CN103423477A - Swinging water-cooled vacuum gate valve and spool component thereof - Google Patents
Swinging water-cooled vacuum gate valve and spool component thereof Download PDFInfo
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- CN103423477A CN103423477A CN2012101631492A CN201210163149A CN103423477A CN 103423477 A CN103423477 A CN 103423477A CN 2012101631492 A CN2012101631492 A CN 2012101631492A CN 201210163149 A CN201210163149 A CN 201210163149A CN 103423477 A CN103423477 A CN 103423477A
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Abstract
The invention relates to a swinging water-cooled vacuum gate valve and a spool component thereof. The valve and the spool component can be higher in sealing performance. The spool component comprises a support plate, a valve plate and a ball rack. A rotary steel ball is disposed on the ball rack. The steel ball is rested between the support plate and the valve plate and is held by the spring plate. A spring plate on the support plate side of the ball rack is connected with the support plate. Another spring plate on the valve plate side of the ball rack is connected with the valve plate. The valve plate and the support plate are opened by the steel ball, and accordingly pressure is applied to the valve plate. An upper cover plate and a lower cover plate are provided with ball pits corresponding to the steel ball. The steel ball can be fitted in the ball pits, so that the pressure of the steel ball upon the valve plate is released. The swinging water-cooled vacuum gate valve is available for full water cooling, so that the service life of a seal ring is prolonged.
Description
Technical field
The valve that the present invention relates to use in vacuum system, relate in particular to push-pull valve.
Background technique
What monocrystalline, polycrystalline furnace manufacturer used at present is the cold separating valve of manual water, and this valve longitudinal size is large, and " O " shape seal ring life-span is short, poor sealing performance, and job insecurity, can not carry out automation and control.Therefore monocrystalline, polycrystalline furnace manufacturer need under 1450 ℃ of temperature environments, to work in a hurry; " O " shape seal ring can obtain that water cooling protection is not burnt, fusing, aging; make monocrystalline, polycrystalline furnace high working efficiency, throughput is large, the valve that practicable automation is controlled.
Summary of the invention
The object of the present invention is to provide a kind of swing type water-cooled vacuum gate valve, to improve sealability.
For realizing the swing type water-cooled vacuum gate valve of described purpose, be characterized in, comprising: valve component comprises the valve body of tubular; The upper cover plate assembly, comprise the upper cover plate with upper valve port, and upper cover plate is fixedly connected with the upside of valve body, between upper cover plate and valve body, seal ring is set; The lower cover plate assembly, comprise the lower cover plate with lower valve port, and lower cover plate is fixedly connected with the downside of valve body, between lower cover plate and valve body, seal ring is set; Transmission shaft component, comprise transmission shaft, transmission shaft passes the attachment hole of upper cover plate and penetrates the attachment hole of lower cover plate, the lower end of transmission shaft is supported by the thrust-bearing in the end cap of the attachment hole below of lower cover plate, between the attachment hole of transmission shaft and upper cover plate, by the sealing of shaft seal black box, between end cap and lower cover plate, by seal ring, seal; Mangetic core assembly, be arranged in valve component, comprise dunnage, valve plate and steel ball rack, place rotating steel ball on steel ball rack, steel ball rack is between dunnage and valve plate, and clamped by latch plate, the latch plate of the dunnage side of steel ball rack is connected with dunnage, and the latch plate of the valve plate side of steel ball rack is connected with valve plate, and valve plate is placed between the upper and lower cover plate of lower cover plate seal ring is set, and sealing lower valve port, dunnage is positioned at the below of upper cover plate; The ball hole that corresponding steel ball is arranged in dunnage, valve plate, steel ball rack is connected with outward extending fork, fork is connected with transmission shaft so that promote the steel ball rack forward rotation makes steel ball climb to the plane of valve plate, dunnage from the ball hole, make valve plate, dunnage strut and then make each valve port to close, also being convenient to promote steel ball rack rotates backward and makes steel ball from ball hole is got back on the plane of valve plate, dunnage, so that valve plate, dunnage draw in, thereby each valve port is opened; And drive unit, be arranged on upper cover plate, and can drive transmission shaft to rotate.
