CN103505996A - Waste gas washing treatment method and device in polycrystalline silicon industry - Google Patents
Waste gas washing treatment method and device in polycrystalline silicon industry Download PDFInfo
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Abstract
The invention provides a chlorosilane-containing waste gas washing treatment method and device in a polycrystalline silicon production process. The device comprises a waste gas buffer tank, a chlorosilane-containing waste gas supply pipeline connected with an inlet of the waste gas buffer tank, and a normal waste gas spraying system, an accidental waste system spraying system and an emergency washing system which are connected with an outlet of the waste gas buffer tank. The chlorosilane-containing waste gas is fed into a spray tower and is washed by spraying 10-30 percent of sodium hydroxide. The gas generated after spraying is discharged into atmosphere through a water-sealed tank. According to the method, the problem that hydrogen chloride escapes is effectively solved, the problem that the pipeline is blocked by silicon dioxide generated in the traditional washing process is solved, and harmlessness of environmental protection is realized. According to the device, the chlorosilane waste gas can be effectively and harmlessly treated, escape of hydrogen chloride can be effectively reduced, and sodium silicate generated in the reaction is relatively convenient to remove.
Description
Technical field
The present invention relates to the chlorine-containing silane waste gas nuisanceless disposal water washing treatment method producing in a kind of polysilicon production process, and the washing treating apparatus of the chlorine-containing silane waste gas producing in a kind of polysilicon production process.
Background technology
In the waste gas that polysilicon industry production process produces, contain a large amount of chlorosilanes, in order to make waste gas can be effectively addressed and make the tail gas can qualified discharge, the traditional washing process of domestic main employing is processed at present, with industry water, flue gas is washed the chlorosilane in hydrolysis waste gas.Although industry water washing method has higher hydrolysis efficiency to chlorosilane, a large amount of hydrogen chloride and silica solid after hydrolyzing chlorosilane.Wherein partial oxidation hydrogen, when being dissolved in industry water, can be escaped to atmosphere, to environment from water; And the industrial wastewater forming after industry water absorbing hydrogen chloride is aobvious acid, and follow-up sewage disposal is caused to great difficulty, and the silica solid producing is difficult to remove from system especially.Along with the development of polysilicon industry, the generation of chlorine-containing silane waste gas, waste liquid also grows with each passing day, and the harmless treatment of chlorine-containing silane waste gas, waste liquid has more and more wide market prospects.
Summary of the invention
The present invention relates to the chlorine-containing silane waste gas water washing treatment method and the device that in a kind of polysilicon production process, produce, realize the absorption of hydrogen chloride gas in flue gas and finally remove to guarantee that flue gas can meet the requirement of national environmental standard.
Realize the technical scheme of the object of the invention: a kind of polysilicon industry waste gas washing treating apparatus, it comprises off-gas buffer tank, the chlorine-containing silane waste gas supply line being connected with the entrance of off-gas buffer tank, the normal waste gas spray system, accident waste gas spray system and the emergent water wash system that are connected with the outlet of off-gas buffer tank;
Described normal waste gas spray system comprises normal waste gas spray woods tower one and normal waste gas spray woods tower two, Siphon pot one and Siphon pot two, normal waste gas Sprayer Circulation pump one and normal spray tower for waste gas circulating pump two and alkali lye pond one and alkali lye pond two; Wherein, the outlet of off-gas buffer tank is connected with the entrance of normal waste gas spray woods tower one, the outlet of normal waste gas spray woods tower one is connected with the entrance in alkali lye pond one, the entrance of Siphon pot one is connected with the outlet in alkali lye pond one, the outlet of Siphon pot one is connected with the entrance of normal waste gas Sprayer Circulation pump one, and the outlet of normal waste gas Sprayer Circulation pump one is connected with the mouth spray of normal spray tower for waste gas one tower top; The outlet of off-gas buffer tank is connected with the entrance of normal waste gas spray woods tower two, the outlet of normal waste gas spray woods tower two is connected with the entrance in alkali lye pond two, the entrance of Siphon pot two is connected with the outlet in alkali lye pond two, the outlet of Siphon pot two is connected with the entrance of normal spray tower for waste gas circulating pump two, and the outlet of normal spray tower for waste gas circulating pump two is connected with the mouth spray of normal waste gas spray woods tower two tower tops;
