CN103382552B - PCVD board abnormality monitoring method and system - Google Patents
PCVD board abnormality monitoring method and system Download PDFInfo
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- CN103382552B CN103382552B CN201210137666.2A CN201210137666A CN103382552B CN 103382552 B CN103382552 B CN 103382552B CN 201210137666 A CN201210137666 A CN 201210137666A CN 103382552 B CN103382552 B CN 103382552B
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Abstract
A kind of PCVD board abnormality monitoring method, comprises the following steps: monitor the movable family of power and influence between cavity; Obtain the information that wafer falls to dodge gate valve port; Send steering order and suspend described movable family of power and influence's closed action.In above-mentioned PCVD board abnormality monitoring method; by monitoring the movable family of power and influence between cavity; whether Real-Time Monitoring wafer falls to dodge gate valve port; once there is the situation that wafer drops; then send steering order to stay off the feet the closed action of the family of power and influence, effectively prevent the wafer breakage caused because transfer system between cavity is abnormal in PCVD board.Meanwhile, a kind of PCVD board abnormality monitoring system is additionally provided.
Description
Technical field
The present invention relates to semiconductor technology, particularly relate to a kind of PCVD board abnormality monitoring method and system.
Background technology
PCVD is the ionization of gas making containing film composed atom by microwave or radio frequency etc., be partially formed plasma body, and plasma chemistry activity is very strong, is easy to react, thus goes out the technology of desired film at deposition on substrate.In order to make chemical reaction carry out at a lower temperature, the activity that make use of plasma body promotes reaction.
Plasma-activated Chemical Vapor Deposition technique needs to carry out under high vacuum environment, and wafer reacts in airtight cavity.Between different cavity, the dependence activity family of power and influence isolates, and transmits wafer by mechanical arm.When board occurs extremely to cause wafer to drop at dodge gate valve port because of transfer systems such as mechanical arm fault or transmission combination misses, wafer can be made to be clipped broken by family of power and influence's closed action, cause wafer breakage.
Summary of the invention
Based on this, be necessary to provide a kind of PCVD board abnormality monitoring method effectively preventing wafer breakage.
A kind of PCVD board abnormality monitoring method, comprises the following steps: monitor the movable family of power and influence between cavity; Obtain the information that wafer falls to dodge gate valve port; Send steering order and suspend described movable family of power and influence's closed action.
Wherein in an embodiment, also comprise step: send steering order and stop mechanical arm grasping movement.
Wherein in an embodiment, also comprise step: the information falling to described dodge gate valve port according to described wafer generates abnormal notice, and is sent to default object.
Wherein in an embodiment, described mode of monitoring the movable family of power and influence between cavity is optical monitoring.
Wherein in an embodiment, described optical monitoring is specially: continue to launch infrared signal to dodge gate valve port, and receive; The step that described acquisition wafer falls to the information of dodge gate valve port is specially: obtain infrared signal interrupting information; The information that wafer falls to described dodge gate valve port is obtained according to infrared signal interrupting information.
In addition, there is a need to provide a kind of PCVD board abnormality monitoring system.
A kind of PCVD board abnormality monitoring system, comprising:
Monitoring device, for monitoring the movable family of power and influence between cavity, and obtains the information that wafer falls to dodge gate valve port;
Treater, being connected with described monitoring device and the communication of described PCVD board, falling to the information of dodge gate valve port for receiving wafer, and sends the described movable family of power and influence's closed action of steering order time-out.
Wherein in an embodiment, described treater also stops mechanical arm grasping movement for sending steering order.
Wherein in an embodiment, the information of described treater also for falling to described dodge gate valve port according to described wafer generates abnormal notice, and is sent to default object.
Wherein in an embodiment, described monitoring device is optical monitoring to the mode that the movable family of power and influence between cavity monitors.
Wherein in an embodiment, described monitoring device comprises:
Optic probe, for continuing to launch infrared signal to dodge gate valve port; And
Receptor, for receiving the infrared signal that optic probe is launched;
Wherein, described treater is connected with described receptor communication; When wafer falls to described dodge gate valve port, wafer blocks infrared signal, and receptor cannot receive infrared signal; Treater obtains infrared signal interrupting information, and obtains according to infrared signal interrupting information the information that wafer falls to described dodge gate valve port.
In above-mentioned PCVD board abnormality monitoring method and system; by monitoring the movable family of power and influence between cavity; whether Real-Time Monitoring wafer falls to dodge gate valve port; once there is the situation that wafer drops; then send steering order to stay off the feet the closed action of the family of power and influence, effectively prevent the wafer breakage caused because transfer system between cavity is abnormal in PCVD board.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of PCVD board;
Fig. 2 is the schema of the PCVD board abnormality monitoring method of the present embodiment;
Fig. 3 is the particular flow sheet of step S120 shown in Fig. 2;
Fig. 4 is the schematic diagram of the PCVD board abnormality monitoring system of the present embodiment.
Embodiment
In order to solve when board occurs to cause wafer to drop at dodge gate valve port because mechanical arm fault or transmission combination miss etc. are abnormal, wafer can be made to be clipped broken by family of power and influence's closed action, cause the problem of wafer breakage, propose a kind of PCVD board abnormality monitoring method effectively preventing wafer breakage.
Refer to Fig. 1, comprise load chamber 10 and transmission cavity 20 at PCVD board, illustrate for load chamber 10 and transmission cavity 20, be vacuum state in transmission cavity 20, load chamber 10 and transmission cavity 20 are separated by the movable family of power and influence 30.In daily production, wafer puts into load chamber 10.After putting into, load chamber 10 is evacuated to vacuum, and the movable family of power and influence 30 opens, and wafer grabbing is put in transmission cavity 20 by the mechanical arm 22 in transmission cavity 20, then delivers to connected each reaction chamber (not shown) reaction.After reaction terminates, mechanical arm 22 captures wafer and puts back to load chamber 10, the closed movable family of power and influence 30, and takes out after rising to normal pressure.When the transfer system of PCVD board occurs abnormal, wafer can drop at dodge gate valve port, and finally causes damaging.
Based on above-mentioned situation, propose PCVD board abnormality monitoring method as shown in Figure 2, comprise the following steps:
Step S110, monitors the movable family of power and influence between cavity.Monitor the movable family of power and influence between each cavity, whether Real-Time Monitoring wafer falls to dodge gate valve port.Concrete, the mode of monitoring the movable family of power and influence between cavity is optical monitoring.
Step S120, obtains the information that wafer falls to dodge gate valve port.When mechanical arm fault or transmission combination miss appear in PCVD board, wafer falls to dodge gate valve port.Now, Real-time Obtaining wafer falls to the information of dodge gate valve port.
It is pointed out that in step S110, infrared rays can be adopted to carry out optical monitoring to the movable family of power and influence, be specially: continue to launch infrared signal to dodge gate valve port, and receive.Meanwhile, step S120 is specially:
Step S121, obtains infrared signal interrupting information.When wafer falls to dodge gate valve port, wafer blocks infrared signal, causes infrared signal to interrupt, and obtains infrared signal interrupting information.
Step S122, obtains according to infrared signal interrupting information the information that wafer falls to dodge gate valve port.Infrared signal interrupts, then have wafer to fall to corresponding dodge gate valve port, and the transfer system further illustrated between two cavitys of being isolated by this movable family of power and influence exists abnormal.
Step S130, sends steering order and to stay off the feet family of power and influence's closed action.Systems analysis wafer sends steering order after falling to the information of dodge gate valve port, suspends the closed action of the corresponding movable family of power and influence, in case clip broken the wafer falling to dodge gate valve port when this movable family of power and influence closes.
If mechanical arm exists abnormal, more wafer can be caused to drop, now system can send steering order stopping mechanical arm grasping movement.Meanwhile, also can take the scheme be connected with the control loop of mechanical arm for the receptor of receiving infrared-ray signal, once infrared signal interrupts, then mechanical arm stops relevant transmission work immediately.
In above-mentioned PCVD board abnormality monitoring method; by monitoring the movable family of power and influence between cavity; whether Real-Time Monitoring wafer falls to dodge gate valve port; once there is the situation that wafer drops; then send steering order to stay off the feet the closed action of the family of power and influence, effectively prevent the wafer breakage caused because transfer system between cavity is abnormal in PCVD board.
Further, above-mentioned PCVD board abnormality monitoring method also can comprise the abnormal notice of information generation falling to dodge gate valve port according to wafer, and is sent to the step of default object.Default object can be relating operation personnel, and after receiving abnormal notice, relating operation personnel can take counter-measure immediately, closes board and to go forward side by side line correlation process operation.
Refer to Fig. 4 and Fig. 1, additionally provide the PCVD board abnormality monitoring system applying above-mentioned PCVD board abnormality monitoring method, comprise monitoring device 410 and treater (not shown).
Monitoring device 410 for monitoring the movable family of power and influence between cavity, and obtains the information that wafer falls to dodge gate valve port.Concrete, the mode of monitoring the movable family of power and influence between cavity is optical monitoring.Monitoring device 410 is arranged near dodge gate valve port place, comprises optic probe 412 and receptor 414.Optic probe 412 is for continuing to launch infrared signal to dodge gate valve port.The infrared signal that receptor 414 is launched for receiving optic probe.
Treater is connected with monitoring device 410 and the communication of PCVD board, falls to the information of dodge gate valve port for receiving wafer, and sends steering order and to stay off the feet family of power and influence's closed action.When mechanical arm fault or transmission combination miss appear in PCVD board, wafer falls to dodge gate valve port.Now, treater Real-time Obtaining wafer falls to the information of dodge gate valve port.
Concrete, when wafer falls to dodge gate valve port, wafer blocks the infrared signal that optic probe 412 is launched, receptor 414 cannot receive infrared signal, treater obtains infrared signal interrupting information, and obtains according to infrared signal interrupting information the information that wafer falls to dodge gate valve port.Treater, by falling to the analysis of the information of dodge gate valve port to analysis wafer, sends steering order, suspends the closed action of the corresponding movable family of power and influence, in case clip broken the wafer falling to dodge gate valve port when this movable family of power and influence closes.
