CN110715507A - Drying device - Google Patents
Drying device Download PDFInfo
- Publication number
- CN110715507A CN110715507A CN201910598063.4A CN201910598063A CN110715507A CN 110715507 A CN110715507 A CN 110715507A CN 201910598063 A CN201910598063 A CN 201910598063A CN 110715507 A CN110715507 A CN 110715507A
- Authority
- CN
- China
- Prior art keywords
- gas
- dried
- suction
- air
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 title claims abstract description 76
- 238000005192 partition Methods 0.000 claims abstract description 19
- 230000007246 mechanism Effects 0.000 claims description 10
- 230000009471 action Effects 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000000903 blocking effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 75
- 239000000758 substrate Substances 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/02—Drying solid materials or objects by processes not involving the application of heat by using ultrasonic vibrations
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Molecular Biology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention provides a drying device, which can simplify the whole structure, reduce the types and the number of components to reduce the manufacturing cost and quickly dry the surface to be dried of an object. The drying device is arranged opposite to a dried surface of an object to dry the dried surface, wherein the drying device is configured to: the gas ejection head includes a partition plate provided in a flow path from the gas supply source to the ejection port and blocking a flow of the gas in the flow path, and the partition plate has an orifice formed therein, and the gas flowing in the flow path and passing through the orifice of the partition plate is ejected from the ejection port.
Description
Technical Field
The present invention relates to a drying apparatus for drying a surface to be dried of a drying object such as a glass substrate, a metal substrate, a resin film, or a three-dimensional object.
Background
Patent document 1 discloses a drying system having an ultrasonic wave generating device. For example, the following is described in paragraph [ 0009 ] of patent document 1: the ultrasonic wave generator 7 irradiates the drying object 5 mixed in the air heated normally with the highest efficiency. Heated air 10 is induced in the pores 7a of the ultrasonic wave generator 7, mixed with the partition wall 11, returned once, and blown out from the outlet 8. The ultrasonic waves preferably have a frequency above 18000 hertz, which helps to shorten the drying time ".
Patent document 1: japanese laid-open patent publication No. 7-91827
The drying system described in patent document 1 is configured on the premise that the ultrasonic wave generator 7 is provided, and ultrasonic waves are mixed with air flowing through a flow path from the outside. Further, air is blown out from an outlet 8 formed at the tip of the nozzle 3. Therefore, the area of the blown air is narrow, and the object needs to be moved two-dimensionally in order to dry the entire surface to be dried of the object, which takes time.
Disclosure of Invention
The present invention has been made in view of the above circumstances, and provides a drying device capable of drying by ultrasonic waves with a simple structure.
The drying device of the present invention is a drying device that is disposed opposite to a surface to be dried of an object to be dried and dries the surface to be dried, wherein the drying device is configured to: the gas ejection head includes a partition plate that is provided in a flow path from the gas supply source to the ejection port and blocks a flow of the gas in the flow path, and an orifice is formed in the partition plate, and the gas flowing in the flow path and passing through the orifice of the partition plate is ejected from the ejection port.
According to such a configuration, by providing the partition plate having the orifice in the flow path of the gas discharge head, the gas flowing in the flow path passes through the orifice, reaches the discharge port, and is discharged from the discharge port toward the surface to be dried of the object to be dried. In this process, the gas can be fluidized to generate ultrasonic vibration by the front, middle, and rear throttling and expansion of the throttling hole for the gas flow. Therefore, the gas in the ultrasonic vibration state can be blown to the surface to be dried of the object to be dried. The drying target surface of the drying object is dried by the gas in the ultrasonic vibration state.
In the drying device of the present invention, the maximum opening width of the orifice may be smaller than the maximum opening width of the discharge port.
According to such a configuration, the flow of the gas throttled by the separator in the flow path of the gas injection head advances while expanding toward the discharge port, and the gas can be brought into an ultrasonic vibration state by the throttling and expanding of the flow of the gas.
In the drying device of the present invention, a surface of the orifice of the separator provided in the flow path of the gas discharge head may be parallel to a surface of the discharge port.
According to this configuration, in the gas discharge head, the surface of the orifice of the partition plate is parallel to the surface of the discharge port, and therefore the structure of the gas discharge head can be further simplified.
