CN103502787A - 陶瓷压力测量单元及其制造方法 - Google Patents
陶瓷压力测量单元及其制造方法 Download PDFInfo
- Publication number
- CN103502787A CN103502787A CN201280013585.XA CN201280013585A CN103502787A CN 103502787 A CN103502787 A CN 103502787A CN 201280013585 A CN201280013585 A CN 201280013585A CN 103502787 A CN103502787 A CN 103502787A
- Authority
- CN
- China
- Prior art keywords
- brazing
- hard solder
- active hard
- platform
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
- B23K1/0016—Brazing of electronic components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/008—Soldering within a furnace
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
- B23K26/211—Bonding by welding with interposition of special material to facilitate connection of the parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/32—Bonding taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/302—Cu as the principal constituent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/32—Selection of soldering or welding materials proper with the principal constituent melting at more than 1550 degrees C
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
- C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C16/00—Alloys based on zirconium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
- C22C30/02—Alloys containing less than 50% by weight of each constituent containing copper
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
- B23K2103/166—Multilayered materials
- B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/52—Ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6565—Cooling rate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/658—Atmosphere during thermal treatment
- C04B2235/6581—Total pressure below 1 atmosphere, e.g. vacuum
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
- C04B2235/665—Local sintering, e.g. laser sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/122—Metallic interlayers based on refractory metals
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/124—Metallic interlayers based on copper
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
- C04B2237/127—The active component for bonding being a refractory metal
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/343—Alumina or aluminates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/59—Aspects relating to the structure of the interlayer
- C04B2237/592—Aspects relating to the structure of the interlayer whereby the interlayer is not continuous, e.g. not the whole surface of the smallest substrate is covered by the interlayer
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/60—Forming at the joining interface or in the joining layer specific reaction phases or zones, e.g. diffusion of reactive species from the interlayer to the substrate or from a substrate to the joining interface, carbide forming at the joining interface
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Optics & Photonics (AREA)
- Metallurgy (AREA)
- Structural Engineering (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Ceramic Products (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011005665.3 | 2011-03-16 | ||
DE102011005665A DE102011005665A1 (de) | 2011-03-16 | 2011-03-16 | Keramische Druckmesszelle und Verfahren zu ihrer Herstellung |
PCT/EP2012/052310 WO2012123199A1 (de) | 2011-03-16 | 2012-02-10 | Keramische druckmesszelle und verfahren zu ihrer herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103502787A true CN103502787A (zh) | 2014-01-08 |
CN103502787B CN103502787B (zh) | 2016-09-14 |
Family
ID=45567030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201280013585.XA Active CN103502787B (zh) | 2011-03-16 | 2012-02-10 | 陶瓷压力测量单元及其制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9816887B2 (zh) |
EP (1) | EP2686653B1 (zh) |
CN (1) | CN103502787B (zh) |
DE (1) | DE102011005665A1 (zh) |
WO (1) | WO2012123199A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105264351A (zh) * | 2013-05-17 | 2016-01-20 | 恩德莱斯和豪瑟尔两合公司 | 陶瓷压力测量单元及其制造方法 |
CN107743578A (zh) * | 2015-06-08 | 2018-02-27 | 恩德莱斯和豪瑟尔两合公司 | 具有活性钎焊的压力传感器 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012106236A1 (de) * | 2012-07-11 | 2014-01-16 | Endress + Hauser Gmbh + Co. Kg | Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle |
DE102012110152A1 (de) * | 2012-07-11 | 2014-05-15 | Endress + Hauser Gmbh + Co. Kg | Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle |
DE102012110618A1 (de) * | 2012-11-06 | 2014-05-22 | Endress + Hauser Gmbh + Co. Kg | Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle, und Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots |
DE102014115801A1 (de) | 2014-10-30 | 2016-05-04 | Endress + Hauser Gmbh + Co. Kg | Keramischer Drucksensor und Verfahren zu dessen Herstellung |
DE102014118430A1 (de) | 2014-12-11 | 2016-06-16 | Endress + Hauser Gmbh + Co. Kg | Aktivhartlotmaterial und Verfahren zur Aktivhartlötung von Bauteilen |
DE102015105057A1 (de) | 2015-04-01 | 2016-10-06 | Endress + Hauser Gmbh + Co. Kg | Kapazitiver Drucksensor |
DE102015108949A1 (de) * | 2015-06-08 | 2016-12-08 | Endress + Hauser Gmbh + Co. Kg | Aktivhartlot zum Aktivhartlöten von Keramik |
US9770790B2 (en) * | 2015-07-30 | 2017-09-26 | Ford Global Technologies, Llc | Metal sheet laser welding clamp |
DE102015121625A1 (de) | 2015-12-11 | 2017-06-14 | Endress+Hauser Gmbh+Co. Kg | Verfahren zur Herstellung einer Druckmesseinrichtung |
DE102016102775A1 (de) | 2016-02-17 | 2017-08-17 | Endress+Hauser Gmbh+Co. Kg | Kapazitiver Drucksensor |
CN107562269B (zh) * | 2017-08-28 | 2020-04-17 | 京东方科技集团股份有限公司 | 压力触控结构和显示装置 |
US11648620B2 (en) | 2017-11-29 | 2023-05-16 | Watlow Electric Manufacturing Company | Semiconductor processing equipment with high temperature resistant nickel alloy joints and methods for making same |
US20210095358A1 (en) * | 2019-10-01 | 2021-04-01 | General Electric Company | Actively brazed joint and method of processing |
DE102020123065A1 (de) | 2020-09-03 | 2022-03-03 | Endress+Hauser SE+Co. KG | Drucksensor und Verfahren zur Herstellung eines Drucksensors |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5407119A (en) * | 1992-12-10 | 1995-04-18 | American Research Corporation Of Virginia | Laser brazing for ceramic-to-metal joining |
CN1161265A (zh) * | 1996-03-12 | 1997-10-08 | 东芝株式会社 | 真空气密容器用焊封钎焊料,真空气密容器及其制造方法 |
US6267009B1 (en) * | 1998-12-14 | 2001-07-31 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same |
DE102010018377A1 (de) * | 2010-04-26 | 2011-04-28 | Labom Meß- und Regeltechnik GmbH | Funktionsbauteil wie Druckmittler mit einer Metallfolie aus Sonderwerkstoff, Verfahren zum Anschweißen einer Metallfolie aus Sonderwerkstoff sowie Laserstrahlschweißeinrichtung hierfür |
CN102159928A (zh) * | 2008-09-17 | 2011-08-17 | 匹艾器件有限公司 | 膜片结构和制造膜片结构的方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4129414A1 (de) | 1990-11-13 | 1993-03-11 | Endress Hauser Gmbh Co | Verwendung eines speziellen tiegels beim melt-spinning einer aktivlot-legierung |
US6363790B1 (en) * | 1998-10-23 | 2002-04-02 | Endress + Hauser Gmbh + Co. | Pressure sensor |
ATE203326T1 (de) * | 1998-12-14 | 2001-08-15 | Endress Hauser Gmbh Co | Kapazitive druck- oder differenzdruckmesszellen und verfahren zu deren herstellung |
DE102007047014B4 (de) | 2007-10-01 | 2019-05-02 | Robert Bosch Gmbh | Verfahren zur Herstellung einer gasdichten und hochtemperaturbeständigen Verbindung von Formteilen mittels Laser |
US7707891B2 (en) | 2008-06-27 | 2010-05-04 | Inficon Gmbh | Optical interferometric pressure sensor |
DE102008036381B3 (de) | 2008-08-05 | 2010-04-22 | Endress + Hauser Gmbh + Co. Kg | Membran aus Al2O3- Keramik für einen Drucksensor und Drucksensor mit einer solchen Messmembran |
DE102009027592A1 (de) * | 2009-07-09 | 2011-05-12 | Endress + Hauser Gmbh + Co. Kg | Drucksensor mit interferometrischem Wandler und Druckmessgerät mit einem solchen Drucksensor |
DE102009054909A1 (de) * | 2009-12-17 | 2011-06-22 | Endress + Hauser GmbH + Co. KG, 79689 | Keramisches Produkt und Verfahren zu dessen Herstellung |
DE102010063065A1 (de) * | 2010-12-14 | 2012-06-14 | Endress + Hauser Gmbh + Co. Kg | Drucksensor und Verfahren zu dessen Herstellung+ |
DE102011004722A1 (de) * | 2011-02-25 | 2012-08-30 | Endress + Hauser Gmbh + Co. Kg | Keramische Druckmesszelle |
JP5541306B2 (ja) * | 2011-05-27 | 2014-07-09 | 株式会社デンソー | 力学量センサ装置およびその製造方法 |
DE102012106236A1 (de) * | 2012-07-11 | 2014-01-16 | Endress + Hauser Gmbh + Co. Kg | Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle |
DE102012110152A1 (de) * | 2012-07-11 | 2014-05-15 | Endress + Hauser Gmbh + Co. Kg | Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle |
DE102012110618A1 (de) * | 2012-11-06 | 2014-05-22 | Endress + Hauser Gmbh + Co. Kg | Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle, und Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots |
JP5971267B2 (ja) * | 2013-02-26 | 2016-08-17 | 株式会社デンソー | 圧力センサおよびその製造方法 |
-
2011
- 2011-03-16 DE DE102011005665A patent/DE102011005665A1/de not_active Withdrawn
-
2012
- 2012-02-10 US US14/004,228 patent/US9816887B2/en active Active
- 2012-02-10 CN CN201280013585.XA patent/CN103502787B/zh active Active
- 2012-02-10 EP EP12702849.6A patent/EP2686653B1/de active Active
- 2012-02-10 WO PCT/EP2012/052310 patent/WO2012123199A1/de active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5407119A (en) * | 1992-12-10 | 1995-04-18 | American Research Corporation Of Virginia | Laser brazing for ceramic-to-metal joining |
CN1161265A (zh) * | 1996-03-12 | 1997-10-08 | 东芝株式会社 | 真空气密容器用焊封钎焊料,真空气密容器及其制造方法 |
US6267009B1 (en) * | 1998-12-14 | 2001-07-31 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same |
CN102159928A (zh) * | 2008-09-17 | 2011-08-17 | 匹艾器件有限公司 | 膜片结构和制造膜片结构的方法 |
DE102010018377A1 (de) * | 2010-04-26 | 2011-04-28 | Labom Meß- und Regeltechnik GmbH | Funktionsbauteil wie Druckmittler mit einer Metallfolie aus Sonderwerkstoff, Verfahren zum Anschweißen einer Metallfolie aus Sonderwerkstoff sowie Laserstrahlschweißeinrichtung hierfür |
Non-Patent Citations (2)
Title |
---|
无: "最新激光技术应用", 《中国科技信息》 * |
雷鸣等: "Al2O3F/ADC12复合材料储能焊接头组织形成规律", 《焊接学报》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105264351A (zh) * | 2013-05-17 | 2016-01-20 | 恩德莱斯和豪瑟尔两合公司 | 陶瓷压力测量单元及其制造方法 |
US10330549B2 (en) | 2013-05-17 | 2019-06-25 | Endress+Hauser Se+Co.Kg | Ceramic pressure measurement cell and method for production thereof |
CN107743578A (zh) * | 2015-06-08 | 2018-02-27 | 恩德莱斯和豪瑟尔两合公司 | 具有活性钎焊的压力传感器 |
US10908044B2 (en) | 2015-06-08 | 2021-02-02 | Endress+Hauser Se+Co.Kg | Pressure sensor having a joint of active braze |
Also Published As
Publication number | Publication date |
---|---|
EP2686653B1 (de) | 2015-04-08 |
US9816887B2 (en) | 2017-11-14 |
EP2686653A1 (de) | 2014-01-22 |
US20160370241A1 (en) | 2016-12-22 |
DE102011005665A1 (de) | 2012-09-20 |
WO2012123199A1 (de) | 2012-09-20 |
CN103502787B (zh) | 2016-09-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103502787A (zh) | 陶瓷压力测量单元及其制造方法 | |
Sumiya et al. | HPHT synthesis and crystalline quality of large high-quality (001) and (111) diamond crystals | |
Yao et al. | Single-shot real-time ultrafast imaging of femtosecond laser fabrication | |
Zhang et al. | Melting curve of vanadium up to 256 GPa: Consistency between experiments and theory | |
CA2677063A1 (en) | Optical element, titanium-containing oxide glass used for the optical element, and light emitting method and light amplifying method using the titanium-containing oxide glass | |
CN104570199A (zh) | 一种硒碲单晶复合光纤及其制备方法 | |
Shimada et al. | Laser patterning of oriented LiNbO3 crystal particle arrays in NiO‐doped lithium niobium silicate glasses | |
CN105798466A (zh) | 陶瓷闪烁体阵列的加工方法 | |
Paleari et al. | A new target design for laser shock-compression studies of carbon reflectivity in the megabar regime | |
US9758901B2 (en) | Vitreous silica crucible for pulling of silicon single crystal and method for manufacturing the same | |
KR20200005664A (ko) | 펄스 다색 레이저 빔 및 필터를 사용하여 소정의 가공 라인을 따라 공작물을 가공하기 위한 장치 및 방법 | |
US10221088B2 (en) | Ribbon optical fiber made of photosensitive glass | |
Kuriakose et al. | Fabrication of conductive micro electrodes in diamond bulk using pulsed Bessel beams | |
Fukata et al. | In situ spectroscopic measurement of transmitted light related to defect formation in SiO 2 during femtosecond laser irradiation | |
EP0092405B1 (en) | Method for producing crystals | |
CN1321337C (zh) | 在玻璃内部形成分相区域的方法 | |
JP6591034B2 (ja) | 不透明溶融石英ガラスを透明溶融石英ガラスに接合するためのプロセス | |
Tang et al. | Microstructure, guiding performance and micro-spectroscopy characterization of Ce: LuAG crystal induced by direct femtosecond laser writing | |
CN103645200B (zh) | μ-XAFS技术原位测量熔融法晶体生长微观结构的方法和微型晶体生长炉 | |
KR20110016843A (ko) | 단결정 모니터링 시스템을 구비한 단결정 제조장치 | |
Nguyen et al. | Iron sound velocities in shock wave experiments | |
CN106158576B (zh) | 一种利用玻璃掺杂钆靶获得高光谱纯度极紫外光源的方法 | |
He et al. | Femtosecond laser plane-by-plane inscription of Bragg gratings in sapphire fiber | |
JPS6045926B2 (ja) | 赤外線透過材料の製造方法 | |
Fu et al. | Complicated morphologies and instructive mechanism of laser-induced bulk damage in transparent materials |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Drewes Ulfert Inventor after: Rosberg Andreas Inventor after: Schmidt Elke Inventor after: Berlinger Andrea Inventor after: Thomas Egon Uehling Inventor before: Drewes Ulfert Inventor before: Rosberg Andreas Inventor before: Schmidt Elke Inventor before: Berlinger Andrea Inventor before: La Erfuyoulin |
|
COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: DREWES ULFERT ROSBERG ANDREAS SCHMIDT ELKE BERLINGER ANDREA UEHLIN RALF TO: DREWES ULFERT ROSBERG ANDREAS SCHMIDT ELKE BERLINGER ANDREA UEHLIN EGON THOMAS |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |