CN103505996B - Waste gas washing treatment method and device in polycrystalline silicon industry - Google Patents
Waste gas washing treatment method and device in polycrystalline silicon industry Download PDFInfo
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Abstract
The invention provides a chlorosilane-containing waste gas washing treatment method and device in a polycrystalline silicon production process. The device comprises a waste gas buffer tank, a chlorosilane-containing waste gas supply pipeline connected with an inlet of the waste gas buffer tank, and a normal waste gas spraying system, an accidental waste system spraying system and an emergency washing system which are connected with an outlet of the waste gas buffer tank. The chlorosilane-containing waste gas is fed into a spray tower and is washed by spraying 10-30 percent of sodium hydroxide. The gas generated after spraying is discharged into atmosphere through a water-sealed tank. According to the method, the problem that hydrogen chloride escapes is effectively solved, the problem that the pipeline is blocked by silicon dioxide generated in the traditional washing process is solved, and harmlessness of environmental protection is realized. According to the device, the chlorosilane waste gas can be effectively and harmlessly treated, escape of hydrogen chloride can be effectively reduced, and sodium silicate generated in the reaction is relatively convenient to remove.
Description
Technical field
The present invention relates to the chlorine-containing silane waste gas nuisanceless disposal water washing treatment method produced in a kind of polysilicon production process, and the washing treating apparatus of the chlorine-containing silane waste gas produced in a kind of polysilicon production process.
Background technology
Containing a large amount of chlorosilane in the waste gas that polysilicon industry production process produces, be effectively addressed to enable waste gas and enable tail gas qualified discharge, the traditional washing process of current domestic main employing processes, and namely washs flue gas with industry water, the chlorosilane in hydrolysis waste gas.Although industry water washing method has higher hydrolysis efficiency to chlorosilane, hydrogen chloride a large amount of after hydrolyzing chlorosilane and silica solid.Wherein partial oxidation hydrogen is while being dissolved in industry water, can escape in air from water, to environment; And the industrial wastewater formed after industry water absorbing hydrogen chloride is aobvious acid, causes great difficulty to follow-up sewage disposal, and the silica solid produced is difficult to remove from system especially.Along with the development of polysilicon industry, the generation of chlorine-containing silane waste gas, waste liquid also grows with each passing day, and the harmless treatment of chlorine-containing silane waste gas, waste liquid has more and more wide market prospects.
Summary of the invention
The present invention relates to the chlorine-containing silane waste gas water washing treatment method and device that produce in a kind of polysilicon production process, realize the absorption of hydrogen chloride gas in flue gas and finally remove to ensure that flue gas can meet the requirement of national environmental standard.
Realize the technical scheme of the object of the invention: a kind of polysilicon industry waste gas washing treating apparatus, it comprises off-gas buffer tank, the chlorine-containing silane waste gas supply line be connected with the entrance of off-gas buffer tank, the normal waste gas spray system, accident waste gas spray system and the emergent water wash system that are connected with the outlet of off-gas buffer tank;
