CN103411938A - Angular spectrum scanning and measuring apparatus for microstructure based on anti-Stokes fluorescent servo-actuated pin holes - Google Patents
Angular spectrum scanning and measuring apparatus for microstructure based on anti-Stokes fluorescent servo-actuated pin holes Download PDFInfo
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Abstract
The invention mainly relates to an angular spectrum scanning and measuring apparatus for a microstructure based on anti-Stokes fluorescent servo-actuated pin holes, which belongs to the field of measurement of surface morphology of an ultra-precise three-dimensional microstructure. The apparatus is provided with an angular spectrum scanning illumination optical path and a fluorescent servo-actuated pin hole detection optical path and employs a fluorescent substance with anti-Stokes properties; with such a design, the problem of incapable illumination or complex reflection in some areas caused by convergent light beam illumination technology is prevented, the problem of reduced measurement precision, or even incapable measurement, caused by attenuated detection signal intensity and increased background noise is effectively overcome, a corresponding fluorescent pin hole is located before each CCD camera pixel, so precise assembling and adjustment of the fluorescent servo-actuated pin holes and the CCD camera pixels is not needed, a near-infrared laser with certain penetrating power can be employed, and a variety of CCD cameras can be chose.
Description
Technical field
The servo-actuated pin hole microstructure of anti-Stokes character fluorescence angular spectrum scanning and measuring apparatus belongs to ultraprecise three-dimensional microstructure measuring surface form field, relates generally to the servo-actuated pin hole microstructure of a kind of anti-Stokes character fluorescence angular spectrum scanning and measuring apparatus.
Background technology
The processed and applied of microstructure is mainly reflected in microelectric technique, microsystems technology and three aspects of micro-optic technology, as typical case's application such as computer chip, biochip and microlens arrays.Its common trait of above-mentioned technology is to have three-dimensional structure, functional structure size in micron, sub-micron or nanometer scale, micro-nanoization of this structure not only brought the energy and raw-material saving, more promote the progress of modern science and technology, directly driven the development of related industry.Along with the develop rapidly of micro-processing technology, can carry out the three-dimensional instrument detected of quick nondestructive to such sample and will have huge application prospect.
U.S. Pat 3013467, a kind of confocal imaging technology is disclosed for the first time, the confocal imaging technology of 3 optical conjugates is surveyed in this invention by introducing pointolite, some illumination and point, obtained the axial detection ability to the sample profile, what coordinate the horizontal direction objective table moves and then realizes three-dimensional measurement.Chinese patent CN1395127A, disclose a kind of confocal micro-measurement system.This invention utilizes confocal technology, by confocal light path, introducing optical interference circuit, obtains highly sensitive interferometry signal, realizes the high-acruracy survey axial to sample.U.S. Pat 6282020B1, disclose a kind of confocal microscope system based on scanning galvanometer.This invention utilizes confocal principle, converges the ability of illumination hot spot in the sample surfaces high-speed mobile by introducing the vibration mirror scanning technology, having obtained, and has realized quick confocal detection, has improved measuring speed.But above-mentioned three kinds of methods are all parallel beam to be converged to sample surfaces by microcobjective throw light on, when carrying out the three-dimensional sample measurement, height fluctuating due to sample self surface profile, to converging illuminating bundle, block, can cause some zone can't throw light on or complex reflex occurs, and then cause the decay of signal strength detection and the enhancing of ground unrest, and make measuring accuracy reduce, even can't measure.
China Patent Publication No. CN1971333A, denomination of invention is for adopting the confocal micro imaging system of dummy pinhole, a kind of confocal micro imaging system based on the dummy pinhole technology is disclosed, this invention utilizes the relevant position on the two-dimensional digital image that CCD collects that dummy pinhole is set, by computing machine, process the intensity signal obtained in dummy pinhole, thereby realize the confocal micro imaging system without pin hole in kind, thereby have pin hole position and big or small controlled, calibrate characteristics easily.But should invent based on basic confocal point-to-point image-forming principle, and once survey and can only if want, carry out imaging to the certain area of sample on sample, a bit carrying out imaging, need additional mechanical three-dimensional scanning mechanism, thereby cause measuring speed to be difficult to improve.Chinese patent CN1632448A, denomination of invention is three-dimensional super-resolution confocal array scanning micro-detecting method and device, discloses a kind of array pin hole technology, by before CCD, introducing pinhole array, realizes the parallel confocal measurement.But the method needs array pin hole position and CCD location of pixels fine registration, thereby causes debuging difficulty.
