CN103592913A - 半导体制造设备的机台性能匹配方法和系统 - Google Patents
半导体制造设备的机台性能匹配方法和系统 Download PDFInfo
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- CN103592913A CN103592913A CN201310525511.0A CN201310525511A CN103592913A CN 103592913 A CN103592913 A CN 103592913A CN 201310525511 A CN201310525511 A CN 201310525511A CN 103592913 A CN103592913 A CN 103592913A
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- 238000000034 method Methods 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 239000004065 semiconductor Substances 0.000 title claims abstract description 15
- 230000008569 process Effects 0.000 claims abstract description 35
- 238000001514 detection method Methods 0.000 claims abstract description 17
- 238000012545 processing Methods 0.000 claims abstract description 11
- 238000005070 sampling Methods 0.000 claims abstract description 10
- 238000013480 data collection Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 claims description 8
- 238000012544 monitoring process Methods 0.000 claims description 7
- 238000012417 linear regression Methods 0.000 claims description 6
- 238000004458 analytical method Methods 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 7
- 238000012360 testing method Methods 0.000 abstract description 2
- 238000003070 Statistical process control Methods 0.000 description 9
- 238000012423 maintenance Methods 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000003908 quality control method Methods 0.000 description 2
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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机台 | y值的标准差 | F-检定的p-值 |
#1 | 0.0544 | - |
#2 | 0.0623 | 0.2997 |
#3 | 0.0728 | 0.1244 |
#4 | 0.0807 | 0.0555 |
#5 | 0.0908 | 0.0207 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105302036A (zh) * | 2014-06-27 | 2016-02-03 | 力晶科技股份有限公司 | 监控根据多个进程方案运行的进程状态的方法及其系统 |
CN105807569A (zh) * | 2014-12-31 | 2016-07-27 | 苏州同冠微电子有限公司 | 光刻机设备间特征尺寸匹配系统及方法 |
CN107644823A (zh) * | 2016-07-21 | 2018-01-30 | 株式会社日立国际电气 | 衬底处理装置以及半导体器件的制造方法 |
CN113723923A (zh) * | 2021-08-30 | 2021-11-30 | 上海华力微电子有限公司 | 机台联动性的监控方法及监控系统 |
CN116387208A (zh) * | 2023-06-02 | 2023-07-04 | 合肥喆塔科技有限公司 | 基于阈值管控的腔室匹配分析方法、系统、设备及介质 |
Citations (4)
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---|---|---|---|---|
CN101118422A (zh) * | 2006-08-02 | 2008-02-06 | 力晶半导体股份有限公司 | 半导体制造的虚拟量测预估与建立预估模型的方法与系统 |
CN101592692A (zh) * | 2008-05-30 | 2009-12-02 | 中芯国际集成电路制造(北京)有限公司 | 测量机台的评估方法 |
CN101908495A (zh) * | 2009-06-05 | 2010-12-08 | 台湾积体电路制造股份有限公司 | 虚拟测量先进工艺控制系统和设置方法 |
US20120086416A1 (en) * | 2010-10-06 | 2012-04-12 | Renesas Electronics Corporation | Power supply device |
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2013
- 2013-10-30 CN CN201310525511.0A patent/CN103592913B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101118422A (zh) * | 2006-08-02 | 2008-02-06 | 力晶半导体股份有限公司 | 半导体制造的虚拟量测预估与建立预估模型的方法与系统 |
CN101592692A (zh) * | 2008-05-30 | 2009-12-02 | 中芯国际集成电路制造(北京)有限公司 | 测量机台的评估方法 |
CN101908495A (zh) * | 2009-06-05 | 2010-12-08 | 台湾积体电路制造股份有限公司 | 虚拟测量先进工艺控制系统和设置方法 |
US20120086416A1 (en) * | 2010-10-06 | 2012-04-12 | Renesas Electronics Corporation | Power supply device |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105302036A (zh) * | 2014-06-27 | 2016-02-03 | 力晶科技股份有限公司 | 监控根据多个进程方案运行的进程状态的方法及其系统 |
CN105807569A (zh) * | 2014-12-31 | 2016-07-27 | 苏州同冠微电子有限公司 | 光刻机设备间特征尺寸匹配系统及方法 |
CN105807569B (zh) * | 2014-12-31 | 2018-08-31 | 苏州同冠微电子有限公司 | 光刻机设备间特征尺寸匹配系统及方法 |
CN107644823A (zh) * | 2016-07-21 | 2018-01-30 | 株式会社日立国际电气 | 衬底处理装置以及半导体器件的制造方法 |
CN107644823B (zh) * | 2016-07-21 | 2021-01-26 | 株式会社国际电气 | 衬底处理装置以及半导体器件的制造方法 |
CN113723923A (zh) * | 2021-08-30 | 2021-11-30 | 上海华力微电子有限公司 | 机台联动性的监控方法及监控系统 |
CN113723923B (zh) * | 2021-08-30 | 2024-03-12 | 上海华力微电子有限公司 | 机台联动性的监控方法及监控系统 |
CN116387208A (zh) * | 2023-06-02 | 2023-07-04 | 合肥喆塔科技有限公司 | 基于阈值管控的腔室匹配分析方法、系统、设备及介质 |
CN116387208B (zh) * | 2023-06-02 | 2023-08-18 | 合肥喆塔科技有限公司 | 基于阈值管控的腔室匹配分析方法、系统、设备及介质 |
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Denomination of invention: Machine performance matching method and system for semiconductor manufacturing equipment Effective date of registration: 20231206 Granted publication date: 20151028 Pledgee: Jiangsu Jiangyin Rural Commercial Bank Co.,Ltd. high tech Zone sub branch Pledgor: Jiangyin Baisheng Electric Control Co.,Ltd. Registration number: Y2023980069263 |
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