Described accident waste gas spray system comprises accident spray tower for waste gas one and accident waste gas spray woods tower two, Siphon pot three and Siphon pot four, accident spray tower for waste gas circulating pump one and accident spray tower for waste gas circulating pump two; Wherein, the outlet of off-gas buffer tank is connected with the entrance of accident spray tower for waste gas one, the outlet of accident spray tower for waste gas one is connected with the entrance in alkali lye pond one, the entrance of Siphon pot three is connected with the outlet in alkali lye pond one, the outlet of Siphon pot three is connected with the entrance of accident waste gas Sprayer Circulation pump one, and the outlet of accident waste gas Sprayer Circulation pump one is connected with the mouth spray of accident spray tower for waste gas one tower top; The outlet of off-gas buffer tank is connected with the entrance of accident spray tower for waste gas two, the outlet of accident spray tower for waste gas two is connected with the entrance in alkali lye pond two, the entrance of Siphon pot four is connected with the outlet in alkali lye pond two, the outlet of Siphon pot four is connected with the entrance of accident spray tower for waste gas circulating pump two, and the outlet of accident spray tower for waste gas circulating pump two is connected with the mouth spray of accident waste gas spray woods tower two tower tops;
Described emergent water wash system comprises accident waste gas pipeline line and emergent washing pool one, the washing pool two of meeting an urgent need; Wherein, the outlet of off-gas buffer tank enters emergent washing pool one and emergent washing pool two liquid levels once by many pipelines;
Described normal waste gas spray woods tower one and tower top gas outlet, accident spray tower for waste gas one and the tower top gas outlet of accident waste gas spray woods tower two of normal waste gas spray woods tower two are connected the entrance of water sealed tank, and the gas outlet of water sealed tank communicates with atmosphere.
A kind of polysilicon industry waste gas washing treating apparatus as above, connects by lining fluorine pipeline between the normal waste gas spray system described in it, accident waste gas spray system and each equipment of emergent water wash system.
A kind of polysilicon industry waste gas washing treating apparatus as above, normal waste gas spray woods tower one and normal waste gas spray woods tower two described in it are glass-reinforced plastic material, spray adopts the empty cone spray of two-stage.
A kind of polysilicon industry waste gas washing treating apparatus as above, the accident waste gas spray woods tower one described in it and accident waste gas spray woods tower two are glass-reinforced plastic material, spray adopts three grades of empty cone sprays.
A kind of polysilicon industry waste gas washing treating apparatus as above, the alkali lye pond one described in it and alkali lye pond two are lining anti-corrosion brick in cement pit, liquid is 10～30% sodium hydroxide solutions.
A kind of polysilicon industry waste gas washing treating apparatus as above, the emergent washing pool one described in it and emergent washing pool two are lining anti-corrosion brick in cement pit, liquid is 15～45% sodium hydroxide solutions.
A kind of polysilicon industry waste gas water washing treatment method of the present invention, it comprises the steps:
(a) by chlorine-containing silane waste gas supply line, chlorine-containing silane waste gas is delivered to off-gas buffer tank, then by waste gas supply line, waste gas is delivered to normal waste gas spray Lin Tayi, waste gas moves from bottom to top in tower; In alkali lye pond one, deposit 10～30% alkali lye, alkali lye as spray liquid through Siphon pot one, deliver to normal waste gas spray woods tower one tower top by normal waste gas Sprayer Circulation pump one, spray liquid from top to bottom with waste gas counter current contacting, gas after processing enters atmosphere through the water sealed tank of the tower top of normal waste gas spray woods tower one;
