CN103567188A

CN103567188A - Cleaning head

Info

Publication number: CN103567188A
Application number: CN201310338255.4A
Authority: CN
Inventors: 白根智博
Original assignee: Hugle Development Co Ltd
Current assignee: Hugle Development Co Ltd
Priority date: 2012-08-06
Filing date: 2013-08-06
Publication date: 2014-02-12
Also published as: TWI573637B; KR20140019213A; JP6058312B2; KR102039530B1; TW201408387A; JP2014030806A

Abstract

A cleaning head comprises: a long internal pipeline (150) which supplies a cleaning gas to a gas injection chamber (170) from outside via a gas supplying pipeline (100), so that the cleaning gas injects from a gas jet orifice (153a); a lower cover (110) arranged to surround the internal pipeline (150); an upper cover (210) which is connected with an upper end part of the lower cover (110) and in which an air storing part (220) is communicated with an exhaust pipeline (200);and a sliding guide part (161) for enabling the two covers (110, 210) to slide relatively along a length direction, so as to connect the two covers, wherein a gas absorbing chamber (180) communicated with a gas absorbing opening (154a) is formed between an internal surface of the lower cover (110) and an external surface of the internal pipeline (150), the gas absorbing chamber (180) is communicated with the air storing part (220) by utilizing exhaust ports (121-124) which have larger opening areas when being farther from the exhaust pipeline (200).

Description

Cleaning head

Technical field

The present invention relates to a kind of cleaning head, this cleaning head, for the jet surface clean air to dedusting objects such as glass substrate, metal substrate, resin-made membranes, makes the dust that is attached to described surface disperse and its attraction is removed.

Background technology

Fig. 3 (a)～(c) represent the prior art of this cleaning head, Fig. 3 (a) is the top view of head main body, and Fig. 3 (b) is whole front view, and Fig. 3 (c) is the B-B amplification view of Fig. 3 (b).

In these accompanying drawings, the 20th, the head main body of square tube shape, is separately installed with steam line 10 at its two ends.As shown in Fig. 3 (a), on the top board 21 of head main body 20, be roughly equally spaced formed with along its length each a pair of exhaust outlet 20b.

In Fig. 3 (b), Fig. 3 (c), 31,32,33 is corresponding with described exhaust outlet 20b, be the discharge duct that is arranged on symmetrically the central portion both sides of head main body 20, these

discharge ducts

31,32,33 open wide exhaust outlet 20b mono-side, and mutually link by

flexible pipe

41,42.

Each discharge duct, for example discharge duct 31 makes the frame-like fixed head 31a shown in Fig. 3 (c) be fixed on the top board 21 of head main body 20 by screw 35.In addition, between fixed head 31a and top board 21, for keeping air-tightness to be provided with seal (not shown).

As shown in Figure 3 (c), be provided with internal pipeline 24 on head main body 20, its inner space is communicated with described steam line 10 as gas jet chamber 25.In addition, the space being formed by the inner surface of head main body 20 and the outer surface of internal pipeline 24 is communicated with

discharge duct

31,32,33 via exhaust outlet 20b as gas suction chamber 26.

The jet 22a being formed with in the central bottom of internal pipeline 24, this jet 22a makes to supply with from steam line 10 clean air coming and sprays to dedusting object G direction.In addition, on the base plate of head main body 20, to be positioned at the mode of gas ejection ports 22a both sides, be formed with a gas attraction mouthful 20a, the dust that this gas attracts mouthful 20a to disperse for attracting to utilize gas jet.

In the prior art, the clean air that is supplied to steam line 10 by sources of the gas (not shown) such as air blast and HEPA filters is injected into the surface of dedusting object G via gas ejection ports 22a from gas jet chamber 25.

On the other hand, because

discharge duct

31,32,33 is from the discharge duct 31 1 side draught bleed bodies of end and be retained as negative pressure, therefore the dust, dispersing from the surface of dedusting object G attracts a mouthful 20a to be attracted, to discharge in gas suction chamber 26 → exhaust outlet 20b →

discharge duct

31,32,33 these paths via gas.

Thus, can attract, remove the dust that is attached to dedusting object G surface.

In addition, disclose the cleaning head roughly similarly forming with the equipment shown in Fig. 3 in patent documentation 1, one of these cleaning heads is characterised in that, can make the installation direction of discharge duct change 180 degree.

