CN103560176A - Method for manufacturing rear film of solar battery - Google Patents

Method for manufacturing rear film of solar battery Download PDF

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Publication number
CN103560176A
CN103560176A CN201310566478.6A CN201310566478A CN103560176A CN 103560176 A CN103560176 A CN 103560176A CN 201310566478 A CN201310566478 A CN 201310566478A CN 103560176 A CN103560176 A CN 103560176A
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China
Prior art keywords
front surface
solar cell
surface conductors
preparation
conductors electrode
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Pending
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CN201310566478.6A
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Chinese (zh)
Inventor
贾河顺
姜言森
方亮
任现坤
徐振华
张春艳
马继磊
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Linuo Solar Power Co Ltd
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Linuo Solar Power Co Ltd
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Priority to CN201310566478.6A priority Critical patent/CN103560176A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/02168Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The invention discloses a method for manufacturing a rear film of a solar battery. The method comprises the following steps that firstly, a front conductor electrode is manufactured on the surface of a semiconductor substrate after the steps of texture surface making, washing and diffusion; secondly, drying is carried out; thirdly, an antireflection film is manufactured. Compared with an existing traditional solar battery production process, the method enables reflected light on fine grids to be reflected into the solar battery again, and therefore the reflected light is fully absorbed and utilized, the absorption efficiency of sunlight can be improved, and the aims of improving the short-circuit current of the solar battery and improving the efficiency are achieved; the surface color of the solar battery is more unified, and color differences are reduced.