In the drying device according to the present invention, the drying device may include an air suction head which is disposed to face the surface to be dried and is provided adjacent to the gas ejection head, and which is coupled to a suction mechanism, wherein the air suction head includes a suction hole which is inclined in a direction toward the gas ejected from the ejection port of the gas ejection head, and the gas on the surface to be dried is sucked through the suction hole by an air suction action of the suction mechanism.
According to such a configuration, since the suction head portion provided adjacent to the gas ejection head portion has the suction hole inclined in a direction toward the gas ejected from the ejection port of the gas ejection head portion, the gas ejected from the ejection port can be efficiently sucked through the suction hole of the suction head portion in a state where the gas in an ultrasonic vibration state is ejected from the ejection port toward the surface to be dried of the object to be dried. As a result, the portion of the surface to be dried that faces the discharge port of the gas discharge head can be dried efficiently.
In the drying apparatus of the present invention, the drying apparatus may be configured to have a1 st suction head and a2 nd suction head, the 1 st suction head and the 2 nd suction head are respectively connected with a suction mechanism, are arranged opposite to the dried surface and sandwich the gas spraying head, the 1 st suction head is provided with a1 st suction hole, the 1 st suction hole is inclined toward the direction of the gas ejected from the ejection port of the gas ejection head, the 2 nd suction head has a2 nd suction hole, the 2 nd suction hole is inclined toward the direction of the gas ejected from the ejection port of the gas ejection head, and the inclination direction of the 2 nd suction hole is opposite to the inclination direction of the 1 st suction hole, and by the suction action of the suction mechanism, and sucking the gas on the dried surface through the 1 st suction hole and the 2 nd suction hole.
According to such a configuration, since the 1 st and 2 nd suction heads provided so as to sandwich the gas discharge head have the 1 st and 2 nd suction holes, and the 1 st and 2 nd suction holes are inclined in a direction toward the gas discharged from the discharge port of the gas discharge head, the gas discharged from the discharge port can be more efficiently sucked through the 1 st and 2 nd suction holes of the 1 st and 2 nd suction heads, respectively, in a state where the gas in an ultrasonic vibration state is discharged from the discharge port toward the surface to be dried of the object to be dried. As a result, the portion of the surface to be dried that faces the discharge port of the gas discharge head can be dried more efficiently.
According to the present invention, in the gas ejection head, in the process in which the gas flowing in the flow path reaches the ejection port after passing through the orifice and is ejected from the ejection port further toward the surface to be dried of the object to be dried, the gas can be fluidized and ultrasonic vibration can be generated by the front, middle, and rear throttling and expansion of the orifice by the flow of the gas, and therefore, drying can be performed by ultrasonic waves with a simple structure.
Drawings
Fig. 1 is a schematic configuration diagram showing a drying system 1000 including a drying device 500 according to an embodiment of the present invention.
Fig. 2 is a diagram showing a drying device according to an embodiment of the present invention, in which fig. 2 (a) is a plan view of a lower cover and fig. 2 (b) is a front view of the whole.
Fig. 3 is an enlarged sectional view a-a of fig. 2 (b).
Fig. 4 is a partially enlarged sectional view of fig. 3.
Description of the reference symbols
100: an air supply duct; 110: a lower cover; 120: a top plate; 121. 122, 123, 124: an exhaust port; 130: a side plate; 131: a protrusion; 150: an internal air duct; 151. 152: a protrusion; 153: a partition plate; 153 a: an orifice; 154: a base plate; 154 a: 1, attracting holes; 154 b: 2, attracting the hole; 155: a flow path; 156: an ejection port; 161. 162: a slide guide portion; 170: an air injection chamber; 180: an air suction chamber; 200: an exhaust air duct; 210: an upper cover; 220: an air reservoir; 310. 320, and (3) respectively: an end cover; 500: a drying device; 501: a gas ejection head; 502 a: 1 st suction head; 502 b: a2 nd suction head; 600: a fan; 700: a HEPA filter; 800: a heater unit; 801: a temperature controller; 900: a gas separation unit; g: drying the object; g1: dried noodles.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, fig. 1 is a configuration diagram showing a schematic configuration of a drying system 1000 including a drying device 500 according to an embodiment of the present invention. Fig. 2 to 4 are views showing a drying device 500 according to an embodiment of the present invention, fig. 2 (a) is a plan view of a lower cover, fig. 2 (b) is a front view of the whole, fig. 3 is an enlarged sectional view taken along line a-a of fig. 2 (b), and fig. 4 is a partially enlarged sectional view taken along line a of fig. 3.
