CN103545384B - 一种高倍聚光光伏系统接收器的保护膜的制备方法 - Google Patents
一种高倍聚光光伏系统接收器的保护膜的制备方法 Download PDFInfo
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Abstract
本发明公开了一种高倍聚光光伏系统接收器的保护膜的制备方法,所述保护膜为Al2O3薄膜,通过原子层沉积技术制备置于接收器外层;接收器由覆铜陶瓷板、太阳能电池、肖特基二极管以及金线等元件组成,所述保护膜包覆所有元件与空气接触的外表面;Al2O3薄膜通过原子层沉积(ALD)方法制备,置于接收器上表面,覆盖接收器表面的器件和电路;本发明通过调整Al2O3薄膜制备中的不同前驱体反应时间、气压、厚度等参数达到绝缘、防水、防氧化、导热的作用,是一种理想的接收器保护膜。
Description
技术领域
本发明属于太阳能制造技术领域,具体涉及一种高倍聚光光伏系统中接收器的保护膜的制备方法。
背景技术
随着GaAs叠层太阳能电池效率的快速提升,其地面应用前景备受瞩目。高倍聚光光伏系统是目前GaAs叠层太阳能电池大规模地面应用的基础。通过透镜使太阳光汇聚到GaAs叠层太阳能电池表面,可以有效降低系统单位装机容量对GaAs叠层太阳能电池材料的消耗,同时还能在一定程度上提高该类太阳能电池的光电转换效率。目前,GaAs叠层太阳能电池在高倍聚光条件下的光电转换效率可达44%,高倍聚光组件效率可达36%,高倍聚光系统效率超过28%。
在高倍聚光光伏系统中,GaAs叠层太阳能电池固定在接收器上,接收器是高倍聚光光伏系统光电转换以及电路连接的载体。接收器以覆铜陶瓷板为基底,其上表面导电的铜膜刻蚀出基本电路后再通过表面装贴技术安装上GaAs太阳能电池、肖特基二极管等元件,并压焊金丝引出太阳能电池表面电极。通常情况下,接收器是没有保护膜的,其制作完成后便直接安装到高倍聚光光伏系统中,容易受到水汽、污染、腐蚀的影响从而导致系统运行不正常甚至无法发电。后来人们逐渐意识到接收器的绝缘、防护、散热性能对于系统发电效果至关重要,并开始考虑制作保护膜覆盖在接收器上。
硅胶保护膜通常采用手工涂覆的办法进行加工,这种方法的好处在于成本低廉,但是很难避免接收器表面器件边沿处残留空气,形成气泡。在接收器工作过程中,这些气泡容易受热膨胀,产生机械应力对接收器造成损伤。此外,手工涂覆硅胶的厚度均匀性、工艺重复性等方面存在问题,另外还会增加接收器故障返修的难度。
通过物理溅射法制备氧化物薄膜作为接收器保护膜,由于物理溅射工艺原理的限制,很难在装载了高低不平的元件的接收器表面形成厚度均匀的氧化物薄膜。一方面因为物理溅射方法沉积薄很难在原子层的尺度控制膜的均匀性与厚度;另一方面还因为元件本身材料表面性质不同导致保护膜生长速率与成核机制差异。此外,物理溅射方法由于接收器表面元件的遮挡,在元件侧面容易形成溅射源材料堆积,而在元件遮挡处则不能很好地覆盖保护膜。因此,通过物理溅射方法制备的保护膜具有一定缺陷。
发明内容
本发明以现有的高倍聚光光伏系统中的接收器为基础,提出了一种接收器的保护膜的制备方法。采用原子层沉积技术制作Al2O3薄膜作为保护膜,使接收器具有防水、防氧化的功能,并且具有更好的导热性。
本发明具体方案如下:
一种高倍聚光光伏系统接收器的保护膜,其特征在于:所述保护膜为Al2O3薄膜,通过原子层沉积(ALD)技术制备置于接收器外层;接收器由覆铜陶瓷板、太阳能电池、肖特基二极管以及金线等元件组成,所述保护膜包覆所有元件与空气接触的外表面。
所述Al2O3薄膜为均匀致密材料,厚度为30-100nm,厚度均匀性偏差小于3%,台阶覆盖高宽比超过100:1。
所述Al2O3薄膜为高透膜,平均透过率超过80%。
所述 Al2O3薄膜沉积方式采用单原子层周期性生长,单原子层厚度为0.1nm左右,整体厚度在纳米级尺度可控。
制备上述保护膜的具体方法如下:
步骤1:将高倍聚光光伏系统的接收器放置到原子层沉积(ALD)设备真空腔室中的样品架上,真空腔室的真空度保持在600-800pa,腔室温度为室温;
步骤2:将金属有机物前驱体三甲基铝(TMAl)通入真空腔室,金属有机物在接收器的表面形成吸附,控制吸附反应时间0.1~0.3秒,然后将氮气通入真空腔室进行吹扫,吹扫时间为1~2秒;
步骤3:通入第二种前驱体水蒸气,水蒸气使接收器表面的金属原子被进一步氧化成Al2O3,控制表面氧化反应时间为0.2~0.4秒,然后再用氮气吹扫真空腔室1~2秒;完成一个原子层薄膜的生长,一个原子层厚度控制在0.1~0.2nm之间;
