CN108716550A - A kind of novel evacuated isolation gate valve - Google Patents
A kind of novel evacuated isolation gate valve Download PDFInfo
- Publication number
- CN108716550A CN108716550A CN201810843281.5A CN201810843281A CN108716550A CN 108716550 A CN108716550 A CN 108716550A CN 201810843281 A CN201810843281 A CN 201810843281A CN 108716550 A CN108716550 A CN 108716550A
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- gate valve
- shaft
- interconnecting piece
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- 238000002955 isolation Methods 0.000 title claims abstract description 40
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 127
- 238000001816 cooling Methods 0.000 claims abstract description 37
- 230000005540 biological transmission Effects 0.000 claims abstract description 34
- 238000007789 sealing Methods 0.000 claims description 27
- 230000008676 import Effects 0.000 claims description 9
- 239000000565 sealant Substances 0.000 claims description 9
- 230000007246 mechanism Effects 0.000 claims description 5
- 125000004122 cyclic group Chemical group 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000001771 vacuum deposition Methods 0.000 description 10
- 238000009413 insulation Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 239000002826 coolant Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2007—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member specially adapted operating means therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2014—Shaping of the valve member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2042—Special features or arrangements of the sealing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2042—Special features or arrangements of the sealing
- F16K1/205—Special features or arrangements of the sealing the sealing being arranged on the valve member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K49/00—Means in or on valves for heating or cooling
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
A kind of novel evacuated isolation gate valve, solves that closed performance of the existing technology is poor, and occupied space is big, and production cost is high, the low problem of transfer efficiency.Gate valve valve body including being internally provided with body cavity, it is characterised in that：It is provided with water cooling isolation valve plate in body cavity, close to one end of gate valve outlet, is provided with rotational valve plate in the gate valve shaft of water cooling isolation valve plate, one end of gate valve shaft is hinged by drive link and the telescopic end of valve plate cylinder；The both ends of gate valve shaft are respectively arranged with shaft intake tunnel and shaft exhalant canal, and shaft intake tunnel is connected by interconnecting piece water stream channel I with the entrance of valve plate water stream channel；The outlet of valve plate water stream channel is connected by interconnecting piece water stream channel II with shaft exhalant canal；It is provided with transitional transmission device below water cooling isolation valve plate.Its reasonable design, it is compact-sized, it occupies little space, closed performance is reliable and stable, saves production cost, and transfer efficiency is high, and using flexible is stable.
Description
Technical field
The invention belongs to technical field of vacuum plating, and in particular to a kind of compact-sized, it can be ensured that sealing rubber ring is in high temperature
Long-time normal use under state, closed performance is reliable and stable, can save vacuum coating production cost, transfer efficiency is high, makes
With flexible novel evacuated isolation gate valve.
Background technology
Super large-tonnage core inductance vacuum coating equipment is usually made of multiple vacuum chamber babinets, also, because technique
Need, setting isolation gate valve needed between adjacent vacuum chamber, with realize be isolated between vacuum and air or vacuum and vacuum it
Between different vacuum level requirements isolation.Simultaneously as when core inductance vacuum coating equipment works, workpiece to be plated needs are added
Heat, so vacuum insulation gate valve should be able to bear certain temperature.Although the sealing rubber ring on gate valve plate is generally all by high temperature resistant
Material is made, but the maximum temperature used can not be more than 250 DEG C；However, the highest temperature in core inductance vacuum coating equipment
Degree can reach 400 DEG C, so, in order to allow sealing rubber ring at high operating temperatures can long-time normal use, need vacuum every
From cooling structure is arranged on gate valve.Existing vacuum insulation gate valve is only provided with cooling water channel on valve body mostly, and for opening
Opening and close on the valve plate of gate valve does not have cooling structure, causes whole cooling effect poor, reduces the sealing effect of sealing rubber ring
Fruit and service life seriously affect the closed performance of vacuum insulation gate valve.
In addition, during the pallet equipped with workpiece to be plated continuously transmits in core inductance vacuum coating equipment, when need
When passing through vacuum insulation gate valve, since there is body cavity certain width, pallet cannot directly pass through；Therefore it must be in valve body
Transitional transmission device is arranged in intracavitary, can will be in pallet smooth delivery of power to adjacent vacuum chamber.However, due in body cavity
It needs that the mechanisms such as rotational valve plate and transitional transmission device are arranged simultaneously, so increasing the overall dimensions of vacuum insulation gate valve, no
But occupied space is big, influences the reasonable Arrangement of the entire production line；Moreover, wider body cavity also improves the life of vacuum coating
Cost is produced, environmental protection and energy saving are unfavorable for.Meanwhile the transfer efficiency of existing transitional transmission device is low, using flexible is insufficient, and operation is steady
Qualitative difference.Therefore it is necessary to the structures to existing vacuum insulation gate valve to be improved.
Invention content
The present invention addresses the above problem, provides a kind of compact-sized, it can be ensured that sealing rubber ring is grown at high operating temperatures
Time normal use, closed performance is reliable and stable, can save vacuum coating production cost, transfer efficiency is high, using flexible
Novel evacuated isolation gate valve.
The technical solution adopted in the present invention is：The novel evacuated isolation gate valve includes gate valve valve body, it is characterised in that：Institute
The body cavity that is internally provided with of gate valve valve body is stated, the both sides of body cavity are respectively arranged with gate valve import and gate valve outlet；Institute
It states in body cavity, be provided with water cooling isolation valve plate close to the top of gate valve exit end, it includes along gate valve that valve plate, which is isolated, in water cooling
Valve body long side horizontal direction is arranged in the gate valve shaft of gate valve outlet top, is provided with for closing door valve outlet in gate valve shaft
Rotational valve plate, rotational valve plate is connected by valve plate interconnecting piece with gate valve shaft；The gate valve shaft reaches outside gate valve valve body
The both ends in portion are rotatablely connected with the rolling bearing inside the shaft bearing seat that is arranged on gate valve valve outer wall respectively, and gate valve
One end of shaft is hinged by drive link and the telescopic end of valve plate cylinder；Meanwhile the inside at gate valve shaft both ends, point
The shaft intake tunnel and shaft exhalant canal not being provided with axially disposed, one end of shaft intake tunnel be provided with shaft into
The mouth of a river, the other end of shaft intake tunnel is by the interconnecting piece water stream channel I that is arranged inside valve plate interconnecting piece, in rotational valve plate
The entrance of the valve plate water stream channel of portion's setting is connected；And the outlet of the valve plate water stream channel of rotational valve plate, then it is connected by valve plate
The interconnecting piece water stream channel II in portion is connected with one end of the shaft exhalant canal, and the other end of shaft exhalant canal, which is provided with, to be turned
Axis water outlet；It is provided with the transitional transmission device that can be swung up and down in the body cavity, below water cooling isolation valve plate.
The transitional transmission device includes fixed transfer roller, fixed transfer roller is arranged horizontally in body cavity,
Close to one end of gate valve import, the both ends of fixed transfer roller rotation axis pass through the two of hinged end bearing block and body cavity respectively
Side inner wall is connected；One end in the body cavity, close to gate valve outlet is provided with arrangement parallel with the fixed transfer roller
Swing transfer roller, swing the both ends of transfer roller and be connected respectively with the both ends of the fixed transfer roller by swinging connecting plate；Two
Oscillating deck connection stock is provided between the swing connecting plate at end, the both ends that oscillating deck connects stock swing connection with two respectively
Plate is fixedly connected；It is provided with sliding journal stirrup in the middle part of oscillating deck connection stock, slides and is provided with cloth straight up below journal stirrup
The telescopic end of the oscillating cylinder set, oscillating cylinder top is provided with drive block, and swing sliding slot is provided on drive block；The swing
Plate connects the sliding journal stirrup on stock, is slidably connected by the swing sliding slot of be slidably connected axis and drive block；And the fixed biography
Send one end of roller rotation axis to be provided with drive sprocket, the other end of fixed transfer roller rotation axis by chain wheel driving mechanism with it is described
The one end for swinging transfer roller rotation axis is connected.By the flexible of oscillating cylinder, transfer roller is swung around fixed transmission to drive
The axis of roller is swung above and below, and then realizes evacuation when being opened to the conveying of filling trays and water cooling isolation valve plate.
The rotational valve plate of the water cooling isolation valve plate is made of valve plate main body, and valve plate main body exports one to be in contact with gate valve
The periphery of side is provided with sealing rubber ring, inside valve plate main body, position corresponding with the sealing rubber ring be provided with cricoid valve
Plate water stream channel；The entrance of cyclic annular valve plate water stream channel is arranged with the other side middle and upper part of the non-laying sealant circle of valve plate main body
Valve plate water inlet interconnecting piece be connected, valve plate water inlet interconnecting piece be connected with interconnecting piece water stream channel I；Valve plate water stream channel goes out
Mouthful, then it is connected with the valve plate water outlet interconnecting piece of the other side middle and lower part of the non-laying sealant circle of valve plate main body setting, valve plate water outlet
Interconnecting piece is connected with interconnecting piece water stream channel II.The entrance of valve plate water stream channel to be connected with same by valve plate water inlet interconnecting piece
The connected shaft intake tunnel connection of socket part water stream channel I, and interconnecting piece is discharged by the outlet of valve plate water stream channel by valve plate
The shaft exhalant canal connection being connected with same interconnecting piece water stream channel II；And then coolant liquid is allowed to enter shaft from shaft water inlet
Intake tunnel, then entered in valve plate water stream channel via interconnecting piece water stream channel I, subsequent coolant liquid is logical by interconnecting piece flow
Road II and shaft exhalant canal are discharged from shaft water outlet, realize the circulating cooling to rotational valve plate.
The hinged otic placode that the valve plate interconnecting piece is arranged by non-laying sealant circle side in rotation axis, with valve plate main body
It is hinged；Meanwhile the valve plate of the valve plate main body is intake between interconnecting piece and interconnecting piece water stream channel I and valve plate water outlet connects
Between socket part and interconnecting piece water stream channel II, be connected respectively by hollow transitional shaft, and each hollow transitional shaft and valve plate into
Between water interconnecting piece and valve plate water outlet interconnecting piece, it is both provided with rotating seal member.To be driven by the flexible of valve plate cylinder
Drive link rotates, and then gate valve shaft and rotational valve plate hinged thereon is driven to rotate together with, and realizes valve outlet on the door
It opens and closes.
Inside the shaft bearing seat of the water cooling isolation valve plate, the both ends on the outside of gate valve valve body are reached with gate valve shaft
Between outer circumferential walls, it is respectively arranged with rotating shaft sealing component.Effectively to seal between gate valve roller end and gate valve body wall
Binding site, it is ensured that the vacuum degree of body cavity.
The gate valve valve body is located at the position of gate valve outlet inner peripheral of body cavity, and it is logical to be provided with valve body flow
Road.It is cooled down with the sealing rubber ring further on the door on the inside of valve outlet, on rotational valve plate, lift-off seal cushion rubber uses the longevity
Life ensures sealing effect.
The top of hinged end bearing block of the fixation transfer roller both ends setting of the transitional transmission device, body cavity it is interior
On side wall, it is respectively arranged with fixed base plate；And between fixed base plate and corresponding hinged end bearing block, pass through adjusting screw respectively
Flexible connection.By the rotation to adjusting screw, to be transmitted to adjust hinged end bearing block and rotate the fixed of arrangement thereon
The height of roller enhances the using flexible of transitional transmission device.
The fixation transfer roller of the transitional transmission device and the both ends for swinging transfer roller, are respectively arranged with guiding side wheel.
Using the guiding side wheel at both ends, in fixed transfer roller and to swing the conveying on transfer roller to filling trays, be limited and led
To effectively promoting transfer efficiency.
The cylinder body of the oscillating cylinder lower part of the transitional transmission device is located at outside gate valve valve body, and oscillating cylinder top is stretched
Contracting bar then passes through body wall, extend into body cavity, and oscillating cylinder telescopic rod is set with the position that body wall is combined
It is equipped with telescopic rod sealing ring.To seal the binding site of oscillating cylinder telescopic rod and gate valve body wall, it is ensured that body cavity
Vacuum degree.
Beneficial effects of the present invention：Since the present invention is using the gate valve valve body for being internally provided with body cavity, body cavity
Both sides be respectively set gate valve import and gate valve outlet；In body cavity, close to the top of gate valve exit end setting water cooling every
From valve plate, water cooling isolation valve plate includes the gate valve shaft for being arranged in gate valve outlet top in the horizontal direction, is arranged in gate valve shaft
It is useful for the rotational valve plate of closing door valve outlet, rotational valve plate is connected by valve plate interconnecting piece with gate valve shaft；Gate valve shaft is stretched
Go out to the both ends outside gate valve valve body, connect respectively with the rolling bearing inside shaft bearing seat, and one end of gate valve shaft is logical
The telescopic end of connecting rod and valve plate cylinder of overdriving is hinged；Axially disposed turn is respectively set in the inside at gate valve shaft both ends
Axis intake tunnel and shaft exhalant canal, one end of shaft intake tunnel are arranged shaft water inlet, shaft intake tunnel it is another
End is connected by the interconnecting piece water stream channel I of valve plate interconnecting piece with the entrance of the valve plate water stream channel of rotational valve plate；Meanwhile turning
The outlet of the valve plate water stream channel of dynamic valve plate passes through the interconnecting piece water stream channel II and the one of shaft exhalant canal of valve plate interconnecting piece
End is connected, and shaft water outlet is arranged in the other end of shaft exhalant canal；In body cavity, the lower section of water cooling isolation valve plate was arranged
The structure type of transmission device is crossed, so its reasonable design, simple and compact for structure, it can be ensured that the sealing on valve plate is isolated in water cooling
Long-time normal use, closed performance are reliable and stable at high operating temperatures for cushion rubber；Also, utilize transitional transmission device oscillating cylinder
It is flexible, swing transfer roller to drive and swung above and below around the axis of fixed transfer roller, and then realize the conveying to filling trays
Evacuation when being opened with water cooling isolation valve plate.The entirety of the vacuum insulation gate valve occupies little space, can effectively save vacuum coating
Production cost, and transfer efficiency is high, and installation and adjustment are convenient, using flexible, stable and reliable operation.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of the present invention.
Fig. 2 is the A direction views of the water cooling isolation valve plate in Fig. 1.
Fig. 3 is the vertical view of Fig. 2.
Fig. 4 is sectional views of the Fig. 2 along line B-B.
Fig. 5 is that the gate valve shaft in Fig. 4 drives rotational valve plate rotation, a kind of use state signal of closing door valve outlet
Figure.
Fig. 6 is a kind of structural schematic diagram of the rotational valve plate in Fig. 2.
Fig. 7 is the A direction views of the transitional transmission device in Fig. 1.
Fig. 8 is the partial structurtes enlarged drawing at C in Fig. 7.
Fig. 9 is sectional views of the Fig. 7 along line D-D.
Figure 10 is that the oscillating cylinder in Fig. 9 drives swing connecting plate and swing live-roller to be swung up together（Water cooling every
It is had turned on from valve plate）, a kind of use state diagram that filling trays are conveyed.
Number explanation in figure：1 gate valve valve body, 2 body cavities, 3 gate valve imports, the outlet of 4 gate valves, 5 water coolings isolation valve plate, 6
Transitional transmission device, 7 valve plate cylinders, 8 drive links, 9 shaft water inlets, 10 gate valve shafts, 11 shaft bearing seats, 12 rotation axis
It holds, 13 rotating shaft sealing components, 14 shaft intake tunnels, 15 interconnecting piece water stream channels I, 16 valve plate interconnecting pieces, 17 hollow transitionals turn
Axis, 18 rotating seal members, 19 valve plate water stream channels, 20 rotational valve plates, 21 interconnecting piece water stream channels II, the water outlet of 22 shafts are logical
Road, 23 shaft water outlets, 24 sealing rubber rings, 25 flow channel of valve, 26 valve plate main bodies, 27 hinged otic placodes, the water inlet of 28 valve plates connect
Socket part, 29 valve plates water outlet interconnecting piece, 30 hinged end bearing blocks, 31 drive sprockets, 32 fix transfer rollers, 33 chain wheel driving mechanisms,
34 swing connecting plate, 35 swing transfer rollers, 36 oscillating decks connection stock, 37 sliding journal stirrups, 38 drive blocks, 39 guiding side wheels, 40
Be slidably connected axis, 41 oscillating cylinders, 42 telescopic rod sealing rings, 43 swing sliding slots, 44 fixed base plates, 45 adjusting screws.
Specific implementation mode
According to Fig. 1~10 concrete structure that the present invention will be described in detail.The novel evacuated isolation gate valve includes hollow structure
Gate valve valve body 1, gate valve valve body 1 are internally provided with body cavity 2；The both sides of body cavity 2 are separately provided at two
The gate valve import 3 of conveying work pieces and gate valve outlet 4 between adjacent vacuum chamber.In order on 4 inside of valve outlet on the door, rotational valve plate 20
Sealing rubber ring 24 cooled down, gate valve valve body 1 be located at body cavity 2 gate valve export 4 inner peripherals position at, be provided with
Flow channel of valve 25；With the service life of effective lift-off seal cushion rubber 24, ensure the sealing effect of gate valve valve body 1.
The top that 4 one end are exported in the body cavity 2 of gate valve valve body 1, close to gate valve, is provided with for closing door valve outlet
Valve plate 5 is isolated in 4 water cooling, and valve plate 5 is isolated by along the horizontally disposed gate valve shaft 10 of 1 long side direction of gate valve valve body, gate valve in water cooling
Rotational valve plate 20 is provided in shaft 10；Rotational valve plate 20 is connected by two valve plate interconnecting pieces 16 with gate valve shaft 10.Door
Valve shaft 10 reaches the both ends outside gate valve valve body 1, respectively in the shaft bearing seat 11 that is arranged on 1 outer wall of gate valve valve body
The rolling bearing 12 in portion is rotatablely connected；And one end of gate valve shaft 10 is mutually cut with scissors by drive link 8 and the telescopic end of valve plate cylinder 7
It connects.In order to effectively seal the binding site between 1 side wall of 10 end of gate valve shaft and gate valve valve body, the shaft bearing seat 11 at both ends
Between internal and gate valve shaft 10 reaches the both ends outer circumferential walls in 1 outside of gate valve valve body, it is respectively arranged with rotating shaft sealing portion
Part 13, to ensure the vacuum degree of body cavity 2.
The rotational valve plate 20 being arranged in the gate valve shaft 10 of water cooling isolation valve plate 5 is made of valve plate main body 26, valve plate main body
The periphery of 26 sides being in contact with the gate valve of gate valve valve body 1 outlet 4, is provided with the sealing rubber ring for closing door valve outlet 4
24.Inside valve plate main body 26, at position corresponding with the sealing rubber ring 24 on outside portion periphery, it is provided with cricoid valve plate flow
Channel 19.Also, the entrance of cyclic annular valve plate water stream channel 19, and does not have the other side of laying sealant circle 24 on valve plate main body 26
Middle and upper part setting valve plate water inlet interconnecting piece 28 be connected.The outlet of cyclic annular valve plate water stream channel 19, then with valve plate main body 26
The valve plate water outlet interconnecting piece 29 of the middle and lower part setting of the other side of upper no laying sealant circle 24 is connected.Meanwhile gate valve turns
The inside at 10 both ends of axis is respectively arranged with axially disposed shaft intake tunnel 14 and shaft exhalant canal 22, gate valve shaft
One end of 10 shaft intake tunnel 14 is provided with shaft water inlet 9, and the other end of shaft intake tunnel 14 is connected by valve plate
The interconnecting piece water stream channel I 15 that 16 inside of portion is arranged, the valve plate water being connected to the valve plate of same rotational valve plate 20 water inlet interconnecting piece 28
The entrance of circulation road 19 is connected；And the outlet of the valve plate water stream channel 19 of rotational valve plate 20, then it is discharged and is connected by same valve plate
The interconnecting piece water stream channel II 21 for the valve plate interconnecting piece 16 that portion 29 is connected to is connected with one end of shaft exhalant canal 22, shaft
The other end of exhalant canal 22 is provided with shaft water outlet 23.
Two valve plate interconnecting pieces 16 being arranged in gate valve shaft 10, pass through the valve plate master of rotation axis and rotational valve plate 20 respectively
Two hinged otic placodes 27 for not having 24 side of laying sealant circle to be arranged on body 26 are hinged.Meanwhile the valve plate of valve plate main body 26
Intake between interconnecting piece 28 and the interconnecting piece water stream channel I 15 of top valve plate interconnecting piece 16 and valve plate water outlet interconnecting piece 29 with
Between the interconnecting piece water stream channel II 21 of lower part valve plate interconnecting piece 16, it is connected respectively by hollow transitional shaft 17；And it is each
Between hollow transitional shaft 17 and valve plate water inlet interconnecting piece 28 and valve plate water outlet interconnecting piece 29, it is both provided with rotating seal member
18.To which the entrance of valve plate water stream channel 19 is connected with same interconnecting piece water stream channel I 15 by valve plate water inlet interconnecting piece 28
Shaft intake tunnel 14 be connected to, and by valve plate be discharged interconnecting piece 29 by the outlet of valve plate water stream channel 19 with interconnecting piece water
The shaft exhalant canal 22 that circulation road II 21 is connected is connected to.And then coolant liquid is allowed to enter shaft water inlet from shaft water inlet 9
Channel 14, then entered in valve plate water stream channel 19 via interconnecting piece water stream channel I 15, subsequent coolant liquid passes through interconnecting piece flow
Channel II 21 and shaft exhalant canal 22 are discharged from shaft water outlet 23, realize the circulating cooling to rotational valve plate 20；And pass through
Valve plate cylinder 7 it is flexible come drive drive link 8 rotate, to drive gate valve shaft 10 and rotational valve plate 20 1 hinged thereon
With rotation, the unlatching and closing of valve outlet 4 on the door is neatly realized.
In the body cavity 2 of gate valve valve body 1, the lower section of water cooling isolation valve plate 5, be provided with the transition transmission that can be swung up and down
Device 6.Transitional transmission device 6 includes being arranged horizontally in the body cavity 2 of gate valve valve body 1, close to gate valve import 3 one
The fixation transfer roller 32 at end, the both ends of 32 rotation axis of fixed transfer roller, passes through hinged end bearing block 30 and body cavity 2 respectively
Both sides inner wall is connected.For the using flexible of intensifier, the hinged end bearing block 30 of 32 both ends of fixed transfer roller setting
Top, body cavity 2 madial wall on, be respectively arranged with fixed base plate 44；And fixed base plate 44 and corresponding hinge support axis
Between bearing 30, it is flexibly connected respectively by adjusting screw 45；And then by the rotation to adjusting screw 45, to adjust hinge support
Bearing block 30 and rotate thereon arrangement fixation transfer roller 32 height.One end in body cavity 2, close to gate valve outlet 4,
Then it is provided with the swing transfer roller 35 of arrangement parallel with fixed transfer roller 32.
The both ends of the swing transfer roller 35 of transitional transmission device 6, respectively by swinging connecting plate 34 and fixed transfer roller 32
Both ends be connected.Also, between the swing connecting plate 34 at both ends, it is provided with the oscillating deck connection stock 36 of long column shape, oscillating deck
The both ends for connecting stock 36 are fixedly connected with two swing connecting plates 34 respectively.Meanwhile the middle part of oscillating deck connection stock 36 is set
It is equipped with for driving the sliding journal stirrup 37 for swinging connecting plate 34 and swinging up and down, the lower section of sliding journal stirrup 37 to be provided with cloth straight up
The oscillating cylinder 41 set.The cylinder body of 41 lower part of oscillating cylinder is located at the outside of gate valve valve body 1, the telescopic rod on 41 top of oscillating cylinder
It then passes through body wall, extend into body cavity 2, and the position setting that 41 telescopic rod of oscillating cylinder is combined with body wall
There is telescopic rod sealing ring 42.To effectively seal the binding site of 41 telescopic rod of oscillating cylinder and 1 side wall of gate valve valve body, it is ensured that valve
The vacuum degree of intracoelomic cavity 2., it is understood that according to specifically using needs, oscillating cylinder 41 that range-adjustable gas may be used
Cylinder, to adjust the flexible stroke of oscillating cylinder 41.
The upper end of 41 telescopic rod of oscillating cylinder of transitional transmission device 6, is provided with for connecting stock 36 with oscillating deck
The drive block 38 that the sliding journal stirrup 37 at middle part is connected；The inclination to reciprocatingly slide convenient for the axis 40 that is slidably connected is provided on drive block 38
Swing sliding slot 43.Oscillating deck connects the sliding journal stirrup 37 on stock 36, passes through axis 40 and the swing on drive block 38 of being slidably connected
Sliding slot 43 is slidably connected.And then by the flexible of oscillating cylinder 41, and connected using the swing sliding slot 43 of drive block 38 and oscillating deck
The cooperation transmission of the sliding journal stirrup 37 of extension bar 36, to drive swing transfer roller 35 upper and lower around the axis of fixed transfer roller 32
It swings, to realize evacuation when being opened to the conveying of filling trays and water cooling isolation 5 rotational valve plate 20 of valve plate.For effectively carrying
The purpose of transfer efficiency, the fixation transfer roller 32 of transitional transmission device 6 and the both ends for swinging transfer roller 35 are risen, are respectively arranged with
It is oriented to side wheel 39；Using the guiding side wheel 39 at both ends, in fixed transfer roller 32 and to be swung on transfer roller 35 to filling trays
Conveying, is limited and is oriented to.One end of 32 rotation axis of fixed transfer roller is provided with drive sprocket 31, and drive sprocket 31 passes through biography
Motivation structure is connected with transmission roll drive motor；The other end of fixed 32 rotation axis of transfer roller, then by chain wheel driving mechanism 33 with
The one end for swinging 35 rotation axis of transfer roller is connected, and transfer roller 35 and the fixed synchronous rotation of transfer roller 32 are swung to drive.
The novel evacuated isolation gate valve in use, during core inductance vacuum coating equipment normally closed plated film,
The valve plate cylinder 7 of water cooling isolation valve plate 5 and the oscillating cylinder 41 of transitional transmission device 6 are in retracted state, i.e.,：Water cooling is isolated
The 20 closing door valve outlet 4 of rotational valve plate of valve plate 5.Meanwhile it being used for coolant liquid of the cooling water cold shut from 5 rotational valve plate 20 of valve plate,
Enter shaft intake tunnel 14 from shaft water inlet 9, then via interconnecting piece water stream channel I 15 and hollow transitional shaft 17, from
Valve plate water inlet interconnecting piece 28 enters in the valve plate water stream channel 19 of rotational valve plate 20；Later, cold in valve plate water stream channel 19
But liquid is discharged interconnecting piece 29 and interconnecting piece water stream channel II 21, from shaft exhalant canal 22 and shaft water outlet 23 by valve plate
Discharge, to be cooled down to rotational valve plate 20 using the coolant liquid circulated, enables the sealing rubber ring 24 on rotational valve plate 20
Enough long-time normal uses at high operating temperatures, it is ensured that the stability and reliability of isolating door valve closure performance.
When needing to convey workpiece to be coated between two adjacent vacuum chambers, first, water cooling isolation valve plate 5 is stretched out
Valve plate cylinder 7, and then drive link 8 is driven to rotate, to drive gate valve shaft 10 and rotational valve plate 20 hinged thereon together
Rotation, to open the gate valve outlet 4 of gate valve valve body 1.Then, the telescopic end of 6 oscillating cylinder 41 of transitional transmission device stretches out, profit
The cooperation transmission of the sliding journal stirrup 37 at 36 middle part of stock is connect with oscillating deck with the swing sliding slot 43 of telescopic end drive block 38, carrys out band
Movable pendulum move connecting plate 34 and swing transfer roller 35 around fixed transfer roller 32 axis, swing upwards into horizontal position（Such as figure
Shown in 10）；Later, start the transmission roll drive motor of transitional transmission device 6, driving swings transfer roller 35 and fixed transfer roller 32
It rotates synchronously, filling trays is transported to gate valve outlet 4 from gate valve import 3.Workpiece to be coated is completed in two vacuum chambers
Between transmission after, withdraw 6 oscillating cylinder 41 of transitional transmission device telescopic end, drive swing connecting plate 34 and swing transfer roller
35 return original state to lower swing（As shown in Figure 9）, it is that the closing of water cooling isolation 5 rotational valve plate 20 of valve plate is avoided；Then,
The valve plate cylinder 7 that valve plate 5 is isolated in water cooling is withdrawn, and drives rotational valve plate 20 to be rotated down, closing door valve outlet 4, vacuum coating is set
It is standby to carry out subsequent plated film processing.The vacuum insulation gate valve occupies little space, can effectively save production cost, transfer efficiency
Height, using flexible, stable and reliable operation.
Claims (9)
1. a kind of novel evacuated isolation gate valve, including gate valve valve body（1）, it is characterised in that：The gate valve valve body（1）Inside set
It is equipped with body cavity（2）, body cavity（2）Both sides be respectively arranged with gate valve import（3）It is exported with gate valve（4）；The valve body
Inner cavity（2）Interior, close gate valve exports（4）The top of one end is provided with water cooling isolation valve plate（5）, water cooling isolation valve plate（5）Including
Along gate valve valve body（1）Long side horizontal direction is arranged in gate valve outlet（4）The gate valve shaft of top（10）, gate valve shaft（10）On set
It is equipped with and is used for closing door valve outlet（4）Rotational valve plate（20）, rotational valve plate（20）Pass through valve plate interconnecting piece（16）Turn with gate valve
Axis（10）It is connected；The gate valve shaft（10）Reach gate valve valve body（1）External both ends, respectively with setting in gate valve valve body
（1）Shaft bearing seat on outer wall（11）Internal rolling bearing（12）Rotation connection, and gate valve shaft（10）One end pass through
Drive link（8）With valve plate cylinder（7）Telescopic end be hinged；Meanwhile the gate valve shaft（10）The inside at both ends, sets respectively
It is equipped with axially disposed shaft intake tunnel（14）With shaft exhalant canal（22）, shaft intake tunnel（14）One end setting
There is shaft water inlet（9）, shaft intake tunnel（14）The other end pass through valve plate interconnecting piece（16）The interconnecting piece water of inside setting
Circulation road I（15）, with rotational valve plate（20）The valve plate water stream channel of inside setting（19）Entrance be connected；And rotational valve plate（20）
Valve plate water stream channel（19）Outlet, then pass through valve plate interconnecting piece（16）Interconnecting piece water stream channel II（21）With the shaft
Exhalant canal（22）One end be connected, shaft exhalant canal（22）The other end be provided with shaft water outlet（23）；The valve body
Inner cavity（2）Valve plate is isolated in interior, water cooling（5）Lower section be provided with the transitional transmission device that can be swung up and down（6）.
2. novel evacuated isolation gate valve according to claim 1, it is characterised in that：The transitional transmission device（6）Including
Fixed transfer roller（32）, fixed transfer roller（32）It is arranged horizontally at body cavity（2）Interior, close gate valve import（3）'s
One end, fixed transfer roller（32）The both ends of rotation axis pass through hinged end bearing block respectively（30）With body cavity（2）Both sides in
Wall is connected；The body cavity（2）Interior, close gate valve exports（4）One end, be provided with and the fixed transfer roller（32）It is equal
The swing transfer roller of row arrangement（35）, swing transfer roller（35）Both ends respectively pass through swing connecting plate（34）With the fixed biography
Send roller（32）Both ends be connected；The swing connecting plate at both ends（34）Between be provided with oscillating deck connection stock（36）, oscillating deck company
Extension bar（36）Both ends respectively with two swing connecting plates（34）It is fixedly connected；Oscillating deck connects stock（36）Middle part setting
There is sliding journal stirrup（37）, slide journal stirrup（37）Lower section be provided with the oscillating cylinder arranged straight up（41）, oscillating cylinder
（41）The telescopic end on top is provided with drive block（38）, drive block（38）On be provided with swing sliding slot（43）；The oscillating deck connects
Extension bar（36）On sliding journal stirrup（37）, pass through the axis that is slidably connected（40）With drive block（38）Swing sliding slot（43）Sliding connects
It connects；And the fixed transfer roller（32）One end of rotation axis is provided with drive sprocket（31）, fixed transfer roller（32）Rotation axis
The other end passes through chain wheel driving mechanism（33）With the swing transfer roller（35）One end of rotation axis is connected.
3. novel evacuated isolation gate valve according to claim 1, it is characterised in that：Valve plate is isolated in the water cooling（5）Turn
Dynamic valve plate（20）By valve plate main body（26）It constitutes, valve plate main body（26）It is exported with gate valve（4）The periphery for the side being in contact is arranged
There is sealing rubber ring（24）, valve plate main body（26）The internal and sealing rubber ring（24）Corresponding position is provided with cricoid valve
Plate water stream channel（19）；Cyclic annular valve plate water stream channel（19）Entrance, with valve plate main body（26）Non- laying sealant circle（24）'s
The valve plate water inlet interconnecting piece of other side middle and upper part setting（28）It is connected, valve plate water inlet interconnecting piece（28）With interconnecting piece water stream channel I
（15）It is connected；Valve plate water stream channel（19）Outlet, then with valve plate main body（26）Non- laying sealant circle（24）The other side
The valve plate of middle and lower part setting is discharged interconnecting piece（29）It is connected, valve plate is discharged interconnecting piece（29）With interconnecting piece water stream channel II（21）Phase
Connection.
4. novel evacuated isolation gate valve according to claim 3, it is characterised in that：The valve plate interconnecting piece（16）By turning
Moving axis, with valve plate main body（26）On non-laying sealant circle（24）The hinged otic placode of side setting（27）It is hinged；Meanwhile it is described
Valve plate main body（26）Valve plate intake interconnecting piece（28）With interconnecting piece water stream channel I（15）Between and valve plate be discharged interconnecting piece
（29）With interconnecting piece water stream channel II（21）Between, pass through hollow transitional shaft respectively（17）It is connected, and each hollow transitional shaft
（17）With valve plate water inlet interconnecting piece（28）It is discharged interconnecting piece with valve plate（29）Between, it is both provided with rotating seal member（18）.
5. novel evacuated isolation gate valve according to claim 1, it is characterised in that：Valve plate is isolated in the water cooling（5）Turn
Bearing housing（11）Inside, with gate valve shaft（10）Reach gate valve valve body（1）Between the both ends outer circumferential walls in outside, respectively
It is provided with rotating shaft sealing component（13）.
6. novel evacuated isolation gate valve according to claim 1, it is characterised in that：The gate valve valve body（1）Positioned at valve body
Inner cavity（2）Gate valve outlet（4）At the position of inner peripheral, it is provided with flow channel of valve（25）.
7. novel evacuated isolation gate valve according to claim 2, it is characterised in that：The transitional transmission device（6）Consolidate
Determine transfer roller（32）The hinged end bearing block of both ends setting（30）Top, body cavity（2）Madial wall on, be respectively arranged with
Fixed base plate（44）；And fixed base plate（44）With corresponding hinged end bearing block（30）Between, pass through adjusting screw respectively（45）
Flexible connection.
8. novel evacuated isolation gate valve according to claim 2, it is characterised in that：The transitional transmission device（6）Consolidate
Determine transfer roller（32）And swing transfer roller（35）Both ends, be respectively arranged with guiding side wheel（39）.
9. novel evacuated isolation gate valve according to claim 2, it is characterised in that：The transitional transmission device（6）Pendulum
It takes offence cylinder（41）The cylinder body of lower part is located at gate valve valve body（1）Outside, oscillating cylinder（41）The telescopic rod on top then passes through valve body-side
Wall extend into body cavity（2）It is interior, and oscillating cylinder（41）Telescopic rod is provided with telescopic rod with the position that body wall is combined
Sealing ring（42）.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810843281.5A CN108716550B (en) | 2018-07-27 | 2018-07-27 | Novel vacuum isolation door valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810843281.5A CN108716550B (en) | 2018-07-27 | 2018-07-27 | Novel vacuum isolation door valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108716550A true CN108716550A (en) | 2018-10-30 |
| CN108716550B CN108716550B (en) | 2024-03-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810843281.5A Active CN108716550B (en) | 2018-07-27 | 2018-07-27 | Novel vacuum isolation door valve |
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| CN201696708U (en) * | 2009-12-25 | 2011-01-05 | 贵州新艺机械厂 | Water-cooling vacuum isolation valve |
| CN202629101U (en) * | 2012-06-20 | 2012-12-26 | 费海鸿 | Water-cooling vacuum flap valve |
| CN202629122U (en) * | 2012-05-23 | 2012-12-26 | 费海鸿 | Swing-type water-cooling vacuum gate valve and valve core component thereof |
| KR20130079916A (en) * | 2012-01-03 | 2013-07-11 | (주)엘티엘 | Vacuum isolation apparatus |
| CN103423477A (en) * | 2012-05-23 | 2013-12-04 | 费海鸿 | Swinging water-cooled vacuum gate valve and spool component thereof |
| CN204611054U (en) * | 2015-04-08 | 2015-09-02 | 爱发科中北真空（沈阳）有限公司 | A kind of rotary type vacuum separation valve |
| CN108278369A (en) * | 2018-03-09 | 2018-07-13 | 重庆川仪调节阀有限公司 | The double water cooling butterfly valves of single cycle guide plate type |
| CN208535181U (en) * | 2018-07-27 | 2019-02-22 | 沈阳乐贝真空技术有限公司 | A kind of novel evacuated isolation gate valve |
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2018
- 2018-07-27 CN CN201810843281.5A patent/CN108716550B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201696708U (en) * | 2009-12-25 | 2011-01-05 | 贵州新艺机械厂 | Water-cooling vacuum isolation valve |
| KR20130079916A (en) * | 2012-01-03 | 2013-07-11 | (주)엘티엘 | Vacuum isolation apparatus |
| CN202629122U (en) * | 2012-05-23 | 2012-12-26 | 费海鸿 | Swing-type water-cooling vacuum gate valve and valve core component thereof |
| CN103423477A (en) * | 2012-05-23 | 2013-12-04 | 费海鸿 | Swinging water-cooled vacuum gate valve and spool component thereof |
| CN202629101U (en) * | 2012-06-20 | 2012-12-26 | 费海鸿 | Water-cooling vacuum flap valve |
| CN204611054U (en) * | 2015-04-08 | 2015-09-02 | 爱发科中北真空（沈阳）有限公司 | A kind of rotary type vacuum separation valve |
| CN108278369A (en) * | 2018-03-09 | 2018-07-13 | 重庆川仪调节阀有限公司 | The double water cooling butterfly valves of single cycle guide plate type |
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|---|---|
| CN108716550B (en) | 2024-03-01 |
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