CN103457141A - Compensating device of thermal distortion of high-power laser mirror - Google Patents
Compensating device of thermal distortion of high-power laser mirror Download PDFInfo
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- CN103457141A CN103457141A CN2013104246152A CN201310424615A CN103457141A CN 103457141 A CN103457141 A CN 103457141A CN 2013104246152 A CN2013104246152 A CN 2013104246152A CN 201310424615 A CN201310424615 A CN 201310424615A CN 103457141 A CN103457141 A CN 103457141A
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Abstract
A compensating device of thermal distortion of a high-power laser mirror comprises a shell. A stepped through hole is formed inside the shell, a light passing hole is formed in the left end of the shell, and a backlight hole is formed in the right end of the shell. An annular semiconductor chilling plate, an annular red copper plate, an annular silver foil plate, the mirror and a pressing ring are sequentially mounted in the stepped through hole from right to left. A U-shaped water channel is formed in the inner wall of the shell, close to the side of the backlight hole. A groove is formed in the thickness direction of the outer circle of the annular red copper plate, a thermoelectric couple is mounted in the groove, and a signal control line of a constant temperature control device is communicated with the annular semiconductor chilling plate and a signal line of the thermoelectric couple respectively. The compensating device of the thermal distortion of the high-power laser mirror is simple in structure, high in universality, suitable for thermal distortion compensation of mirrors with various laser energy and light spot sizes, capable of conducting real-time regulation, capable of removing multiple overlapping of the thermal distortion of large-scale high-power long-distance transmission mirrors, and good in compensating effect.
Description
Technical field
The invention belongs to a kind of compensation arrangement, be specifically related to the compensation arrangement of a kind of high power laser light speculum heat distortion.
Background technology
When high power laser light acts on the laser mirror surface, in the laser mirror matrix and film surface cause reflector laser irradiation area and the non-homogeneous temperature rise of fringe region because of the absorbing laser energy, the formation temperature gradient, it is the distortion of speculum heat that minute surface produces thermal deformation, and then wavefront distorted when laser is transmitted by speculum.And, in large-scale light laser long haul transmission system, the laser mirror of using as leaded light is used in a large number in optical train, these speculums need to bear tens of KW/cm
2power density.Experiment shows, high like this power density can cause the heat distortion of single speculum light area central protuberance; Further in optical train, dozens of even under the superposition of hundreds of speculums heat distortion, can cause the Beam Wave-Front quality of high power laser light transmission system significantly to descend, and serious meeting causes laser system to work.
In addition, in actual transmission laser system, often need laser power is regulated to adapt to the needs of multiple application.The method of existing compensation thermal effect is difficult in regulating the scope that laser power is larger, makes the laser of transmission keep good beam quality.
In order to reduce and eliminate the phenomenon of high power laser light speculum heat distortion, mainly contain at present following several way;
(1) optimization of material aspect
Speculum is selected the material of ultra low heat expansion, and the reasonable material that present stage adopts is monocrystalline silicon, carborundum.But these materials still can't make beam quality maintain 5 times below diffraction limit.
(2) optimization of configuration aspects
By the mirror body structure being optimized and improving to reduce the thermal deformation in laser irradiation zone.As Chinese patent " hot distortion self-compensation high-energy laser reflecting mirror " (Granted publication number: CN201994558U) disclose at the back side of heat distortion self compensation speculum and be provided with a plurality of apertures around spot area, the maximum heat distortion of elimination mirror surface spot area is poor with minimum thermal change, can be in the transient heat distortion that reduces laser mirror, realize easily the purpose of spot area laser corrugated without the heat distortion, and be provided with certain distance between two adjacent apertures, can reduce the impact of aperture on light area matrix geometric stiffness.
But this mode also exists certain limitation, at first, when the incident laser spot size hour, open many apertures on the mirror body, the mirror body is difficult for processing, mirror structure stability reduces, if on the mirror body, aperture is less, compensation effect is not obvious.Secondly, in the mirror body, the size and number of aperture need be carried out specific design according to given laser parameter and index thereof, and versatility is low.Again, this collocation structure is based on the self structure thermal behavior, can effectively reduce the distortion of minute surface subtransient state heat, be particularly useful for the higher situation of laser bright dipping starting stage beam quality requirement, but in light laser long time running system, the heat accumulation of mirror mirror is difficult to eliminate, and the heat distortion of speculum eyeglass still exists.Finally, the compensation that the heat distortion that this speculum can only produce the laser of specified performance is fixed, when the energy of laser or spot size change in actual applications, can't carry out real-Time Compensation.