Summary of the invention
In order to address the above problem, the present invention has designed the servo-actuated pin hole microstructure of a kind of anti-Stokes character fluorescence angular spectrum scanning and measuring apparatus, can't throw light on or the problem of complex reflex in some zone that this device not only can avoid existing convergent beam lighting engineering to cause, effectively solving signal strength detection decay and ground unrest strengthens, the measuring accuracy caused reduces, the problem that even can't measure, and can realize all having corresponding fluorescence pin hole to exist before each CCD camera pixel, thereby make between the servo-actuated pin hole of fluorescence and CCD camera pixel, debug without carrying out precision, after incident beam is absorbed by fluorescent material, send the light beam shorter than incident beam wavelength, and then can use the near infrared laser with certain penetration capacity, after near infrared light is absorbed by fluorescent material, send visible light, adopt the CCD camera of visible light wave range, making the CCD camera have widely selects.
The object of the present invention is achieved like this:
The servo-actuated pin hole microstructure of anti-Stokes character fluorescence angular spectrum scanning and measuring apparatus, comprise laser instrument, the first scanning galvanometer, the second scanning galvanometer, scanning lens, the first diaphragm, the first imaging len, spectroscope, the second diaphragm, microcobjective, scanning objective table, Guan Jing, the servo-actuated pin hole of fluorescence, the second imaging len, narrow band pass filter and CCD camera; The light beam sent from laser instrument is after the first scanning galvanometer and the reflection of the second scanning galvanometer, successively through scanning lens, the first diaphragm, the first imaging len, spectroscope, the second diaphragm, microcobjective shine with the axially-movable of scanning objective table by the micro-measuring structure sample surfaces, form angular spectrum scanning illumination path; From by the irreflexive light beam of micro-measuring structure sample surfaces, again being passed through microcobjective, the second diaphragm, and reflected by spectroscope, through Guan Jing, converge to the servo-actuated pin hole of fluorescence, the fluorescence inspired is imaged onto the CCD camera by the second imaging len and narrow band pass filter, forms the servo-actuated pin hole of fluorescence and surveys light path; The rotating shaft of the first scanning galvanometer and the second scanning galvanometer is mutually vertical, and the object plane of the back focal plane of scanning lens and the first imaging len coincides with the first plane, diaphragm place; The back focal plane as plane and microcobjective of the first imaging len coincides with the second plane, diaphragm place; The object plane of the front focal plane of Guan Jing and the second imaging len coincides with plane, fluorescence servo-actuated pin hole place.The CCD camera is positioned at the second imaging len as plane, and optical filter is positioned between the servo-actuated pin hole of fluorescence and CCD camera; The servo-actuated pin hole of described fluorescence is for evenly being coated with the thin transparent base material of the fluorescent material with anti-Stokes character.
The servo-actuated pin hole microstructure of above-mentioned anti-Stokes character fluorescence angular spectrum scanning and measuring apparatus, described thin transparent base material is the glass that thickness is no more than 0.17mm, upper and lower surface is parallel and cut open light and process.
The present invention is by introducing angular spectrum scanning illumination path, realize that parallel beam throws light on by the micro-measuring structure sample with the different incidence angles degree, and then make can be found corresponding optimal illumination angle by the every bit of micro-measuring structure sample, can't throw light on or the problem of complex reflex in some zone of avoiding existing convergent beam lighting engineering to cause, effectively solving signal strength detection decay and ground unrest strengthens, the measuring accuracy caused reduces, the problem that even can't measure.
The present invention also introduces the servo-actuated pin hole of fluorescence and surveys light path, utilizes the fluorescent substance film with anti-Stokes character to realize the detection of array pin hole point, thereby increases substantially measuring speed; Utilize simultaneously the large characteristics of fluorescent material density that have anti-Stokes character in the servo-actuated pin hole of fluorescence, realize all having corresponding fluorescence pin hole to exist before each CCD camera pixel, debug without carrying out precision thereby make between the servo-actuated pin hole of fluorescence and CCD camera pixel.
The present invention evenly is coated with the thin transparent base material fluorescent material with anti-Stokes character, after incident beam is absorbed by fluorescent material, send the light beam shorter than incident beam wavelength, its beneficial effect is to use the near infrared laser with certain penetration capacity, after near infrared light is absorbed by fluorescent material, send visible light, adopt the CCD camera of visible light wave range, make the CCD camera have widely and select.
The accompanying drawing explanation
Fig. 1 is the servo-actuated pin hole microstructure of the anti-Stokes character of the present invention fluorescence angular spectrum scanning and measuring apparatus structural representation.