Described swing type water-cooled vacuum gate valve, its further characteristics are, the cooling water circulation passage is arranged respectively in upper and lower cover plate, are provided with the water inlet and outlet passage in transmission shaft, described water inlet and outlet passage and cooling water circulation channel connection.
Described swing type water-cooled vacuum gate valve, its further characteristics are, in the ball hole of steel ball rack, upper and lower two steel balls are arranged.
Described swing type water-cooled vacuum gate valve, its further characteristics are that the cooling water circulation zone is arranged in lower cover plate.
Described swing type water-cooled vacuum gate valve, its further characteristics are that the cooling water circulation zone is arranged respectively in upper cover plate, valve body.
For realizing the mangetic core assembly of described purpose, be characterized in, comprise dunnage, valve plate and steel ball rack, place rotating steel ball on steel ball rack, steel ball rack is between dunnage and valve plate, and clamped by latch plate, the latch plate of the dunnage side of steel ball rack is connected with dunnage, the latch plate of the valve plate side of steel ball rack is connected with valve plate, the ball hole that corresponding steel ball is arranged in dunnage, valve plate, steel ball rack energy forward rotation is climbed on the plane of upper and lower cover plate steel ball from the ball hole, and valve plate, dunnage are strutted; Steel ball rack can also rotate backward steel ball is got back to the ball hole from the plane of upper and lower cover plate, and valve plate, dunnage are drawn in.
Described mangetic core assembly, its further characteristics are, in each ball hole of steel ball rack, upper and lower two steel balls are arranged, these two steel balls contact respectively dunnage and valve plate.
In embodiments of the invention, with latch plate, clamp steel ball rack, steel ball rack promotes steel ball, and steel ball climbs out of and struts valve plate, dunnage from the ball hole, and valve closes; Steel ball is got back to two plates in the ball hole and is drawn in, valve open.Because steel ball struts valve plate, dunnage, so on valve plate, there are powerful pressure, this pressure to be delivered on seal ring valve plate below, on lower cover plate, make the sealability of seal ring strengthen.Swing the fork on steel ball rack, just can swing steel ball rack, thereby control steel ball, from the ball hole, climb out of or climb in the ball hole, to realize the switch of valve, fork is driven by transmission shaft, and transmission shaft can have cylinder and connecting rod to drive.Cylinder can be by electromagnetic valve, so the use of this valve can realize automation.Also can realize with 90 degree rotary cylinders or 90 degree rotary electrical apparatus.
Therefore in an embodiment of the present invention, valve has the multichannel water-cooled, can realize working under the condition of whole-water-cooling, keeps the long lifetime of seal ring.
In an embodiment of the present invention; can realize the valve that monocrystalline, polycrystalline furnace manufacturer need in a hurry; this valve can be worked under 1450 ℃ of temperature environments; the cooling protection that " O " shape seal ring has obtained water is not burnt, fusing, aging; make monocrystalline, polycrystalline furnace high working efficiency; throughput is large, and practicable automation is controlled.
Embodiments of the invention, can be used on single crystal growing furnace in a large number, in the environment that turbidity test are poor, temperature is high, and the basic parameter of this environment: leak rate 1 * 10
-10PaM
3/ S, working pressure 1 * 10
5Pa～1 * 10
-6Pa, 1450 ℃ of operating ambient temperatures.
Embodiments of the invention with straight push-pull valve than shorten length 1/3, with separating valve than highly reducing by 2/3.Whole-water-cooling Ke You seven road cooling waters, " O " shape seal ring obtains sufficient cooling protection, extends operating life.About 70 ° of valve switch pendulum angles are compact.
The accompanying drawing explanation
Fig. 1 is the planimetric map of mangetic core assembly.
Fig. 2 is the sectional drawing of the mangetic core assembly cut open along the A-A line shown in Fig. 1.
Fig. 3 is the planimetric map of valve component.
Fig. 4 is the sectional drawing of the valve component cut open along the B-B line shown in Fig. 3.
Fig. 5 is the planimetric map of upper or lower cover plate assembly.
Fig. 6 is the sectional drawing of the upper or lower cover plate assembly cut open along the C-C line shown in Fig. 5.
Fig. 7 is the sectional drawing of cutting open along the D-D line shown in Fig. 5.
Fig. 8 is the plan view of transmission shaft.
