CN103453215A - Valve assembly and valve - Google Patents
Valve assembly and valve Download PDFInfo
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- CN103453215A CN103453215A CN201210176769XA CN201210176769A CN103453215A CN 103453215 A CN103453215 A CN 103453215A CN 201210176769X A CN201210176769X A CN 201210176769XA CN 201210176769 A CN201210176769 A CN 201210176769A CN 103453215 A CN103453215 A CN 103453215A
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Abstract
A valve assembly comprises a cavity, a valve and an electromagnetic actuator. The cavity is provided with a plurality of channels which are arranged on one lateral side of the cavity, so that the cavity is communicated with the outside through the channels, the lateral side is provided with a first surface and a second surface, the first surface is opposite to the inside of the cavity, and the second surface is exposed outside the cavity. The valve is provided with a plurality of staggered sub valves and a plurality of connectors, wherein the sub valves correspond to the channels respectively, and each sub valve is detachably connected to the corresponding connector. The electromagnetic actuator is arranged on the lateral side of the cavity and suitable for attracting the valve, so that the sub valves are correspondingly closed on the channels.
Description
Technical field
The invention relates to a kind of valve, and particularly about a kind of extendible and be applicable to large-sized vacuum valve.
Background technique
Valve be applied in current electronic industry such as LCD panel manufacturing industry, thin film solar plate manufacturing industry etc. for more and more extensive.In order to reduce costs, the substrate sizes of using in preparation process is also along with the progress of technology continues to increase.Accordingly, along with substrate sizes increases, the size of valve also must increase accordingly.Generally speaking, for the glass of 5.5 generations (Gen 5.5), substrate sizes is 1400x1100mm
2, and the valve size of using at least also is greater than the size of long 1.1m, wide about 10cm and could facilitates base material turnover.And current glass developed into for 8 generations (Gen 8), (the base material size is 2160x2460mm
2), and in the development of the specification of (Gen 10) line of marching toward for 10 generations.Now, if be applicable to the valve of 8 generations (Gen 8) base material with traditional designing and producing, this valve size is well imagined will be very huge.And valve size is larger, except the processing of valve, control and be not easy, promoting the required power of valve also can be quite surprising, because pressure reduction is multiplied by area, equals stressed.
With solar panels preparation process, for example chemical vapor deposition of most step (chemical vapor deposition in preparation process, CVD) as plasma auxiliary chemical vapor deposition (plasma enhanced chemical vapor deposition, PECVD) or Metalorganic chemical vapor deposition (metal organic chemical vapor deposition, MOCVD), physical vapor deposition (physical vapor deposition, PVD) as sputtering method or vapour deposition method etc., all need under vacuum environment, could implement, be that must arrange in pairs or groups vacuum cavity (chamber) and vacuum valve of this class board could be implemented.With the structure of vacuum valve commonly used at present, mainly be divided into the gate valve (gate valve) of dead-beat on-off action and the pendulum valve (pendulum valve) of rocking arm type on-off action etc.If must use when the large scale occasion, be the deformation of avoiding inside and outside differential pressure to cause, the thickness of above-mentioned valve must increase, and the active force while producing along with the valve inside and outside differential pressure increases, the rigidity of valve must be along with the lifting of thickness cube.Therefore, known valve mechanism, as long as size increases, the rigidity of structure is to increase with non-equal proportion.When valve must be done thick and heavyly, drive the equipment of valve also must be replaced with the driving equipment that power stage is larger, can make the valve mechanism cost become very expensive.And known valve mechanism, the pressure reduction of allowing is generally all lower than 30mbar (about 22.5torr).Therefore, known valve structure, if will be used in large scale especially on the preparation process of multidisc the time, have the too thick and heavy and bad control of valve and fabricating cost and cross the shortcomings such as high.
Summary of the invention
The object of the present invention is to provide a kind of valve assembly with open-ended function.
Another purpose of the present invention is to provide a kind of valve, is applicable to being installed on valve assembly to be applicable to the vacuum module of large scale base material, and has open-ended function.
For achieving the above object, valve assembly provided by the invention comprises:
One cavity, have the side that a plurality of passages are disposed at this cavity, and this cavity is in communication with the outside by those passages, and wherein this side has with respect to the first surface in this cavity and is exposed to one second outside this cavity;
One valve, have a plurality of sub-valves, wherein respectively corresponding those passages of this little valve; And
One electromagnetic actuating component, be disposed at this side of this cavity, and be suitable for adsorbing this valve, this little valve closed accordingly entire in those passages.