As shown in fig. 1, the drying system 1000 has a blower 600, a HEPA filter 700, a heater unit 800, and a gas separation unit. The blower 600 supplies air (gas) to the drying device 500. The HEPA filter 700 removes dust from air supplied from the blower 600. The blower 600 and the HEPA filter 700 constitute a gas supply source. Further, the heater unit 800 may generate dust, and when cleanliness is required for the dry air, the HEPA filter 700 may be disposed between the heater unit 800 and the drying device 500.
The heater unit 800 heats air supplied from the blower fan 600. The heater unit 800 is provided with a temperature controller 801 configured to be capable of adjusting the temperature of air. The drying device 500 will be described below with reference to fig. 2 to 4. The gas separation unit 900 removes not only moisture from the air exhausted from the drying device 500 but also volatile components and harmful substances, and particles, etc. collected while being dried.
That is, the drying system 1000 is configured to filter the sucked air to a level at which normal exhaust can be performed, and to perform processing in a case where the sucked gas is harmful, and reuse in a case where the collected fine particles are expensive.
In fig. 2 (a) and (b), 110 is a lower cover having a rectangular tubular shape, 210 is an upper cover attached to an upper end portion of the lower cover 110, and the lower cover 110 and the upper cover 210 can be coupled by sliding relative to each other in the direction of arrow X in fig. 2 (b). The structure for sliding the two covers 110 and 210 will be described later. In a state where the lower cover 110 and the upper cover 210 are integrally coupled, the end covers 310 and 320 are attached to and fixed to both ends in the longitudinal direction.
An internal duct 150 shown in fig. 3, which will be described later, is disposed in the lower cover 110 over substantially the entire length of the lower cover 110 in the longitudinal direction thereof, and an air supply duct 100 communicating with the internal duct 150 is attached to the outside of the end cover 310 in fig. 2 (b). Further, an exhaust duct 200 communicating with an air reservoir 220 formed inside the upper cover 210 is attached above the supply duct 100.
The supply air duct 100 and the exhaust air duct 200 are connected to an air supply source including a blower 600 and a HEPA filter 700 shown in fig. 1, and supply air from the supply air duct 100 to the internal air duct 150, and the dried air is discharged from the exhaust air duct 200 via the air reservoir 220.
As shown in fig. 2 (a), the top plate 120 of the lower cover 110 is provided with a pair of exhaust ports 121, 122, 123, 124 each having an opening area that increases as the distance from the supply duct 100 and the exhaust duct 200 increases (the length in the longitudinal direction of the lower cover 110 increases). The number and shape of these exhaust ports are not limited to those shown in the drawings.
Next, the internal structure of the drying device 500 will be described in detail with reference to fig. 3 and 4. As shown in fig. 3 and 4, the drying device 500 is disposed to face a drying target surface G1, which is one surface of the drying target G, and dries a drying target surface G1.
The drying device 500 has a gas ejection head 501. The gas ejection head 501 is disposed opposite to the surface to be dried G1, and has an ejection port 156 that ejects the gas supplied from the gas supply source toward the surface to be dried G1. The gap between the discharge port 156 and the surface to be dried G1 is, for example, 4mm or less. The gas ejection head 501 includes a partition 153, and the partition 153 is provided in a flow path 155 from the gas supply source to the ejection port 156 to block the flow of the gas in the flow path 155. The gap between the discharge port 156 and the surface to be dried G1 is preferably 4mm or less, but is not limited thereto, and may be larger than 4 mm.
An orifice 153a is formed in the partition 153. The maximum opening width of the orifice 153a is designed to be smaller than the maximum opening width of the discharge port 156. Accordingly, the flow of air throttled by the throttle hole 153a of the partition 153 advances while expanding toward the discharge port 156, and the flow of air is throttled and expanded to bring the air into an ultrasonic vibration state. The width of the flow path between the orifice 153a and the discharge port 156 may be constant or may be varied. In addition, a plurality of the partition plates 153 having the orifices 153a may be provided in the flow path 155.