Fig. 9 is the planimetric map of swing type water-cooled vacuum gate valve.
Figure 10 is the sectional view along A-B-C-D line in Fig. 9.
Figure 11 is the schematic diagram of the cooling water path between transmission shaft, dunnage, valve plate.
Embodiment
As depicted in figs. 1 and 2, mangetic core assembly 1 comprises valve plate (lower valve plate) 11, dunnage (upper valve plate) 12, steel ball 13, latch plate 14 and steel ball rack 17.Steel ball rack 17 is ring, circumferentially there are a plurality of ball holes 171 of receiving, respectively receive in ball hole 171 and be placed with upper and lower two steel balls 13, the outstanding upper edge of receiving ball hole 171 of steel ball 13 of top contacts with the lower surface of dunnage 12, the outstanding lower edge of receiving ball hole 171 of steel ball 13 of below contacts with the upper surface of valve plate 11, in embodiment as shown in Figure 1, have 12 in steel ball rack 17 and receive the ball hole.Steel ball rack 17 is fixedly clamped by two groups of latch plates 14, each is organized latch plate 14 and comprises the upper spring plate 141 that is positioned at steel ball rack 17 upsides, the lower spring plate 142 that is positioned at steel ball rack 17 downsides, the respective end of upper and lower latch plate 141,142 by fastening piece for example bolt and nut be fixedly connected with, and steel ball rack 17 is clamped in wherein, the middle part of upper spring plate 141 is fixedly connected with by link 143 with dunnage 12, and the middle part of lower spring plate 142 is fixedly connected with by link 144 with valve plate 11.As shown in Figure 1, steel ball rack 17 connects radially outstanding fork 16, and fork 16 is for being connected with transmission shaft described later.Be connected with roller 15 on fork 16, in the side in contrast to fork of steel ball rack 17, be connected with two rollers 15, the rolling path of each roller 15 is all centered by the oscillation center of fork 16, and three rollers 15 are not on same straight line.
Continue to see figures.1.and.2, the upper surface of valve plate 11 has the ball hole 138 of the steel ball 13 in the corresponding steel ball rack 17 of a circle, and the lower surface of dunnage 12 also has the ball hole 138 of the steel ball in the corresponding steel ball rack 17 of a circle.Position shown in Fig. 2 is the position that steel ball 13 climbs out of ball hole, and now valve plate 11 and dunnage 12 are strutted by steel ball 13, and the distance between the two is to receive the twice of diameter of a steel ball 13 in ball hole 171.Position as shown in Figure 1 is the position that steel ball 13 is positioned at the ball hole, and now the distance between valve plate 11 and dunnage 12 is the twice that is less than the diameter of steel ball 13, and mangetic core assembly can swing and the seal ring that can not rub like this.Between valve plate 11 and dunnage 12, softened distance depends on the degree of depth in ball hole, and the degree of depth in ball hole and the unlatching size of valve have relation.
As shown in Figure 3, the whole ovalize of valve component 2 (containing the shape of approximate ellipsoidal).As shown in Figure 4, valve component 2 comprises a valve body 21, and the week of valve body 21 has circular groove 210 laterally, and circular groove 210 is by 22 sealings of water-cooled compound plate, and circular groove 210 and water-cooled compound plate 22 provide a cooling water passage that Cooling Water is mobile.
Upper and lower cover board component 3,4 has identical or approximate structure, and above cover plate assembly 3 is example, and as shown in Figures 5 to 7, upper cover plate assembly 3 comprises upper cover plate 30, and upper cover plate 30 has upper valve port 31.Upper cover plate assembly 3 also comprises the flange 32 around upper valve port 31, and flange 32 is for being connected with user's pipe flange.Upper cover plate assembly 3 also comprises water-cooling cover plate 33, water-cooling cover plate 33 covers on cover plate 30, form flow of cooling water chamber 331 between water-cooling cover plate 33 and upper cover plate 30, and also be formed with flow of cooling water passage 332 between flange 32 and upper valve port 31 circumferential side wall, flow of cooling water chamber 331 and flow of cooling water passage 332 can be connected, and form the flow of cooling water zone of upper cover plate assembly 3.In addition, also be formed with transmission axis hole flange 35 on upper cover plate 30, transmission axis hole flange 35 provides axis hole 34, for transmission shaft described later, passes.
Same, lower cover plate assembly 4 comprises lower cover plate 40, lower cover plate has lower valve port 41.The lower cover plate assembly also comprises the flange around lower valve port, and flange is for being connected with user's pipe flange.The lower cover plate assembly also comprises the water-cooled lower cover plate, the water-cooled lower cover plate covers on lower cover plate, form the flow of cooling water chamber between water-cooled lower cover plate and lower cover plate, and also be formed with the flow of cooling water passage between flange and lower valve port 41 circumferential side wall, flow of cooling water chamber and flow of cooling water passage are connected, and form the flow of cooling water zone of lower cover plate assembly.In addition, also be formed with transmission axis hole flange on lower cover plate 40, transmission axis hole flange provides axis hole, for transmission shaft described later, passes.
As shown in Fig. 8 and Figure 10, the supporting piece 53 that the bearing (as needle bearing) 52 that transmission shaft component 5 comprises transmission shaft 51, connect on the underpart of transmission shaft 51, the end face of underpart connect, supporting piece 53 is fixed on needle bearing 52 on transmission shaft 51.There is attachment hole 510 lower end of transmission shaft 51, and attachment hole 510 can be the profile hole, with the fork 16 be connected on the steel ball rack 17 of mangetic core assembly 1, connects.
As shown in Figure 9 and Figure 10, valve body 21 is fixedly connected with upper cover plate 30, the lower end of valve body 21 is fixedly connected with lower cover plate 40, between valve body 21 and each cover plate 30,40, by O-ring seals 92,93, seal, mangetic core assembly 1 is built in valve body 21, and the valve plate 11 of mangetic core assembly 1 is placed on lower cover plate 40, seals the lower valve port 41 on lower cover plate 40, the dunnage 12 of mangetic core assembly 1 is positioned at upper cover plate 30 belows, seals the upper valve port 31 of upper cover plate 30.Between position around the lower valve port 41 of valve plate 11 and lower cover plate 40, O-ring seals 91 is set.Position as shown in figure 10, the valve plate 11 of mangetic core assembly 1 seals lower valve port 41 by means of O-ring seals 91, and because the steel ball 13 of mangetic core assembly 1 climbs out of from the ball hole, valve plate 11 and dunnage 12 are strutted,, can not be moved by the stopping of upper cover plate 31 due to dunnage 12, act on valve plate 11 and dunnage 12 thereby steel ball 13 places will produce powerful pressure simultaneously, after obtaining enough pressure on valve plate 11, even the running parameter of vacuum system is leak rate 1 * 10
-10PaM
3/ S, working pressure 1 * 10
5Pa～1 * 10
-6Pa, also can guarantee the effective sealing of O-ring seals 91.
In one embodiment of this invention, the installation process of swing type water-cooled vacuum gate valve is as follows:
1, lower cover plate also fills " O " shape seal ring towards sky;
2, be placed on lower cover plate by valve component and be screwed;
3, mangetic core assembly and transmission shaft component are assembled, together the transmission shaft component bottom is inserted in the transmission axis hole flange of lower cover plate;
4, the transmission axis hole flange of upper cover plate is inserted on the transmission shaft upper axis, the upper cover plate housing screw is fixed on valve component;
5, install the shaft seal Sealing to the transmission axis hole flange of upper cover plate and compress;
6, by drive unit for example cylinder part be contained on upper cover plate, the connecting rod that cranks is connected with transmission shaft.
The valve of previous embodiment is whole-water-cooling swing board plug valve, can be widely used on single crystal growing furnace, in the environment that turbidity test are poor, temperature is high, meets the basic parameter of vacuum system: leak rate 1 * 10
-10PaM
3/ S, working pressure 1 * 105Pa～1 * 10
-6Pa, 1450 ℃ of operating ambient temperatures.
The principle of closing, open of valve is: clamp steel ball rack with latch plate, steel ball rack promotes steel ball, and steel ball climbs out of plane and struts valve plate, dunnage from the ball hole, and valve cuts out, and steel ball is got back to two plates in the ball hole and drawn in, valve open; With reference to Fig. 1,2,9,10,
(1) promote steel ball rack and turn right and make steel ball climb to plane (now valve plate, dunnage are subject to stopping of valve body inboard and can rotate and only can be backed down by steel ball, only can move axially) from hole, make valve plate, dunnage strut valve closing;
(2) promote steel ball rack and turn left to make steel ball to get back to hole (now valve plate, dunnage have larger pressure can not rotate, unless steel ball is got back to the ball hole, prevent seal ring destructions of being rubbed) from plane, make valve plate, dunnage gathering valve open.Continue to turn left the spool of valve plate is taken away valve wide open.
The length of aforementioned valve is very short, with straight push-pull valve than shorten length 1/3, with Flap valve than highly reducing by 2/3.
The whole-water-cooling of aforementioned valve has seven road cooling waters, wherein a road is the cooling water in valve component 2, the two-way water-cooled is the cooling water in the upper cover plate assembly, another two-way water-cooled is the cooling water in the lower cover plate assembly, also having a road water-cooled is the cooling water on valve plate, and also having a road water-cooled is the cooling water in dunnage.
As shown in figure 11, two groups of inlet and outlet pipes 511,522 are arranged in transmission shaft 51, wherein one group of inlet and outlet pipe is connected with the cooling water circulation passage on dunnage 12, and another group inlet and outlet pipe is connected with the cooling water circulation passage of valve plate 11.Therefore transmission shaft 51 provides the cooling water passage of valve plate, dunnage.
Because valve has the multichannel cooling water passage, so each " O " shape seal ring in valve obtains sufficient cooling protection, the prolongation operating life.
In addition, 70 ° of left and right of the pendulum angle of mangetic core assembly in valve component, so compact structure.The valve upper and lower cover plates compresses and adopts screw to be combined with hinge, and mounting or dismounting are convenient.
Cylinder adopts bounce cylinder, and valve switch is steady, sound vibration is little.
Pneumatic basic parameter: source of the gas 4～6kgf/cm
2, power supply 220V, threshold switch magnetic switch output electrical signals.
Claims (7)
1. the swing type water-cooled vacuum gate valve, is characterized in that, comprising:
Valve component, comprise the valve body of tubular;
The upper cover plate assembly, comprise the upper cover plate with upper valve port, and upper cover plate is fixedly connected with the upside of valve body, between upper cover plate and valve body, seal ring is set;
The lower cover plate assembly, comprise the lower cover plate with lower valve port, and lower cover plate is fixedly connected with the downside of valve body, between lower cover plate and valve body, seal ring is set;
Transmission shaft component, comprise transmission shaft, transmission shaft passes the attachment hole of upper cover plate and penetrates the attachment hole of lower cover plate, the lower end of transmission shaft is supported by the thrust-bearing in the end cap of the attachment hole below of lower cover plate, between the attachment hole of transmission shaft and upper cover plate, by the sealing of shaft seal black box, between end cap and lower cover plate, by seal ring, seal;
Mangetic core assembly, be arranged in valve component, comprise dunnage, valve plate and steel ball rack, place rotating steel ball on steel ball rack, steel ball rack is between dunnage and valve plate, and clamped by latch plate, the latch plate of the dunnage side of steel ball rack is connected with dunnage, and the latch plate of the valve plate side of steel ball rack is connected with valve plate, and valve plate is placed between the upper and lower cover plate of lower cover plate seal ring is set, and sealing lower valve port, dunnage is positioned at the below of upper cover plate; The ball hole that corresponding steel ball is arranged in dunnage, valve plate, steel ball rack is connected with outward extending fork, fork is connected with transmission shaft so that promote the steel ball rack forward rotation makes steel ball climb to the plane of valve plate, dunnage from the ball hole, make valve plate, dunnage strut and then make each valve port to close, also being convenient to promote steel ball rack rotates backward and makes steel ball from ball hole is got back on the plane of valve plate, dunnage, so that valve plate, dunnage draw in, thereby each valve port is opened; And
Drive unit, be arranged on upper cover plate, and can drive transmission shaft to rotate.
2. swing type water-cooled vacuum gate valve as claimed in claim 1, is characterized in that, the cooling water circulation passage is arranged respectively in upper and lower cover plate, is provided with the water inlet and outlet passage in transmission shaft, described water inlet and outlet passage and cooling water circulation channel connection.
3. swing type water-cooled vacuum gate valve as claimed in claim 1, is characterized in that, in the ball hole of steel ball rack, upper and lower two steel balls arranged.
4. swing type water-cooled vacuum gate valve as claimed in claim 1, is characterized in that, the cooling water circulation zone is arranged in lower cover plate.
5. swing type water-cooled vacuum gate valve as claimed in claim 1, is characterized in that, the cooling water circulation zone is arranged respectively in upper cover plate, valve body.
6. mangetic core assembly, it is characterized in that, comprise dunnage, valve plate and steel ball rack, place rotating steel ball on steel ball rack, steel ball rack is between dunnage and valve plate, and clamped by latch plate, the latch plate of the dunnage side of steel ball rack is connected with dunnage, and the latch plate of the valve plate side of steel ball rack is connected with valve plate, and the ball hole of corresponding steel ball is arranged in dunnage, valve plate, steel ball rack energy forward rotation is climbed on the plane of upper and lower cover plate steel ball from the ball hole, and valve plate, dunnage are strutted; Steel ball rack can also rotate backward steel ball is got back to the ball hole from the plane of upper and lower cover plate, and valve plate, dunnage are drawn in.
7. mangetic core assembly as claimed in claim 6, is characterized in that, in each ball hole of steel ball rack, upper and lower two steel balls arranged, and these two steel balls contact respectively dunnage and valve plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210163149.2A CN103423477B (en) | 2012-05-23 | 2012-05-23 | Swing type water-cooled vacuum gate valve and mangetic core assembly thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210163149.2A CN103423477B (en) | 2012-05-23 | 2012-05-23 | Swing type water-cooled vacuum gate valve and mangetic core assembly thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103423477A true CN103423477A (en) | 2013-12-04 |
| CN103423477B CN103423477B (en) | 2015-12-02 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210163149.2A Active CN103423477B (en) | 2012-05-23 | 2012-05-23 | Swing type water-cooled vacuum gate valve and mangetic core assembly thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103423477B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108716550A (en) * | 2018-07-27 | 2018-10-30 | 沈阳乐贝真空技术有限公司 | A kind of novel evacuated isolation gate valve |
| CN113932024A (en) * | 2021-09-23 | 2022-01-14 | 成都中科唯实仪器有限责任公司 | Valve core structure of vacuum valve |
| CN116066583A (en) * | 2023-03-30 | 2023-05-05 | 成都中科唯实仪器有限责任公司 | Self-locking single valve plate vacuum valve |
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| CN201225445Y (en) * | 2008-05-28 | 2009-04-22 | 钰衡科技股份有限公司 | Valve plate opening and closing mechanism |
| CN201593617U (en) * | 2010-01-08 | 2010-09-29 | 良精集团有限公司 | Butterfly-type flat-plate vacuum valve |
| CN202629122U (en) * | 2012-05-23 | 2012-12-26 | 费海鸿 | Swing-type water-cooling vacuum gate valve and valve core component thereof |
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2012
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4541453A (en) * | 1983-11-03 | 1985-09-17 | Conoco Inc. | High temperature slide valve |
| CN2186334Y (en) * | 1993-03-12 | 1994-12-28 | 机械电子工业部西安重型机械研究所 | Sway vacuum pneumatic valve |
| CN201225445Y (en) * | 2008-05-28 | 2009-04-22 | 钰衡科技股份有限公司 | Valve plate opening and closing mechanism |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108716550A (en) * | 2018-07-27 | 2018-10-30 | 沈阳乐贝真空技术有限公司 | A kind of novel evacuated isolation gate valve |
| CN108716550B (en) * | 2018-07-27 | 2024-03-01 | 沈阳乐贝真空技术有限公司 | Novel vacuum isolation door valve |
| CN113932024A (en) * | 2021-09-23 | 2022-01-14 | 成都中科唯实仪器有限责任公司 | Valve core structure of vacuum valve |
| CN116066583A (en) * | 2023-03-30 | 2023-05-05 | 成都中科唯实仪器有限责任公司 | Self-locking single valve plate vacuum valve |
| CN116066583B (en) * | 2023-03-30 | 2023-06-13 | 成都中科唯实仪器有限责任公司 | Self-locking single valve plate vacuum valve |
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| CN103423477B (en) | 2015-12-02 |
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