CN103510065B - Substrate feeding manipulator, substrate feeding system and PECVD device - Google Patents
Substrate feeding manipulator, substrate feeding system and PECVD device Download PDFInfo
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- CN103510065B CN103510065B CN201210200997.6A CN201210200997A CN103510065B CN 103510065 B CN103510065 B CN 103510065B CN 201210200997 A CN201210200997 A CN 201210200997A CN 103510065 B CN103510065 B CN 103510065B
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Abstract
The invention discloses a kind of substrate feeding manipulator, comprising: support; Arm, described arm can connect on the bracket up and down rotatably; Substrate adsorption piece, for adsorbing substrate on one end that described substrate adsorption piece is located at described arm; And rotation detection device, described rotation detection device is for detecting the rotary motion of described arm.According to the substrate feeding manipulator of the embodiment of the present invention, by arm is rotatably connected on support, make can realize the interlocking design with feeding platform when the motion of substrate feeding manipulator is restricted, avoid the damage of arm or substrate adsorption piece in time, reduce maintenance and alternative costs, and do not dally over one's work process, improves working efficiency.The invention also discloses a kind of substrate feeding system and there is its PECVD device.
Description
Technical field
The present invention relates to technical field of semiconductor device, particularly a kind of substrate feeding manipulator, the substrate feeding system with described substrate feeding manipulator and PECVD device.
Background technology
Traditional solar plate PECVD(plasma enhanced chemical vapor deposition) in equipment work process, get sheet mechanical manipulator and constantly take out cell piece from the magazine of feeding platform.When getting sheet mechanical manipulator and extending in magazine, if Load System breaks down and quits work, now operator are very likely direct when being unfamiliar with whole equipment is elevated feeding platform, thus cause getting sheet mechanical manipulator and oppressed by magazine, and then the adsorption piece causing getting sheet mechanical manipulator front end damages, even can make to get the arm bending of sheet mechanical manipulator and cause deformation of timbering.Therefore causing the damage to getting sheet mechanical manipulator, adding maintenance and alternative costs, and having delayed job schedule.
In addition, in existing PECVD device, the control device usually controlling feeding platform is arranged in when feeding platform breaks down and locks this feeding platform, and namely existing PECVD can only realize designing the monolock of feeding platform.
Summary of the invention
The present invention is intended at least to solve one of technical problem existed in prior art.
For this reason, one object of the present invention is to propose a kind of substrate feeding manipulator, and described substrate feeding manipulator avoids damage, reduces maintenance and alternative costs and the progress that do not dally over one's work.
Another object of the present invention is to propose a kind of substrate feeding system with above-mentioned substrate feeding manipulator.
Another object of the present invention is to propose a kind of PECVD device with above-mentioned substrate feeding system.
The substrate feeding manipulator of embodiment, comprising: comprising: support according to a first aspect of the present invention; Arm, described arm can connect on the bracket up and down rotatably; Substrate adsorption piece, for adsorbing substrate on one end that described substrate adsorption piece is located at described arm; And rotation detection device, described rotation detection device is for detecting the rotary motion of described arm.
According to the substrate feeding manipulator of the embodiment of the present invention, by arm is rotatably connected on support, make can realize the interlocking design with feeding platform when the motion of substrate feeding manipulator is restricted, avoid the damage to arm or substrate adsorption piece in time, reduce maintenance and alternative costs, and do not dally over one's work progress, improves working efficiency.
In addition, substrate feeding manipulator according to the present invention also has following additional technical feature:
Alternatively, described rotation detection device comprises: for measuring the sensor of described arm angle of rotation.
Alternatively, described arm is connected on the bracket by pivotal axis.
Alternatively, described sensor is located at described pivotal axis place.
Alternatively, described substrate adsorption piece is sucker.
Alternatively, described rotation detection device comprises: elastic component, and described elastic component is fixedly attached to the other end of described arm.
The substrate feeding system of embodiment, comprising: magazine according to a second aspect of the present invention, has the chamber for placing substrate in described magazine; Liftable feeding platform; Travelling belt, described magazine is sent on described feeding platform by described travelling belt; Substrate feeding manipulator according to a first aspect of the present invention described in embodiment, wherein said substrate feeding manipulator stretches in described chamber and carries out getting sheet; With the first control unit, described first control unit is for controlling the motion of described substrate feeding manipulator; And second control unit, described second control unit is for controlling the lifting of described feeding platform.
Described substrate feeding system also comprises lifting drive, and described lifting drive to be located at bottom described feeding platform and to be electrically connected to drive the lifting of described feeding platform with described second control unit.
Alternatively, at described rotation detection device, described second control unit detects that described arm stops the lifting of described feeding platform when rotating.
Alternatively, described lifting drive is leading screw.Thus, by adopting leading screw, thus total simple, be easy to install and cost is low.
Described substrate feeding system also comprises pallet and upper and lower gripper cylinder, and described upper and lower gripper cylinder is located on described feeding platform for locating described magazine.
According to the substrate feeding system of the embodiment of the present invention, rational in infrastructure and performance safety, thus drastically increase working efficiency.
A kind of PECVD device of embodiment according to a third aspect of the present invention, comprises the substrate feeding system according to a second aspect of the present invention described in embodiment.
Additional aspect of the present invention and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become obvious and easy understand from accompanying drawing below combining to the description of embodiment, wherein:
Fig. 1 (a) is the schematic diagram of the substrate feeding manipulator of embodiment according to a first aspect of the present invention;
Fig. 1 (b) is the schematic diagram of another substrate feeding manipulator of embodiment according to a first aspect of the present invention;
Fig. 2 is the schematic diagram of the substrate feeding system of embodiment according to a second aspect of the present invention;
Fig. 3 be the substrate feeding manipulator motion of the substrate feeding system shown in Fig. 2 restricted time feeding platform propradation schematic diagram;
Fig. 4 be the substrate feeding manipulator motion of the substrate feeding system shown in Fig. 2 restricted time feeding platform decline state schematic diagram; With
Fig. 5 is the schematic diagram of substrate feeding manipulator when being positioned at ready position.
Embodiment
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not limitation of the present invention being interpreted as.
In describing the invention, it will be appreciated that, term " on ", D score, "front", "rear", "left", "right", " level ", " top ", " end ", " interior ", the orientation of the instruction such as " outward " or position relationship be based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise one or more these features.In describing the invention, except as otherwise noted, the implication of " multiple " is two or more.
In describing the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, particular case above-mentioned term concrete meaning in the present invention can be understood.
First describe the substrate feeding system of embodiment according to a second aspect of the present invention below with reference to figure 2, described substrate feeding system is for loading substrate (scheming not shown) such as cell piece.
According to the substrate feeding system of the embodiment of the present invention, comprising: magazine 2, liftable feeding platform 3, travelling belt 4, substrate feeding manipulator 1, first and second control unit (scheming not shown).
As shown in Figure 2, have the chamber 20 for placing substrate in magazine 2, particularly, the side of chamber 20 is opened wide.Magazine 2 is sent on feeding platform 3 by travelling belt 4.
The side that substrate feeding manipulator 1 can open wide from chamber 20 extend into chamber 20 carry out taking-up substrate then by substrate load on predetermined position such as support plate (scheming not shown), wherein the concrete structure of substrate feeding manipulator 1 is described in detail in following content.First and second control units are respectively used to control the motion of substrate feeding manipulator 1 and the lifting of feeding platform 2, and wherein the motion of substrate feeding manipulator 1 can comprise such as translational motion and rotary motion.
Describe substrate feeding manipulator 1 as above below with reference to Fig. 1 (a), this substrate feeding manipulator 1 for taking out substrate such as cell piece and being loaded into predetermined position from magazine 2.
According to the substrate feeding manipulator 1 of the embodiment of the present invention, comprising: support 11, arm 12, substrate adsorption piece 13 and rotation detection device (not shown).This rotation detection device is for detecting the rotary motion of this arm 12.Fig. 1 (a) shows the schematic diagram of substrate feeding manipulator 1 according to an embodiment of the invention.As shown in Fig. 1 (a), arm 12 can be connected on support 11 up and down rotatably, is understandable that, " rotating up and down " mentioned here refers to, arm 12 around the axis direction perpendicular to paper around pivotal axis 14 clockwise or rotate counterclockwise, as shown in Figure 3 and Figure 4.Alternatively, arm 12 is connected on support 11 by pivotal axis 14.
For adsorbing substrate (scheming not shown) on the other end that substrate adsorption piece 13 is located at arm 12.According to one embodiment of present invention, this rotation detection device can be the sensor (not shown) for measurement arm 12 angle of rotation.Sensor is used for the sensor of measurement arm 12 angle of rotation, and such as sensor is angle displacement sensor.According to one embodiment of present invention, sensor is located at pivotal axis 14 place.
According to one embodiment of present invention, as shown in Figure 1 (b), rotation detection device can comprise elastic component 15, and described elastic component 15 is fixedly attached to the other end of arm 12, and the other end of described arm 12 stretches out from described support 11.Thus, when the touched rotation of arm 12, based on lever principle, the rotation of this arm 12 can be detected by the change of the elastic force of elastic component 15.
Like this, when the first control unit of substrate feeding system breaks down, the motion of substrate feeding manipulator 1 is restricted, now when feeding platform 3 continues lifting, come in contact with described substrate feeding manipulator 1, arm 12 is forced to rotate on support 11, the angle that arm 12 rotates simultaneously is detected by rotation detection device and the signal detected is sent to the second control unit, as shown in Figure 3, second control unit controls feeding platform 3 in time and stops lifting, the damage causing arm 12 or substrate adsorption piece 13 can be avoided thus, achieve the interlocking design between substrate feeding manipulator 1 and feeding platform 3.
According to the substrate feeding manipulator 1 of the embodiment of the present invention, by arm 12 is rotatably connected on support 11, make can realize when substrate feeding manipulator 1 moves restricted the interlocking design with feeding platform 3, avoid the damage of arm 12 or substrate adsorption piece 13 in time, reduce maintenance and alternative costs, and do not dally over one's work process, improves working efficiency.In addition, by arranging rotation detection device, be also convenient to writing and designing of the load module of substrate feeding system.According to one embodiment of present invention, substrate adsorption piece 13 can be sucker.
In one embodiment of the invention, substrate feeding system also comprises lifting drive 5, and lifting drive 5 is located at the lifting be electrically connected bottom feeding platform 3 and with the second control unit to drive feeding platform 3.Wherein alternatively, lifting drive 5 is leading screw.Thus, structure simple, be easy to install and cost is low.
Be understandable that, above-mentioned the first control unit of mentioning and the second control unit to the control mode of the motion of substrate feeding manipulator 1 and the lifting of feeding platform 2, for those skilled in the art are known, do not repeat them here respectively.
In another embodiment of the present invention, substrate feeding system also comprises pallet and upper and lower gripper cylinder (scheming not shown), upper and lower gripper cylinder to be located on feeding platform 3 for locating magazine 2, magazine 2 is placed on feeding platform 3 stable so that sheet is got in stretching into of substrate feeding manipulator 1.
According to the substrate feeding system of the embodiment of the present invention, rational in infrastructure, performance safety, substantially increases working efficiency.
The substrate load process according to the substrate feeding system of the embodiment of the present invention is described in detail below with reference to Fig. 1-Fig. 5.
First, as shown in Figure 5, substrate feeding manipulator 1 is positioned at ready position B, waits for work.Now magazine 2 to be sent on feeding platform 3 and to be located by pallet and upper and lower gripper cylinder by travelling belt 4.
Then feeding platform 3 drops to and gets sheet ready position, as shown in Figure 2, and then substrate feeding manipulator 1 (namely towards magazine 2) motion forward, and prepare to get sheet in the chamber 20 extending into magazine 2.
Then sheet position (scheming not shown) is got in feeding platform 3 arrival of rising, and makes the substrate adsorption piece 13 of substrate feeding manipulator 1 contact with the first substrate in magazine 2 and adsorb.Now substrate feeding manipulator 1 is moved to such as support plate place, predetermined position by control away from magazine 2, is put down by the first substrate of absorption, then moves towards magazine 2, and extend into the interior taking-up of chamber 20 second substrate of magazine 2.Above action repeats, until take out all substrates in magazine 2.
Now substrate feeding manipulator 1 gets back to ready position B place, and feeding platform 3 declines, and exports empty magazine 2.Then feeding platform 3 rises, and waits for that next magazine 2 inputs.This completes the substrate load process in a magazine 2.Wherein alternatively, ready position B can be identical position with above-mentioned predetermined position (such as support plate place).
In the process, when the first control unit of substrate feeding system breaks down, the motion of substrate feeding manipulator 1 is restricted, now when feeding platform 3 continues lifting, arm 12 can be forced to rotate on support 11, the angle that arm 12 rotates simultaneously is detected by rotation detection device and the signal detected is sent to the second control unit, second control unit controls feeding platform 3 in time and stops lifting, the damage causing arm 12 or substrate adsorption piece 13 can be avoided thus, achieve the interlocking design between substrate feeding manipulator 1 and feeding platform 3.
The PECVD(plasma enhanced chemical vapor deposition of embodiment according to a third aspect of the present invention) equipment, comprise the substrate feeding system according to a second aspect of the present invention described in embodiment.According to the PECVD device of the embodiment of the present invention other form and operation be all known for the ordinary skill in the art, be not described in detail here.
In the description of this specification sheets, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present invention or example.In this manual, identical embodiment or example are not necessarily referred to the schematic representation of above-mentioned term.And the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.
Although illustrate and describe embodiments of the invention, those having ordinary skill in the art will appreciate that: can carry out multiple change, amendment, replacement and modification to these embodiments when not departing from principle of the present invention and aim, scope of the present invention is by claim and equivalents thereof.
Claims (10)
1. a substrate feeding manipulator, is characterized in that, comprising:
Support;
Arm, described arm can connect on the bracket up and down rotatably;
Substrate adsorption piece, for adsorbing substrate on one end that described substrate adsorption piece is located at described arm; With
Rotation detection device, described rotation detection device is used for the rotary motion of arm described in direct-detection with the restricted state of the motion of feeding back described arm.
2. substrate feeding manipulator according to claim 1, is characterized in that, described rotation detection device comprises: for measuring the sensor of described arm angle of rotation.
3. substrate feeding manipulator according to claim 2, is characterized in that, described arm is connected on the bracket by pivotal axis.
4. substrate feeding manipulator according to claim 3, is characterized in that, described sensor is located at described pivotal axis place.
5. substrate feeding manipulator according to claim 1, is characterized in that, described rotation detection device comprises: elastic component, and described elastic component is fixedly attached to the other end of described arm.
6. a substrate feeding system, is characterized in that, comprising:
Magazine, has the chamber for placing substrate in described magazine;
Liftable feeding platform;
Travelling belt, described magazine is sent on described feeding platform by described travelling belt;
Substrate feeding manipulator according to any one of claim 1-5, wherein said substrate feeding manipulator stretches in described chamber and carries out getting sheet; With
First control unit, described first control unit is for controlling the motion of described substrate feeding manipulator; And
Second control unit, described second control unit is for controlling the lifting of described feeding platform.
7. substrate feeding system according to claim 6, is characterized in that, at described rotation detection device, described second control unit detects that described arm stops the lifting of described feeding platform when rotating.
8. substrate feeding system according to claim 6, is characterized in that, described substrate feeding system also comprises:
Lifting drive, described lifting drive to be located at bottom described feeding platform and to be electrically connected to drive the lifting of described feeding platform with described second control unit.
9. substrate feeding system according to claim 8, is characterized in that, described lifting drive is leading screw.
10. a PECVD device, is characterized in that, comprises the substrate feeding system according to any one of claim 6-9.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210200997.6A CN103510065B (en) | 2012-06-18 | 2012-06-18 | Substrate feeding manipulator, substrate feeding system and PECVD device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210200997.6A CN103510065B (en) | 2012-06-18 | 2012-06-18 | Substrate feeding manipulator, substrate feeding system and PECVD device |
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| Publication Number | Publication Date |
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| CN103510065A CN103510065A (en) | 2014-01-15 |
| CN103510065B true CN103510065B (en) | 2016-02-10 |
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| CN201210200997.6A Active CN103510065B (en) | 2012-06-18 | 2012-06-18 | Substrate feeding manipulator, substrate feeding system and PECVD device |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0723840A1 (en) * | 1993-07-13 | 1996-07-31 | Komatsu Ltd. | Manipulator |
| CN101602208A (en) * | 2008-06-11 | 2009-12-16 | 松下电器产业株式会社 | The collision checking method of manipulator, manipulator and the control method of manipulator |
| CN201778110U (en) * | 2010-08-13 | 2011-03-30 | 深圳市捷佳伟创微电子设备有限公司 | Plasma enhanced chemical vapor deposition (PECVD) automatic loading and unloading boat device |
| CN102328312A (en) * | 2010-07-12 | 2012-01-25 | 精工爱普生株式会社 | The control method of robot device and robot device |
-
2012
- 2012-06-18 CN CN201210200997.6A patent/CN103510065B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0723840A1 (en) * | 1993-07-13 | 1996-07-31 | Komatsu Ltd. | Manipulator |
| CN101602208A (en) * | 2008-06-11 | 2009-12-16 | 松下电器产业株式会社 | The collision checking method of manipulator, manipulator and the control method of manipulator |
| CN102328312A (en) * | 2010-07-12 | 2012-01-25 | 精工爱普生株式会社 | The control method of robot device and robot device |
| CN201778110U (en) * | 2010-08-13 | 2011-03-30 | 深圳市捷佳伟创微电子设备有限公司 | Plasma enhanced chemical vapor deposition (PECVD) automatic loading and unloading boat device |
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| CN103510065A (en) | 2014-01-15 |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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