The orifice 153a of the partition 153 has a surface parallel to the surface of the discharge port 156. Therefore, in the gas discharge head 501, the surface of the orifice 153a of the partition 153 is parallel to the surface of the discharge port 156, and therefore, a complicated structure is not necessary, and the structure of the gas discharge head 501 can be made simpler.
In addition, the drying device 500 has a1 st suction head 502a and a2 nd suction head 502b coupled to the suction mechanism, respectively. The 1 st and 2 nd intake header portions 502a and 502b are disposed adjacent to the gas ejection header portion 501 in a cross-sectional view, that is, facing the surface to be dried G1 with the gas ejection header portion 501 interposed therebetween.
The 1 st suction head 502a has 1 st suction hole 154a, and the 1 st suction hole 154a is disposed adjacent to the discharge port 156 of the gas discharge head 501. The 1 st suction hole 154a is formed on the bottom plate 154 of the inner duct 150. Specifically, the 1 st suction head 502a has the 1 st suction hole 154a, and the 1 st suction hole 154a is inclined toward the gas discharged from the discharge port 156 of the gas discharge head 501. The 1 st suction hole 154a may be formed in a slit shape that opens in the longitudinal direction of the bottom plate 154, or may have a circular or elliptical cross-sectional shape.
The 2 nd suction head 502b has the 2 nd suction hole 154b, and the 2 nd suction hole 154b is disposed adjacent to the ejection port 156 of the gas ejection head 501. The 2 nd suction hole 154b is formed on the bottom plate 154 of the inner duct 150. Specifically, the 2 nd suction head 502b has the 2 nd suction hole 154b, the 2 nd suction hole 154b is inclined in a direction toward the gas discharged from the discharge port 156 of the gas discharge head 501, and the inclination direction of the 2 nd suction hole is opposite to the inclination direction of the 1 st suction hole. The 2 nd suction hole 154b may be formed in a slit shape that opens in the longitudinal direction of the bottom plate 154, or may have a circular or elliptical cross-sectional shape.
Specifically, as shown in fig. 3 and 4, the 1 st suction hole 154a and the 2 nd suction hole 154b are formed to be inclined in a direction away from each other in a lateral direction on the paper surface with respect to the center line of the drying device 500 in a cross-sectional view. That is, the 1 st suction hole 154a and the 2 nd suction hole 154b function as a guide portion for guiding the air discharged from the discharge port 156, and support the introduction into the air suction chamber 180.
As described above, since the orifice 153a is formed in the partition plate 153 disposed at the lower center portion of the internal air duct 150, the 1 st suction hole 154a and the 2 nd suction hole 154b are formed in the bottom plate 154 of the internal air duct 150, and the 1 st suction hole 154a and the 2 nd suction hole 154b are positioned on both sides of the discharge port 156, the air in the ultrasonic vibration state, which flows linearly in the flow path 155 and is discharged from the discharge port 156 to dry the surface to be dried G1, is sucked through the 1 st suction hole 154a and the 2 nd suction hole 154b by the suction action of the suction mechanism. That is, since the air can be swirled by the orifice 153a and the air can be sucked more efficiently by the 1 st suction hole 154a and the 2 nd suction hole 154b, the portion of the surface to be dried G1 facing the discharge port 156 of the gas discharge head 501 can be dried more efficiently. The 1 st suction header 502b and the 2 nd suction header 502b are not essential to the drying device 500, and only one of the suction headers may be configured as the drying device 500.
As shown in fig. 3, the lower cover 110 and the upper cover 210 are slidable relative to each other in the front-back direction of the paper surface by a slide guide portion 161, and the slide guide portion 161 is formed of an uneven structure formed on both sides of the upper end portion of the lower cover 110 and both sides of the lower end portion of the upper cover 210. The internal duct 150 disposed inside the lower cover 110 is also slidable relative to the lower cover 110 by the slide guide 162 having the same uneven structure as described above.
The inner space of the inner air duct 150 forms an air injection chamber 170, and the air injection chamber 170 communicates with the air supply duct 100. The space formed by the inner surface of the lower cover 110 and the outer surface of the inner duct 150 is communicated with the air reservoir 220 of the upper cover 210 via the exhaust port 121 as the air suction chamber 180, and further communicated with the exhaust duct 200.
Further, a plurality of protrusions 131 for increasing air resistance are formed at appropriate positions on the inner surface of the side plate 130 of the lower cover 110, and protrusions 151 and 152 are also formed at appropriate positions on the inner and outer surfaces of the inner duct 150. The number and shape of these protrusions are not limited in any way by the illustrated examples.
Next, the operation of this embodiment will be explained. The entire drying apparatus is assembled as shown in fig. 2 (b) and 3 by coupling the internal duct 150, the lower cover 110, and the upper cover 210 by sliding each other, attaching the end covers 310 and 320, and further attaching the supply duct 100 and the exhaust duct 200.
In this state, the air supplied from the external air supply source to the supply air duct 100 is ejected from the air ejection chamber 170 in the internal air duct 150 to the surface of the object to be dried G, i.e., the surface to be dried G1, through the orifice 153 a. As shown in fig. 4, the air flowing through the flow path 155 from the air ejection chamber 170 to the ejection port 156 is ejected linearly toward the surface to be dried G1 via the orifice 153 a. Then, the surface of the object to be dried G is dried with air. The air is sucked and exhausted through the 1 st suction hole 154a and the 2 nd suction hole 154b in a path of the air suction chamber 180 → the exhaust port 121 → the air reservoir 220 → the exhaust duct 200.
In the series of air supply and exhaust processes, the air passes through the narrow lower end of the air injection chamber 170 to become high-pressure air, and is discharged from the orifice 153a toward the drying object G, thereby drying the surface of the drying object G. The air is ejected toward the surface to be dried G1 of the object to be dried G by passing through the air ejection chamber 170 → the orifice 153a → the ejection port 156 in this order (arrow a 1). At this time, the air passes through portions having different passage widths to generate vibration. That is, the air can be swirled by the front, middle, and rear throttles and expansions of the throttle hole 153a, thereby generating ultrasonic vibration. Therefore, the air in the ultrasonic vibration state can be blown out to the surface to be dried G1 of the object to be dried G.
The drying target surface G1 of the drying target G is dried by the air in the ultrasonic vibration state. The drying object G can be dried uniformly and in a short time by promoting the volatilization of moisture by ultrasonically vibrating the air. Therefore, according to the drying apparatus 500, the gas can be ultrasonically vibrated without providing an ultrasonic wave generating device such as an ultrasonic transducer (a piezoelectric element or the like) or without a structure for inverting the air, and the drying object G can be more efficiently dried. The moisture present on the surface to be dried G1 of the object to be dried G may contain not only water but also materials containing volatile components such as chemicals.
Further, since the air resistance is changed by the protrusion 152 protruding toward the inner surface of the inner duct 150, vibration can be further applied to the air discharged from the discharge port 156, and the surface of the object to be dried G, that is, the surface to be dried can be more effectively dried.
Further, the air is sucked into the air suction chamber 180 through the 1 st suction hole 154a and the 2 nd suction hole 154b (arrow a2), but at this time, since the air resistance is changed by the protrusions 131, 151, and 152 protruding toward the inner surface of the lower cover 110 and the outer surface of the inner duct 150, the negative pressure of the air passing through the air suction chamber 180 is locally increased in the vicinity of these protrusions, and the air from the 1 st suction hole 154a and the 2 nd suction hole 154b can be further strongly sucked.
Further, in a state where the gas in the ultrasonic vibration state is discharged from the discharge port 156 toward the surface to be dried G1 of the object to be dried G, the gas discharged from the discharge port 156 can be more efficiently sucked through the 1 st suction hole 154a and the 2 nd suction hole 154b of the 1 st suction head 502a and the 2 nd suction head 502b, respectively. As a result, the portion of the surface to be dried G1 facing the ejection port 156 of the gas ejection head 501 can be dried more effectively.
Further, since the opening area increases as the distance from the exhaust duct 200 increases (as the distance from the end cover 320 increases) the exhaust ports 121, 122, 123, and 124 formed in the ceiling plate 120 of the lower cover 110, the air flow rate on the end cover 310 side where the suction pressure of air is high and the air flow rate on the end cover 320 side where the suction pressure of air is low can be made substantially equal, and the air flow rate sucked into the air reservoir 220 of the upper cover 210 can be made substantially uniform over the entire length of the drying device in the longitudinal direction. This provides a substantially uniform suction force over the entire length of the drying device in the longitudinal direction, and the entire surface area of the object G to be dried can be uniformly dried.
The large-capacity air reservoir 220 formed by the upper cover 210 has a function of collectively conveying the suction air sucked from the exhaust ports 121, 122, 123, and 124 individually toward the exhaust duct 200, and the air reservoir 220 also contributes to smooth suction of the air. Further, the drying device 500 may be configured to be movable with respect to the object to be dried G, or the object to be dried G may be configured to be movable with respect to the drying device 500.
According to this embodiment, since the gas discharged from the discharge port 156 can be made into a turbulent flow without adopting a complicated structure, the number and the type of the components can be reduced, the manufacturing cost can be reduced, and the surface to be dried can be dried more quickly by ultrasonically vibrating the discharged gas.
In the above-described drying apparatus 1000, the air in the ultrasonic vibration state is blown toward the object to be dried G, but another gas such as nitrogen gas may be blown toward the surface to be dried G1 of the object to be dried G in the ultrasonic vibration state.
The drying apparatus 1000 described above can be applied not only to drying the surface to be dried G1 of a planar member such as a glass substrate, a metal substrate, a semiconductor substrate, or a liquid crystal substrate, but also to drying the surface to be dried G1 of a film-like member such as a resin film or a spherical member as the object to be dried G.
The present invention is not limited to the above-described embodiments, various examples, and modifications and application examples thereof. Various modifications can be made in accordance with the gist of the present invention, and these modifications are not excluded from the scope of the present invention.
Claims (5)
1. A drying device is arranged opposite to a surface to be dried of a drying object to dry the surface to be dried, wherein,
the drying device comprises a gas ejection head which is arranged opposite to the surface to be dried and has an ejection port for ejecting gas supplied from a gas supply source toward the surface to be dried,
the gas ejection head includes a partition plate that is provided in a flow path from the gas supply source to the ejection port and blocks a flow of the gas in the flow path,
an orifice is formed in the separator,
the gas flowing through the flow path and passing through the orifice of the separator is ejected from the ejection port.
2. The drying apparatus according to claim 1,
the orifice has an opening maximum width smaller than an opening maximum width of the discharge port.
3. The drying apparatus according to claim 1 or 2,
the surface of the orifice of the separator provided in the flow path of the gas discharge head is parallel to the surface of the discharge port.
4. The drying apparatus according to any one of claims 1 to 3,
the drying device comprises an air suction head which is arranged opposite to the dried surface, is arranged adjacent to the air ejection head and is combined with a suction mechanism,
the suction head has a suction hole inclined in a direction toward the gas discharged from the discharge port of the gas discharge head,
the air on the surface to be dried is sucked through the suction hole by the suction action of the suction mechanism.
5. The drying apparatus according to any one of claims 1 to 3,
the drying device comprises a1 st air suction head part and a2 nd air suction head part, wherein the 1 st air suction head part and the 2 nd air suction head part are respectively combined with a suction mechanism, are arranged opposite to the dried surface and sandwich the gas spraying head part,
the 1 st suction head has a1 st suction hole inclined toward the direction of the gas discharged from the discharge port of the gas discharge head,
