CN103472304B - 一种弹性探针阵列多通道电阻测量方法和装置 - Google Patents
一种弹性探针阵列多通道电阻测量方法和装置 Download PDFInfo
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CN105445557A (zh) * | 2015-01-04 | 2016-03-30 | 宁波英飞迈材料科技有限公司 | 一种高通量电阻率测试装置 |
CN105334392B (zh) * | 2015-12-01 | 2023-04-07 | 深圳市思榕科技有限公司 | 一种柔性导电材料平面阻抗测试设备 |
CN105954591A (zh) * | 2016-04-29 | 2016-09-21 | 宁波国际材料基因工程研究院有限公司 | 一种软磁薄膜材料表面电阻高通量测试方法 |
CN110068712A (zh) * | 2019-04-28 | 2019-07-30 | 昆明理工大学 | 一种卡扣式四探针测试装置 |
CN114895106B (zh) * | 2022-03-28 | 2023-04-07 | 电子科技大学 | 基于近场扫描微波显微镜的电阻率测量方法 |
CN115616290B (zh) * | 2022-12-20 | 2023-03-21 | 法特迪精密科技(苏州)有限公司 | 一种开尔文方式多路弹簧针电阻测试装置及方法 |
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JP3327534B2 (ja) * | 1999-11-24 | 2002-09-24 | 日本特殊陶業株式会社 | 基板検査装置、基板製造方法及びバンプ付き基板 |
WO2004086062A1 (ja) * | 2003-03-26 | 2004-10-07 | Jsr Corporation | 電気抵抗測定用コネクター、電気抵抗測定用コネクター装置およびその製造方法並びに回路基板の電気抵抗測定装置および測定方法 |
CN200972480Y (zh) * | 2006-11-30 | 2007-11-07 | 唐中卫 | 集成电路芯片测试座 |
CN201464507U (zh) * | 2009-07-31 | 2010-05-12 | 中芯国际集成电路制造(上海)有限公司 | 探针卡及金属探针 |
JP5499383B2 (ja) * | 2010-03-30 | 2014-05-21 | 株式会社国際電気セミコンダクターサービス | 半導体ウェーハ抵抗率測定装置 |
CN103424623B (zh) * | 2012-05-24 | 2016-06-01 | 宸鸿科技(厦门)有限公司 | 电阻率量测装置 |
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