By chlorine-containing silane waste gas supply line, chlorine-containing silane waste gas is delivered to off-gas buffer tank, then by waste gas supply line, waste gas is delivered to normal waste gas spray woods tower two, waste gas moves from bottom to top in tower; In alkali lye pond two, deposit 10～30% alkali lye, alkali lye as spray liquid through Siphon pot two, deliver to normal waste gas spray woods tower two tower tops by normal spray tower for waste gas circulating pump two, spray liquid from top to bottom with waste gas counter current contacting, gas after processing enters atmosphere through the water sealed tank of the tower top of normal waste gas spray woods tower two;
(b) when present segment operation has an accident, when exhausted air quantity increases to suddenly the disposal ability that has surpassed normal waste gas spray woods tower one and normal waste gas spray woods tower two, waste gas can proceed to accident spray tower for waste gas one and accident waste gas spray woods tower two, and now waste gas moves from bottom to top in accident spray tower for waste gas one and accident waste gas spray woods tower two towers; In alkali lye pond one, deposit a large amount of 10～30% alkali lye, through Siphon pot three, by accident spray tower for waste gas circulating pump one, deliver to accident spray tower for waste gas one tower top, spray liquid from top to bottom with waste gas counter current contacting, the gas after processing enters atmosphere through the water sealed tank of the top of tower of accident spray tower for waste gas one; In alkali lye pond two, deposit a large amount of 10～30% alkali lye, through Siphon pot four, by accident spray tower for waste gas circulating pump two, deliver to accident waste gas spray woods tower two tower tops, spray liquid from top to bottom with waste gas counter current contacting, the gas after processing enters atmosphere through the water sealed tank of the top of tower of accident waste gas spray woods tower two;
(c) present segment operation has an accident and causes within exhausted air quantity can not be stabilized in scope of design, waste gas can turn emergent washing pool one and emergent washing pool two automatically, chlorosilane is hydrolyzed in pond, the hydrogen chloride that hydrolysis produces further reacts with NaOH again, reduce the amount that enters atmosphere, avoided HCl gas too much to escape.
A kind of polysilicon industry waste gas water washing treatment method as above, the liquid described in it is 10～30% sodium hydroxide solutions.
Effect of the present invention is:
The present invention sends the waste gas of chlorine-containing silane into spray column, with 10～30% NaOH spray woods washings.The gas producing after spray enters atmosphere through water sealed tank.The method efficiently solves the problem that hydrogen chloride is escaped, and has solved the problem that traditional washing can produce silica blocking pipe, realizes the " innoxious of environment protection treating.Hydrolyzing chlorosilane is thorough, and percent hydrolysis reaches 99.9%; Hydrogen chloride is absorbed neutralization by sodium hydroxide solution, and absorptivity reaches 98%; In pipeline, liquid circulation flow is clear and coherent smooth, efficiently solves danger and harm that the chlorosilane that produces in production of polysilicon brings.
Apparatus of the present invention can be carried out harmless treatment to chlorosilane waste gas effectively, can effectively reduce again hydrogen chloride and escape, and the sodium metasilicate that reaction produces is also convenient to remove relatively.Along with the development of polysilicon, organosilicon industry, this new polysilicon waste gas washing process will be promoted widely.Designed normal spray woods tower, accident spray woods tower, water sealed tank and emergent pond, finally guaranteed that emission meets the emission request of GB16297-1996 standard.Whole system technological process is simple, practical, reasonable, reliable.
Accompanying drawing explanation
Fig. 1 is a kind of polysilicon industry waste gas water washing treatment method of the present invention and device schematic diagram.
In figure: 1. off-gas buffer tank; 2. normal waste gas sprays Lin Tayi; 3. accident waste gas sprays Lin Tayi; 4. water sealed tank; 5. accident waste gas spray woods tower two; 6. normal waste gas sprays woods tower two; 7. normal spray tower for waste gas circulating pump one; 8. Siphon pot one; 9. alkali lye pond one; 10. Siphon pot three; 11. accident spray tower for waste gas circulating pumps one; 12. accident spray tower for waste gas circulating pumps two; 13. Siphon pots four; 14. alkali lye ponds two; 15. Siphon pots two; 16. normal spray tower for waste gas circulating pumps two; 17. emergent washing pools one; 18. emergent washing pools two.
The specific embodiment
Below in conjunction with accompanying drawing, a kind of polysilicon industry waste gas water washing treatment method of the present invention and device are further described.
Embodiment 1
As shown in Figure 1, a kind of polysilicon industry waste gas water washing treatment method of the present invention and device, it comprises off-gas buffer tank 1, the chlorine-containing silane waste gas supply line being connected with the entrance of off-gas buffer tank 1, the normal waste gas spray system, accident waste gas spray system and the emergent water wash system that are connected with the outlet of off-gas buffer tank 1;
Described normal waste gas spray system comprises normal waste gas spray woods tower 1 and normal waste gas spray woods tower 26, Siphon pot 1 and Siphon pot 2 15, normal waste gas Sprayer Circulation pump 1 and normal spray tower for waste gas circulating pump 2 16, alkali lye pond 1 and alkali lye pond 2 14; Wherein, the outlet of off-gas buffer tank 1 is connected with the entrance of normal waste gas spray woods tower 1, the outlet of normal waste gas spray woods tower 1 is connected with the entrance in alkali lye pond 1, the entrance of Siphon pot 1 is connected with the outlet in alkali lye pond 1, the outlet of Siphon pot 1 is connected with the entrance of normal waste gas Sprayer Circulation pump 1, and the outlet of normal waste gas Sprayer Circulation pump 1 is connected with the mouth spray of normal spray tower for waste gas one 2 tower tops; The outlet of off-gas buffer tank 1 is connected with the entrance of normal waste gas spray woods tower 26, the outlet of normal waste gas spray woods tower 28 is connected with the entrance in alkali lye pond 2 14, the entrance of Siphon pot 2 15 is connected with the outlet in alkali lye pond 2 14, the outlet of Siphon pot 2 15 is connected with the entrance of normal spray tower for waste gas circulating pump 2 16, and the outlet of normal spray tower for waste gas circulating pump 2 16 is connected with the mouth spray of normal waste gas spray woods tower 26 tower tops;
Described accident waste gas spray system comprises accident spray tower for waste gas 1 and accident waste gas spray woods tower 25, Siphon pot 3 10 and Siphon pot 4 13, accident spray tower for waste gas circulating pump 1 and accident spray tower for waste gas circulating pump 2 12; Wherein, the outlet of off-gas buffer tank 1 is connected with the entrance of accident spray tower for waste gas 1, the outlet of accident spray tower for waste gas 1 is connected with the entrance in alkali lye pond 1, the entrance of Siphon pot 3 10 is connected with the outlet in alkali lye pond 1, the outlet of Siphon pot 3 10 is connected with the entrance of accident waste gas Sprayer Circulation pump 1, and the outlet of accident waste gas Sprayer Circulation pump 1 is connected with the mouth spray of accident spray tower for waste gas one 3 tower tops; The outlet of off-gas buffer tank 1 is connected with the entrance of accident spray tower for waste gas 25, the outlet of accident spray tower for waste gas 25 is connected with the entrance in alkali lye pond 2 14, the entrance of Siphon pot 4 13 is connected with the outlet in alkali lye pond 2 14, the outlet of Siphon pot 4 13 is connected with the entrance of accident spray tower for waste gas circulating pump 2 12, and the outlet of accident spray tower for waste gas circulating pump 2 12 is connected with the mouth spray of accident waste gas spray woods tower 25 tower tops;
Described emergent water wash system comprises accident waste gas pipeline line and emergent washing pool 1, the washing pool 2 18 of meeting an urgent need; Wherein, the outlet of off-gas buffer tank 1 enters emergent washing pool 1 and emergent washing pool 2 18 liquid levels once by many pipelines;
Described normal waste gas spray woods tower 1 and tower top gas outlet, accident spray tower for waste gas 1 and the tower top gas outlet of accident waste gas spray woods tower 25 of normal waste gas spray woods tower 26 are connected the entrance of water sealed tank 4, and the gas outlet of water sealed tank 4 communicates with atmosphere.
Between described normal waste gas spray system, accident waste gas spray system and each equipment of emergent water wash system, by lining fluorine pipeline, connect.
Described normal waste gas spray woods tower 1 and normal waste gas spray woods tower 26 are glass-reinforced plastic material, and spray adopts the empty cone spray of two-stage.
Described accident waste gas spray woods tower 1 and accident waste gas spray woods tower 25 are glass-reinforced plastic material, and spray adopts three grades of empty cone sprays.
Described alkali lye pond 1 and alkali lye pond 2 14 are lining anti-corrosion brick in cement pit, and liquid is 10～30% sodium hydroxide solutions.
Described emergent washing pool 1 and emergent washing pool 2 18 are lining anti-corrosion brick in cement pit, and liquid is 15～45% sodium hydroxide solutions.
Embodiment 2
An industry waste gas water washing treatment method, it comprises the steps:
(a) by chlorine-containing silane waste gas supply line, chlorine-containing silane waste gas is delivered to off-gas buffer tank 1, then by waste gas supply line, waste gas is delivered to normal waste gas spray woods tower 1, waste gas moves from bottom to top in tower; In alkali lye pond 1, deposit 10～30% alkali lye, alkali lye as spray liquid through Siphon pot 1, deliver to normal waste gas spray woods tower one 2 tower tops by normal waste gas Sprayer Circulation pump 1, spray liquid from top to bottom with waste gas counter current contacting, gas after processing enters atmosphere through the water sealed tank 4 of the tower top of normal waste gas spray woods tower 1;
By chlorine-containing silane waste gas supply line, chlorine-containing silane waste gas is delivered to off-gas buffer tank 1, then by waste gas supply line, waste gas is delivered to normal waste gas spray woods tower 26, waste gas moves from bottom to top in tower; In alkali lye pond 2 14, deposit 10～30% alkali lye, alkali lye as spray liquid through Siphon pot 2 15, deliver to normal waste gas spray woods tower 26 tower tops by normal spray tower for waste gas circulating pump 2 16, spray liquid from top to bottom with waste gas counter current contacting, gas after processing enters atmosphere through the water sealed tank 4 of the tower top of normal waste gas spray woods tower 26;
(b) when present segment operation has an accident, when exhausted air quantity increases to suddenly the disposal ability that has surpassed normal waste gas spray woods tower 1 and normal waste gas spray woods tower 26, waste gas can proceed to accident spray tower for waste gas 1 and accident waste gas spray woods tower 25, and now waste gas moves from bottom to top in accident spray tower for waste gas 1 and accident waste gas spray woods tower 25 towers;
In alkali lye pond 1, deposit a large amount of 10～30% alkali lye, through Siphon pot 3 10, by accident spray tower for waste gas circulating pump 1, deliver to accident spray tower for waste gas one 3 tower tops, spray liquid from top to bottom with waste gas counter current contacting, the gas after processing enters atmosphere through the water sealed tank 4 of the top of tower of accident spray tower for waste gas 1;
In alkali lye pond 2 14, deposit a large amount of 10～30% alkali lye, through Siphon pot 4 13, by accident spray tower for waste gas circulating pump 2 12, deliver to accident waste gas spray woods tower 25 tower tops, spray liquid from top to bottom with waste gas counter current contacting, the gas after processing enters atmosphere through the water sealed tank 4 of the top of tower of accident waste gas spray woods tower 25;
(c) present segment operation has an accident and causes within exhausted air quantity can not be stabilized in scope of design, waste gas can turn emergent washing pool 1 and emergent washing pool 2 18 automatically, chlorosilane is hydrolyzed in pond, the hydrogen chloride that hydrolysis produces further reacts with NaOH again, reduce the amount that enters atmosphere, avoided HCl gas too much to escape.
Aforesaid liquid is 10～30% sodium hydroxide solutions.
Claims (8)
1. a polysilicon industry waste gas is washed treating apparatus, it is characterized in that, this device comprises off-gas buffer tank (1), the chlorine-containing silane waste gas supply line being connected with the entrance of off-gas buffer tank (1), the normal waste gas spray system, accident waste gas spray system and the emergent water wash system that are connected with the outlet of off-gas buffer tank (1);
Described normal waste gas spray system comprises normal waste gas spray Lin Tayi (2) and normal waste gas spray woods tower two (6), Siphon pot one (8) and Siphon pot two (15), normal waste gas Sprayer Circulation pump one (7) and normal spray tower for waste gas circulating pump two (16) and alkali lye pond one (9) and alkali lye pond two (14); Wherein, the outlet of off-gas buffer tank (1) is connected with the entrance of normal waste gas spray Lin Tayi (2), the outlet of normal waste gas spray Lin Tayi (2) is connected with the entrance in alkali lye pond one (9), the entrance of Siphon pot one (8) is connected with the outlet in alkali lye pond one (9), the outlet of Siphon pot one (8) is connected with the entrance of normal waste gas Sprayer Circulation pump one (7), and the outlet of normal waste gas Sprayer Circulation pump one (7) is connected with the mouth spray of normal spray tower for waste gas one (2) tower top; The outlet of off-gas buffer tank (1) is connected with the entrance of normal waste gas spray woods tower two (6), the outlet of normal waste gas spray woods tower two (8) is connected with the entrance in alkali lye pond two (14), the entrance of Siphon pot two (15) is connected with the outlet in alkali lye pond two (14), the outlet of Siphon pot two (15) is connected with the entrance of normal spray tower for waste gas circulating pump two (16), and the outlet of normal spray tower for waste gas circulating pump two (16) is connected with the mouth spray of normal waste gas spray woods tower two (6) tower tops;
Described accident waste gas spray system comprises accident spray tower for waste gas one (3) and accident waste gas spray woods tower two (5), Siphon pot three (10) and Siphon pot four (13), accident spray tower for waste gas circulating pump one (11) and accident spray tower for waste gas circulating pump two (12); Wherein, the outlet of off-gas buffer tank (1) is connected with the entrance of accident spray tower for waste gas one (3), the outlet of accident spray tower for waste gas one (3) is connected with the entrance in alkali lye pond one (9), the entrance of Siphon pot three (10) is connected with the outlet in alkali lye pond one (9), Siphon pot three (10)) outlet is connected with the entrance of accident waste gas Sprayer Circulation pump one (11), and the outlet of accident waste gas Sprayer Circulation pump one (11) is connected with the mouth spray of accident spray tower for waste gas one (3) tower top; The outlet of off-gas buffer tank (1) is connected with the entrance of accident spray tower for waste gas two (5), the outlet of accident spray tower for waste gas two (5) is connected with the entrance in alkali lye pond two (14), the entrance of Siphon pot four (13) is connected with the outlet in alkali lye pond two (14), the outlet of Siphon pot four (13) is connected with the entrance of accident spray tower for waste gas circulating pump two (12), and the outlet of accident spray tower for waste gas circulating pump two (12) is connected with the mouth spray of accident waste gas spray woods tower two (5) tower tops;
Described emergent water wash system comprises accident waste gas pipeline line and emergent washing pool one (17), the washing pool two (18) of meeting an urgent need; Wherein, the outlet of off-gas buffer tank (1) enters emergent washing pool one (17) and emergent washing pool two (18) liquid levels once by many pipelines;
The tower top gas outlet of described normal waste gas spray Lin Tayi (2) and normal waste gas spray woods tower two (6), accident spray tower for waste gas one (3) and the tower top gas outlet of accident waste gas spray woods tower two (5) are connected the entrance of water sealed tank (4), and the gas outlet of water sealed tank (4) communicates with atmosphere.
2. a kind of polysilicon industry waste gas washing treating apparatus according to claim 1, is characterized in that: between described normal waste gas spray system, accident waste gas spray system and each equipment of emergent water wash system, by lining fluorine pipeline, connect.
3. a kind of polysilicon industry waste gas washing treating apparatus according to claim 1, is characterized in that: described normal waste gas spray Lin Tayi (2) and normal waste gas spray woods tower two (6) are glass-reinforced plastic material, and spray adopts the empty cone spray of two-stage.
4. a kind of polysilicon industry waste gas washing treating apparatus according to claim 1, is characterized in that: described accident waste gas spray Lin Tayi (3) and accident waste gas spray woods tower two (5) are glass-reinforced plastic material, and spray adopts three grades of empty cone sprays.
5. a kind of polysilicon industry waste gas washing treating apparatus according to claim 1, is characterized in that: described alkali lye pond one (9) and alkali lye pond two (14) are lining anti-corrosion brick in cement pit, and liquid is 10～30% sodium hydroxide solutions.
6. a kind of polysilicon industry waste gas washing treating apparatus according to claim 1, is characterized in that: described emergent washing pool one (17) and emergent washing pool two (18) are lining anti-corrosion brick in cement pit, and liquid is 15～45% sodium hydroxide solutions.
7. a polysilicon industry waste gas water washing treatment method, is characterized in that, the method comprises the steps:
(a) by chlorine-containing silane waste gas supply line, chlorine-containing silane waste gas is delivered to off-gas buffer tank (1), then by waste gas supply line, waste gas is delivered to normal waste gas spray Lin Tayi (2), waste gas moves from bottom to top in tower; In alkali lye pond one (9), deposit 10～30% alkali lye, alkali lye as spray liquid through Siphon pot one (8), deliver to normal waste gas spray Lin Tayi (2) tower top by normal waste gas Sprayer Circulation pump one (7), spray liquid from top to bottom with waste gas counter current contacting, gas after processing enters atmosphere through the water sealed tank (4) of the tower top of normal waste gas spray Lin Tayi (2);
By chlorine-containing silane waste gas supply line, chlorine-containing silane waste gas is delivered to off-gas buffer tank (1), then by waste gas supply line, waste gas is delivered to normal waste gas spray woods tower two (6), waste gas moves from bottom to top in tower; In alkali lye pond two (14), deposit 10～30% alkali lye, alkali lye as spray liquid through Siphon pot two (15), deliver to normal waste gas spray woods tower two (6) tower tops by normal spray tower for waste gas circulating pump two (16), spray liquid from top to bottom with waste gas counter current contacting, gas after processing enters atmosphere through the water sealed tank (4) of the tower top of normal waste gas spray woods tower two (6);
(b) when present segment operation has an accident, when exhausted air quantity increases to suddenly the disposal ability that has surpassed normal waste gas spray Lin Tayi (2) and normal waste gas spray woods tower two (6), waste gas can proceed to accident spray tower for waste gas one (3) and accident waste gas spray woods tower two (5), now waste gas operation in accident spray tower for waste gas one (3) and accident waste gas spray woods tower two (5) towers from bottom to top;
In alkali lye pond one (9), deposit a large amount of 10～30% alkali lye, through Siphon pot three (10), by accident spray tower for waste gas circulating pump one (11), deliver to accident spray tower for waste gas one (3) tower top, spray liquid from top to bottom with waste gas counter current contacting, the gas after processing enters atmosphere through the water sealed tank (4) of the top of tower of accident spray tower for waste gas one (3);
In alkali lye pond two (14), deposit a large amount of 10～30% alkali lye, through Siphon pot four (13), by accident spray tower for waste gas circulating pump two (12), deliver to accident waste gas spray woods tower two (5) tower tops, spray liquid from top to bottom with waste gas counter current contacting, the gas after processing enters atmosphere through the water sealed tank (4) of the top of tower of accident waste gas spray woods tower two (5);
(c) present segment operation has an accident and causes within exhausted air quantity can not be stabilized in scope of design, waste gas can turn emergent washing pool one (17) and emergent washing pool two (18) automatically, chlorosilane is hydrolyzed in pond, the hydrogen chloride that hydrolysis produces further reacts with NaOH again, reduce the amount that enters atmosphere, avoided HCl gas too much to escape.
8. a kind of polysilicon industry waste gas water washing treatment method according to claim 1, is characterized in that, described liquid is 10～30% sodium hydroxide solutions.
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| CN105013295B (en) * | 2015-08-05 | 2017-06-16 | 太仓中化环保化工有限公司 | A kind of emergent treatment system and emergency processing method of fluorine carbon alkane process units |
| CN106474878A (en) * | 2015-08-26 | 2017-03-08 | 中国石油化工股份有限公司 | Acrylonitrile off-gas concentrate exhaust system and acrylonitrile off-gas to concentrate discharge method |
| CN106474878B (en) * | 2015-08-26 | 2024-03-26 | 中国石油化工股份有限公司 | Acrylonitrile tail gas centralized discharge system and acrylonitrile tail gas centralized discharge method |
| CN105413438A (en) * | 2015-12-31 | 2016-03-23 | 中冶南方工程技术有限公司 | Acid-system tail gas spraying clear-water-recycling and alkaline-water-draining washing tower and automatic control washing technology thereof |
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|---|---|
| CN103505996B (en) | 2015-06-03 |
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Address after: 100076 Beijing, Fengtai District, South Road, No. 1, Patentee after: Beijing aviate energy saving and Environmental Protection Technology Co., Ltd. Address before: 100076 Beijing, Fengtai District, South Road, No. 1, Patentee before: Beijing wing wing Technology Co., Ltd. |