Fig. 2 is angular spectrum scanning illumination path figure in the servo-actuated pin hole microstructure of the anti-Stokes character of the present invention fluorescence angular spectrum scanning and measuring apparatus.
Fig. 3 is that the servo-actuated pin hole of the servo-actuated pin hole microstructure of the anti-Stokes character of the present invention fluorescence angular spectrum scanning and measuring apparatus fluorescence is surveyed index path.
Fig. 4 is the servo-actuated pin hole schematic diagram of light beam incident fluorescence.
In figure: 1 laser instrument, 2 first scanning galvanometers, 3 second scanning galvanometers, 4 scanning lenses, 5 first diaphragms, 6 first imaging lens, 7 spectroscopes, 8 second diaphragms, 9 microcobjectives, 10 scanning objective tables, 11 pipe mirrors, the servo-actuated pin hole of 12 fluorescence, 13 second imaging lens, 14 narrow band pass filters, 15CCD camera.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
As shown in Figure 1, this device comprises laser instrument 1, the first scanning galvanometer 2, the second scanning galvanometer 3, scanning lens 4, the first diaphragm 5, the first imaging len 6, spectroscope 7, the second diaphragm 8, microcobjective 9, scanning objective table 10, pipe mirror 11, the servo-actuated pin hole 12 of fluorescence, the second imaging len 13, narrow band pass filter 14 and CCD camera 15 to the servo-actuated pin hole microstructure of the anti-Stokes character fluorescence angular spectrum scanning and measuring apparatus structural representation of the present embodiment; The light beam sent from laser instrument 1 is after the first scanning galvanometer 2 and the second scanning galvanometer 3 reflections, successively through scanning lens 4, the first diaphragm 5, the first imaging len 6, spectroscope 7, the second diaphragm 8, microcobjective 9 shine with 10 axially-movables of scanning objective table by the micro-measuring structure sample surfaces, form angular spectrum scanning illumination path, as shown in Figure 2; From by the irreflexive light beam of micro-measuring structure sample surfaces, again being passed through microcobjective 9, the second diaphragm 8, and by spectroscope 7 reflections, through pipe mirror 11, converge to the servo-actuated pin hole 12 of fluorescence, the fluorescence inspired is imaged onto CCD camera 15 by the second imaging len 13 and narrow band pass filter 14, form the servo-actuated pin hole of fluorescence and survey light path, as shown in Figure 3; The rotating shaft of the first scanning galvanometer 2 and the second scanning galvanometer 3 is mutually vertical, and the object plane of the back focal plane of scanning lens 4 and the first imaging len 6 coincides with the first diaphragm 5 planes, place; The back focal plane as plane and microcobjective 9 of the first imaging len 6 coincides with the second diaphragm 8 planes, place; The front focal plane of pipe mirror 11 and the object plane of the second imaging len 13 coincide with the servo-actuated pin hole of fluorescence 12 planes, place.CCD camera 15 is positioned at the second imaging len 13 picture planes, and optical filter 14 is positioned between the servo-actuated pin hole 12 of fluorescence and CCD camera 15; The servo-actuated pin hole 12 of described fluorescence is for evenly being coated with the thin transparent base material of the fluorescent material with anti-Stokes character.Described thin transparent base material is the glass that thickness is no more than 0.17mm, and upper and lower surface is parallel and cut open light and process.Selection is no more than the glass of 0.17mm, not only can reduce aberration, and can directly adopt the raw material of cover glass as the thin transparent base material, cost-saving.
The schematic diagram of the servo-actuated pin hole 12 of light beam incident fluorescence as shown in Figure 4.Wherein, circle means fluorescence molecule, and diameter generally arrives the hundreds of nanometer tens, the rectangle of fluorescence molecule below is the thin transparent base material, the black rectangle of below is effective imaging region, and its diameter is generally five microns left and right, much larger than the fluorescence molecule diameter.Corresponding black fluorescence molecule is effective servo-actuated pin hole; The white rectangle is invalid imaging region, and corresponding white fluorescent molecule is invalid servo-actuated pin hole.While therefore making effective imaging region generation micro-displacement, still there is the servo-actuated pin hole of corresponding fluorescence to match.
After the incident beam that anti-Stokes character in the present embodiment refers to is absorbed by fluorescent material, send the light beam shorter than incident beam wavelength.This mode can be used the near infrared laser 1 with certain penetration capacity, and near infrared light sends visible light after by fluorescent material, being absorbed, and adopts the CCD camera 15 of visible light wave range, makes CCD camera 15 have widely and selects.