the 2 nd suction head has a2 nd suction hole which is inclined in a direction toward the gas discharged from the discharge port of the gas discharge head and in which the 2 nd suction hole is inclined in a direction opposite to the inclination direction of the 1 st suction hole,
the suction mechanism sucks the gas on the surface to be dried through the 1 st suction hole and the 2 nd suction hole.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018-131506 | 2018-07-11 | ||
JP2018131506A JP7152713B2 (en) | 2018-07-11 | 2018-07-11 | drying equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110715507A true CN110715507A (en) | 2020-01-21 |
Family
ID=69151098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910598063.4A Pending CN110715507A (en) | 2018-07-11 | 2019-07-04 | Drying device |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP7152713B2 (en) |
CN (1) | CN110715507A (en) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101348031A (en) * | 2008-08-01 | 2009-01-21 | 刘洪生 | Drying cabinet of ultraviolet printer |
CN102282377A (en) * | 2009-01-20 | 2011-12-14 | 松下电器产业株式会社 | Air blowing device and hand drying device using the same |
CN102458689A (en) * | 2009-06-02 | 2012-05-16 | 三菱电机株式会社 | Method for coating instrument and process for producing heat exchange |
CN103217006A (en) * | 2013-04-18 | 2013-07-24 | 天津冶金轧一华信制钢有限公司 | Surface fluid driving device |
CN103567188A (en) * | 2012-08-06 | 2014-02-12 | 修谷鲁开发股份有限公司 | Cleaning head |
CN207050412U (en) * | 2017-05-27 | 2018-02-27 | 上海杰伟机械制造有限公司 | A kind of air knife structure |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE8107374L (en) * | 1981-12-09 | 1983-06-10 | Kelva Ab | web cleaners |
JP2005030657A (en) | 2003-07-10 | 2005-02-03 | Fuji Photo Film Co Ltd | Coated film drying device |
US9068775B2 (en) | 2009-02-09 | 2015-06-30 | Heat Technologies, Inc. | Ultrasonic drying system and method |
-
2018
- 2018-07-11 JP JP2018131506A patent/JP7152713B2/en active Active
-
2019
- 2019-07-04 CN CN201910598063.4A patent/CN110715507A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101348031A (en) * | 2008-08-01 | 2009-01-21 | 刘洪生 | Drying cabinet of ultraviolet printer |
CN102282377A (en) * | 2009-01-20 | 2011-12-14 | 松下电器产业株式会社 | Air blowing device and hand drying device using the same |
CN102458689A (en) * | 2009-06-02 | 2012-05-16 | 三菱电机株式会社 | Method for coating instrument and process for producing heat exchange |
CN103567188A (en) * | 2012-08-06 | 2014-02-12 | 修谷鲁开发股份有限公司 | Cleaning head |
CN103217006A (en) * | 2013-04-18 | 2013-07-24 | 天津冶金轧一华信制钢有限公司 | Surface fluid driving device |
CN207050412U (en) * | 2017-05-27 | 2018-02-27 | 上海杰伟机械制造有限公司 | A kind of air knife structure |
Also Published As
Publication number | Publication date |
---|---|
JP2020008242A (en) | 2020-01-16 |
JP7152713B2 (en) | 2022-10-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6632190B2 (en) | Liquid ejection device and liquid ejection method | |
JP5816649B2 (en) | Fluid ejection device and method for bypassing fluid in fluid ejection device | |
US8439478B2 (en) | Ink-jet wiping apparatus, and wiping method using this | |
TW201823047A (en) | Liquid ejection head and liquid ejection device | |
CN103817109A (en) | Dust collector | |
US8876251B2 (en) | Recording apparatus | |
US11130333B2 (en) | Inkjet head and inkjet recording apparatus | |
EP1077331A2 (en) | Liquid drop spraying apparatus | |
CN111070896A (en) | Ink mist collecting device and ink jet recording apparatus | |
KR20150000829A (en) | Wiping device, inkjet apparatus, and wiping method | |
JP6095455B2 (en) | Liquid ejection device | |
CN110715507A (en) | Drying device | |
JP4948787B2 (en) | Dust remover | |
JP7278280B2 (en) | Air blower for thin film stretching equipment and its thin film stretching equipment | |
CN107825850B (en) | Ink jet head, ink jet recording apparatus, and method of manufacturing ink jet head | |
CN116323021A (en) | Dust removing device and dust removing method | |
KR20210093500A (en) | Dry type ultrasonic cleaner having multi-suction port | |
JP6237603B2 (en) | Inkjet recording device | |
JP3908063B2 (en) | Liquid ejection device and inkjet printer | |
JP2017226095A (en) | Ink mist collection device and inkjet recording device | |
CN110072700B (en) | Ink jet head and image forming apparatus | |
JP2014205261A (en) | Liquid discharge device | |
JP6561851B2 (en) | Inkjet recording device | |
KR20090129420A (en) | Nozzle, dry cleaner, dry cleaner system | |
JP2014205262A (en) | Liquid discharge device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200121 |
|
RJ01 | Rejection of invention patent application after publication |