Described normal waste gas spray system comprises normal waste gas spray woods tower one and normal waste gas spray woods tower two, Siphon pot one and Siphon pot two, normal waste gas Sprayer Circulation pump one and normal spray tower for waste gas circulating pump two and alkali lye pond one and alkali lye pond two; Wherein, the entrance that outlet and the normal waste gas of off-gas buffer tank spray woods tower one is connected, the outlet of normal waste gas spray woods tower one is connected with the entrance in alkali lye pond one, the entrance of Siphon pot one is connected with the outlet in alkali lye pond one, the outlet of Siphon pot one is connected with the entrance of normal waste gas Sprayer Circulation pump one, and the outlet of normal waste gas Sprayer Circulation pump one is connected with the mouth spray of normal spray tower for waste gas one tower top; The entrance that outlet and the normal waste gas of off-gas buffer tank spray woods tower two is connected, the outlet of normal waste gas spray woods tower two is connected with the entrance in alkali lye pond two, the entrance of Siphon pot two is connected with the outlet in alkali lye pond two, the outlet of Siphon pot two is connected with the entrance of normal spray tower for waste gas circulating pump two, and the mouth spray that outlet and the normal waste gas of normal spray tower for waste gas circulating pump two spray woods tower two tower top is connected;
Described accident waste gas spray system comprises accident spray tower for waste gas one and accident waste gas spray woods tower two, Siphon pot three and Siphon pot four, accident spray tower for waste gas circulating pump one and accident spray tower for waste gas circulating pump two; Wherein, the outlet of off-gas buffer tank is connected with the entrance of accident spray tower for waste gas one, the outlet of accident spray tower for waste gas one is connected with the entrance in alkali lye pond one, the entrance of Siphon pot three is connected with the outlet in alkali lye pond one, the outlet of Siphon pot three is connected with the entrance of accident waste gas Sprayer Circulation pump one, and the outlet of accident waste gas Sprayer Circulation pump one is connected with the mouth spray of accident spray tower for waste gas one tower top; The outlet of off-gas buffer tank is connected with the entrance of accident spray tower for waste gas two, the outlet of accident spray tower for waste gas two is connected with the entrance in alkali lye pond two, the entrance of Siphon pot four is connected with the outlet in alkali lye pond two, the outlet of Siphon pot four is connected with the entrance of accident spray tower for waste gas circulating pump two, and the mouth spray that outlet and the accident waste gas of accident spray tower for waste gas circulating pump two spray woods tower two tower top is connected;
Described emergent water wash system comprises accident waste gas pipeline line and emergent washing pool one, emergent washing pool two; Wherein, the outlet of off-gas buffer tank enters emergent washing pool one and emergent washing pool two liquid level once by many pipelines;
The tower top gas outlet of described normal waste gas spray woods tower one and normal waste gas spray woods tower two, accident spray tower for waste gas one are connected the entrance of water sealed tank with the tower top gas outlet of accident waste gas spray woods tower two, the gas outlet of water sealed tank communicates with air.
A kind of polysilicon industry waste gas washing treating apparatus as above, connects by lining fluorine pipeline between the normal waste gas spray system described in it, accident waste gas spray system and each equipment of emergent water wash system.
A kind of polysilicon industry waste gas washing treating apparatus as above, the normal waste gas spray woods tower one described in it and normal waste gas spray woods tower two are glass-reinforced plastic material, and spray adopts two-stage sky cone spray.
A kind of polysilicon industry waste gas washing treating apparatus as above, the accident waste gas spray woods tower one described in it and accident waste gas spray woods tower two are glass-reinforced plastic material, spray employing three grades sky cone spray.
A kind of polysilicon industry waste gas washing treating apparatus as above, the alkali lye pond one described in it and alkali lye pond two are lining anti-corrosion brick in cement pit, and liquid is 10 ~ 30% sodium hydroxide solutions.
A kind of polysilicon industry waste gas washing treating apparatus as above, the emergent washing pool one described in it and emergent washing pool two are lining anti-corrosion brick in cement pit, and liquid is 15 ~ 45% sodium hydroxide solutions.