Patent documentation 1: No. 4771419 communique of Japanese Patent (the 0037th, 0038 section, Fig. 7 etc.)

In prior art shown in Fig. 3, there are the following problems.

First, in Fig. 3, discharge duct and flexible pipe be the length direction central portion of close head main body 20, and internal diameter is less, large thereby the pressure while making to attract gas (negative pressure) becomes.But, even if adopt such structure, also there is following situation: get over the length direction central portion of close head main body 20, the attraction of gas more weakens, or cause attraction to produce deviation, can not obtain sufficient dust removal performance.In addition, shape, the structure of

discharge duct

31,32,33 and

flexible pipe

41,42 spreads all over numerous kinds and components number is on the whole also many, therefore, and the problem that exists manufacturing cost to raise.

In addition, the screw 35

discharge duct

31,32,33 being fixed on the top board 21 of head main body 20 can become flexible because of vibration, in worst situation, likely occurs that screw 35 drops on the upper and damage dedusting object G of dedusting object G or causes the situation of pollution.

And dust is easily attached to the jog of the parts such as

discharge duct

31,32,33 and

flexible pipe

41,42, the situation that also exists these dust to fall to the surface of dedusting object G.

Summary of the invention

Therefore, technical problem to be solved by this invention is to provide a kind of cleaning head, and this cleaning head can be simplified structure on the whole, reduces kind and the number of parts, thereby reduction manufacturing cost, and can in the length range of length direction, obtain roughly uniform attraction.

For solving the problems of the technologies described above, the invention of first aspect is a kind of cleaning head, its jet surface clean air from from gas ejection ports to dedusting object and the dust that is attached to described surface is dispersed, this dust is attracted mouth to attract out and discharged from gas together with clean air, it is characterized in that, comprise: long internal pipeline, it is supplied to gas jet chamber by clean air from outside via steam line, and described clean air is sprayed from described gas ejection ports; Lower cover, it is configured to surround internal pipeline in the roughly length range of described internal pipeline; Upper cover, the upper end of itself and described lower cover links, and inner airtrapping portion is communicated with discharge duct; For making described upper cover and described lower cover, along the length direction of two covers, relatively slide and link the guide member of two covers; The mode that described the upper cover and lower cover is arranged above and below with described discharge duct and described steam line links, and, between the inner surface of described lower cover and the outer surface of described internal pipeline, form a gas suction chamber that attracts mouth to be communicated with described gas, utilization makes described gas suction chamber be communicated with described airtrapping portion apart from the larger exhaust outlet of described discharge duct aperture area far away.

On the basis of the cleaning head of recording in first aspect, the invention of second aspect also comprises: for described lower cover and described internal pipeline are relatively slided and the guide member that links along both length direction.

First or the basis of the cleaning head recorded of second aspect on, the invention of the third aspect is formed with for increasing the projection of air drag on the inner surface of described gas jet chamber.

First or the basis of the cleaning head recorded of second aspect on, the invention of fourth aspect is formed with for increasing the projection of air drag on the inner surface of described gas suction chamber.

Invention effect

According to the present invention, can make upper cover, lower cover, internal pipeline etc. slide along its length and link, and can only by installation steam line, each of discharge duct, overall package be got up.Therefore, do not need as in the past the discharge duct of a plurality of numerous kinds to be threaded to be fixed, can simplify structure on the whole, reduce kind and the number of parts, thereby reduce manufacturing cost.Thus, compared with prior art, can reduce screw loosening, fall and dust to the possibility of adhering on the jog of a plurality of parts etc.

In addition, by according to change the aperture area of the exhaust outlet forming in lower cover from the distance of discharge duct, can in the length range of the length direction of cleaning head, obtain roughly attraction uniformly, the attraction of eliminating dust produces unbalanced situation.

Accompanying drawing explanation

Fig. 1 (a) and (b) mean the figure of the cleaning head of embodiments of the present invention, and Fig. 1 (a) is the top view of lower cover, and Fig. 1 (b) is whole front view.

Fig. 2 is the A-A amplification view of Fig. 1 (b).

Fig. 3 (a)～(c) mean the figure of existing cleaning head, Fig. 3 (a) is the top view of head main body, and Fig. 3 (b) is whole front view, and Fig. 3 (c) is the B-B amplification view of Fig. 3 (b).