Described valve assembly, wherein, this valve has a plurality of links, with this little valve, be staggered, and respectively this sub-valve removably is connected in respectively this link.
Described valve assembly, wherein, comprise an air pressure actuator, this valve is between this second of this side of this air pressure actuator and this cavity, this air pressure actuator is suitable for driving this valve to move toward this cavity, makes this little valve cover accordingly those passages.
Described valve assembly, wherein, this air pressure actuator has respectively corresponding this little valve of a plurality of pneumatic port.
Described valve assembly, wherein, respectively this link has the edge that at least one engagement portion is disposed at this link, with this little valve, engages.
Described valve assembly, wherein, this valve has at least one push rod, be connected in this little valve one of them.
Described valve assembly, wherein, comprise that an elastic component is connected in this valve, to assist this valve, leaves this cavity.
Described valve assembly, wherein, this valve closes entire when this cavity, has a pressure reduction between this cavity and the external world, and this pressure reduction between zero between a barometric pressure (1atm or 760torr).
Described valve assembly, wherein, this cavity has a plurality of sub-cavitys, and this sub-cavity correspondence this passage respectively respectively.
Described valve assembly, wherein, this cavity have a plurality of black boies be disposed at respectively this passage respectively around.
Described valve assembly, wherein, the material of this valve comprises metal.
Valve provided by the invention, be applicable to a valve assembly, this valve is suitable for a cavity of airtight this valve assembly, this cavity has the side that a plurality of passages are disposed at this cavity, this cavity is in communication with the outside by those passages, wherein this side has with respect to the first surface in this cavity and is exposed to one second outside this cavity, and this valve comprises: a plurality of sub-valves, respectively corresponding those passages.
Described valve, wherein, comprise a plurality of links, with this little valve, is staggered, and respectively this link has at least one clipping device and is disposed at edge, and respectively this little valve removably is connected in respectively this link by this clipping device.
Described valve, wherein, this valve assembly comprises an electromagnetic actuating component, is disposed at this side of this cavity, and is suitable for adsorbing this valve, this little valve is closed entire in those passages.
Described valve, wherein, this valve assembly comprises an air pressure actuator, and this valve is between this second of this side of this air pressure actuator and this cavity, this air pressure actuator is suitable for driving this valve to move toward this cavity, makes this little valve cover accordingly those passages.
Described valve, wherein, this air pressure actuator has respectively corresponding this little valve of a plurality of pneumatic port.
Described valve, wherein, comprise at least one push rod, be connected in this little valve one of them.
Described valve, wherein, this valve assembly comprises that an elastic component is connected in this valve, to assist this valve, leaves this cavity.
Described valve, wherein, this valve closes entire when this cavity, has a pressure reduction between this cavity and the external world, and this pressure reduction between zero between a barometric pressure (1atm or 760torr).
Described valve, wherein, the material of this valve comprises metal.
Based on above-mentioned, valve assembly of the present invention, by the valve with detachable combination between a plurality of sub-valves and a plurality of link, be applicable to need the preparation process of large-sized valve, for example large-sized solar energy module preparation process.By the valve of combined type design, valve assembly of the present invention has open-ended function.In other words, by valve applications of the present invention, when the preparation process of multidisc base material, the user can be according to the number of active lanes of the number respective chamber of base material, certainly is about to sub-valve and link combination.And, because each sub-valve is a corresponding passage, therefore, when passage increases, just can the sub-valve of corresponding increase, and due to stressed be the product of pressure reduction and area, and when valve size strengthens, only have the number needs of sub-valve to increase, and the area of each sub-valve is constant, so the strength that each sub-valve bears yet just can not increase and increase because of the size of valve.With the valve of traditional integral type relatively, valve size traditional when the base material number increases must increase because cavity size increases, and causes cavity and valve volume very huge.Therefore, when valve assembly of the present invention is applied to large-sized preparation process's occasion, the thickness of valve only needs the size of a corresponding base material to increase, and the size that increases accordingly passage and sub-valve gets final product.Because the substrate sizes when monolithic is enough large and while needing to make the preparation process of multidisc, to the structure of the valve of traditional integral type and drive with control on consideration, valve thickness also can't unrestrictedly increase.Therefore, advantage of the present invention is more obvious in the preparation process of large scale and multidisc base material.Accordingly, valve assembly of the present invention has the advantages such as simple in structure, light, low-cost.