(3) speculum Water Cooling Technology
This is at present advanced technology, but system complex involves great expense, and exists some process technologies not yet to solve simultaneously, and immature.
To sum up, at present also to be faced with compensation effect poor for this phenomenon of high power laser light speculum heat distortion, and versatility is low, regulates in real time difficulty large, and the long Distance Transmission speculum heat of large-scale high power distortion stack such as can't eliminate at the series of problems.
Summary of the invention
The present invention proposes for solving the technical problem existed in prior art, its objective is the compensation arrangement that the distortion of high, that can regulate in real time, that compensation effect the is high high power laser light speculum heat of a kind of versatility is provided.
Technical scheme of the present invention is: the compensation arrangement of a kind of high power laser light speculum heat distortion, comprise housing, and be formed with ladder hole in enclosure interior, left end forms light hole, right-hand member forms hole backlight.Annular semiconductor cooling piece, annular copper sheet, annular silver foil sheet, speculum and trim ring are installed successively from right to left in ladder hole, be formed with the U-shaped water channel in the inner walls near hole backlight one side, be formed with groove on the cylindrical thickness direction of annular copper sheet, thermocouple is installed in groove, and the signal control line of thermostatically-controlled equipment is communicated with the holding wire of annular semiconductor cooling piece and thermocouple respectively.
The aperture of described light hole is definite by the straight warp of speculum, and the aperture in hole backlight is straight through determining by the Ear Mucosa Treated by He Ne Laser Irradiation hot spot.
Described annular semiconductor cooling piece, annular copper sheet and annular silver foil sheet internal-and external diameter are equal, and the aperture in its internal diameter and hole backlight equates.
Heating of described annular semiconductor cooling piece held near annular copper sheet, and polishing one side of speculum is near annular silver foil sheet, and trim ring compresses the opposite side that speculum is coated with reflectance coating by being threaded with housing.
The present invention is simple in structure, versatility is high, be suitable for the speculum thermal distortion compensation of various laser energies and spot size, and can regulate in real time, can eliminate the Multiple Superposition of the long Distance Transmission speculum heat of large-scale high power distortion, and compensation effect is good.
The accompanying drawing explanation
Fig. 1 is profile of the present invention;
Fig. 2 is along the profile of A-A line in Fig. 1.
Wherein:
1 housing 2 annular semiconductor cooling pieces
The annular silver foil sheet of 3 annular copper sheet 4
5 speculum 6 trim rings
7 U-shaped water channel 8 light holes
9 hole backlight 10 grooves
11 thermocouple 12 thermostatically-controlled equipments.
Embodiment
Below, compensation arrangement with reference to drawings and Examples to high power laser light speculum heat of the present invention distortion is elaborated: as shown in Fig. 1～2, the compensation arrangement of high power laser light speculum heat distortion, comprise housing 1, housing 1 profile is cuboid, the Thickness Ratio length and width is little, inside has ladder hole, left end forms light hole 8, right-hand member forms hole 9 backlight, and annular semiconductor cooling piece 2, annular copper sheet 3, annular silver foil sheet 4, speculum 5 and trim ring 6 are installed successively from right to left in ladder hole.Be formed with U-shaped water channel 7 in the inner walls near hole backlight 8 one sides.
The aperture of light hole 8 is definite by the straight warp of speculum 5, and the aperture in hole 9 backlight is straight through determining by the Ear Mucosa Treated by He Ne Laser Irradiation hot spot.
Annular semiconductor cooling piece 2, annular copper sheet 3 and annular silver foil sheet 4 internal-and external diameters are equal, and the aperture in its internal diameter and hole backlight 8 equates.
Heating of annular semiconductor cooling piece 2 held near annular copper sheet 3, and polishing one side of speculum 5 is near annular silver foil sheet 4, and trim ring 6 compresses the opposite side that speculum 5 is coated with reflectance coating by being threaded with housing 1.
The holding wire of annular semiconductor cooling piece 2 is communicated with thermostatically-controlled equipment 12 through the wire guide on housing 1.
Be formed with groove 10 on the cylindrical thickness direction of annular copper sheet 3, thermocouple 11 is installed in groove 10, the holding wire of thermocouple 11 is communicated with thermostatically-controlled equipment 12.