Description of reference numerals

100 steam lines

110 lower covers

120 top boards

121,122,123,124 exhaust outlets

130 side plates

131 projections

150 internal pipelines

151,152 projections

153 nozzle plates

153a gas ejection ports

154 base plates

154a gas attracts mouth

161,162 sliding guidance portions

170 gas jet chambers

180 gas suction chambers

200 discharge ducts

210 upper covers

220 airtrapping portions

310,320 end cover

G dedusting object

The specific embodiment

Below, by figure explanation embodiments of the present invention.

First, Fig. 1 (a) and (b) and Fig. 2 mean the figure of the cleaning head of embodiments of the present invention, and Fig. 1 (a) is the top view of lower cover, and Fig. 1 (b) is whole front view, and Fig. 2 is the A-A amplification view of Fig. 1 (b).

In Fig. 1 (a) and (b), the 110th, the lower cover of square tube shape, 210 are mounted in the upper cover of lower cover 110 upper ends, and these lower covers 110 and upper cover 210 can relatively slide by the arrow directions X along Fig. 1 (b) to link.For the structure that two covers 110,210 are slided, see below.

In addition, under the state linking integratedly in lower cover 110 and upper cover 210, at the both ends of length direction, install, anchor portion cover 310,320.

In the inside of lower cover 110, in the roughly length range of its length direction, dispose the internal pipeline 150 shown in Fig. 2 described later, the outside in the end cover 310 of Fig. 1 (b), is provided with the steam line 100 being communicated with internal pipeline 150.In addition, above steam line 100, the discharge duct 200 being communicated with the airtrapping portion 220 that is formed on upper cover 210 inside is installed.

Steam line 100 and discharge duct 200 are connected with the source of the gas (not shown) of the well-known structure consisting of air blast, HEPA filter, clean air is supplied to internal pipeline 150 from steam line 100, and the gas after dedusting is discharged from discharge duct 200 via airtrapping portion 220 together with dust.

In addition, as shown in Fig. 1 (a), on the top board 120 of lower cover 110, be respectively equipped with apart from steam line 100 and discharge duct 200 more the exhaust outlet 121,122,123,124 of aperture area larger (length along lower cover 110 length directions is long) each is a pair of.In addition, the number of these exhaust outlets, shape are not subject to any restriction of illustrated example.

The internal structure of this cleaning head then, is described in detail in detail based on Fig. 2.

As shown in Figure 2, lower cover 110 can utilize sliding guidance portion 161 relatively to slide in the inside and outside direction of paper with upper cover 210, and sliding guidance portion 161 consists of the concaveconvex structure that is respectively formed at the both sides, upper end of lower cover 110 and the both sides, bottom of upper cover 210.

In addition the internal pipeline 150 that, is configured in lower cover 110 inside also can utilize the sliding guidance portion 162 consisting of above-mentioned same concaveconvex structure relatively to slide with respect to lower cover 110.

The inner space of internal pipeline 150 forms the 170，Gai of gas jet chamber gas jet chamber 170 and is communicated with steam line 100.In addition, the space being formed by the inner surface of lower cover 110 and the outer surface of internal pipeline 150 is communicated with the airtrapping portion 220 of upper cover 210 via described exhaust outlet 121 as gas suction chamber 180, and then is communicated with discharge duct 200.

On the nozzle plate 153 of bottom center portion that is disposed at internal pipeline 150, be formed with gas ejection ports 153a, and, on the base plate 154 of internal pipeline 150, to be positioned at the mode of gas ejection ports 153a both sides, be formed with a gas attraction mouthful 154a.

In addition, in the appropriate location of side plate 130 inner surfaces of lower cover 110, be formed with a plurality ofly for increasing the projection 131 of air drag, in the appropriate location of internal pipeline 150 surfaces externally and internallies, be also formed with projection 151,152.The number of these projections, shape are not subject to any restriction of illustrated example.

The action of this embodiment then, is described.

Make internal pipeline 150, lower cover 110 and upper cover 210 mutually slide and link and mounting end cover 310,320, and by installation steam line 100 and discharge duct 200, as Fig. 1 (b) and assemble as shown in Figure 2 cleaning head integral body.