The accompanying drawing explanation
Fig. 1 is the schematic diagram according to a kind of valve assembly of one embodiment of the invention.
The state that when Fig. 2 A to Fig. 2 D illustrates respectively the air pressure actuator of valve assembly of Fig. 1 and electromagnetic actuating component start, valve presents.
Fig. 3 illustrates valve assembly and can utilize push rod that valve is shifted to abdicate passage.
Primary clustering symbol description in accompanying drawing:
100 valve assemblies; 110 cavitys; 112 passages; 114 sides; The 114a first surface; Second of 114b; 116 black boies; 120 valves; 122 sub-valves; 124 links; The 124a engagement portion; 130 air pressure actuators; 132 pneumatic port; 140 electromagnetic actuating component; 150 chests; 160 elastic components; 170 push rods.
Embodiment
The present invention proposes a kind of valve assembly, comprises a cavity, a valve, an electromagnetic actuating component and an air pressure actuator.Cavity has the side that a plurality of passages are disposed at cavity, so that cavity is in communication with the outside by these passages, wherein side has with respect to the first surface in cavity and is exposed to one second outside cavity.Electromagnetic actuating component is disposed at the side of cavity, and is suitable for adsorbing valve, so that sub-valve closes accordingly is entire in passage.
In one embodiment of this invention, above-mentioned valve assembly also has a plurality of links and this little valve is staggered, and its neutron valve is respective channel respectively, and each sub-valve removably is connected in every a connection piece.
In one embodiment of this invention, above-mentioned valve assembly also comprises an air pressure actuator, and valve is between second of the side of air pressure actuator and cavity.The air pressure actuator is suitable for driving valve to move toward cavity, so that sub-valve covers passage accordingly.
In one embodiment of this invention, above-mentioned air pressure actuator has a plurality of pneumatic port corresponding sub-valve respectively.
In one embodiment of this invention, above-mentioned every a connection piece has the edge that at least one engagement portion is disposed at link, to engage with this little valve.
In one embodiment of this invention, above-mentioned valve also has at least one push rod, is suitable for making its displacement and abdicating passage for promoting valve.
In one embodiment of this invention, above-mentioned valve assembly also comprises that an elastic component is connected in valve, leaves cavity with auxiliary valve.
In one embodiment of this invention, above-mentioned valve closes entire when cavity, has a pressure reduction between cavity and the external world, and pressure reduction between zero between a barometric pressure (1 atm or 760torr).
In one embodiment of this invention, above-mentioned cavity also has a plurality of sub-cavitys, and sub-cavity respective channel.
In one embodiment of this invention, above-mentioned cavity also have a plurality of black boies be disposed at respectively each passage around.
In one embodiment of this invention, the material of above-mentioned valve comprises metal.
The present invention also proposes a kind of valve, is applicable to a valve assembly.Valve is suitable for a cavity of sealed valve assembly.Cavity has the side that a plurality of passages are disposed at cavity, so that cavity is in communication with the outside by these passages, wherein side has with respect to the first surface in cavity and is exposed to one second outside cavity.Valve comprises a plurality of sub-valves.
In one embodiment of this invention, above-mentioned valve also comprises link, wherein respectively corresponding each passage of each sub-valve.Every a connection piece and each sub-valve are staggered.Every a connection piece has at least one clipping device and is disposed at edge, and sub-valve removably is connected in link by clipping device.
In one embodiment of this invention, above-mentioned valve also comprises an electromagnetic actuating component, is disposed at the side of cavity, and is suitable for adsorbing valve, so that this little valve closes is entire in passage.
In one embodiment of this invention, above-mentioned valve also comprises an air pressure actuator, and valve is between second of the side of air pressure actuator and cavity, and the air pressure actuator is suitable for driving valve to move toward cavity, so that sub-valve covers passage accordingly.
In one embodiment of this invention, above-mentioned air pressure actuator has respectively corresponding this little valve of a plurality of pneumatic port.
In one embodiment of this invention, above-mentioned valve comprises at least one push rod, is suitable for making its displacement and abdicating passage for promoting valve.