If mechanical arm exists abnormal, more wafer can be caused to drop, now treater can send steering order stopping mechanical arm grasping movement.Meanwhile, also can take the scheme that receptor 414 is connected with the control loop of mechanical arm, once infrared signal interrupts, then mechanical arm stops relevant transmission work immediately.
In above-mentioned PCVD board abnormality monitoring system; by monitoring the movable family of power and influence between cavity; whether Real-Time Monitoring wafer falls to dodge gate valve port; once there is the situation that wafer drops; then treater sends steering order immediately and to stay off the feet the closed action of the family of power and influence, effectively prevents the wafer breakage caused because transfer system between cavity is abnormal in PCVD board.
Further, in above-mentioned PCVD board abnormality monitoring system, the information of treater also for falling to dodge gate valve port according to wafer generates abnormal notice, and is sent to default object.Default object can be relating operation personnel, and after receiving abnormal notice, relating operation personnel can take counter-measure immediately, closes board and to go forward side by side line correlation process operation.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (6)
1. a PCVD board abnormality monitoring method, is characterized in that, comprises the following steps:
The movable family of power and influence between cavity is monitored;
Obtain the information that wafer falls to dodge gate valve port;
Send steering order and suspend described movable family of power and influence's closed action;
Wherein, described mode of monitoring the movable family of power and influence between cavity is optical monitoring; Described optical monitoring is specially: continue to launch infrared signal to dodge gate valve port, and receive;
The step that described acquisition wafer falls to the information of dodge gate valve port is specially:
Obtain infrared signal interrupting information;
The information that wafer falls to described dodge gate valve port is obtained according to infrared signal interrupting information.
2. PCVD board abnormality monitoring method according to claim 1, is characterized in that, also comprise step:
Send steering order and stop mechanical arm grasping movement.
3. PCVD board abnormality monitoring method according to claim 1, is characterized in that, also comprise step:
The information falling to described dodge gate valve port according to described wafer generates abnormal notice, and is sent to default object.
4. a PCVD board abnormality monitoring system, is characterized in that, comprising:
Monitoring device, for monitoring the movable family of power and influence between cavity, and obtains the information that wafer falls to dodge gate valve port;
Treater, being connected with described monitoring device and the communication of described PCVD board, falling to the information of dodge gate valve port for receiving wafer, and sends the described movable family of power and influence's closed action of steering order time-out;
Wherein, described monitoring device is optical monitoring to the mode that the movable family of power and influence between cavity monitors; Described monitoring device comprises:
Optic probe, for continuing to launch infrared signal to dodge gate valve port; And
Receptor, for receiving the infrared signal that optic probe is launched;
Wherein, described treater is connected with described receptor communication; When wafer falls to described dodge gate valve port, wafer blocks infrared signal, and receptor cannot receive infrared signal; Treater obtains infrared signal interrupting information, and obtains according to infrared signal interrupting information the information that wafer falls to described dodge gate valve port.
5. PCVD board abnormality monitoring system according to claim 4, is characterized in that, described treater also stops mechanical arm grasping movement for sending steering order.
6. PCVD board abnormality monitoring system according to claim 4, is characterized in that, the information of described treater also for falling to described dodge gate valve port according to described wafer generates abnormal notice, and is sent to default object.
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| CN201210137666.2A CN103382552B (en) | 2012-05-04 | 2012-05-04 | PCVD board abnormality monitoring method and system |
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| CN201210137666.2A CN103382552B (en) | 2012-05-04 | 2012-05-04 | PCVD board abnormality monitoring method and system |
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| CN105441887B (en) * | 2014-06-13 | 2017-11-10 | 北大方正集团有限公司 | Magnetic control sputtering device |
| CN105405800A (en) * | 2014-06-16 | 2016-03-16 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Semiconductor processing equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101469418A (en) * | 2007-12-29 | 2009-07-01 | 沈阳中科博微自动化技术有限公司 | Control method for plasma reinforced chemical meteorology deposition apparatus |
| CN101477961A (en) * | 2008-01-03 | 2009-07-08 | 京元电子股份有限公司 | Wafer raising platform and wafer test machine |
| CN101640166A (en) * | 2008-08-01 | 2010-02-03 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Substrate transmission device and control system and control method thereof |
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| KR20100106608A (en) * | 2008-01-31 | 2010-10-01 | 어플라이드 머티어리얼스, 인코포레이티드 | Closed loop mocvd deposition control |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101469418A (en) * | 2007-12-29 | 2009-07-01 | 沈阳中科博微自动化技术有限公司 | Control method for plasma reinforced chemical meteorology deposition apparatus |
| CN101477961A (en) * | 2008-01-03 | 2009-07-08 | 京元电子股份有限公司 | Wafer raising platform and wafer test machine |
| CN101640166A (en) * | 2008-08-01 | 2010-02-03 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Substrate transmission device and control system and control method thereof |
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