Utilize the servo-actuated pin hole microstructure of the anti-Stokes character of the present invention fluorescence angular spectrum scanning and measuring apparatus to carry out the method for being measured by the micro-measuring structure sample surfaces to be:
The stepping number of revolutions of step a, setting the first scanning galvanometer 2 is N
x, the second scanning galvanometer 3 the stepping number of revolutions be N
y, along the stepping of optical axis direction, to move number of times be N to scanning objective table 10
z, the number of pixels in CCD camera 15 is M;
Stepping shift position, the stepping turned position of the first scanning galvanometer 2 and the stepping turned position permutation and combination of the second scanning galvanometer 3 of step b, scanning objective table 10 that step a is set, obtain N
x* N
y* N
zIndividual different spatial, to by the micro-measuring structure sample, being carried out the angular spectrum illumination, and then form N on the servo-actuated pin hole of fluorescence 12 surfaces in each locus
x* N
y* N
zIndividual picture;
M the phosphor dot detector array that step c utilizes the servo-actuated pin hole 12 of fluorescence and CCD camera 15 to form, to the N by micro-measuring structure
x* N
y* N
zIndividual picture is surveyed, and then obtains N
x* N
y* N
z* M light intensity data;
Steps d, the N that utilizes computing machine treatment step c to obtain
x* N
y* N
z* M light intensity data, obtain by M point, N on the micro-measuring structure sample
x* N
yAxial response curve under individual angular spectrum light angle, at first judge every bit and the theoretical sinc function square axial response curve that curve mates most according to confocal principle, i.e. best angular spectrum light angle, and then calculate the axial coordinate of every bit;
Step e, obtain corresponding axial coordinate according to planimetric position and the steps d of every bit, reconstruct by the three-dimensional structure of micro-measuring structure sample.
Claims (2)
1. the servo-actuated pin hole microstructure of anti-Stokes character fluorescence angular spectrum scanning and measuring apparatus, is characterized in that: comprise laser instrument (1), the first scanning galvanometer (2), the second scanning galvanometer (3), scanning lens (4), the first diaphragm (5), the first imaging len (6), spectroscope (7), the second diaphragm (8), microcobjective (9), scanning objective table (10), Guan Jing (11), the servo-actuated pin hole of fluorescence (12), the second imaging len (13), narrow band pass filter (14) and CCD camera (15); The light beam sent from laser instrument (1) is after the first scanning galvanometer (2) and the second scanning galvanometer (3) reflection, pass through successively scanning lens (4), the first diaphragm (5), the first imaging len (6), spectroscope (7), the second diaphragm (8), microcobjective (9) shine with the axially-movable of scanning objective table (10) by the micro-measuring structure sample surfaces, form angular spectrum scanning illumination path; From by the irreflexive light beam of micro-measuring structure sample surfaces, again being passed through microcobjective (9), the second diaphragm (8), and reflected by spectroscope (7), through Guan Jing (11), converge to the servo-actuated pin hole of fluorescence (12), the fluorescence inspired is imaged onto CCD camera (15) by the second imaging len (13) and narrow band pass filter (14), forms the servo-actuated pin hole of fluorescence and surveys light path; The first scanning galvanometer (2) is mutually vertical with the rotating shaft of the second scanning galvanometer (3), and the object plane of the back focal plane of scanning lens (4) and the first imaging len (6) coincides with the first diaphragm (5) plane, place; The picture plane of the first imaging len (6) and the back focal plane of microcobjective (9) coincide with the second diaphragm (8) plane, place; The object plane of the front focal plane of Guan Jing (11) and the second imaging len (13) coincides with the servo-actuated pin hole of fluorescence (12) plane, place.CCD camera (15) is positioned at the second imaging len (13) as plane, and optical filter (14) is positioned between the servo-actuated pin hole of fluorescence (12) and CCD camera (15); The servo-actuated pin hole of described fluorescence (12) is for evenly being coated with the thin transparent base material of the fluorescent material with anti-Stokes character.
2. the servo-actuated pin hole microstructure of anti-Stokes character fluorescence according to claim 1 angular spectrum scanning and measuring apparatus, it is characterized in that: described thin transparent base material is the glass that thickness is no more than 0.17mm, upper and lower surface is parallel and cut open light and process.
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| CN107479189A (en) * | 2017-08-14 | 2017-12-15 | 中国科学院西安光学精密机械研究所 | Non-paraxial autoacceleration light beam generating method and generation device based on angular spectrum regulation and control |
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| CN107479189A (en) * | 2017-08-14 | 2017-12-15 | 中国科学院西安光学精密机械研究所 | Non-paraxial autoacceleration light beam generating method and generation device based on angular spectrum regulation and control |
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