The course of work of the present invention: during work, the speculum under irradiating for different laser powers, measure the peak-to-valley value of speculum 5 heat distortion; The temperature of according to the surperficial peak-to-valley value of speculum heat distortion of measuring, regulating annular semiconductor chilling plate 2, make the temperature of speculum 5 non-light areas that corresponding the variation occur, speculum 5 produces the concave or convex distortion, reduce the temperature gradient of mirror volumetric laser irradiation area and non-irradiation area, thereby obviously reduce the peak-to-valley value of the non-light area of speculum and light area surface deformation.
The present invention is simple in structure, versatility is high, be suitable for the speculum thermal distortion compensation of various laser energies and spot size, and can regulate in real time, can eliminate the Multiple Superposition of the long Distance Transmission speculum heat of large-scale high power distortion, and compensation effect is good.
Claims (4)
1. the compensation arrangement of high power laser light speculum heat distortion, comprise housing (1), be formed with ladder hole in housing (1) inside, left end forms light hole (8), right-hand member forms hole backlight (9), it is characterized in that: annular semiconductor cooling piece (2) is installed successively from right to left in ladder hole, annular copper sheet (3), annular silver foil sheet (4), speculum (5) and trim ring (6), be formed with U-shaped water channel (7) in the inner walls near hole backlight (8) one sides, be formed with groove (10) on the cylindrical thickness direction of annular copper sheet (3), thermocouple (11) is installed in groove (10), the signal control line of thermostatically-controlled equipment (12) is communicated with the holding wire of annular semiconductor cooling piece (2) and thermocouple (11) respectively.
2. the compensation arrangement that a kind of high power laser light speculum heat according to claim 1 distorts, it is characterized in that: the aperture of described light hole (8) is definite by the straight warp of speculum (5), and the aperture of hole backlight (9) is straight through determining by the Ear Mucosa Treated by He Ne Laser Irradiation hot spot.
3. the compensation arrangement that a kind of high power laser light speculum heat according to claim 1 distorts, it is characterized in that: described annular semiconductor cooling piece (2), annular copper sheet (3) and annular silver foil sheet (4) internal-and external diameter are equal, and the aperture of its internal diameter and hole backlight (8) equates.
4. the compensation arrangement that a kind of high power laser light speculum heat according to claim 1 distorts, it is characterized in that: heating of described annular semiconductor cooling piece (2) held near annular copper sheet (3), polishing one side of speculum (5) is near annular silver foil sheet (4), and trim ring (6) compresses the opposite side that speculum (5) is coated with reflectance coating by being threaded with housing 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104246152A CN103457141A (en) | 2013-09-18 | 2013-09-18 | Compensating device of thermal distortion of high-power laser mirror |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104246152A CN103457141A (en) | 2013-09-18 | 2013-09-18 | Compensating device of thermal distortion of high-power laser mirror |
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| CN103457141A true CN103457141A (en) | 2013-12-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2013104246152A Pending CN103457141A (en) | 2013-09-18 | 2013-09-18 | Compensating device of thermal distortion of high-power laser mirror |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105207044A (en) * | 2015-10-12 | 2015-12-30 | 哈尔滨工业大学 | Crystal clamping frame with crystal temperature control function |
| CN107255854A (en) * | 2017-08-15 | 2017-10-17 | 温州大学 | The reflecting optics cooling device of laser blast wave transmission |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050002434A1 (en) * | 2002-01-16 | 2005-01-06 | Rofin-Sinar Laser Gmbh | Cooled mirror for a laser beam |
| CN200979963Y (en) * | 2006-12-08 | 2007-11-21 | 华中科技大学 | A composite micro deformable mirror with thermal compensation controllable wave phase contrast |
| CN203503965U (en) * | 2013-09-18 | 2014-03-26 | 核工业理化工程研究院 | Compensation device for high-power laser mirror thermal distortion |
-
2013
- 2013-09-18 CN CN2013104246152A patent/CN103457141A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050002434A1 (en) * | 2002-01-16 | 2005-01-06 | Rofin-Sinar Laser Gmbh | Cooled mirror for a laser beam |
| CN200979963Y (en) * | 2006-12-08 | 2007-11-21 | 华中科技大学 | A composite micro deformable mirror with thermal compensation controllable wave phase contrast |
| CN203503965U (en) * | 2013-09-18 | 2014-03-26 | 核工业理化工程研究院 | Compensation device for high-power laser mirror thermal distortion |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105207044A (en) * | 2015-10-12 | 2015-12-30 | 哈尔滨工业大学 | Crystal clamping frame with crystal temperature control function |
| CN107255854A (en) * | 2017-08-15 | 2017-10-17 | 温州大学 | The reflecting optics cooling device of laser blast wave transmission |
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Application publication date: 20131218 |