403A CN 103594403 A CN103594403 A CN 103594403A CN 201210290300 A CN201210290300 A CN 201210290300A CN 103594403 A CN103594403 A CN 103594403A
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- guide member
- film magazine
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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Abstract
The invention discloses a wafer box transmission device, which comprises a wafer box, a cavity and a mobile platform, wherein the wafer box is used for placing a tray which bears a wafer, and the outer bottom surface of the wafer box is provided with a first guide member; the cavity is internally provided with a chamber used for accommodating the wafer box, and the bottom wall of the chamber is provided with a second guide member used for being matched with the first guide member; and the upper surface of the mobile platform is provided with a third guide member, the third guide member is used for being matched with the first guide member so as to support the wafer box on the mobile platform, and the mobile platform can move to a front opening of the chamber in order that the second guide member is abutted against the third guide member and that the wafer box can move in or out of the chamber along the second guide member and the third guide member. The wafer box transmission device disclosed by the invention can place and take the wafer box conveniently and efficiently. The invention further discloses a semiconductor device.
Description
Technical field
The present invention relates to field of semiconductor devices, especially relate to a kind of film magazine transmitting device and there is its semiconductor equipment.
Background technology
In LED industry, generally a plurality of wafers to be processed are placed on pallet, pallet is placed in film magazine, then the film magazine of placing a plurality of pallets is placed into and in transmission cavity, passes the subsequent techniques such as sheet.Owing to having placed a plurality of wafers on the pallet in film magazine, therefore film magazine can be heavier, film magazine is being placed in transmission cavity or from taking out the film magazine particularly inconvenience that all seems in transmission cavity like this, and in current LED industry, normally by portable mode, film magazine is put in transmission cavity at present, but very heavy owing to having placed the film magazine of wafer, for portable transportation and to place film magazine all inconvenient, be not easy to operation, efficiency is low.
Summary of the invention
The present invention is intended at least solve one of technical problem existing in prior art.
For this reason, one object of the present invention is to propose a kind of film magazine transmitting device, and described film magazine transmitting device is convenient when depositing wafer and transportation film magazine.
Another object of the present invention is to propose a kind of semiconductor equipment.
Film magazine transmitting device according to first aspect present invention embodiment, comprising: film magazine, and in described film magazine, for placing the pallet that carries wafer, the outer bottom of described film magazine is provided with the first guide member; Cavity, has in described cavity for holding the chamber of described film magazine, and the diapire of described chamber is provided with the second guide member for coordinating with described the first guide member; And mobile platform, the upper surface of described mobile platform is provided with the 3rd guide member, described the 3rd guide member is for coordinating that with described the first guide member described film magazine is supported on to described mobile platform, and the open front that described mobile platform is movable to described chamber sentences that toilet is stated the second guide member and described the 3rd guide member is adjacent to each other and described film magazine can pass in and out described chamber along the described second and the 3rd guide member.
According to the film magazine transmitting device of the embodiment of the present invention, by mobile platform is set, when mobile platform moves to open front place of cavity, the second guiding piece is adjacent to each other with the 3rd guide member and coordinates with the first guide member respectively, the film magazine of filling thus wafer can enter chamber easily under the guide function of guide member, easy to operate, time saving and energy saving, improve efficiency of transmission, facilitated follow-up carrying out of getting blade technolgy.
In addition, film magazine transmitting device according to the above embodiment of the present invention also has following additional technical feature:
In one embodiment of the invention, described the first guide member is the line channel extending along fore-and-aft direction, the described second and the 3rd guide member is the line slideway extending along fore-and-aft direction, and described in when described mobile platform is movable to open front place of described chamber the second and the 3rd guide member on fore-and-aft direction on same straight line.
In one embodiment of the invention, described line channel is two and spaced apart along left and right directions, and described line slideway is two and spaced apart along left and right directions.
In another embodiment of the present invention, described the first guide member is to be located at the line slideway extending along fore-and-aft direction on the outer bottom of described film magazine, the described second and the 3rd guide member is the line channel extending along fore-and-aft direction, when described mobile platform is movable to open front place of described chamber described in the second and the 3rd guide member on fore-and-aft direction on same straight line.
In one embodiment of the invention, described film magazine transmitting device also comprises positioning element, and described positioning element is used for connecting and locating the second and the 3rd guide member being adjacent to each other.Thus, by connection, the positioning action of positioning element, thereby realize the second guide member and the 3rd guide member in abutting connection with cooperation, the rear end in contact of the front end of the second guide member and the 3rd guide member and the second guide member and the 3rd guide member are on same straight line, greatly improved thus efficiency of transmission, convenient film magazine enters in chamber.
In one embodiment of the invention, described positioning element is alignment pin.
In one embodiment of the invention, in described chamber, be also provided with for described film magazine is fixed on to the limiting component in described chamber.Thus, after film magazine enters chamber, can realize backstop, position-limiting action to film magazine, place the undue mobile rear wall that touches cavity backward of film magazine, damage cavity.
In one embodiment of the invention, described limiting component is block.
In another embodiment of the present invention, described film magazine transmitting device also comprises film magazine lifting member, the film magazine of described film magazine lifting member for being placed on it in chamber interior lifting.
In one embodiment of the invention, the upper surface of described film magazine lifting member is provided with the 4th guide member for coordinating with described the first guide member, and described the 4th guide member and described the second guide member are positioned on same level straight line when described film magazine enters described chamber.
According to the film magazine transmitting device of the embodiment of the present invention, film magazine can be placed on mobile platform always, mobile platform can move to easily the place ahead of chamber and the guiding function by guiding piece pushes film magazine in chamber easily, the inconvenience that the film magazine of having avoided thus hand hoisting, conveyance to fill wafer brings, it is time saving and energy saving not only to operate, and effectively reduces labour intensity, has also improved efficiency of transmission simultaneously, facilitate the carrying out of subsequent technique, thereby realization is efficient, quick, labour-saving picks and places film magazine.
According to the semiconductor equipment of second aspect present invention embodiment, comprise film magazine transmitting device according to the above embodiment of the present invention.
In one embodiment of the invention, described semiconductor equipment is LED etching machine.
Additional aspect of the present invention and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage accompanying drawing below combination obviously and is easily understood becoming the description of embodiment, wherein:
Fig. 1 is according to the vertical view of the film magazine transmitting device of the embodiment of the present invention;
Fig. 2 is that the film magazine of the film magazine transmitting device shown in Fig. 1 is to the schematic diagram of cavity moving process;
Fig. 3 is that the film magazine of the film magazine transmitting device shown in Fig. 1 moves to the schematic diagram in chamber; With
Fig. 4 is the vertical view of film magazine transmitting device according to another embodiment of the present invention;
Fig. 5 is that the film magazine of the film magazine transmitting device shown in Fig. 4 is to the schematic diagram of cavity moving process;
Fig. 6 is that the film magazine of the film magazine transmitting device shown in Fig. 4 moves to the schematic diagram in chamber.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, be intended to for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center ", " longitudinally ", " laterally ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " clockwise ", orientation or the position relationship of indications such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.
In addition, term " first ", " second " be only for describing object, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the invention, except as otherwise noted, the implication of " a plurality of " is two or more.
In the present invention, unless otherwise clearly defined and limited, the terms such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can understand as the case may be above-mentioned term concrete meaning in the present invention.
In the present invention, unless otherwise clearly defined and limited, First Characteristic Second Characteristic it " on " or D score can comprise that the first and second features directly contact, also can comprise that the first and second features are not directly contacts but contact by the other feature between them.And, First Characteristic Second Characteristic " on ", " top " and " above " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that First Characteristic level height is higher than Second Characteristic.First Characteristic Second Characteristic " under ", " below " and " below " comprise First Characteristic under Second Characteristic and tiltedly, or only represent that First Characteristic level height is less than Second Characteristic.
First with reference to figure 1-Fig. 3, describe according to the film magazine transmitting device 100 of the embodiment of the present invention below.According to the film magazine transmitting device 100 of the embodiment of the present invention, can be used for the biography blade technolgy of depositing film magazine 1 and completing film magazine 1.
According to the film magazine transmitting device 100 of the embodiment of the present invention, comprise film magazine 1, cavity 2 and mobile platform 3.
As shown in Figure 1, in film magazine 1, comprise the pallet that carries wafer for placing, specifically, in film magazine 1, can be placed with at least one pallet, on pallet, can deposit a plurality of wafers.The outer bottom of film magazine 1 is provided with the first guide member 11.In cavity 2, have chamber 22, chamber 22 is for holding film magazine 1, and the diapire of chamber 22 is provided with the second guide member 21 for coordinating with the first guide member 11, and wherein the front side of cavity 2 opens wide to form open front.Here, coordinate to can be understood as the first guide member 11 and the second guide member 21 can coordinate generation relative motion, that is to say, the mating reaction that film magazine 1 can be by the first guide member 11 and the second guide member 21 moves horizontally along the second guide member 21 chamber 22 is interior.
The upper surface of mobile platform 3 is provided with the 3rd guide member 31, the 3rd guide member 31 is for coordinating film magazine 1 to be supported on mobile platform 3 with the first guide member 11 and can making film magazine 1 move horizontally along the 3rd guide member 31 by the mating reaction of the first guide member 11 and the 3rd guide member 31, and the second guide member 21 is sentenced just in the open front that mobile platform 3 itself is movable to chamber 22 and the 3rd guide member 31 is adjacent to each other and film magazine 1 can pass in and out chamber 22 along the second guide member 21 and the 3rd guide member 31.Particularly, mobile platform 3 is movable to open front place of chamber 22, the rear end in contact of the front end of the second guide member 21 and the 3rd guide member 31 now, thus form a guide member and coordinate with the first guide member 11, thus film magazine 1 can be easily on mobile platform 3 and the interior movement of chamber 22.
Owing to can placing a plurality of pallets in film magazine 1, in pallet, deposit wafer, therefore film magazine 1 can become heavy after filling wafer, be inconvenient to move, according to the film magazine transmitting device 100 of the embodiment of the present invention, by mobile platform 3 is set, when mobile platform 3 moves to open front place of cavity 1, the second guiding piece 21 is adjacent to each other with the 3rd guide member 31 and coordinates with the first guide member 11 respectively, the film magazine 1 of filling thus wafer can enter chamber 22 easily under the guide function of guide member, easy to operate, time saving and energy saving, improved efficiency of transmission, facilitate follow-up carrying out of getting blade technolgy.
It should be noted that, preferably, above-mentioned mobile platform 3 can be also the workbench of film magazine 1, that is to say, mobile platform 3 has the effect of film magazine 1 workbench simultaneously, therefore film magazine 1 can be placed on mobile platform 3 in advance, then pallet is placed on to 1 li of film magazine, can carry out lower step operation after putting pallet well.
In one embodiment of the invention, the first guide member 11 is the line channel extending along fore-and-aft direction, the second guide member 21 and the 3rd guide member 31 are the line slideway extending along fore-and-aft direction, and when mobile platform 3 moves to open front place of chamber 22 the second guiding piece 21 and the 3rd guiding piece 31 on fore-and-aft direction on same level straight line.Thus, when mobile film magazine 1, only need first mobile platform 3 to be moved to open front place of cavity 1, now the second guide member 21 and the 3rd guide member 31 front and back coordinate, along the 3rd guiding piece 31, towards the second guiding piece 21, promote film magazine 1, film magazine 1 can enter in chamber 22, and rapid operation, convenience efficiently solve the unhandy problem of traditional manual transportation film magazine 1.
Further, for improving the balance of film magazine 1 from mobile platform 3 to the interior moving process of chamber 22, line channel can be two and spaced apart along left and right directions, accordingly, line slideway is also two and spaced apart along left and right directions, that is to say, the second guide member 21 and the 3rd guide member 31 are respectively two along left and right directions line slideway at interval.Thus, when film magazine 1 moves on line slideway, can keep better balance on the one hand, on the other hand can be more swimmingly in chamber 22, practicality is good.
Wherein, in the above-described embodiments, it should be noted that, the second guide member 21 and the 3rd guide member 31 can be two independent line slideways.Certainly, the second guide member 21 and the 3rd guide member 31 can be also line slideways, and particularly, the second guide member 21 can be driven to front stretching predetermined length to form the 3rd guide member 31.For example, when mobile platform 3 moves to open front place of chamber 22, the second guide member 21 can be to front stretching predetermined length, be retractable to the bottom (film magazine 1 in advance frame above mobile platform 3) of film magazine 1 to replace the 3rd rail guide piece 31, alternatively, the second guide member 21 can be driven by micromachine flexible, thereby also can easily film magazine 1 be placed in cavity 2.
