CN108716550B - Novel vacuum isolation door valve - Google Patents
Novel vacuum isolation door valve Download PDFInfo
- Publication number
- CN108716550B CN108716550B CN201810843281.5A CN201810843281A CN108716550B CN 108716550 B CN108716550 B CN 108716550B CN 201810843281 A CN201810843281 A CN 201810843281A CN 108716550 B CN108716550 B CN 108716550B
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- valve plate
- rotating shaft
- water
- door
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- 238000002955 isolation Methods 0.000 title claims abstract description 59
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 148
- 238000007789 sealing Methods 0.000 claims abstract description 48
- 230000007704 transition Effects 0.000 claims abstract description 36
- 238000001816 cooling Methods 0.000 claims abstract description 34
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000007246 mechanism Effects 0.000 claims description 6
- 210000000476 body water Anatomy 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000001771 vacuum deposition Methods 0.000 description 11
- 230000008602 contraction Effects 0.000 description 5
- 239000000110 cooling liquid Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000576 coating method Methods 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2007—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member specially adapted operating means therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2014—Shaping of the valve member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2042—Special features or arrangements of the sealing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2042—Special features or arrangements of the sealing
- F16K1/205—Special features or arrangements of the sealing the sealing being arranged on the valve member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K49/00—Means in or on valves for heating or cooling
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
The utility model provides a novel vacuum isolation door valve, solves the sealing performance that prior art exists poor, occupation space is big, and manufacturing cost is high, the low problem of conveying efficiency. Including the inside valve body that is provided with valve body inner chamber, its characterized in that: a water-cooling isolation valve plate is arranged at one end, close to the outlet of the valve, in the inner cavity of the valve body, a valve rotating shaft of the water-cooling isolation valve plate is provided with a rotating valve plate, and one end of the valve rotating shaft is hinged with a telescopic end of a valve plate cylinder through a driving connecting rod; the two ends of the door valve rotating shaft are respectively provided with a rotating shaft water inlet channel and a rotating shaft water outlet channel, and the rotating shaft water inlet channel is connected with the inlet of the valve plate water flow channel through a connecting part water flow channel I; the outlet of the valve plate water flow channel is connected with the rotating shaft water outlet channel through the connecting part water flow channel II; a transition conveying device is arranged below the water-cooling isolation valve plate. The device has the advantages of reasonable design, compact structure, small occupied space, stable and reliable sealing performance, production cost saving, high conveying efficiency, flexible use and stable operation.
Description
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to a novel vacuum isolation door valve which is compact in structure, can ensure long-time normal use of a sealing rubber ring in a high-temperature state, is stable and reliable in sealing performance, can save the production cost of vacuum coating, and is high in conveying efficiency and flexible to use.
Background
The magnetic core inductance vacuum coating equipment with ultra-large yield is generally composed of a plurality of vacuum chamber boxes, and isolation gate valves are required to be arranged between adjacent vacuum chambers because of process requirements so as to realize isolation between vacuum and atmosphere or isolation between vacuum and vacuum with different vacuum requirements. Meanwhile, as the workpiece to be plated needs to be heated when the magnetic core inductance vacuum coating equipment works, the vacuum isolation door valve can bear a certain temperature. Although the sealing rubber ring on the valve plate of the door is generally made of high-temperature resistant materials, the highest temperature of the door cannot exceed 250 ℃; however, the maximum temperature in the magnetic core inductance vacuum coating equipment can reach 400 ℃, so in order to enable the sealing rubber ring to be normally used for a long time in a high temperature state, a cooling structure needs to be arranged on the vacuum isolation door valve. Most of the existing vacuum isolation gate valves are only provided with cooling water channels on the valve body, and a cooling structure is not arranged on a valve plate for opening and closing the gate valve, so that the overall cooling effect is poor, the sealing effect and the service life of a sealing rubber ring are reduced, and the sealing performance of the vacuum isolation gate valve is seriously affected.
In addition, in the process of continuously conveying the tray provided with the plated workpiece in the magnetic core inductance vacuum coating equipment, when the tray needs to pass through the vacuum isolation door valve, the tray cannot directly pass through as the inner cavity of the valve body has a certain width; therefore, a transition conveying device is arranged in the inner cavity of the valve body to smoothly convey the tray into the adjacent vacuum chamber. However, because the inner cavity of the valve body is required to be provided with the rotating valve plate, the transition conveying device and other mechanisms at the same time, the overall size of the vacuum isolation door valve is increased, the occupied space is large, and the reasonable arrangement of the whole production line is influenced; in addition, the wider valve body inner cavity also promotes the production cost of vacuum coating, which is unfavorable for environmental protection and energy saving. Meanwhile, the existing transition conveying device is low in conveying efficiency, insufficient in use flexibility and poor in running stability. Therefore, there is a need for improvements in the construction of existing vacuum isolation gate valves.
Disclosure of Invention
The invention aims at the problems, and provides the novel vacuum isolation door valve which has the advantages of compact structure, stable and reliable sealing performance, high conveying efficiency and flexible use, and can ensure that the sealing rubber ring can be normally used for a long time in a high-temperature state, and the production cost of vacuum coating can be saved.
