JPS6490091A - Neutralizing device for opener of semiconductor package - Google Patents

Neutralizing device for opener of semiconductor package

Info

Publication number
JPS6490091A
JPS6490091A JP62246550A JP24655087A JPS6490091A JP S6490091 A JPS6490091 A JP S6490091A JP 62246550 A JP62246550 A JP 62246550A JP 24655087 A JP24655087 A JP 24655087A JP S6490091 A JPS6490091 A JP S6490091A
Authority
JP
Japan
Prior art keywords
neutralizing
liquid
section
neutralization
waste
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62246550A
Other languages
Japanese (ja)
Inventor
Mitsuharu Wakasugi
Hikari Takahata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamato Scientific Co Ltd
Original Assignee
Yamato Scientific Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamato Scientific Co Ltd filed Critical Yamato Scientific Co Ltd
Priority to JP62246550A priority Critical patent/JPS6490091A/en
Publication of JPS6490091A publication Critical patent/JPS6490091A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enable smooth resumption of neutralization even when the neutralization is interrupted during operation by providing a means for determining quantitatively the amt. of neutralizing liquid, waste liquid and waste gas, etc., and a means for storing the memory of the discharging condition of said waste liquid, etc. CONSTITUTION:A neutralizing liquid storing section 1, a waste liquid neutralizing section 2, a waste gas neutralizing section 3 having at least two neutralizing tanks 16, 17, and a treating liquid storing section 4, are provided. Further, a measuring means 11, 18, 19 for measuring quantitatively neutralizing liquid to be sent to the neutralizing liquid neutralizing section 2 and the waste gas neutralizing section 3 from the neutralizing liquid storing section 1 are provided. Moreover, the amt. of the waste liquid and the waste gas to be sent to the neutralizing sections 2, 3 are determined quantitatively by measuring means 14, 22. Furthermore, the neutralizing liquid during neutralization is stirred by stirring means 8-10, 31, 32 in the neutralizing section 2, 3. Conditions of the liquid after neutralization in the stage of discharging to the storing section 4 are stored in discharging means 28-30. As the result, the safety and the efficiency in the stage of neutralization of liquid and gas discharged from an opening device of a semiconductor package are improved permitting also smooth resumption even in a stage of interruption of operation.
JP62246550A 1987-09-30 1987-09-30 Neutralizing device for opener of semiconductor package Pending JPS6490091A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62246550A JPS6490091A (en) 1987-09-30 1987-09-30 Neutralizing device for opener of semiconductor package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62246550A JPS6490091A (en) 1987-09-30 1987-09-30 Neutralizing device for opener of semiconductor package

Publications (1)

Publication Number Publication Date
JPS6490091A true JPS6490091A (en) 1989-04-05

Family

ID=17150082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62246550A Pending JPS6490091A (en) 1987-09-30 1987-09-30 Neutralizing device for opener of semiconductor package

Country Status (1)

Country Link
JP (1) JPS6490091A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103505996A (en) * 2013-09-24 2014-01-15 北京航天动力研究所 Waste gas washing treatment method and device in polycrystalline silicon industry

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49122472A (en) * 1973-03-28 1974-11-22
JPS5246541A (en) * 1975-10-13 1977-04-13 Shinryo Air Conditioning Co Ltd Solar collector
JPS60156533A (en) * 1983-12-23 1985-08-16 エアー　フレ−リツヒ　ア−ゲ−　フユア　エネルギ−リユツクゲヴイヌンク Method and device for separating noxious substance from fluegas
JPS61249524A (en) * 1985-04-30 1986-11-06 Shinagawa Fuaanesu Kk Deodorizing treatment apparatus for offensive odor gas

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49122472A (en) * 1973-03-28 1974-11-22
JPS5246541A (en) * 1975-10-13 1977-04-13 Shinryo Air Conditioning Co Ltd Solar collector
JPS60156533A (en) * 1983-12-23 1985-08-16 エアー　フレ−リツヒ　ア−ゲ−　フユア　エネルギ−リユツクゲヴイヌンク Method and device for separating noxious substance from fluegas
JPS61249524A (en) * 1985-04-30 1986-11-06 Shinagawa Fuaanesu Kk Deodorizing treatment apparatus for offensive odor gas

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103505996A (en) * 2013-09-24 2014-01-15 北京航天动力研究所 Waste gas washing treatment method and device in polycrystalline silicon industry

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