步骤4:重复步骤2和3,经过多循环的周期沉积生长,在接收器表面形成一层均匀的Al2O3薄膜,厚度范围为30~100nm;
步骤5:在压强30pa,温度120℃,Ar气气氛下退火20分钟。
研究表明,Al2O3薄膜可以起到隔离水分和氧气的作用。同时,Al2O3还具备优良的导热性,能加快高倍聚光条件按下电池表面热量的传输,有利于降低接收器工作温度。利用Al2O3材料作为接收器保护膜,其保护性能优劣的关键在于Al2O3薄膜的致密性、厚度均匀性,以及膜本身的连续性(最好完全覆盖保护)。原子层沉积技术采用连续的原子级别厚度的薄膜生长控制,沉积温度低、节省原料,相对于溅射等其它工艺对器件表面的损伤更小,且无针孔、缺陷和裂纹产生。所以在较大的比表面积和复杂的结构中,原子层沉积技术均能保持很高的均匀性和致密性。原子层沉积技术制作的Al2O3薄膜,具有良好的台阶覆盖率和极小的厚度偏差率,能在复杂的基体表面达到很高的一致性。在高倍聚光光伏系统的接收器制作完成后,引入原子层沉积技术制作的高致密、高透过率的Al2O3薄膜,可以满足接收器对绝缘、防水、防氧化以及散热方面的要求。
本发明的有益效果如下:
本发明所述保护膜,具有绝缘、防水、防氧化、导热的作用;通过制备保护膜,可以有效防止接收器表面以及GaAs叠层太阳能电池侧面由于水汽结露造成的短路;同时也可以有效防止接收器表面金属电路氧化造成的失效等问题;此外,Al2O3保护膜是热的良导体,可以加快在高倍聚光条件下GaAs叠层太阳能电池表面的热传递,有利于降低接收器工作温度。
附图说明:
图1为本发明所述接收器的俯视示意图
图2为本发明所述接收器制作保护膜前的侧视示意图
图3为本发明所述接收器制作保护膜后的侧视示意图
其中,附图标记为:1、GaAs叠层太阳能电池;2、压焊的金线;3、肖特基二极管;4、电缆接口;5、覆铜陶瓷板;6、保护膜。
具体实施方式
如图1所示,常规结构的接收器包括有GaAs叠层太阳能电池1、压焊的金线2、肖特基二极管3、电缆接口4、覆铜陶瓷板5,以该接收器为例,结合如下方式实施本发明:
步骤1:将接收器放置到原子层沉积(ALD)设备真空腔室中的样品架上,真空腔室的真空度保持在600-800pa,腔室温度为室温;
步骤2:将金属有机物前驱体三甲基铝(TMAl)通入真空腔室,金属有机物在接收器的表面形成吸附,控制吸附反应时间0.1~0.3秒,然后将氮气通入真空腔室进行吹扫,吹扫时间为1~2秒;
步骤3:通入第二种前驱体水蒸气,水蒸气使接收器表面的金属原子被进一步氧化成Al2O3,控制表面氧化反应时间为0.2~0.4秒,然后再用氮气吹扫真空腔室1~2秒;完成一个原子层薄膜的生长,一个原子层厚度控制在0.1~0.2nm之间,整体厚度在纳米级尺度可控;
步骤4:重复步骤2和3,经过多循环的周期沉积生长,在接收器表面形成一层均匀的Al2O3保护膜,厚度范围为30~100nm;
步骤5:在压强30pa,温度120℃,Ar气气氛下退火20分钟。
Al2O3保护膜6制备完成后,接收器的覆铜陶瓷板、太阳能电池、肖特基二极管以及金线等元件均被保护膜6包覆,使得接收器的外表面与空气隔离。
所述Al2O3保护膜6为均匀致密材料,厚度为30-100nm,厚度均匀性偏差小于3%,台阶覆盖高宽比超过100:1。
所述Al2O3保护膜6为高透膜,平均透过率超过80%。
Claims (1)
1.制备一种高倍聚光光伏系统接收器的保护膜的方法,其特征在于步骤如下:
步骤1:将高倍聚光光伏系统的接收器放置到原子层沉积设备真空腔室中的样品架上,真空腔室的真空度保持在600-800pa,腔室温度为室温;
步骤2:将金属有机物前驱体三甲基铝通入真空腔室,金属有机物在接收器的表面形成吸附,控制吸附反应时间0.1~0.3秒,然后将氮气通入真空腔室进行吹扫,吹扫时间为1~2秒;
步骤3:通入第二种前驱体水蒸气,水蒸气使接收器表面的金属原子被进一步氧化成Al2O3,控制表面氧化反应时间为0.2~0.4秒,然后再用氮气吹扫真空腔室1~2秒;完成一个原子层薄膜的生长,一个原子层厚度控制在0.1~0.2nm之间;
步骤4:重复步骤2和3,经过多循环的周期沉积生长,在接收器表面形成一层均匀的Al2O3薄膜,厚度范围为30~100nm;
步骤5:在压强30pa,温度120℃,Ar气气氛下退火20分钟。
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