The technical scheme adopted by the invention is as follows: this novel vacuum isolation door valve includes door valve body, its characterized in that: the inside of the valve body of the valve is provided with a valve body inner cavity, and two sides of the valve body inner cavity are respectively provided with a valve inlet and a valve outlet; the upper part of one end, close to the gate valve outlet, of the inner cavity of the valve body is provided with a water-cooling isolation valve plate, the water-cooling isolation valve plate comprises a gate valve rotating shaft which is arranged above the gate valve outlet along the horizontal direction of the long side of the gate valve body, the gate valve rotating shaft is provided with a rotating valve plate for closing the gate valve outlet, and the rotating valve plate is connected with the gate valve rotating shaft through a valve plate connecting part; the door valve rotating shaft extends to two ends outside the door valve body and is respectively and rotatably connected with a rotating bearing in a rotating shaft bearing seat arranged on the outer wall of the door valve body, and one end of the door valve rotating shaft is hinged with the telescopic end of the valve plate cylinder through a driving connecting rod; meanwhile, a rotating shaft water inlet channel and a rotating shaft water outlet channel which are axially arranged are respectively arranged in the two ends of the rotating shaft of the gate valve, a rotating shaft water inlet is formed in one end of the rotating shaft water inlet channel, and the other end of the rotating shaft water inlet channel is connected with an inlet of a valve plate water flow channel which is arranged in the rotating valve plate through a connecting part water flow channel I which is arranged in the valve plate connecting part; the outlet of the valve plate water flow channel of the rotary valve plate is connected with one end of the rotary shaft water outlet channel through a connecting part water flow channel II of the valve plate connecting part, and the other end of the rotary shaft water outlet channel is provided with a rotary shaft water outlet; and a transition conveying device capable of swinging up and down is arranged in the inner cavity of the valve body and below the water-cooling isolation valve plate.
The transition conveying device comprises a fixed conveying roller, wherein the fixed conveying roller is arranged in the inner cavity of the valve body along the horizontal direction and is close to one end of the inlet of the valve, and two ends of a rotating shaft of the fixed conveying roller are respectively connected with inner walls at two sides of the inner cavity of the valve body through bearing seats at hinged ends; one end, close to the outlet of the gate valve, in the inner cavity of the valve body is provided with a swinging conveying roller which is arranged in parallel with the fixed conveying roller, and two ends of the swinging conveying roller are respectively connected with two ends of the fixed conveying roller through swinging connecting plates; a swinging plate connecting long rod is arranged between the swinging connecting plates at the two ends, and the two ends of the swinging plate connecting long rod are fixedly connected with the two swinging connecting plates respectively; the middle part of the swing plate connecting long rod is provided with a sliding support lug, a swing cylinder which is vertically upwards arranged is arranged below the sliding support lug, a driving block is arranged at the telescopic end of the upper part of the swing cylinder, and a swing chute is arranged on the driving block; the swing plate is connected with a sliding support lug on the long rod and is in sliding connection with a swing chute of the driving block through a sliding connection shaft; and one end of the fixed conveying roller rotating shaft is provided with a driving sprocket, and the other end of the fixed conveying roller rotating shaft is connected with one end of the swinging conveying roller rotating shaft through a sprocket transmission mechanism. The swing conveying roller is driven to swing up and down around the axis of the fixed conveying roller through the extension and contraction of the swing air cylinder, so that the feeding of the feeding tray and avoidance when the water-cooling isolation valve plate is opened are realized.
The rotary valve plate of the water-cooling isolation valve plate is composed of a valve plate main body, a sealing rubber ring is arranged on the periphery of one side of the valve plate main body, which is contacted with a door valve outlet, and an annular valve plate water flow channel is arranged in the valve plate main body and at a position corresponding to the sealing rubber ring; an inlet of the annular valve plate water flow channel is connected with a valve plate water inlet connecting part arranged at the middle upper part of the other side of the valve plate main body, where the sealing rubber ring is not arranged, and the valve plate water inlet connecting part is connected with a connecting part water flow channel I; the outlet of the valve plate water flow channel is connected with a valve plate water outlet connecting part arranged at the middle lower part of the other side of the valve plate main body, where the sealing rubber ring is not arranged, and the valve plate water outlet connecting part is connected with a connecting part water flow channel II. The inlet of the valve plate water flow channel is communicated with the rotating shaft water inlet channel connected with the connecting part water flow channel I through the valve plate water inlet connecting part, and the outlet of the valve plate water flow channel is communicated with the rotating shaft water outlet channel connected with the connecting part water flow channel II through the valve plate water outlet connecting part; and then let the coolant liquid enter into the pivot water inlet channel from the pivot water inlet, enter into the valve plate water flow channel again through connecting portion water flow channel I in, the coolant liquid is discharged from the pivot delivery port through connecting portion water flow channel II and pivot play water flow channel afterwards, realizes the circulative cooling to the rotation valve plate.