The clean air that is supplied to steam line 100 from external air source under this state is injected into dedusting object G surface from the gas jet chamber 170 in internal pipeline 150 via gas ejection ports 153a.Then, cleaned gas peels from dedusting object G surface and the dust that disperses attracts a mouthful 154a to be attracted, to discharge in gas suction chamber 180 → exhaust outlet 121 → airtrapping portion's 220 → discharge duct 200 these paths via gas with clean air together.

In above-mentioned a series of air feed-deairing step, clean air utilizes the narrow bottom of gas jet chamber 170 to become gases at high pressure and sprays from gas ejection ports 153a to dedusting object G direction, peels effectively and is attached to its lip-deep dust and makes it to dispersing in the air.Now, utilize outstanding projection 152 on the inner surface of internal pipeline 150 and the power of generation air drag, therefore, the gas that can spray to gas ejection ports 154a brings vibration, can more effectively peel dust.

In addition, the dust dispersing attracts mouthful 154a to be attracted by gas suction chamber 180 via gas with clean air together, and now, utilization outstanding projection 131,151,152 and produce the power of air drag on the inner surface of lower cover 110 and the outer surface of internal pipeline 150, therefore, near these projections, the negative pressure of the gas by gas suction chamber 180 is local becomes large, can further strongly attract to attract from air the clean air of mouthful 154a.

And, aperture area is larger apart from discharge duct 200 (more approaching end cover 320) far away to be formed on exhaust outlet 121,122,123,124 on the top board 120 of lower cover 110, therefore, can make the gas flow of end cover 320 1 sides that the gas flow of end cover 310 1 sides that the suction pressure of clean air is high and the attraction of clean air forces down about equally, the gas flow of airtrapping portion 220 that can make to be attracted to upper cover 210 in the length range of the length direction of cleaning head is roughly even.Thus, in the length range of the length direction of cleaning head, can both obtain roughly attraction uniformly, can to the whole region, surface of dedusting object G, carry out dedusting equably.

In addition, the jumbo airtrapping portion 220 being formed by upper cover 210 has the function of carrying to discharge duct 200 directions uniformly open the attraction gas that is taken into for 121,122,123,124 minutes from each exhaust outlet, and this airtrapping portion 200 also contributes to attract swimmingly clean air.

According to this embodiment, the discharge duct and the flexible pipe that do not need the numerous kinds shown in Fig. 3, can take shape, upper cover 210, lower cover 110, internal pipeline 150, steam line 100 and discharge duct 200 etc. relatively simple for structure is critical piece, therefore components number also reduces, and can reduce manufacturing cost.

In addition, owing to not being the structure that the discharge duct of numerous kinds is as shown in Figure 3 threaded and is fixed, therefore, the possibility minimizing that vibration causes screw loosening and falls, and the jog in the profile being produced by component parts also reduces, the possibility of adhering to dust also reduces.Therefore, can improve the dust removal performance as cleaning head.

Claims

1. a cleaning head, its jet surface clean air from from gas ejection ports to dedusting object and the dust that is attached to described surface is dispersed, attracts this dust mouthful to attract and discharge from gas with clean air together,

It is characterized in that, comprising:

Long internal pipeline, it is supplied to gas jet chamber by clean air from outside via steam line, and described clean air is sprayed from described gas ejection ports;

Lower cover, it is configured to surround internal pipeline in the roughly length range of described internal pipeline;

Upper cover, the upper end of itself and described lower cover links, and inner airtrapping portion is communicated with discharge duct;

Guide member, it is for making described the upper cover and lower cover relatively slide and link two covers along the length direction of two covers;

The mode that described the upper cover and lower cover is arranged above and below with described discharge duct and described steam line links,

And, between the inner surface of described lower cover and the outer surface of described internal pipeline, form the gas suction chamber that attracts mouth to be communicated with described gas,

Utilize the larger exhaust outlet of distance described discharge duct aperture area far away that described gas suction chamber is communicated with described airtrapping portion.

2. cleaning head as claimed in claim 1, is characterized in that, also comprises:

For described lower cover and described internal pipeline are relatively slided and the guide member that links along both length direction.

3. cleaning head as claimed in claim 1 or 2, is characterized in that, the inner surface in described gas jet chamber is formed with for increasing the projection of air drag.

4. cleaning head as claimed in claim 1 or 2, is characterized in that, at the inner surface of described gas suction chamber, is formed with for increasing the projection of air drag.