A kind of polysilicon industry waste gas water washing treatment method of the present invention, it comprises the steps:
A chlorine-containing silane waste gas is delivered to off-gas buffer tank by chlorine-containing silane waste gas supply line by (), then by waste gas supply line, waste gas is delivered to normal waste gas spray Lin Tayi, and waste gas runs from bottom to top in tower; 10 ~ 30% alkali lye are deposited in alkali lye pond one, alkali lye as spray liquid through Siphon pot one, to be delivered to normal waste gas spray woods tower one tower top by normal waste gas Sprayer Circulation pump one, spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank of the tower top of normal waste gas spray woods tower one;
By chlorine-containing silane waste gas supply line, chlorine-containing silane waste gas is delivered to off-gas buffer tank, then by waste gas supply line, waste gas is delivered to normal waste gas spray woods tower two, waste gas runs from bottom to top in tower; 10 ~ 30% alkali lye are deposited in alkali lye pond two, alkali lye as spray liquid through Siphon pot two, to be delivered to normal waste gas spray woods tower two tower top by normal spray tower for waste gas circulating pump two, spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank of the tower top of normal waste gas spray woods tower two;
When () present segment operation has an accident b, when exhausted air quantity has increased above suddenly the disposal ability of normal waste gas spray woods tower one and normal waste gas spray woods tower two, waste gas can proceed to accident spray tower for waste gas one and accident waste gas spray woods tower two, and now waste gas runs from bottom to top in accident spray tower for waste gas one and accident waste gas spray woods tower two tower; A large amount of 10 ~ 30% alkali lye are deposited in alkali lye pond one, accident spray tower for waste gas one tower top is delivered to by accident spray tower for waste gas circulating pump one through Siphon pot three, spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank of the top of tower of accident spray tower for waste gas one; A large amount of 10 ~ 30% alkali lye are deposited in alkali lye pond two, deliver to accident waste gas through Siphon pot four by accident spray tower for waste gas circulating pump two and spray woods tower two tower top, spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank of the top of tower of accident waste gas spray woods tower two;
C () present segment operation has an accident and causes exhausted air quantity can not be stabilized within scope of design, waste gas can turn emergent washing pool one and emergent washing pool two automatically, chlorosilane is hydrolyzed in pond, the hydrogen chloride that hydrolysis produces reacts with NaOH again further, decrease the amount entering air, avoid HCl gas too much to escape.
A kind of polysilicon industry waste gas water washing treatment method as above, the liquid described in it is 10 ~ 30% sodium hydroxide solutions.
Effect of the present invention is:
The waste gas of chlorine-containing silane is sent into spray column by the present invention, with 10 ~ 30% NaOH spray woods washings.The gas produced after spray enters air through water sealed tank.The method efficiently solves the problem that hydrogen chloride is escaped, and solves the problem that traditional washing can produce silica occlusion pipeline, realizes the " innoxious of environment protection treating.Hydrolyzing chlorosilane is thorough, and percent hydrolysis reaches 99.9%; Hydrogen chloride is absorbed neutralization by sodium hydroxide solution, and absorptivity reaches 98%; In pipeline, liquid circulation flow is clear and coherent smooth, efficiently solves danger and harm that the chlorosilane that produces in production of polysilicon brings.
Apparatus of the present invention can carry out harmless treatment to chlorosilane waste gas effectively, effectively can reduce again hydrogen chloride and escape, and the sodium metasilicate that reaction produces also is convenient to remove relatively.Along with the development of polysilicon, organosilicon industry, this new polysilicon waste gas washing process will be promoted widely.Devise normal spray woods tower, accident spray woods tower, water sealed tank and emergent pond, finally ensure that emission meets the emission request of GB16297-1996 standard.Whole system technological process is simple, practical, reasonable, reliable.
Accompanying drawing explanation
Fig. 1 is a kind of polysilicon industry waste gas water washing treatment method of the present invention and device schematic diagram.
In figure: 1. off-gas buffer tank; 2. normal waste gas spray Lin Tayi; 3. accident waste gas spray Lin Tayi; 4. water sealed tank; 5. accident waste gas spray woods tower two; 6. normal waste gas spray woods tower two; 7. normal spray tower for waste gas circulating pump one; 8. Siphon pot one; 9. alkali lye pond one; 10. Siphon pot three; 11. accident spray tower for waste gas circulating pumps one; 12. accident spray tower for waste gas circulating pumps two; 13. Siphon pots four; 14. alkali lye ponds two; 15. Siphon pots two; 16. normal spray tower for waste gas circulating pumps two; 17. emergent washing pools one; 18. emergent washing pools two.
Detailed description of the invention
Below in conjunction with accompanying drawing, a kind of polysilicon industry waste gas water washing treatment method of the present invention and device are further described.
Embodiment 1
As shown in Figure 1, a kind of polysilicon industry waste gas water washing treatment method of the present invention and device, it comprises off-gas buffer tank 1, the chlorine-containing silane waste gas supply line be connected with the entrance of off-gas buffer tank 1, the normal waste gas spray system, accident waste gas spray system and the emergent water wash system that are connected with the outlet of off-gas buffer tank 1;
Described normal waste gas spray system comprises normal waste gas spray woods tower 1 and normal waste gas spray woods tower 26, Siphon pot 1 and Siphon pot 2 15, normal waste gas Sprayer Circulation pump 1 and normal spray tower for waste gas circulating pump 2 16, alkali lye pond 1 and alkali lye pond 2 14; Wherein, the entrance that outlet and the normal waste gas of off-gas buffer tank 1 spray woods tower 1 is connected, the outlet of normal waste gas spray woods tower 1 is connected with the entrance in alkali lye pond 1, the entrance of Siphon pot 1 is connected with the outlet in alkali lye pond 1, the outlet of Siphon pot 1 is connected with the entrance of normal waste gas Sprayer Circulation pump 1, and the outlet of normal waste gas Sprayer Circulation pump 1 is connected with the mouth spray of normal spray tower for waste gas 1 tower top; The entrance that outlet and the normal waste gas of off-gas buffer tank 1 spray woods tower 26 is connected, the outlet of normal waste gas spray woods tower 28 is connected with the entrance in alkali lye pond 2 14, the entrance of Siphon pot 2 15 is connected with the outlet in alkali lye pond 2 14, the outlet of Siphon pot 2 15 is connected with the entrance of normal spray tower for waste gas circulating pump 2 16, and the mouth spray that outlet and the normal waste gas of normal spray tower for waste gas circulating pump 2 16 spray woods tower 26 tower top is connected;
Described accident waste gas spray system comprises accident spray tower for waste gas 1 and accident waste gas spray woods tower 25, Siphon pot 3 10 and Siphon pot 4 13, accident spray tower for waste gas circulating pump 1 and accident spray tower for waste gas circulating pump 2 12; Wherein, the outlet of off-gas buffer tank 1 is connected with the entrance of accident spray tower for waste gas 1, the outlet of accident spray tower for waste gas 1 is connected with the entrance in alkali lye pond 1, the entrance of Siphon pot 3 10 is connected with the outlet in alkali lye pond 1, the outlet of Siphon pot 3 10 is connected with the entrance of accident waste gas Sprayer Circulation pump 1, and the outlet of accident waste gas Sprayer Circulation pump 1 is connected with the mouth spray of accident spray tower for waste gas 1 tower top; The outlet of off-gas buffer tank 1 is connected with the entrance of accident spray tower for waste gas 25, the outlet of accident spray tower for waste gas 25 is connected with the entrance in alkali lye pond 2 14, the entrance of Siphon pot 4 13 is connected with the outlet in alkali lye pond 2 14, the outlet of Siphon pot 4 13 is connected with the entrance of accident spray tower for waste gas circulating pump 2 12, and the mouth spray that outlet and the accident waste gas of accident spray tower for waste gas circulating pump 2 12 spray woods tower 25 tower top is connected;
Described emergent water wash system comprises accident waste gas pipeline line and emergent washing pool 1, emergent washing pool 2 18; Wherein, the outlet of off-gas buffer tank 1 enters emergent washing pool 1 and emergent washing pool 2 18 liquid level once by many pipelines;
The tower top gas outlet of described normal waste gas spray woods tower 1 and normal waste gas spray woods tower 26, accident spray tower for waste gas 1 are connected the entrance of water sealed tank 4 with the tower top gas outlet of accident waste gas spray woods tower 25, the gas outlet of water sealed tank 4 communicates with air.
Connect by lining fluorine pipeline between described normal waste gas spray system, accident waste gas spray system and each equipment of emergent water wash system.
Described normal waste gas spray woods tower 1 and normal waste gas spray woods tower 26 are glass-reinforced plastic material, and spray adopts two-stage sky cone spray.
Described accident waste gas spray woods tower 1 and accident waste gas spray woods tower 25 are glass-reinforced plastic material, spray employing three grades sky cone spray.
Described alkali lye pond 1 and alkali lye pond 2 14 are lining anti-corrosion brick in cement pit, and liquid is 10 ~ 30% sodium hydroxide solutions.
Described emergent washing pool 1 and emergent washing pool 2 18 are lining anti-corrosion brick in cement pit, and liquid is 15 ~ 45% sodium hydroxide solutions.
Embodiment 2
A kind of polysilicon industry waste gas water washing treatment method, it comprises the steps:
A chlorine-containing silane waste gas is delivered to off-gas buffer tank 1 by chlorine-containing silane waste gas supply line by (), then by waste gas supply line, waste gas is delivered to normal waste gas spray woods tower 1, and waste gas runs from bottom to top in tower; 10 ~ 30% alkali lye are deposited in alkali lye pond 1, alkali lye as spray liquid through Siphon pot 1, to be delivered to normal waste gas spray woods tower 1 tower top by normal waste gas Sprayer Circulation pump 1, spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank 4 of the tower top of normal waste gas spray woods tower 1;
By chlorine-containing silane waste gas supply line, chlorine-containing silane waste gas is delivered to off-gas buffer tank 1, then by waste gas supply line, waste gas is delivered to normal waste gas spray woods tower 26, waste gas runs from bottom to top in tower; 10 ~ 30% alkali lye are deposited in alkali lye pond 2 14, alkali lye as spray liquid through Siphon pot 2 15, to be delivered to normal waste gas spray woods tower 26 tower top by normal spray tower for waste gas circulating pump 2 16, spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank 4 of the tower top of normal waste gas spray woods tower 26;
When () present segment operation has an accident b, when exhausted air quantity has increased above suddenly the disposal ability of normal waste gas spray woods tower 1 and normal waste gas spray woods tower 26, waste gas can proceed to accident spray tower for waste gas 1 and accident waste gas spray woods tower 25, and now waste gas runs from bottom to top in accident spray tower for waste gas 1 and accident waste gas spray woods tower 25 tower;
A large amount of 10 ~ 30% alkali lye are deposited in alkali lye pond 1, accident spray tower for waste gas 1 tower top is delivered to by accident spray tower for waste gas circulating pump 1 through Siphon pot 3 10, spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank 4 of the top of tower of accident spray tower for waste gas 1;
A large amount of 10 ~ 30% alkali lye are deposited in alkali lye pond 2 14, deliver to accident waste gas through Siphon pot 4 13 by accident spray tower for waste gas circulating pump 2 12 and spray woods tower 25 tower top, spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank 4 of the top of tower of accident waste gas spray woods tower 25;
C () present segment operation has an accident and causes exhausted air quantity can not be stabilized within scope of design, waste gas can turn emergent washing pool 1 and emergent washing pool 2 18 automatically, chlorosilane is hydrolyzed in pond, the hydrogen chloride that hydrolysis produces reacts with NaOH again further, decrease the amount entering air, avoid HCl gas too much to escape.
Aforesaid liquid is 10 ~ 30% sodium hydroxide solutions.
Claims (8)
1. a polysilicon industry waste gas washing treating apparatus, it is characterized in that, this device comprises off-gas buffer tank (1), the chlorine-containing silane waste gas supply line be connected with the entrance of off-gas buffer tank (1), the normal waste gas spray system, accident waste gas spray system and the emergent water wash system that are connected with the outlet of off-gas buffer tank (1);
Described normal waste gas spray system comprises normal waste gas spray Lin Tayi (2) and normal waste gas spray woods tower two (6), Siphon pot one (8) and Siphon pot two (15), normally waste gas Sprayer Circulation pump one (7) and normal spray tower for waste gas circulating pump two (16) and alkali lye pond one (9) and alkali lye pond two (14); Wherein, the entrance that outlet and the normal waste gas of off-gas buffer tank (1) spray Lin Tayi (2) is connected, the outlet of normal waste gas spray Lin Tayi (2) is connected with the entrance in alkali lye pond one (9), the entrance of Siphon pot one (8) is connected with the outlet in alkali lye pond one (9), the outlet of Siphon pot one (8) is connected with the entrance of normal waste gas Sprayer Circulation pump one (7), and the outlet of normal waste gas Sprayer Circulation pump one (7) is connected with the mouth spray of normal spray tower for waste gas one (2) tower top; The entrance that outlet and the normal waste gas of off-gas buffer tank (1) spray woods tower two (6) is connected, the outlet of normal waste gas spray woods tower two (8) is connected with the entrance in alkali lye pond two (14), the entrance of Siphon pot two (15) is connected with the outlet in alkali lye pond two (14), the outlet of Siphon pot two (15) is connected with the entrance of normal spray tower for waste gas circulating pump two (16), and the mouth spray that outlet and the normal waste gas of normal spray tower for waste gas circulating pump two (16) spray woods tower two (6) tower top is connected;
Described accident waste gas spray system comprises accident spray tower for waste gas one (3) and accident waste gas spray woods tower two (5), Siphon pot three (10) and Siphon pot four (13), accident spray tower for waste gas circulating pump one (11) and accident spray tower for waste gas circulating pump two (12); Wherein, the outlet of off-gas buffer tank (1) is connected with the entrance of accident spray tower for waste gas one (3), the outlet of accident spray tower for waste gas one (3) is connected with the entrance in alkali lye pond one (9), the entrance of Siphon pot three (10) is connected with the outlet in alkali lye pond one (9), Siphon pot three (10)) outlet be connected with the entrance of accident waste gas Sprayer Circulation pump one (11), the outlet of accident waste gas Sprayer Circulation pump one (11) is connected with the mouth spray of accident spray tower for waste gas one (3) tower top; The outlet of off-gas buffer tank (1) is connected with the entrance of accident spray tower for waste gas two (5), the outlet of accident spray tower for waste gas two (5) is connected with the entrance in alkali lye pond two (14), the entrance of Siphon pot four (13) is connected with the outlet in alkali lye pond two (14), the outlet of Siphon pot four (13) is connected with the entrance of accident spray tower for waste gas circulating pump two (12), and the mouth spray that outlet and the accident waste gas of accident spray tower for waste gas circulating pump two (12) spray woods tower two (5) tower top is connected;
Described emergent water wash system comprises accident waste gas pipeline line and emergent washing pool one (17), emergent washing pool two (18); Wherein, the outlet of off-gas buffer tank (1) enters emergent washing pool one (17) and emergent washing pool two (18) liquid level once by many pipelines;
The tower top gas outlet that the tower top gas outlet of described normal waste gas spray Lin Tayi (2) and normal waste gas spray woods tower two (6), accident spray tower for waste gas one (3) and accident waste gas spray woods tower two (5) is connected the entrance of water sealed tank (4), and the gas outlet of water sealed tank (4) communicates with air.
2. a kind of polysilicon industry waste gas washing treating apparatus according to claim 1, is characterized in that: connect by lining fluorine pipeline between described normal waste gas spray system, accident waste gas spray system and each equipment of emergent water wash system.
3. a kind of polysilicon industry waste gas washing treating apparatus according to claim 1, is characterized in that: described normal waste gas spray Lin Tayi (2) and normal waste gas spray woods tower two (6) are glass-reinforced plastic material, and spray adopts two-stage sky cone spray.
4. a kind of polysilicon industry waste gas washing treating apparatus according to claim 1, is characterized in that: described accident waste gas spray Lin Tayi (3) and accident waste gas spray woods tower two (5) are glass-reinforced plastic material, spray employing three grades sky cone spray.
5. a kind of polysilicon industry waste gas washing treating apparatus according to claim 1, is characterized in that: described alkali lye pond one (9) and alkali lye pond two (14) are lining anti-corrosion brick in cement pit, and liquid is 10 ~ 30% sodium hydroxide solutions.
6. a kind of polysilicon industry waste gas washing treating apparatus according to claim 1, is characterized in that: described emergent washing pool one (17) and emergent washing pool two (18) are lining anti-corrosion brick in cement pit, and liquid is 15 ~ 45% sodium hydroxide solutions.
7. a polysilicon industry waste gas water washing treatment method, it is characterized in that, the method comprises the steps:
A chlorine-containing silane waste gas is delivered to off-gas buffer tank (1) by chlorine-containing silane waste gas supply line by (), then by waste gas supply line, waste gas is delivered to normal waste gas spray Lin Tayi (2), and waste gas runs from bottom to top in tower; 10 ~ 30% alkali lye are deposited in alkali lye pond one (9), alkali lye as spray liquid through Siphon pot one (8), to be delivered to normal waste gas spray Lin Tayi (2) tower top by normal waste gas Sprayer Circulation pump one (7), spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank (4) of the tower top of normal waste gas spray Lin Tayi (2);
By chlorine-containing silane waste gas supply line, chlorine-containing silane waste gas is delivered to off-gas buffer tank (1), then by waste gas supply line, waste gas is delivered to normal waste gas spray woods tower two (6), waste gas runs from bottom to top in tower; 10 ~ 30% alkali lye are deposited in alkali lye pond two (14), alkali lye as spray liquid through Siphon pot two (15), to be delivered to normal waste gas spray woods tower two (6) tower top by normal spray tower for waste gas circulating pump two (16), spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank (4) of the tower top of normal waste gas spray woods tower two (6);
When () present segment operation has an accident b, when exhausted air quantity has increased above suddenly the disposal ability of normal waste gas spray Lin Tayi (2) and normal waste gas spray woods tower two (6), waste gas can proceed to accident spray tower for waste gas one (3) and accident waste gas spray woods tower two (5), and now waste gas runs from bottom to top in accident spray tower for waste gas one (3) and accident waste gas spray woods tower two (5) tower;
A large amount of 10 ~ 30% alkali lye are deposited in alkali lye pond one (9), accident spray tower for waste gas one (3) tower top is delivered to by accident spray tower for waste gas circulating pump one (11) through Siphon pot three (10), spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank (4) of the top of tower of accident spray tower for waste gas one (3);
A large amount of 10 ~ 30% alkali lye are deposited in alkali lye pond two (14), deliver to accident waste gas through Siphon pot four (13) by accident spray tower for waste gas circulating pump two (12) and spray woods tower two (5) tower top, spray liquid contacts with exhaust contra-flow from top to bottom, and the gas after process enters air through the water sealed tank (4) of the top of tower of accident waste gas spray woods tower two (5);
C () present segment operation has an accident and causes exhausted air quantity can not be stabilized within scope of design, waste gas can turn emergent washing pool one (17) and emergent washing pool two (18) automatically, chlorosilane is hydrolyzed in pond, the hydrogen chloride that hydrolysis produces reacts with NaOH again further, decrease the amount entering air, avoid HCl gas too much to escape.
8. a kind of polysilicon industry waste gas water washing treatment method according to claim 1, it is characterized in that, described liquid is 10 ~ 30% sodium hydroxide solutions.
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| CN105013295B (en) * | 2015-08-05 | 2017-06-16 | 太仓中化环保化工有限公司 | A kind of emergent treatment system and emergency processing method of fluorine carbon alkane process units |
| CN106474878B (en) * | 2015-08-26 | 2024-03-26 | 中国石油化工股份有限公司 | Acrylonitrile tail gas centralized discharge system and acrylonitrile tail gas centralized discharge method |
| CN105413438A (en) * | 2015-12-31 | 2016-03-23 | 中冶南方工程技术有限公司 | Acid-system tail gas spraying clear-water-recycling and alkaline-water-draining washing tower and automatic control washing technology thereof |
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| JP2001329375A (en) * | 2000-05-19 | 2001-11-27 | Sony Corp | Exhaust gas treating system for surface treating equipment |
| CN102210964B (en) * | 2011-06-17 | 2013-11-06 | 杭州中昊科技有限公司 | Gas phase silicon dioxide tail gas treatment process and system |
| CN203494384U (en) * | 2013-09-24 | 2014-03-26 | 北京航天动力研究所 | Device for water washing of waste gas in polysilicon industry |
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