The valve plate connecting part is hinged with a hinged lug plate arranged on one side of the valve plate main body, on which the sealing rubber ring is not arranged, through a rotating shaft; simultaneously, the valve plate water inlet connecting part and the connecting part water flow channel I of the valve plate main body and the valve plate water outlet connecting part and the connecting part water flow channel II are respectively connected through hollow transition rotating shafts, and rotary sealing parts are arranged between the hollow transition rotating shafts and the valve plate water inlet connecting part and the valve plate water outlet connecting part. The driving connecting rod is driven to rotate through the expansion and contraction of the valve plate cylinder, so that the door valve rotating shaft and the hinged rotating valve plate on the door valve rotating shaft are driven to rotate together, and the opening and closing of the door valve outlet are realized.
And a rotating shaft sealing component is respectively arranged inside the rotating shaft bearing seat of the water-cooling isolation valve plate and between the two end part circumferential outer walls of the outer side of the valve body of the door valve, which extend out of the rotating shaft of the door valve. The joint part between the end part of the door valve rotating shaft and the side wall of the door valve body is effectively sealed, so that the vacuum degree of the inner cavity of the valve body is ensured.
The valve body of the valve is positioned at the periphery of the inner side of the valve outlet of the inner cavity of the valve body, and a valve body water flow channel is arranged. The sealing rubber ring on the inner side of the outlet of the door valve and the rotary valve plate is further cooled, the service life of the sealing rubber ring is prolonged, and the sealing effect is guaranteed.
A fixed seat plate is respectively arranged above the hinged end bearing seats arranged at the two ends of the fixed conveying roller of the transition conveying device and on the inner side wall of the inner cavity of the valve body; and the fixed seat plate is movably connected with the corresponding hinged end bearing seat through adjusting screws. The height of the hinged end bearing seat and the fixed conveying roller rotatably arranged on the hinged end bearing seat are adjusted through the rotation of the adjusting screw, so that the use flexibility of the transition conveying device is enhanced.
And the two ends of the fixed conveying roller and the swinging conveying roller of the transition conveying device are respectively provided with a guide side wheel. With the guide side wheel at both ends, carry on spacing and direction to the transport of loading tray on fixed transfer roller and swing transfer roller, effectively promote conveying efficiency.
The cylinder body of the lower part of the swing cylinder of the transition conveying device is positioned outside the valve body of the door valve, the telescopic rod at the upper part of the swing cylinder penetrates through the side wall of the valve body and stretches into the inner cavity of the valve body, and a telescopic rod sealing ring is arranged at the combined part of the telescopic rod of the swing cylinder and the side wall of the valve body. The vacuum degree of the inner cavity of the valve body is ensured by sealing the joint part of the swing cylinder telescopic rod and the side wall of the valve body of the door valve.
The invention has the beneficial effects that: because the invention adopts the valve body of the valve with the inner cavity of the valve body, the two sides of the inner cavity of the valve body are respectively provided with the inlet and the outlet of the valve; the upper part of one end, close to the gate valve outlet, of the inner cavity of the valve body is provided with a water-cooling isolation valve plate, the water-cooling isolation valve plate comprises a gate valve rotating shaft which is arranged above the gate valve outlet along the horizontal direction, a rotary valve plate for closing the gate valve outlet is arranged on the gate valve rotating shaft, and the rotary valve plate is connected with the gate valve rotating shaft through a valve plate connecting part; the door valve rotating shaft extends to two ends of the outer part of the door valve body and is respectively connected with a rotating bearing in a rotating shaft bearing seat, and one end of the door valve rotating shaft is hinged with the telescopic end of the valve plate cylinder through a driving connecting rod; a rotary shaft water inlet channel and a rotary shaft water outlet channel which are axially arranged are respectively arranged in the two ends of the rotary shaft of the gate valve, one end of the rotary shaft water inlet channel is provided with a rotary shaft water inlet, and the other end of the rotary shaft water inlet channel is connected with an inlet of a valve plate water flow channel of the rotary valve plate through a connecting part water flow channel I of the valve plate connecting part; meanwhile, an outlet of a valve plate water flow channel of the rotary valve plate is connected with one end of a rotary shaft water outlet channel through a connecting part water flow channel II of a valve plate connecting part, and a rotary shaft water outlet is arranged at the other end of the rotary shaft water outlet channel; the transition conveying device is arranged in the inner cavity of the valve body and below the water-cooling isolation valve plate, so that the valve is reasonable in design, simple and compact in structure, and stable and reliable in sealing performance, and can ensure that the sealing rubber ring on the water-cooling isolation valve plate is normally used for a long time in a high-temperature state; and moreover, the swing conveying roller is driven to swing up and down around the axis of the fixed conveying roller by utilizing the extension and contraction of the swing cylinder of the transition conveying device, so that the feeding tray is conveyed and the water-cooling isolation valve plate is avoided when being opened. The vacuum isolation door valve has small overall occupied space, can effectively save the production cost of vacuum coating, has high conveying efficiency, is convenient to install and adjust, is flexible to use, and runs stably and reliably.