In one embodiment of this invention, above-mentioned valve also comprises that an elastic component is connected in valve, leaves cavity with auxiliary valve.
In one embodiment of this invention, above-mentioned valve closes entire when cavity, has a pressure reduction between cavity and the external world, and pressure reduction between zero between a barometric pressure (1 atm or 760torr).
In one embodiment of this invention, the material of above-mentioned valve comprises metal.
For above-mentioned feature and advantage of the present invention can be become apparent, below especially exemplified by embodiment, and coordinate accompanying drawing to be described in detail below.
Fig. 1 is the schematic diagram according to a kind of valve assembly of one embodiment of the invention.Please refer to Fig. 1, the valve assembly 100 of the present embodiment comprises a cavity 110, a valve 120, an electromagnetic actuating component 130 and an air pressure actuator 140.Cavity 110 has the side 114 that a plurality of passages 112 are positioned at cavity 110, so that cavity 110 is in communication with the outside by these passages 112, wherein the sides with respect in cavity 110 of side 114 is defined as to first surface 114a and is exposed to the cavity 110 outer sides and be defined as second 114b.In the present embodiment, cavity 110 is as placing an object (not illustrating) to carry out a certain preparation process's use.For example, the glass substrate of solar energy module (not illustrating) (not illustrating) can be placed in cavity 110 to carry out solar base plate preparation process.Valve 120 has a plurality of sub-valves 122 and a plurality of link 124.In the present embodiment, as shown in Figure 1, between sub-valve 122 and link 124, be to be connected with staggered pattern, wherein this little valve 122 corresponds respectively to these passages 112.In addition, between sub-valve 122 and link 124, be to be connected to each other with removably.For example, every a connection piece 124 has the edge that at least one engagement portion 124a is disposed at link 124.In the present embodiment, two engagement portion 124a of every a connection piece 124 configurations, to engage with sub-valve 122.Yet the present invention does not limit the Placement between link 124 and sub-valve 122, as long as sub-valve 122 has the function of assembling removably with link 124.
In the present embodiment, as shown in Figure 1, cavity 110 has four passages 112 for illustrating.Due to the sub-valve 122 of the present embodiment corresponding to passage 112, therefore also configured accordingly four sub-valves 122 between link 124.In other embodiments, when valve 120 is applied to need to increase preparation process's occasion of substrate number, the user, as long as increase accordingly the number of sub-valve 122 and link 124, combines a valve 120 that meets demand and gets final product, and does not need to increase the thickness of valve.Sub-valve 122 that it should be noted that the present embodiment is the sizes corresponding to passage 112, and therefore, the pressure stress that sub-valve 122 bears can not increase because of the size of valve 120 and change to some extent.Accordingly, in the preparation process of multidisc, only need increase accordingly the quantity of sub-valve 122, the pressure stress that sub-valve 122 bears can not change to some extent.Therefore, the quantity that only need increase accordingly sub-valve 122 just can be applied to preparation process's occasion of multidisc, so that the structure of the valve assembly 100 of the present embodiment becomes frivolous simple again, further can save fabricating cost.
As shown in Figure 1, the valve assembly 100 of the present embodiment also has a chest 150, valve 120, air pressure actuator 130 and electromagnetic actuating component 140 can be disposed in chest 150, but this present invention is not limited.Air pressure actuator 130 is as the use that drives valve 120 to move toward cavity 110.In the present embodiment, valve 120 is between the side 114 of air pressure actuator 130 and cavity 110.When 130 start of air pressure actuator, will drive valve 120 to move toward cavity 110, so that each sub-valve 122 covers each passage 112 accordingly.In the present embodiment, air pressure actuator 130 can be the device (not illustrating) that an air pressure drives, but the present invention is not limited to this.Air pressure actuator 130 has a plurality of pneumatic port 132 and corresponds respectively to this little valve 122.And, when these pneumatic port 132 are driven by actuating device of atmospheric pressure simultaneously, each sub-valve 122 will be driven by each pneumatic port 132, so that the kinetic energy that valve 120 is subject to is comparatively even.In addition, the device that the user can be driven by air pressure, function drives valve 120 to move toward cavity 110 to select that single action drives, two moving driving or meta stop drivings etc., and then closes entirely in this passage 112, makes formation one pressure reduction between cavity 110 and the external world.In the present embodiment, the pressure differential range formed between cavity 110 and the external world is zero to a barometric pressure (1 atm or 760torr).
Be different from general traditional valve structure, the present embodiment has configured the side 114 of an electromagnetic actuating component 140 at cavity 110.In the present embodiment, electromagnetic actuating component 140 is disposed at the first surface 114a of side 114, but the present invention is not limited to this, in the embodiment who does not illustrate at other, according to artificer's demand electromagnetic actuating component 140 also configurable in cavity 110 Anywhere, second 114b of the configurable side in cavity 110 114 for example.The state that when Fig. 2 A to Fig. 2 D illustrates respectively the electromagnetic actuating component of valve assembly of Fig. 1 and the start of air pressure actuator, valve presents, and only illustrate a sub-valve 122 in figure for for example.
Please also refer to Fig. 1 and Fig. 2, the electromagnetic actuating component 140 of the present embodiment is for example the device solenoid valve (not illustrating) namely of an Electromagnetic Drive, is suitable for adsorbing valve 120 in the side 114 of cavity 110, so that sub-valve 122 closes entire passage 112 accordingly.Mean that with the direction of arrow in cavity 110 pressure in cavity 110 is less than the pressure outside sub-valve 122 in Fig. 2 A.Mean that with the direction of arrow outside cavity 110 pressure in cavity 110 is greater than the pressure outside sub-valve 122 in Fig. 2 B.When the solenoid valve start, valve 120 is attached at the side 114 of cavity 110 because of electromagnetic force, no matter is the pressure condition of Fig. 2 A or Fig. 2 B, and electromagnetic actuating component 140 can make valve 120 be attached at the side 114 of cavity 110.The advantage that this can't reach for traditional air pressure actuator.
When air pressure actuator 130 and electromagnetic actuating component 140 are not all doing that used time (when namely valve 120 is opened) valve 120 leaves cavity 110 and state (Fig. 2 C) in driving valve.When 130 start of air pressure actuator, valve 120 will move towards the side 114 of cavity 110, now can start electromagnetic actuating component 140 so that valve 120 is adsorbed in to the side 114 of cavity 110, namely in closing the state (Fig. 2 D) of valve.
In other words, when air pressure actuator 130 is driven, valve 120 will be pushed and move towards cavity 110, and each sub-valve 122 will be closed each passage 112 accordingly.Now, electromagnetic actuating component 140 is driven and make solenoid valve with electromagnet magnetic force, the adaptation between sub-valve 122 and passage 112 be increased.In the present embodiment, for the device of corresponding Electromagnetic Drive, the material of valve 120 comprises that metal or other are suitable for the material with the device effect of Electromagnetic Drive, and the present invention is not limited to this.When the valve 120 of valve assembly 100 will be opened, the electromagnet magnetic force between valve 120 and cavity 110 is stopped and making valve 120 leave cavity 110.
In the present embodiment, more airtight in order to make cavity 110, cavity 110 also have a plurality of black boies 116 be disposed at respectively each passage 112 around.The present embodiment is to utilize O type ring (Oring) to be disposed at each passage 112, so that air pressure actuator 130 during with electromagnetic actuating component 140 start, prevents not closely sealed between the passage 112 of sub-valve 122 and cavity 110 and produces and leak gas.
The valve assembly 100 of the present embodiment also comprises that an elastic component 160 is connected in valve 120, leaves cavity 110 with auxiliary valve 120.More specifically, elastic component 160 is as will open valve 120 time, the use that valve 120 is resetted.As shown in Figure 1, the elastic component 160 of the present embodiment is Returnning spring, is configured near the pneumatic port 132 of air pressure actuator 130 and is connected in valve 120.
Please refer to Fig. 1, valve assembly 100 also has at least one push rod 170 and is suitable for making its displacement and abdicating passage 112 for promoting valve 120.Push rod 170 and air pressure actuator 130 can be combined, perhaps also push rod 170 can be disposed at sub-valve 122 one of them, this the present invention is not limited, pass in and out in order to base material to abdicate passage 112 as long as push rod 170 can produce displacement by valve 120.And, among the present embodiment, push rod 170 combines with air pressure actuator 130, that is air pressure actuator 130 is disposed on push rod 170.
Fig. 3 illustrates valve assembly and can utilize push rod that valve is shifted to abdicate passage.Please also refer to Fig. 1 and Fig. 3, in the present embodiment, the both sides of air pressure actuator 130 have configured respectively push rod 170, and push rod 170 is suitable for making between valve 120 and cavity 110 producing a displacement (valve 120 moves towards the direction of arrow of Fig. 3), to abdicate passage 112, in order to base material, pass in and out.In addition, the user can utilize manually, air pressure driver or motor push push rod 170 so that sub-valve 122 is abdicated passage open.
As above-mentioned, in the present embodiment, when cavity 110 need to close when entire, air pressure actuator 130 drives valve 120 to move toward cavity 110, make sub-valve 122 accordingly with passage 112 close entire after, electromagnetic actuating component 140 starts and by valve 120 absorption, so that valve 120 is sealed at cavity 110.When valve 120 need to leave cavity 110, electromagnetic actuating component 140 stops start so that the electromagnet magnetic force between valve 120 and cavity 110 while stopping, valve 120 can be got back to the position while not driving because elastic component 160 resets, that is valve 120 leaves cavity 110 and gets back to the position while not driving.The user can utilize push rod 170 further to make to produce displacement between valve 120 and cavity 110, to abdicate passage 112, in order to base material, passes in and out.
Need by the way, in other embodiments, the structure of valve 120 also can be as shown in Figure 3, and sub-valve 122 directly is disposed on air pressure actuator 130 and elastic component 160, and each sub-valve 122 is corresponding to each passage 112.
In addition, the valve 120 of the present embodiment also is applicable to have the cavity 110 of a plurality of sub-cavitys (not illustrating), and this little cavity corresponds respectively to these passages 112.Now, the pressure between sub-cavity can equate or is unequal, and this present invention is not limited.
In sum, valve assembly of the present invention, by the valve that has between a plurality of sub-valves and a plurality of link detachable combination, be applicable to need the preparation process of the valve of large scale and multidisc, for example the solar energy module preparation process of large scale and multidisc.By the valve of combined type design, valve assembly of the present invention has open-ended function.In other words, by valve applications of the present invention, when the preparation process of multidisc base material, the user can be according to the number of active lanes of the number respective chamber of base material, certainly is about to sub-valve and link combination.And, because each sub-valve is a corresponding passage, therefore, when passage increases, just can the sub-valve of corresponding increase, and due to stressed be the product of pressure reduction and area, and when valve size strengthens, only have the number needs of sub-valve to increase, and the area of each sub-valve is constant, so the strength that each sub-valve bears yet just can not increase and increase because of the size of valve.With the valve of traditional integral type, compare, valve size traditional when the base material number increases can must increase because cavity volume increases, and causes all very huge of cavity and valve volume.Therefore, when valve assembly of the present invention is applied to preparation process's occasion of large scale and multidisc, the thickness of valve only needs the size of a corresponding base material to increase, and get final product in the size that increases accordingly passage and sub-valve.Because the substrate sizes of monolithic is enough large and while needing to make the preparation process of multidisc, to the structure of traditional integral type valve and drive with control on consideration, valve thickness also can't unrestrictedly increase.Therefore, advantage of the present invention is more obvious in the preparation process of large scale and multidisc base material.Accordingly, valve assembly of the present invention has the advantages such as simple in structure, light, low-cost.In addition, utilize the device of Electromagnetic Drive, also promoted the effect that the valve of valve assembly of the present invention closes the entire passage in cavity.
Although the present invention discloses as above with embodiment; so it is not in order to limit the present invention; those skilled in the art without departing from the spirit and scope of the present invention, when doing a little change and retouching, therefore protection scope of the present invention should be as the criterion with the claim scope content that be defined of application.
Claims (20)
1. a valve assembly comprises:
One cavity, have the side that a plurality of passages are disposed at this cavity, and this cavity is in communication with the outside by those passages, and wherein this side has with respect to the first surface in this cavity and is exposed to one second outside this cavity;
One valve, have a plurality of sub-valves, wherein respectively corresponding those passages of this little valve; And
One electromagnetic actuating component, be disposed at this side of this cavity, and be suitable for adsorbing this valve, this little valve closed accordingly entire in those passages.
2. valve assembly according to claim 1, wherein, this valve has a plurality of links, with this little valve, be staggered, and respectively this sub-valve removably is connected in respectively this link.
3. valve assembly according to claim 1, wherein, comprise an air pressure actuator, this valve is between this second of this side of this air pressure actuator and this cavity, this air pressure actuator is suitable for driving this valve to move toward this cavity, makes this little valve cover accordingly those passages.
4. valve assembly according to claim 3, wherein, this air pressure actuator has respectively corresponding these a little valves of a plurality of pneumatic port.
5. valve assembly according to claim 1, wherein, respectively this link has the edge that at least one engagement portion is disposed at this link, with this little valve, engages.
6. valve assembly according to claim 1, wherein, this valve has at least one push rod, be connected in this little valve one of them.
7. valve assembly according to claim 1, wherein, comprise that an elastic component is connected in this valve, to assist this valve, leaves this cavity.
8. valve assembly according to claim 1, wherein, this valve closes entire when this cavity, has a pressure reduction between this cavity and the external world, and this pressure reduction between zero between a barometric pressure.
9. valve assembly according to claim 1, wherein, this cavity has a plurality of sub-cavitys, and this sub-cavity correspondence this passage respectively respectively.
10. valve assembly according to claim 1, wherein, this cavity have a plurality of black boies be disposed at respectively this passage respectively around.
11. valve assembly according to claim 1, wherein, the material of this valve comprises metal.
A 12. valve, be applicable to a valve assembly, this valve is suitable for a cavity of airtight this valve assembly, this cavity has the side that a plurality of passages are disposed at this cavity, this cavity is in communication with the outside by those passages, wherein this side has with respect to the first surface in this cavity and is exposed to one second outside this cavity, and this valve comprises:
A plurality of sub-valves, respectively corresponding those passages.
13. valve according to claim 12, wherein, comprise a plurality of links, is staggered with this little valve, respectively this link has at least one clipping device and is disposed at edge, and respectively this little valve removably is connected in respectively this link by this clipping device.
14. valve according to claim 12, wherein, this valve assembly comprises an electromagnetic actuating component, is disposed at this side of this cavity, and is suitable for adsorbing this valve, this little valve is closed entire in those passages.
15. valve according to claim 12, wherein, this valve assembly comprises an air pressure actuator, this valve is between this second of this side of this air pressure actuator and this cavity, this air pressure actuator is suitable for driving this valve to move toward this cavity, makes this little valve cover accordingly those passages.
16. valve according to claim 15, wherein, this air pressure actuator has respectively corresponding this little valve of a plurality of pneumatic port.
17. valve according to claim 12, wherein, comprise at least one push rod, be connected in this little valve one of them.
18. valve according to claim 12, wherein, this valve assembly comprises that an elastic component is connected in this valve, to assist this valve, leaves this cavity.
19. valve according to claim 12, wherein, this valve closes entire when this cavity, has a pressure reduction between this cavity and the external world, and this pressure reduction between zero between a barometric pressure.
20. valve according to claim 12, wherein, the material of this valve comprises metal.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210176769.XA CN103453215B (en) | 2012-05-31 | 2012-05-31 | Valve assembly and valve |
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| CN201210176769.XA CN103453215B (en) | 2012-05-31 | 2012-05-31 | Valve assembly and valve |
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| CN103453215A true CN103453215A (en) | 2013-12-18 |
| CN103453215B CN103453215B (en) | 2016-04-27 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111750135A (en) * | 2019-03-29 | 2020-10-09 | 罗伯特·博世有限公司 | Distribution valve, valve core and refrigerating system |
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| JPS52160131U (en) * | 1976-05-31 | 1977-12-05 | ||
| CN1698179A (en) * | 2003-03-11 | 2005-11-16 | 东京毅力科创株式会社 | Gate valve for semiconductor treatment system and vacuum container |
| CN201193724Y (en) * | 2008-05-09 | 2009-02-11 | 孙光锋 | Parabiose multipath electrovalve |
| CN101937833A (en) * | 2009-06-30 | 2011-01-05 | Ckd株式会社 | Feeder |
| CN102315142A (en) * | 2010-06-22 | 2012-01-11 | 东京毅力科创株式会社 | Flow passage selector device, processing unit, stream changing method, processing method |
| CN101956845A (en) * | 2010-09-10 | 2011-01-26 | 广东万家乐燃气具有限公司 | Gas subsection valve applied to gas cooking appliances |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111750135A (en) * | 2019-03-29 | 2020-10-09 | 罗伯特·博世有限公司 | Distribution valve, valve core and refrigerating system |
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