Description

Overlay film preparation method after solar cell
Technical field
The present invention relates to solar cell fabricating technology field, specifically disclose overlay film preparation method after a kind of solar cell.
Background technology
The front surface conductors electrode of tradition crystal silicon solar battery adopts the method for a wire mark at the silver slurry of the certain patterning of surface printing of antireflective coating, thereby the method by sintering penetrates antireflective coating by silver electrode, is connected the object that reaches collected current with diffusion layer.But existing silver electrode has stopped the incident of part sunlight, generally can stop the incident light of 6% left and right, according to the efficiency of existing monocrystalline 19%, if this part of reverberation is all absorbed by solar cell, can improve certificate to efficiency 1.14%.
The IBC of Sunpower (Interdigitated back contact) solar cell reduces the effect of traditional solar cel electrode pattern to the reflex of sunlight by front surface conductors electrode all being moved on to the back side, but this solar cell requires very high to Si wafer quality, and operation is numerous and diverse, cost is higher, is unsuitable for a large amount of production.
Summary of the invention
Object of the present invention is exactly overlay film preparation method after the solar cell providing for the defect of above-mentioned existence, the method can significantly reduce the reflection of sunlight on the thin grid of solar cell front surface conductors electrode, reach and improve solar cell short circuit current, the object of raising the efficiency; And make solar battery surface color homogeneous more, reduced aberration.
After solar cell of the present invention, overlay film preparation method technical scheme is to comprise the following steps:
Step 1, at the semiconductor substrate surface after making herbs into wool, cleaning, diffusing step, prepare front surface conductors electrode;
Step 2, oven dry;
Step 3, prepare antireflective coating.
Solar cell front surface conductors electrode be prepared with following three kinds of modes:
Mode one, the preparation of solar cell front surface conductors electrode comprises two step process, first carries out the preparation of the thin grid of front surface conductors electrode, then carries out the preparation of front surface conductors electrode main grid.
Mode two, the preparation of solar cell front surface conductors electrode comprises two step process, first carries out the preparation of front surface conductors electrode main grid, then carries out the preparation of the thin grid of front surface conductors electrode.
Mode three, the preparation of solar cell front surface conductors electrode adopts one-time process to prepare front surface conductors electrode main grid and thin grid;
The preparation method of front surface conductors electrode is silk screen printing or inkjet printing.
The width of the thin grid of front surface conductors electrode is 1-60um, and the width of front surface conductors electrode main grid is 30-2000um.
Preferably, the width of the thin grid of front surface conductors electrode is 20um, and the width of front surface conductors electrode main grid is 1200um.
Antireflective coating is the laminated construction that one deck has the film of anti-reflective effect above.
Preferably, antireflective coating is one deck silicon nitride film, and thickness is 85nm.
Through after step 1 to three, after printing electrode, the non-sensitive surface of solar cell carries out sintering, obtain solar battery sheet.
Main grid and welding in module technique on solar cell weld, and thin grid are because its penetration capacity is not strong, under antireflective coating, thereby can improve the absorptance of solar cell.
After can also punching on the antireflective coating above the main grid of front, weld with welding, and thin grid are because its penetration capacity is not strong, under antireflective coating, thereby can improve the absorptance of solar cell.
Beneficial effect of the present invention is: overlay film preparation method after a kind of solar cell of the present invention, the method is first prepared solar cell front and is prepared after front electrode, carry out again the preparation of antireflective coating, can significantly reduce the reflection of sunlight on the thin grid of solar cell front surface conductors, reach and improve solar cell short circuit current, the object of raising the efficiency; And make solar battery surface color homogeneous more, reduced aberration.Experiment shows, the solar cell that uses the method to make, more than short circuit current improves 0.4A, has fully shown the application prospect of the method.
accompanying drawing explanation:
Figure 1 shows that solar cell front surface conductors electrode of the present invention prepares the structural representation after antireflective coating;
1. Semiconductor substrate in figure, the 3. thin grid of front surface conductors electrode, 4. antireflective coating, 5. front surface conductors electrode main grid.
embodiment:
In order to understand better the present invention, below in conjunction with accompanying drawing, describe technical scheme of the present invention in detail, but the present invention is not limited thereto.
Embodiment 1
After an overlay film preparation method, comprise the following steps:
Step 1, at the Semiconductor substrate 1 surface screen-printed front surface conductors electrode after making herbs into wool, cleaning, diffusing step: first carry out the printing of the thin grid 3 of front surface conductors electrode, carry out again the printing of front surface conductors electrode main grid 5, the width of the thin grid of front surface conductors electrode is 20um, and the width of front surface conductors electrode main grid is 1200um;
Step 2, oven dry: 350 ℃ of temperature, 3.5 minutes time;
Step 3, prepare antireflective coating 4.Antireflective coating is one deck silicon nitride film, and its thickness is 85nm;
After the non-sensitive surface of solar cell prints electrode, carry out sintering, obtain solar battery sheet.
The method front surface conductors electrode main grid 5 adopts different slurries to carry out silk screen printing from the thin grid 3 of front surface conductors electrode, wherein the traditional back silver slurry of the thin grid of front surface conductors electrode 3 use (such as continent 0028D etc.) carries out silk screen printing, be conducive to form Ag-Si alloy after sintering, but the silicon nitride film of this position can not penetrated by silver slurry yet; Front surface conductors electrode main grid 5 adopts traditional slurry front side silver pastes (such as the PV17A of Du Pont etc.), after sintering, not only can penetrate silicon nitride film well welds together with welding in module technique, can also form Ag-Si alloy, and can link together with thin grid 3, reach the effect of collected current.Therefore, the method can be given full play to the best use of of slurry heterogeneity, and reduces costs.
Front surface conductors electrode main grid in module technique on solar cell 5 welds with welding, and the thin grid 3 of front surface conductors electrode are because its penetration capacity is not strong, in antireflective coating 4 times, thereby can improve the absorptance of solar cell.
Experiment shows, the solar cell that uses the method to make, more than short circuit current improves 0.4A, has fully shown the application prospect of the method.
Embodiment 2
After an overlay film preparation method, comprise the following steps:
Step 1, at the Semiconductor substrate 1 surface screen-printed front surface conductors electrode after making herbs into wool, cleaning, diffusing step: adopt silk screen printing one-time process to prepare front surface conductors electrode main grid 5 and the thin grid 3 of front surface conductors electrode; The width of the thin grid 3 of front surface conductors electrode is 40um, and the width of front surface conductors electrode main grid 5 is 1800um; Main grid and thin grid all adopt traditional slurry.
Step 2, oven dry, temperature is 400 ℃, 2 minutes time;
Step 3, prepare antireflective coating 4.Antireflective coating is two-layer, and ground floor (adjacent semiconductor layer) is 10nm silica, and the second layer (away from semiconductor layer) is 80nm silicon nitride.
In module technique, on the antireflective coating 4 above front surface conductors electrode main grid 5, after punching, weld with welding, and the thin grid 3 of front surface conductors electrode are because its penetration capacity is not strong, in antireflective coating 4 times, thereby can improve the absorptance of solar cell.After the non-sensitive surface of solar cell prints electrode, carry out sintering, obtain solar battery sheet.
Experiment shows, the solar cell that uses the method to make, more than short circuit current improves 0.2A, has fully shown the application prospect of the method.
Embodiment 3
After an overlay film preparation method, comprise the following steps:
Step 1, at the surperficial inkjet printing front surface conductors of Semiconductor substrate 1 electrode after making herbs into wool, cleaning, diffusing step: first carry out the printing of front surface conductors electrode main grid 5, then carry out the printing of the thin grid 3 of front surface conductors electrode; The width of the thin grid 3 of front surface conductors electrode is 60um, and the width of front surface conductors electrode main grid 5 is 800um.
Step 2, oven dry, 420 ℃ of temperature, 2 minutes time;
Step 3, prepare antireflective coating 4.Antireflective coating is three layers, and the film of adjacent semiconductor layer is 10nm silicon oxide film, and next is followed successively by 5nm silicon nitride (refractive index 2.3), 80nm silicon nitride (refractive index 1.9), and above three-layer thin-film is all prepared with PECVD equipment.
The method front surface conductors electrode main grid 5 adopts different slurries to carry out silk screen printing from the thin grid 3 of front surface conductors electrode, wherein the traditional back silver slurry of the thin grid of front surface conductors electrode 3 use (such as continent 0028D etc.) carries out silk screen printing, be conducive to form Ag-Si alloy, but the silicon nitride film of this position can not penetrated by silver slurry yet; Front surface conductors electrode main grid 5 adopts traditional slurry front side silver pastes (such as the PV17A of Du Pont etc.), not only after sintering, can penetrate silicon nitride film well welds together with welding in module technique, after sintering, can also form Ag-Si alloy, and can link together with thin grid 3, reach the effect of collected current.Therefore, the method can be given full play to the best use of of slurry heterogeneity.
Experiment shows, the solar cell that uses the method to make, more than short circuit current improves 0.4A, has fully shown the application prospect of the method.

