CN103515184B - 感应耦合等离子体装置、分光分析装置以及质量分析装置 - Google Patents

感应耦合等离子体装置、分光分析装置以及质量分析装置 Download PDF

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Publication number
CN103515184B
CN103515184B CN201310261620.6A CN201310261620A CN103515184B CN 103515184 B CN103515184 B CN 103515184B CN 201310261620 A CN201310261620 A CN 201310261620A CN 103515184 B CN103515184 B CN 103515184B
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gas
plasma
cover
inductively coupled
calibration
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CN103515184A (zh
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松泽修
赤松宪
赤松宪一
中野信男
宫丰
一宫丰
田边英规
夏井克己
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Hitachi High Tech Analysis Co ltd
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Hitachi High Tech Science Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes

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  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Plasma & Fusion (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
CN201310261620.6A 2012-06-27 2013-06-27 感应耦合等离子体装置、分光分析装置以及质量分析装置 Active CN103515184B (zh)

Applications Claiming Priority (2)

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JP2012-144604 2012-06-27
JP2012144604A JP5965743B2 (ja) 2012-06-27 2012-06-27 Ｉｃｐ装置及び分光分析装置並びに質量分析装置

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CN103515184A CN103515184A (zh) 2014-01-15
CN103515184B true CN103515184B (zh) 2017-06-16

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JP (1) JP5965743B2 (enExample)
KR (1) KR101948943B1 (enExample)
CN (1) CN103515184B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109314025B (zh) * 2017-04-06 2020-05-15 株式会社爱发科 离子源以及离子注入装置
CN108732234B (zh) * 2017-04-24 2020-09-29 上海新昇半导体科技有限公司 等离子体发生装置
DE112018002448T5 (de) 2017-05-12 2020-02-20 Sumco Corporation Sprühkammer, Probenzerstäubungs- und -einführungsvorrichtung, Analysevorrichtung sowie Verfahren zur Analyse von Bestandteilen einer Probe
CN107464735A (zh) * 2017-06-28 2017-12-12 中国地质科学院水文地质环境地质研究所 一种新型氯/溴同位素质谱仪及其分析方法
CN108181374A (zh) * 2018-02-08 2018-06-19 聚光科技(杭州)股份有限公司 等离子体-质谱分析系统的工作方法
CN110519904B (zh) * 2019-08-16 2020-09-29 中国地质大学（武汉） 一种基于集磁器的icp等离子源形成装置及方法
CN110677972A (zh) * 2019-10-17 2020-01-10 中国人民解放军国防科技大学 用于SiC光学镜面加工的等离子体发生器及其应用方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4760253A (en) * 1986-01-31 1988-07-26 Vg Instruments Group Limited Mass spectrometer
US4926021A (en) * 1988-09-09 1990-05-15 Amax Inc. Reactive gas sample introduction system for an inductively coupled plasma mass spectrometer
JPH05135896A (ja) * 1991-11-11 1993-06-01 Sansha Electric Mfg Co Ltd インダクシヨンプラズマトーチ
US5642190A (en) * 1995-09-01 1997-06-24 Thermo Jarrell Ash Corp. Dual-axis plasma imaging system for use in spectroscopic analysis
JPH11111491A (ja) * 1997-10-01 1999-04-23 Yokogawa Analytical Systems Inc プラズマ発生器
CN1235274A (zh) * 1997-12-29 1999-11-17 液体空气乔治洛德方法利用和研究有限公司 有可调喷射器的等离子喷管和使用该喷管的气体分析仪
JP2003194723A (ja) * 2001-12-27 2003-07-09 Rikogaku Shinkokai プラズマトーチ
JP2004327243A (ja) * 2003-04-24 2004-11-18 Tdk Corp Ｉｃｐ質量分析装置及び質量分析方法
JP2010197080A (ja) * 2009-02-23 2010-09-09 Sii Nanotechnology Inc 誘導結合プラズマ分析装置
WO2011140168A1 (en) * 2010-05-05 2011-11-10 Perkinelmer Health Sciences, Inc. Inductive devices and low flow plasmas using them

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584062U (ja) * 1981-06-30 1983-01-11 日本ジヤ−レル・アツシユ株式会社 高周波誘導プラズマト−チ管
JP2010197207A (ja) * 2009-02-25 2010-09-09 Shimadzu Corp 発光分光分析方法及び発光分光分析装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4760253A (en) * 1986-01-31 1988-07-26 Vg Instruments Group Limited Mass spectrometer
US4926021A (en) * 1988-09-09 1990-05-15 Amax Inc. Reactive gas sample introduction system for an inductively coupled plasma mass spectrometer
JPH05135896A (ja) * 1991-11-11 1993-06-01 Sansha Electric Mfg Co Ltd インダクシヨンプラズマトーチ
US5642190A (en) * 1995-09-01 1997-06-24 Thermo Jarrell Ash Corp. Dual-axis plasma imaging system for use in spectroscopic analysis
JPH11111491A (ja) * 1997-10-01 1999-04-23 Yokogawa Analytical Systems Inc プラズマ発生器
CN1235274A (zh) * 1997-12-29 1999-11-17 液体空气乔治洛德方法利用和研究有限公司 有可调喷射器的等离子喷管和使用该喷管的气体分析仪
JP2003194723A (ja) * 2001-12-27 2003-07-09 Rikogaku Shinkokai プラズマトーチ
JP2004327243A (ja) * 2003-04-24 2004-11-18 Tdk Corp Ｉｃｐ質量分析装置及び質量分析方法
JP2010197080A (ja) * 2009-02-23 2010-09-09 Sii Nanotechnology Inc 誘導結合プラズマ分析装置
WO2011140168A1 (en) * 2010-05-05 2011-11-10 Perkinelmer Health Sciences, Inc. Inductive devices and low flow plasmas using them

Also Published As

Publication number Publication date
KR101948943B1 (ko) 2019-02-15
CN103515184A (zh) 2014-01-15
JP5965743B2 (ja) 2016-08-10
KR20140001125A (ko) 2014-01-06
JP2014009961A (ja) 2014-01-20

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