Drawings
Fig. 1 is a schematic view of a structure of the present invention.
Fig. 2 is an a-direction view of the water cooled isolation valve plate of fig. 1.
Fig. 3 is a top view of fig. 2.
Fig. 4 is a cross-sectional view taken along line B-B of fig. 2.
FIG. 5 is a schematic view of the door valve in FIG. 4 in a use state in which the rotary valve plate is rotated by the door valve shaft to close the door valve outlet.
Fig. 6 is a schematic view of a structure of the rotary valve plate of fig. 2.
Fig. 7 is an a-direction view of the transition conveyor of fig. 1.
Fig. 8 is an enlarged view of a partial structure at C in fig. 7.
Fig. 9 is a sectional view taken along line D-D of fig. 7.
Fig. 10 is a schematic view of a use state of the oscillating cylinder in fig. 9 for driving the oscillating connecting plate and the oscillating driving roller to oscillate upward (the water-cooled isolating valve plate is opened) and conveying the loading tray.
The serial numbers in the figures illustrate: a valve body of a valve 1, an inner cavity of a valve body 2, an inlet of a valve 3, an outlet of a valve 4, a water-cooling isolation valve plate 5, a transition transmission device 6, a valve plate cylinder 7, a driving connecting rod 8, a water inlet of a rotating shaft 9, a rotating shaft 10, a bearing seat of a rotating shaft 11, a rotating bearing 12, a sealing part of a rotating shaft 13, a water inlet channel of a rotating shaft 14, a water flow channel I of a connecting part 15, a connecting part 16, a hollow transition rotating shaft 17, a rotating sealing part 18, a water flow channel of a valve plate 19, a rotating valve plate 20, a water flow channel II of a connecting part 21, a water outlet channel of a rotating shaft 22 the device comprises a rotating shaft water outlet 23, a sealing rubber ring 24, a valve body water flow channel 25, a valve plate main body 26, a hinged lug plate 27, a valve plate water inlet connecting part 28, a valve plate water outlet connecting part 29, a hinged end bearing seat 30, a driving sprocket 31, a fixed conveying roller 32, a sprocket transmission mechanism 33, a swinging connecting plate 34, a swinging conveying roller 35, a swinging plate connecting long rod 36, a sliding lug 37, a driving block 38, a guiding side wheel 39, a sliding connecting shaft 40, a swinging cylinder 41, a telescopic rod sealing ring 42, a swinging chute 43, a fixed seat plate 44 and a regulating screw 45.
Detailed Description
The specific structure of the present invention will be described in detail with reference to fig. 1 to 10. The novel vacuum isolation door valve comprises a door valve body 1 with a hollow structure, wherein a valve body inner cavity 2 is arranged in the door valve body 1; two sides of the valve body inner cavity 2 are respectively provided with a door valve inlet 3 and a door valve outlet 4 for conveying workpieces between two adjacent vacuum chambers. In order to cool the sealing rubber ring 24 on the rotary valve plate 20 inside the valve outlet 4, the valve body 1 of the valve is arranged at the periphery of the inner side of the valve outlet 4 of the valve body inner cavity 2, and a valve body water flow channel 25 is arranged; so as to effectively prolong the service life of the sealing rubber ring 24 and ensure the sealing effect of the valve body 1 of the door valve.
The upper part of one end, close to the gate valve outlet 4, of the valve body cavity 2 of the gate valve body 1 is provided with a water-cooling isolation valve plate 5 for closing the gate valve outlet 4, the water-cooling isolation valve plate 5 is formed by a gate valve rotating shaft 10 horizontally arranged along the long side direction of the gate valve body 1, and the gate valve rotating shaft 10 is provided with a rotary valve plate 20; the rotary valve plate 20 is connected to the door valve spindle 10 through two valve plate connecting portions 16. The door valve rotating shaft 10 extends to two ends of the outer part of the door valve body 1 and is respectively and rotatably connected with a rotating bearing 12 in a rotating shaft bearing seat 11 arranged on the outer wall of the door valve body 1; and one end of the door valve rotating shaft 10 is hinged with the telescopic end of the valve plate cylinder 7 through the driving connecting rod 8. In order to effectively seal the joint between the end of the door valve rotating shaft 10 and the side wall of the door valve body 1, rotating shaft bearing seats 11 at the two ends and the circumference outer walls of the two ends of the door valve rotating shaft 10 extending to the outer side of the door valve body 1 are respectively provided with rotating shaft sealing parts 13 so as to ensure the vacuum degree of the inner cavity 2 of the valve body.
The rotary valve plate 20 provided on the gate valve shaft 10 of the water-cooled isolation valve plate 5 is composed of a valve plate main body 26, and a seal rubber ring 24 for closing the gate valve outlet 4 is provided on the periphery of the side of the valve plate main body 26 contacting the gate valve outlet 4 of the gate valve body 1. An annular valve plate water flow passage 19 is provided in the valve plate main body 26 at a position corresponding to the seal ring 24 on the outer periphery. The inlet of the annular valve plate water flow passage 19 is connected to a valve plate water inlet connection portion 28 provided at the middle upper portion of the other side of the valve plate main body 26 where the seal rubber ring 24 is not provided. The outlet of the annular valve plate water flow passage 19 is connected with a valve plate water outlet connection part 29 arranged at the middle lower part of the other side of the valve plate main body 26 where the sealing rubber ring 24 is not arranged. Meanwhile, a rotating shaft water inlet channel 14 and a rotating shaft water outlet channel 22 which are axially arranged are respectively arranged in the two ends of the door valve rotating shaft 10, a rotating shaft water inlet 9 is arranged at one end of the rotating shaft water inlet channel 14 of the door valve rotating shaft 10, and the other end of the rotating shaft water inlet channel 14 is connected with an inlet of a valve plate water flow channel 19 which is communicated with a valve plate water inlet connecting part 28 of the rotating valve plate 20 through a connecting part water flow channel I15 arranged in the valve plate connecting part 16; the outlet of the valve plate water flow channel 19 of the rotary valve plate 20 is connected with one end of the rotary shaft water outlet channel 22 through a connecting part water flow channel II 21 of the valve plate connecting part 16 communicated with the valve plate water outlet connecting part 29, and the other end of the rotary shaft water outlet channel 22 is provided with a rotary shaft water outlet 23.
The two valve plate connecting parts 16 arranged on the valve rotating shaft 10 are respectively hinged with two hinge lug plates 27 arranged on the side where the sealing rubber ring 24 is not arranged on the valve plate main body 26 of the rotating valve plate 20 through the rotating shaft. Meanwhile, the valve plate water inlet connecting part 28 of the valve plate main body 26 is connected with the connecting part water flow channel I15 of the upper valve plate connecting part 16 and the valve plate water outlet connecting part 29 is connected with the connecting part water flow channel II 21 of the lower valve plate connecting part 16 through the hollow transition rotating shaft 17; and rotary sealing parts 18 are arranged between each hollow transition rotating shaft 17 and the valve plate water inlet connecting part 28 and the valve plate water outlet connecting part 29. So that the inlet of the valve plate water flow channel 19 is communicated with the rotary shaft water inlet channel 14 connected with the connecting part water flow channel I15 through the valve plate water inlet connecting part 28, and the outlet of the valve plate water flow channel 19 is communicated with the rotary shaft water outlet channel 22 connected with the connecting part water flow channel II 21 through the valve plate water outlet connecting part 29. Then, cooling liquid enters the rotating shaft water inlet channel 14 from the rotating shaft water inlet 9, then enters the valve plate water flow channel 19 through the connecting part water flow channel I15, and then is discharged from the rotating shaft water outlet 23 through the connecting part water flow channel II 21 and the rotating shaft water outlet channel 22, so that the circulating cooling of the rotating valve plate 20 is realized; and the driving connecting rod 8 is driven to rotate by the expansion and contraction of the valve plate cylinder 7 so as to drive the door valve rotating shaft 10 and the hinged rotating valve plate 20 to rotate together, and the opening and closing of the door valve outlet 4 are flexibly realized.
A transition conveying device 6 capable of swinging up and down is arranged in the valve body cavity 2 of the valve body 1 and below the water-cooling isolation valve plate 5. The transition conveying device 6 comprises a fixed conveying roller 32 which is arranged in the valve body cavity 2 of the valve body 1 of the valve and is close to one end of the inlet 3 of the valve along the horizontal direction, and two ends of a rotating shaft of the fixed conveying roller 32 are respectively connected with two side inner walls of the valve body cavity 2 through a hinged end bearing seat 30. In order to enhance the use flexibility of the device, a fixed seat plate 44 is respectively arranged above the hinged end bearing seats 30 arranged at the two ends of the fixed conveying roller 32 and on the inner side wall of the valve body inner cavity 2; the fixed seat plates 44 are movably connected with the corresponding hinged end bearing seats 30 through adjusting screws 45 respectively; and further the height of the hinge end bearing housing 30 and the fixed transfer roller 32 rotatably disposed thereon is adjusted by rotation of the adjusting screw 45. A swing conveyor roller 35 is provided in the valve body cavity 2 near one end of the gate valve outlet 4, which is arranged in parallel with the fixed conveyor roller 32.
Both ends of the swing conveying roller 35 of the transition conveying device 6 are respectively connected with both ends of the fixed conveying roller 32 through swing connecting plates 34. A long column-shaped swing plate connecting long rod 36 is arranged between the swing connecting plates 34 at the two ends, and the two ends of the swing plate connecting long rod 36 are fixedly connected with the two swing connecting plates 34 respectively. Meanwhile, a sliding support lug 37 for driving the swing connecting plate 34 to swing up and down is arranged in the middle of the swing plate connecting long rod 36, and a swing cylinder 41 which is vertically and upwardly arranged is arranged below the sliding support lug 37. The cylinder body of the lower part of the swinging cylinder 41 is positioned outside the valve body 1 of the door valve, the telescopic rod of the upper part of the swinging cylinder 41 penetrates through the side wall of the valve body and stretches into the inner cavity 2 of the valve body, and a telescopic rod sealing ring 42 is arranged at the combined part of the telescopic rod of the swinging cylinder 41 and the side wall of the valve body. Thereby effectively sealing the joint of the telescopic rod of the swing cylinder 41 and the side wall of the valve body 1 of the door valve and ensuring the vacuum degree of the inner cavity 2 of the valve body. It will be appreciated that the swing cylinder 41 may employ an adjustable stroke cylinder to adjust the telescopic stroke of the swing cylinder 41, depending on the particular use requirements.
The upper end part of the telescopic rod of the swing cylinder 41 of the transition conveying device 6 is provided with a driving block 38 which is used for being connected with a sliding support lug 37 at the middle part of the swing plate connecting long rod 36; the driving block 38 is provided with an inclined swing chute 43 for facilitating the reciprocating sliding of the slide coupling shaft 40. The swing plate is connected with a sliding support lug 37 on the long rod 36 and is connected with a swing chute 43 on the driving block 38 in a sliding way through a sliding connecting shaft 40. And then the swing conveying roller 35 is driven to swing up and down around the axis of the fixed conveying roller 32 by the extension and contraction of the swing cylinder 41 and the cooperation transmission of the swing chute 43 of the driving block 38 and the sliding support lug 37 of the swing plate connecting long rod 36, so as to realize the conveying of the charging tray and the avoidance when the water-cooling isolation valve plate 5 rotates and the valve plate 20 is opened. For the purpose of effectively improving the conveying efficiency, both ends of the fixed conveying roller 32 and the swinging conveying roller 35 of the transition conveying device 6 are respectively provided with a guiding side wheel 39; the feeding tray is conveyed on the fixed conveying roller 32 and the swing conveying roller 35 by using the guide side wheels 39 at both ends, and is limited and guided. One end of the rotating shaft of the fixed conveying roller 32 is provided with a driving chain wheel 31, and the driving chain wheel 31 is connected with a conveying roller driving motor through a transmission mechanism; the other end of the rotation shaft of the fixed conveying roller 32 is connected to one end of the rotation shaft of the swing conveying roller 35 through a sprocket drive mechanism 33 to drive the swing conveying roller 35 and the fixed conveying roller 32 to rotate synchronously.
When the novel vacuum isolation door valve is used, in the normal airtight coating process of the magnetic core inductance vacuum coating equipment, the valve plate cylinder 7 of the water-cooling isolation valve plate 5 and the swing cylinder 41 of the transition conveying device 6 are in a retraction state, namely: the rotary valve plate 20 of the water-cooled isolation valve plate 5 closes the gate valve outlet 4. Meanwhile, the cooling liquid for cooling the rotary valve plate 20 of the water-cooled isolation valve plate 5 enters the rotary shaft water inlet channel 14 from the rotary shaft water inlet 9, and then enters the valve plate water flow channel 19 of the rotary valve plate 20 from the valve plate water inlet connecting part 28 through the connecting part water flow channel I15 and the hollow transition rotary shaft 17; then, the cooling liquid in the valve plate water flow channel 19 is discharged from the rotating shaft water outlet channel 22 and the rotating shaft water outlet 23 through the valve plate water outlet connecting part 29 and the connecting part water flow channel II 21, so that the circulating cooling liquid is utilized to cool the rotating valve plate 20, the sealing rubber ring 24 on the rotating valve plate 20 can be normally used for a long time in a high temperature state, and the stability and the reliability of the sealing performance of the isolating door valve are ensured.
When the workpiece to be coated needs to be conveyed between two adjacent vacuum chambers, firstly, the valve plate cylinder 7 of the water-cooling isolation valve plate 5 extends out to drive the driving connecting rod 8 to rotate so as to drive the valve rotating shaft 10 and the hinged rotating valve plate 20 to rotate together, and thus the valve outlet 4 of the valve body 1 of the valve is opened. Then, the telescopic end of the swinging cylinder 41 of the transition conveying device 6 extends out, and the swinging chute 43 of the telescopic end driving block 38 is used for driving the swinging connecting plate 34 and the swinging conveying roller 35 to swing upwards to a horizontal position around the axis of the fixed conveying roller 32 by the matched transmission of the sliding supporting lug 37 in the middle part of the swinging plate connecting long rod 36 (as shown in fig. 10); thereafter, the transfer roller driving motor of the transition transfer device 6 is started to drive the swing transfer roller 35 and the fixed transfer roller 32 to rotate in synchronization to transfer the charge tray from the gate valve inlet 3 to the gate valve outlet 4. After the transmission of the workpiece to be coated between the two vacuum chambers is completed, the telescopic end of the swing cylinder 41 of the transition conveying device 6 is retracted, the swing connecting plate 34 and the swing conveying roller 35 are driven to swing downwards to return to an initial state (as shown in fig. 9), and the water-cooling isolation valve plate 5 is closed to avoid the rotary valve plate 20; then, the valve plate cylinder 7 of the water-cooling isolation valve plate 5 is retracted to drive the rotary valve plate 20 to rotate downwards to close the valve outlet 4, and the vacuum coating equipment performs subsequent coating processing. The vacuum isolation door valve occupies small space, can effectively save production cost, has high conveying efficiency, flexible use and stable and reliable operation.
Claims (7)
1. The utility model provides a novel vacuum isolation door valve, includes door valve body (1), its characterized in that: a valve body inner cavity (2) is formed in the valve body (1), and a valve inlet (3) and a valve outlet (4) are respectively formed in two sides of the valve body inner cavity (2); the upper part of one end, close to the door valve outlet (4), of the valve body inner cavity (2) is provided with a water-cooling isolation valve plate (5), the water-cooling isolation valve plate (5) comprises a door valve rotating shaft (10) which is horizontally arranged above the door valve outlet (4) along the long side of the door valve body (1), the door valve rotating shaft (10) is provided with a rotary valve plate (20) for closing the door valve outlet (4), and the rotary valve plate (20) is connected with the door valve rotating shaft (10) through a valve plate connecting part (16); the door valve rotating shaft (10) extends to two ends outside the door valve body (1) and is respectively and rotatably connected with a rotating bearing (12) inside a rotating shaft bearing seat (11) arranged on the outer wall of the door valve body (1), and one end of the door valve rotating shaft (10) is hinged with the telescopic end of the valve plate cylinder (7) through a driving connecting rod (8); meanwhile, a rotating shaft water inlet channel (14) and a rotating shaft water outlet channel (22) which are axially arranged are respectively arranged in the two ends of the door valve rotating shaft (10), a rotating shaft water inlet (9) is arranged at one end of the rotating shaft water inlet channel (14), and the other end of the rotating shaft water inlet channel (14) is connected with an inlet of a valve plate water flow channel (19) arranged in the rotating valve plate (20) through a connecting part water flow channel I (15) arranged in the valve plate connecting part (16); the outlet of the valve plate water flow channel (19) of the rotary valve plate (20) is connected with one end of the rotary shaft water outlet channel (22) through a connecting part water flow channel II (21) of the valve plate connecting part (16), and the other end of the rotary shaft water outlet channel (22) is provided with a rotary shaft water outlet (23); a transition conveying device (6) capable of swinging up and down is arranged in the valve body inner cavity (2) and below the water-cooling isolation valve plate (5); the transition conveying device (6) comprises a fixed conveying roller (32), wherein the fixed conveying roller (32) is arranged in the valve body inner cavity (2) along the horizontal direction and is close to one end of the door valve inlet (3), and two ends of a rotating shaft of the fixed conveying roller (32) are respectively connected with two side inner walls of the valve body inner cavity (2) through hinged end bearing seats (30); a swinging conveying roller (35) which is arranged in parallel with the fixed conveying roller (32) is arranged at one end, close to the door valve outlet (4), in the valve body inner cavity (2), and two ends of the swinging conveying roller (35) are respectively connected with two ends of the fixed conveying roller (32) through swinging connecting plates (34); a swinging plate connecting long rod (36) is arranged between the swinging connecting plates (34) at two ends, and two ends of the swinging plate connecting long rod (36) are fixedly connected with the two swinging connecting plates (34) respectively; the middle part of the swing plate connecting long rod (36) is provided with a sliding support lug (37), a swing cylinder (41) which is vertically upwards arranged is arranged below the sliding support lug (37), a driving block (38) is arranged at the telescopic end of the upper part of the swing cylinder (41), and a swing chute (43) is arranged on the driving block (38); the swinging plate is connected with a sliding support lug (37) on the long rod (36) and is in sliding connection with a swinging chute (43) of the driving block (38) through a sliding connection shaft (40); one end of the rotating shaft of the fixed conveying roller (32) is provided with a driving sprocket (31), and the other end of the rotating shaft of the fixed conveying roller (32) is connected with one end of the rotating shaft of the swinging conveying roller (35) through a sprocket transmission mechanism (33); the rotary valve plate (20) of the water-cooling isolation valve plate (5) is composed of a valve plate main body (26), a sealing rubber ring (24) is arranged on the periphery of one side, which is contacted with a door valve outlet (4), of the valve plate main body (26), and an annular valve plate water flow channel (19) is arranged in the valve plate main body (26) at a position corresponding to the sealing rubber ring (24); an inlet of the annular valve plate water flow channel (19) is connected with a valve plate water inlet connecting part (28) arranged at the middle upper part of the other side of the valve plate main body (26) where the sealing rubber ring (24) is not arranged, and the valve plate water inlet connecting part (28) is connected with a connecting part water flow channel I (15); the outlet of the valve plate water flow channel (19) is connected with a valve plate water outlet connecting part (29) which is arranged at the middle lower part of the other side of the valve plate main body (26) and is not provided with a sealing rubber ring (24), and the valve plate water outlet connecting part (29) is connected with a connecting part water flow channel II (21).
2. The novel vacuum isolation gate valve of claim 1, wherein: the valve plate connecting part (16) is hinged with a hinged lug plate (27) arranged on one side of the valve plate main body (26) where the sealing rubber ring (24) is not arranged through a rotating shaft; meanwhile, a rotary sealing component (18) is arranged between a valve plate water inlet connecting part (28) of the valve plate main body (26) and a connecting part water flow channel I (15) and between a valve plate water outlet connecting part (29) and a connecting part water flow channel II (21) respectively and continuously through hollow transition rotating shafts (17), and between each hollow transition rotating shaft (17) and the valve plate water inlet connecting part (28) and the valve plate water outlet connecting part (29).
3. The novel vacuum isolation gate valve of claim 1, wherein: and a rotating shaft sealing part (13) is respectively arranged inside the rotating shaft bearing seat (11) of the water-cooling isolation valve plate (5) and between the two end part circumferential outer walls of the outer side of the door valve body (1) of the door valve, wherein the rotating shaft (10) of the door valve extends out.
4. The novel vacuum isolation gate valve of claim 1, wherein: the valve body (1) is positioned at the periphery of the inner side of the valve outlet (4) of the valve body inner cavity (2), and is provided with a valve body water flow channel (25).
5. The novel vacuum isolation gate valve of claim 1, wherein: a fixed seat plate (44) is respectively arranged above the hinged end bearing seats (30) arranged at two ends of the fixed conveying roller (32) of the transition conveying device (6) and on the inner side wall of the valve body inner cavity (2); and the fixed seat plates (44) are movably connected with the corresponding hinged end bearing seats (30) through adjusting screws (45).
6. The novel vacuum isolation gate valve of claim 1, wherein: both ends of a fixed conveying roller (32) and a swinging conveying roller (35) of the transition conveying device (6) are respectively provided with a guide side wheel (39).
7. The novel vacuum isolation gate valve of claim 1, wherein: the cylinder body of the lower part of the swinging cylinder (41) of the transition conveying device (6) is positioned outside the valve body (1) of the door valve, the telescopic rod at the upper part of the swinging cylinder (41) penetrates through the side wall of the valve body and stretches into the inner cavity (2) of the valve body, and a telescopic rod sealing ring (42) is arranged at the combined part of the telescopic rod of the swinging cylinder (41) and the side wall of the valve body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810843281.5A CN108716550B (en) | 2018-07-27 | 2018-07-27 | Novel vacuum isolation door valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810843281.5A CN108716550B (en) | 2018-07-27 | 2018-07-27 | Novel vacuum isolation door valve |
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| Publication Number | Publication Date |
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| CN108716550A CN108716550A (en) | 2018-10-30 |
| CN108716550B true CN108716550B (en) | 2024-03-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810843281.5A Active CN108716550B (en) | 2018-07-27 | 2018-07-27 | Novel vacuum isolation door valve |
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| CN201696708U (en) * | 2009-12-25 | 2011-01-05 | 贵州新艺机械厂 | Water-cooling vacuum isolation valve |
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| CN202629122U (en) * | 2012-05-23 | 2012-12-26 | 费海鸿 | Swing-type water-cooling vacuum gate valve and valve core component thereof |
| KR20130079916A (en) * | 2012-01-03 | 2013-07-11 | (주)엘티엘 | Vacuum isolation apparatus |
| CN103423477A (en) * | 2012-05-23 | 2013-12-04 | 费海鸿 | Swinging water-cooled vacuum gate valve and spool component thereof |
| CN204611054U (en) * | 2015-04-08 | 2015-09-02 | 爱发科中北真空（沈阳）有限公司 | A kind of rotary type vacuum separation valve |
| CN108278369A (en) * | 2018-03-09 | 2018-07-13 | 重庆川仪调节阀有限公司 | The double water cooling butterfly valves of single cycle guide plate type |
| CN208535181U (en) * | 2018-07-27 | 2019-02-22 | 沈阳乐贝真空技术有限公司 | A kind of novel evacuated isolation gate valve |
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2018
- 2018-07-27 CN CN201810843281.5A patent/CN108716550B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201696708U (en) * | 2009-12-25 | 2011-01-05 | 贵州新艺机械厂 | Water-cooling vacuum isolation valve |
| KR20130079916A (en) * | 2012-01-03 | 2013-07-11 | (주)엘티엘 | Vacuum isolation apparatus |
| CN202629122U (en) * | 2012-05-23 | 2012-12-26 | 费海鸿 | Swing-type water-cooling vacuum gate valve and valve core component thereof |
| CN103423477A (en) * | 2012-05-23 | 2013-12-04 | 费海鸿 | Swinging water-cooled vacuum gate valve and spool component thereof |
| CN202629101U (en) * | 2012-06-20 | 2012-12-26 | 费海鸿 | Water-cooling vacuum flap valve |
| CN204611054U (en) * | 2015-04-08 | 2015-09-02 | 爱发科中北真空（沈阳）有限公司 | A kind of rotary type vacuum separation valve |
| CN108278369A (en) * | 2018-03-09 | 2018-07-13 | 重庆川仪调节阀有限公司 | The double water cooling butterfly valves of single cycle guide plate type |
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|---|---|
| CN108716550A (en) | 2018-10-30 |
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