Claims (10)

1. an overlay film preparation method after solar cell, comprises the following steps:
Step 1, at the semiconductor substrate surface after making herbs into wool, cleaning, diffusing step, prepare front surface conductors electrode;
Step 2, oven dry;
Step 3, prepare antireflective coating.
2. overlay film preparation method after solar cell according to claim 1, is characterized in that, the preparation of solar cell front surface conductors electrode comprises two step process, first carries out the preparation of the thin grid of front surface conductors electrode, then carries out the preparation of front surface conductors electrode main grid.
3. overlay film preparation method after solar cell according to claim 1, is characterized in that, the preparation of solar cell front surface conductors electrode comprises two step process, first carries out the preparation of front surface conductors electrode main grid, then carries out the preparation of the thin grid of front surface conductors electrode.
4. overlay film preparation method after solar cell according to claim 1, is characterized in that, the preparation of solar cell front surface conductors electrode adopts one-time process to prepare front surface conductors electrode main grid and thin grid.
5. according to overlay film preparation method after the arbitrary described solar cell of claim 1-4, it is characterized in that, the preparation method of front surface conductors electrode is silk screen printing or inkjet printing.
6. overlay film preparation method after solar cell according to claim 5, is characterized in that, the width of the thin grid of front surface conductors electrode is 1-60um, and the width of front surface conductors electrode main grid is 30-2000um.
7. overlay film preparation method after solar cell according to claim 6, is characterized in that, the width of the thin grid of front surface conductors electrode is 20um, and the width of front surface conductors electrode main grid is 1200um.
8. overlay film preparation method after solar cell according to claim 1, is characterized in that, antireflective coating is the laminated construction that one deck has the film of anti-reflective effect above, and the thickness of every layer of antireflective coating is 5-100nm.
9. overlay film preparation method after solar cell according to claim 8, is characterized in that, antireflective coating is one deck silicon nitride film, and thickness is 85nm.
10. overlay film preparation method after solar cell according to claim 1, is characterized in that, through after step 1 to three, after the non-sensitive surface of solar cell prints electrode, carries out sintering, obtains solar battery sheet.
CN201310566478.6A 2013-11-13 2013-11-13 Method for manufacturing rear film of solar battery Pending CN103560176A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105405910A (en) * 2015-11-17 2016-03-16 新奥光伏能源有限公司 Heterojunction solar cell, preparation method thereof and solar cell module
CN115020525A (en) * 2022-07-12 2022-09-06 晶澳(扬州)太阳能科技有限公司 Back junction solar cell and preparation method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2009703A1 (en) * 2006-04-14 2008-12-31 Sharp Kabushiki Kaisha Solar cell, solar cell module using the solar cell and method for manufacturing the solar cell module
US8211738B2 (en) * 2008-01-16 2012-07-03 Snu R&Db Foundation Polycrystalline silicon solar cell having high efficiency and method for fabricating the same
US8536447B2 (en) * 2008-12-17 2013-09-17 Industrial Technology Research Institute Electrode of solar cell and fabricating method thereof
CN103337553A (en) * 2013-06-04 2013-10-02 南京日托光伏科技有限公司 A silicon solar energy battery with a positive electrode coated by a film and a manufacturing technique thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2009703A1 (en) * 2006-04-14 2008-12-31 Sharp Kabushiki Kaisha Solar cell, solar cell module using the solar cell and method for manufacturing the solar cell module
US8211738B2 (en) * 2008-01-16 2012-07-03 Snu R&Db Foundation Polycrystalline silicon solar cell having high efficiency and method for fabricating the same
US8536447B2 (en) * 2008-12-17 2013-09-17 Industrial Technology Research Institute Electrode of solar cell and fabricating method thereof
CN103337553A (en) * 2013-06-04 2013-10-02 南京日托光伏科技有限公司 A silicon solar energy battery with a positive electrode coated by a film and a manufacturing technique thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105405910A (en) * 2015-11-17 2016-03-16 新奥光伏能源有限公司 Heterojunction solar cell, preparation method thereof and solar cell module
CN115020525A (en) * 2022-07-12 2022-09-06 晶澳(扬州)太阳能科技有限公司 Back junction solar cell and preparation method thereof
CN115020525B (en) * 2022-07-12 2023-11-07 晶澳(扬州)太阳能科技有限公司 Back junction solar cell and preparation method thereof
WO2024011808A1 (en) * 2022-07-12 2024-01-18 晶澳(扬州)太阳能科技有限公司 Back junction solar cell and preparation method therefor

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Application publication date: 20140205