When mobile platform 3 moves to open front place of chamber 22, can to mobile platform 3, be fixed location by positioning element (scheming not shown), that is to say, positioning element can be used for the second guide member 21 and the 3rd guide member 31 that connect and location is adjacent to each other.Particularly, positioning element is alignment pin, alignment pin can be located on mobile platform, for example from the lower surface at mobile platform 3 rear portions, to downward-extension or from mobile platform 3 rear end faces, extend back, alignment pin can be a plurality of, can improve positioning precision like this, thereby make the tightr of the second guide member 21 and the 3rd guide member 31 cooperations, facilitate film magazine 1 to slide thereon.Certainly, the present invention is not limited to this, and in other embodiment of the present invention, alignment pin also can be located on cavity 2, can realize location fixed function equally thus.Be appreciated that, when alignment pin is located on mobile platform 3, cavity 2 can form dowel hole accordingly.
When mobile platform 3 moves to open front place of chamber 22, by connection, the positioning action of positioning element, thereby realize the second guide member 21 and the 3rd guide member 31 in abutting connection with cooperation, the rear end in contact of the front end of the second guide member 21 and the 3rd guide member 31 and the second guide member 21 and the 3rd guide member 31 are on same straight line, greatly improved thus efficiency of transmission, convenient film magazine 1 enters in chamber 22.
At film magazine 1, move to chamber 22 when interior, in order to limit film magazine 1, move too backward chamber 22 is interior, film magazine transmitting device 100 also can comprise limiting component (scheming not shown), limiting component is located in chamber 22 for film magazine 1 is fixed in chamber 22, for example in one embodiment of the invention, limiting component is block, and block can be a plurality of and from the diapire of chamber 22, extends upward respectively, and the rear end that a plurality of blocks can be close to the second guide member 21 arranges and is spaced apart from each other along left and right directions.Thus, at film magazine 1, enter after chamber 22 certain distances, block can continue to move backward by backstop film magazine 1, realizes spacing, backstop function, prevents that film magazine 1 from touching the rear wall of cavity 2, damages cavity 2, and impact passes the carrying out of sheet operation.
In another embodiment of the present invention, the first guide member 11 is for being located at the line slideway extending along fore-and-aft direction on the outer bottom of film magazine 1, the second guide member 21 and the 3rd guide member 31 are the line channel extending along fore-and-aft direction, when mobile platform 3 moves to open front place of chamber 22 the second guide member 21 and the 3rd guide member 31 on fore-and-aft direction on same straight line.For the present embodiment, be understandable that, the second guide member 21 and the 3rd guide member 31 can be two independent line channels, it can certainly be a line channel with Telescopic, wherein, for convenience of the location of mobile platform 3, also can on mobile platform 3 or cavity 2, alignment pin be set, a plurality of block backstop film magazines 1 also can be set in chamber 22 and move too backward simultaneously, that is to say, these features all can arrange according to the mode of describing in above-described embodiment.
Below with reference to simple description of Fig. 1-Fig. 3, according to the film magazine 1 in the film magazine transmitting device 100 of the embodiment of the present invention, move to the process in chamber 22.
1) pallet that installs wafer is put in film magazine 1, then film magazine 1 is placed on mobile platform 3, the first guide member 11 of film magazine 1 bottom coordinates with the 3rd guide member 31 on mobile platform 3, as shown in Figure 1;
2) mobile platform 3 moves to the front opening place of chamber 22, by positioning element, mobile platform 3 is positioned to the dead ahead of chamber 22, and now the second guide member 21 and the 3rd guide member 31 front and back coordinate;
3) film magazine 1 by the first guide member 11 respectively with the mating reaction of the 3rd guide member 31 and the second guide member 21, mobile finally entering in chamber 22, as shown in Figure 2 on the 3rd guide member 31 and the second guide member 21;
4) at film magazine 1, move into backward after chamber 22 certain distances, the interior limiting component of chamber 22 contacts with film magazine 1, thereby backstop film magazine 1 continues to move backward, realizes spacing, backstop action to film magazine 1, as shown in Figure 3;
5) mobile platform 3 is moved away, and the door body of film magazine transmitting device 100 is closed, and carries out subsequent technique.
Wherein, while needing to take out film magazine 1 after subsequent technique finishes, its process of taking out film magazine 1 is contrary with the above-mentioned process that enters, and is not described in detail here.
According to the film magazine transmitting device 100 of the embodiment of the present invention, film magazine 1 can be placed on mobile platform 3 always, mobile platform 3 can move to easily the place ahead of chamber 22 and the guiding function by guiding piece pushes film magazine 1 in chamber 22 easily, the inconvenience that the film magazine 1 of having avoided thus hand hoisting, conveyance to fill wafer brings, it is time saving and energy saving not only to operate, effectively reduce labour intensity, also improved efficiency of transmission simultaneously, facilitate the carrying out of subsequent technique, thereby realization is efficient, quick, labour-saving picks and places film magazine 1.
Preferably, as another kind of embodiment, as Figure 4-Figure 6, film magazine transmitting device 100 of the present invention, comprising: film magazine 1, cavity 2, mobile platform 3 and film magazine lifting member 23.
In film magazine 1, can be placed with a plurality of pallets, on pallet, deposit wafer.The outer bottom of film magazine 1 is provided with the first guide member 11.In cavity 2, have chamber 22, chamber 22 is for holding film magazine 1, and the diapire of chamber 22 is provided with the second guide member 21 coordinating with the first guide member 11.Film magazine lifting member 23 for the film magazine 1 placed on it in the inner lifting of chamber 22 with cooperative mechanical hand (the scheming not shown) pallet of taking, and the upper surface of film magazine lifting member 23 is provided with the 4th guide member 41 for coordinating with the first guide member 11, and described the 4th guide member 41 and the second guide member 21 are positioned on same level straight line when described film magazine 1 enters chamber 22.Wherein the front side of cavity 2 opens wide to form open front.Here, cooperation can be understood as the first guide member 11 and the second guide member 21 can coordinate generation relative motion, the first guide member 11 and the 4th guide member 41 can coordinate generation relative motion, that is to say, the first guide member 11 of film magazine 1 bottom can be moved horizontally to the upper surface of film magazine lifting member 23 along the second guide member 21 and the 4th guide member 41 in chamber 22.
The upper surface of mobile platform 3 is provided with the 3rd guide member 31, the 3rd guide member 31 is for coordinating film magazine 1 to be supported on mobile platform 3 with the first guide member 11 and can making film magazine 1 move horizontally along the 3rd guide member 31 by the mating reaction of the first guide member 11 and the 3rd guide member 31, and the second guide member 21 is sentenced just in the open front that mobile platform 3 itself is movable to chamber 22 and the 3rd guide member 31 is adjacent to each other and film magazine 1 can pass in and out chamber 22 along the second guide member 21 and the 3rd guide member 31.Particularly, mobile platform 3 is movable to open front place of chamber 22, now the second guide member 21, the 3rd guide member 31 and the 4th guide member 41 jointly form guide members and coordinate with the first guide member 11, film magazine 1 can be easily be entered in chamber 22 and directly be arrived the upper surface of film magazine lifting member 23 by mobile platform 3 thus, and then the film magazine 1 of placing on it in the inner lifting of chamber 22 by film magazine lifting member 23 carrys out the cooperative mechanical hand pallet of taking.
Owing to can placing a plurality of pallets in film magazine 1, in pallet, deposit wafer, therefore film magazine can become heavy after filling wafer, be inconvenient to move, adopt the film magazine transmitting device 100 of the embodiment of the present invention, by mobile platform 3 and film magazine lifting member 23 are set, when mobile platform 3 moves to open front place of cavity 1, the second guiding piece 21, the 3rd guide member 31 and the 4th guide member 41 are adjacent to each other and coordinate with the first guide member 11 respectively, the film magazine 1 of filling thus wafer can enter easily chamber 22 and carry out lifting under the guide function of guide member, realized horizontal transport and the lifting under the support of film magazine lifting member that film magazine enters chamber by mobile platform transmits simultaneously, easy to operate, time saving and energy saving, improved efficiency of transmission, facilitate follow-up carrying out of getting blade technolgy.
According to the semiconductor equipment of the embodiment of the present invention, comprise according to the film magazine transmitting device 100 of describing in the above embodiment of the present invention.Wherein semiconductor equipment is LED(Light Emitting Diode, Light-Emitting Diode) etching machine.
According to other formation of the semiconductor equipment of the embodiment of the present invention and operation etc., for prior art, also by one of ordinary skilled in the art, known, be not described in detail here.
In the description of this specification, the description of reference term " embodiment ", " some embodiment ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, the schematic statement of above-mentioned term is not necessarily referred to identical embodiment or example.And the specific features of description, structure, material or feature can be with suitable mode combinations in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that: in the situation that not departing from principle of the present invention and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, scope of the present invention is limited by claim and equivalent thereof.
Claims (12)
1. a film magazine transmitting device, is characterized in that, comprising:
Film magazine, for placing the pallet that carries wafer, the outer bottom of described film magazine is provided with the first guide member;
Cavity, has in described cavity for holding the chamber of described film magazine, and the diapire of described chamber is provided with the second guide member coordinating with described the first guide member; With
Mobile platform, the upper surface of described mobile platform is provided with the 3rd guide member, described the 3rd guide member is for coordinating that with described the first guide member described film magazine is supported on to described mobile platform, and the open front that described mobile platform can move to described chamber sentences that toilet is stated the second guide member and described the 3rd guide member is adjacent to each other and described film magazine passes in and out described chamber along described the second guide member and the 3rd guide member.
2. film magazine transmitting device according to claim 1, it is characterized in that, described the first guide member is the line channel extending along fore-and-aft direction, described the second guide member and the 3rd guide member are the line slideway extending along fore-and-aft direction, and described in when described mobile platform moves to open front place of described chamber the second guide member and the 3rd guide member on fore-and-aft direction on same straight line.
3. film magazine transmitting device according to claim 2, is characterized in that, described line channel is two and spaced apart along left and right directions, and described line slideway is two and spaced apart along left and right directions.
4. film magazine transmitting device according to claim 1, it is characterized in that, described the first guide member is to be located at the line slideway extending along fore-and-aft direction on the outer bottom of described film magazine, described the second guide member and the 3rd guide member are the line channel extending along fore-and-aft direction, when described mobile platform moves to open front place of described chamber described in the second guide member and the 3rd guide member on fore-and-aft direction on same straight line.
5. film magazine transmitting device according to claim 1, is characterized in that, also comprises positioning element, and described positioning element is used for connecting and locating the second and the 3rd guide member being adjacent to each other.
6. film magazine transmitting device according to claim 5, is characterized in that, described positioning element is alignment pin.
7. film magazine transmitting device according to claim 1, is characterized in that, is also provided with for described film magazine is fixed on to the limiting component in described chamber in described chamber.
8. film magazine transmitting device according to claim 7, is characterized in that, described limiting component is block.
9. according to the film magazine transmitting device described in any one in claim 1-8, it is characterized in that, also comprise film magazine lifting member, the film magazine of described film magazine lifting member for being placed on it in chamber interior lifting.
10. film magazine transmitting device according to claim 9, it is characterized in that, the upper surface of described film magazine lifting member is provided with the 4th guide member for coordinating with described the first guide member, and described the 4th guide member and described the second guide member are positioned on same level straight line when described film magazine enters described chamber.
11. 1 kinds of semiconductor equipments, is characterized in that, comprise the film magazine transmitting device as described in any one in claim 1-10.
12. semiconductor equipments according to claim 11, is characterized in that, described semiconductor equipment is LED etching machine.
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| CN201210290300.9A CN103594403B (en) | 2012-08-15 | 2012-08-15 | Film magazine transmits device and has its semiconductor devices |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110211914A (en) * | 2019-07-11 | 2019-09-06 | 中威新能源(成都)有限公司 | A kind of bearing method of semiconductor article, transmission method, manufacturing method and application thereof |
| CN111312614A (en) * | 2019-11-29 | 2020-06-19 | 福建省福联集成电路有限公司 | Etching and spin-drying integrated machine table and spin-drying mechanism |
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| KR20060051134A (en) * | 2004-09-28 | 2006-05-19 | 가부시키가이샤 신가와 | Bonding apparatus |
| CN101855718A (en) * | 2007-09-06 | 2010-10-06 | 村田自动化机械有限公司 | Transport system with buffering |
| US20110238201A1 (en) * | 2008-12-18 | 2011-09-29 | Tokyo Electron Limited | Vacuum processing apparatus and vacuum transfer apparatus |
| CN102282664A (en) * | 2009-01-15 | 2011-12-14 | 周星工程股份有限公司 | Substrate-processing system and substrate transfer method |
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| CN110211914A (en) * | 2019-07-11 | 2019-09-06 | 中威新能源(成都)有限公司 | A kind of bearing method of semiconductor article, transmission method, manufacturing method and application thereof |
| CN111312614A (en) * | 2019-11-29 | 2020-06-19 | 福建省福联集成电路有限公司 | Etching and spin-drying integrated machine table and spin-drying mechanism |
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| CN103594403B (en) | 2016-06-08 |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |