CN103493181B - 原料的汽化供给装置 - Google Patents

原料的汽化供给装置 Download PDF

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Publication number
CN103493181B
CN103493181B CN201280020255.3A CN201280020255A CN103493181B CN 103493181 B CN103493181 B CN 103493181B CN 201280020255 A CN201280020255 A CN 201280020255A CN 103493181 B CN103493181 B CN 103493181B
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CN
China
Prior art keywords
pressure
raw material
storage tank
flow rate
source storage
Prior art date
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Expired - Fee Related
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CN201280020255.3A
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English (en)
Chinese (zh)
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CN103493181A (zh
Inventor
日高敦志
平田薰
永濑正明
土肥亮介
西野功二
池田信一
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Fujikin Inc
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Fujikin Inc
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Publication of CN103493181A publication Critical patent/CN103493181A/zh
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Expired - Fee Related legal-status Critical Current
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45512—Premixing before introduction in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45557—Pulsed pressure or control pressure
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • H01L21/205—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
CN201280020255.3A 2011-04-28 2012-02-20 原料的汽化供给装置 Expired - Fee Related CN103493181B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011-100446 2011-04-28
JP2011100446A JP5703114B2 (ja) 2011-04-28 2011-04-28 原料の気化供給装置
PCT/JP2012/001117 WO2012147251A1 (ja) 2011-04-28 2012-02-20 原料の気化供給装置

Publications (2)

Publication Number Publication Date
CN103493181A CN103493181A (zh) 2014-01-01
CN103493181B true CN103493181B (zh) 2016-03-09

Family

ID=47071787

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280020255.3A Expired - Fee Related CN103493181B (zh) 2011-04-28 2012-02-20 原料的汽化供给装置

Country Status (6)

Country Link
US (1) US20140124064A1 (enExample)
JP (1) JP5703114B2 (enExample)
KR (1) KR101483472B1 (enExample)
CN (1) CN103493181B (enExample)
TW (1) TWI445058B (enExample)
WO (1) WO2012147251A1 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102534567B (zh) * 2012-03-21 2014-01-15 中微半导体设备(上海)有限公司 控制化学气相沉积腔室内的基底加热的装置及方法
DE102012210332A1 (de) * 2012-06-19 2013-12-19 Osram Opto Semiconductors Gmbh Ald-beschichtungsanlage
JP5837869B2 (ja) * 2012-12-06 2015-12-24 株式会社フジキン 原料気化供給装置
JP2015190035A (ja) * 2014-03-28 2015-11-02 東京エレクトロン株式会社 ガス供給機構およびガス供給方法、ならびにそれを用いた成膜装置および成膜方法
US9951423B2 (en) * 2014-10-07 2018-04-24 Lam Research Corporation Systems and methods for measuring entrained vapor
EP3162914A1 (en) * 2015-11-02 2017-05-03 IMEC vzw Apparatus and method for delivering a gaseous precursor to a reaction chamber
JP6565645B2 (ja) 2015-12-02 2019-08-28 東京エレクトロン株式会社 原料ガス供給装置、原料ガス供給方法及び記憶媒体
KR102483924B1 (ko) 2016-02-18 2023-01-02 삼성전자주식회사 기화기 및 이를 구비하는 박막 증착 장치
IT201700014505A1 (it) * 2017-02-09 2018-08-09 Eurotecnica Melamine Luxemburg Zweigniederlassung In Ittigen Apparato di cristallizzazione di melammina e impianto di melammina impiegante lo stesso
US10947621B2 (en) * 2017-10-23 2021-03-16 Applied Materials, Inc. Low vapor pressure chemical delivery
JP7027151B2 (ja) * 2017-12-13 2022-03-01 株式会社堀場エステック 濃度制御装置、ガス制御システム、成膜装置、濃度制御方法、及び濃度制御装置用プログラム
CN110957235B (zh) * 2018-09-26 2023-03-21 北京北方华创微电子装备有限公司 工艺气体流量补偿的装置及方法、半导体处理设备
US11519070B2 (en) * 2019-02-13 2022-12-06 Horiba Stec, Co., Ltd. Vaporization device, film formation device, program for a concentration control mechanism, and concentration control method
US11661653B2 (en) 2019-12-18 2023-05-30 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Vapor delivery systems for solid and liquid materials
JP7572168B2 (ja) * 2020-05-29 2024-10-23 大陽日酸株式会社 混合ガス供給装置、金属窒化膜の製造装置、及び金属窒化膜の製造方法
JP7158443B2 (ja) * 2020-09-17 2022-10-21 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法、プログラム、および、基板処理方法
CN114927433B (zh) * 2022-05-16 2024-11-26 北京北方华创微电子装备有限公司 半导体工艺设备及其控制方法
CN114911282B (zh) * 2022-05-31 2024-11-26 北京北方华创微电子装备有限公司 源瓶的温度控制系统及方法
FI131053B1 (en) * 2022-06-03 2024-08-20 Canatu Oy Reagent cartridge and reactor apparatus
CN115182041A (zh) * 2022-06-14 2022-10-14 东莞市天域半导体科技有限公司 管路供应系统
CN117089818A (zh) * 2023-07-11 2023-11-21 中国科学院半导体研究所 金属有机物mo源输运系统和方法
CN119020757B (zh) * 2024-10-24 2025-01-10 内蒙古工业大学 固态源等离子体增强化学气相沉积设备及方法
KR102881618B1 (ko) * 2024-11-26 2025-11-13 (주)쏠라딘 압력 조절 시스템 및 이를 이용한 압력 조절 방법
CN120232575A (zh) * 2025-05-29 2025-07-01 西安二衍机电科技有限公司 一种单晶炉真空管道压力测量方法及装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010013363A1 (en) * 1999-04-22 2001-08-16 Hirofumi Kitayama Apparatus and method for feeding gases for use in semiconductor manufacturing
JP2001313288A (ja) * 2000-04-28 2001-11-09 Ebara Corp 原料ガス供給装置
CN101479402A (zh) * 2006-06-27 2009-07-08 株式会社富士金 原料的气化供给装置以及用于其的自动压力调节装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2893148B2 (ja) * 1991-10-08 1999-05-17 東京エレクトロン株式会社 処理装置
US6443435B1 (en) * 2000-10-23 2002-09-03 Applied Materials, Inc. Vaporization of precursors at point of use
JP2003013233A (ja) * 2001-07-04 2003-01-15 Horiba Ltd 液体原料気化供給装置
US6701066B2 (en) * 2001-10-11 2004-03-02 Micron Technology, Inc. Delivery of solid chemical precursors
JP4082901B2 (ja) * 2001-12-28 2008-04-30 忠弘 大見 圧力センサ、圧力制御装置及び圧力式流量制御装置の温度ドリフト補正装置
JP2010153741A (ja) * 2008-12-26 2010-07-08 Hitachi Kokusai Electric Inc 半導体装置の製造方法及び基板処理装置
US20100266765A1 (en) * 2009-04-21 2010-10-21 White Carl L Method and apparatus for growing a thin film onto a substrate
JP5562712B2 (ja) * 2010-04-30 2014-07-30 東京エレクトロン株式会社 半導体製造装置用のガス供給装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010013363A1 (en) * 1999-04-22 2001-08-16 Hirofumi Kitayama Apparatus and method for feeding gases for use in semiconductor manufacturing
JP2001313288A (ja) * 2000-04-28 2001-11-09 Ebara Corp 原料ガス供給装置
CN101479402A (zh) * 2006-06-27 2009-07-08 株式会社富士金 原料的气化供给装置以及用于其的自动压力调节装置

Also Published As

Publication number Publication date
KR101483472B1 (ko) 2015-01-16
TW201303970A (zh) 2013-01-16
JP2012234860A (ja) 2012-11-29
CN103493181A (zh) 2014-01-01
TWI445058B (zh) 2014-07-11
JP5703114B2 (ja) 2015-04-15
WO2012147251A1 (ja) 2012-11-01
US20140124064A1 (en) 2014-05-08
KR20130130061A (ko) 2013-11-29

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