CN104213187B - A kind of vacuum detecting protection device - Google Patents
A kind of vacuum detecting protection device Download PDFInfo
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- CN104213187B CN104213187B CN201410414824.3A CN201410414824A CN104213187B CN 104213187 B CN104213187 B CN 104213187B CN 201410414824 A CN201410414824 A CN 201410414824A CN 104213187 B CN104213187 B CN 104213187B
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- touch switch
- metal bellows
- single crystal
- crystal growing
- growing furnace
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Abstract
The present invention relates to single crystal growing furnace detection equipment technical field, it is desirable to provide a kind of vacuum detecting protection device.This kind of vacuum detecting protection device includes touch switch and metal bellows; the open circuit of touch switch and single crystal growing furnace controls circuit or controller connects; the side of metal bellows is arranged on the pressure detecting mouth of secondary vacuum system; secondary vacuum system communicates with the furnace chamber of single crystal growing furnace; the opposite side of metal bellows for contacting connection with touch switch; and ensure: when the pressure in single crystal growing furnace is normal condition, wavy metal end surfaces contacts with touch switch and triggers touch switch；When the pressure in single crystal growing furnace is negative pressure state, metal bellows compresses, and then wavy metal end surfaces disengages with touch switch.Triggering mode of the present invention is that mechanical type triggers electronic devices and components, and safety coefficient is high, and service life is long, simple in construction, it is possible to realize optimal function in the case of low cost.
Description
Technical field
The present invention is to detect equipment technical field about single crystal growing furnace, particularly to a kind of vacuum detecting protection device.
Background technology
Single crystal growing furnace is in noble gas (argon) environment, is dissolved by silicon semiconductor material with graphite resistance heater, uses
The equipment of monocrystalline growth with czochralski.The negative pressure condition of high temperature it is in furnace chamber, if now maloperation carries when single crystal growing furnace works
Rise furnace chamber, then major accident can occur, cause device damage even casualties.And the most traditional technology is by pressure
Power is measured components and parts and is monitored the pressure of furnace interior, and the stove that control program feeds back according to stress test components and parts is intrinsic pressure
Force data limits the most all body of heater actions that can destroy furnace pressure, thus the negative pressure shape in protecting stove
State.But pressure detecting components and parts are required the highest by this traditional technical measures, and it must feed back the most accurately
Pressure actual value in stove, if pressure detecting components and parts occur aging after itself there are quality problems, or Reusability,
Arrive lifetime limitation, and if being continuing with, the measurement misalignment that i.e. there will be components and parts lost efficacy, thus control program and occur
, when being in the negative pressure condition of high temperature in stove, once there is maloperation, will cause heavy losses in false judgment.
Summary of the invention
Present invention is primarily targeted at and overcome deficiency of the prior art, it is provided that a kind of safety coefficient is higher, service life
The detection protection device that no-failure situation long, basic produces.For solving above-mentioned technical problem, the solution of the present invention is:
There is provided a kind of vacuum detecting protection device, for monitoring the pressure size in single crystal growing furnace, it is characterised in that include touching
The open circuit of dynamic switch and metal bellows, touch switch and single crystal growing furnace controls circuit or controller connects；Metal bellows
Side be arranged on the pressure detecting mouth of secondary vacuum system, secondary vacuum system communicates with the furnace chamber of single crystal growing furnace, wavy metal
The opposite side of pipe for contacting connection with touch switch, and ensures: (single when the pressure in single crystal growing furnace is normal condition
Brilliant furnace pressure is at 0.9P0≤ P ＜ P0In the range of), wavy metal end surfaces contacts with touch switch and triggers touch switch；
(the monocrystalline furnace pressure 0 ＜ P ＜ 0.9P when the pressure in single crystal growing furnace is negative pressure state0In the range of), metal bellows
Compress, and then wavy metal end surfaces disengages with touch switch, wherein, P0It it is 1 normal atmosphere；
Metal bellows contacts connection with touch switch, can produce detection signal, detection signal seal in blow-on control circuit or
Time in access controller, circuit can be controlled by open circuit or single crystal growing furnace is operated by controller；Metal bellows and shake-up
Switch disengages, and does not detect signal and seals in blow-on when controlling in circuit or access controller, it is impossible to by open circuit control
Single crystal growing furnace is operated by circuit or controller.
As further improving, the end face of described metal bellows is the circular end face closed, circular metal corrugated tube
The end face closed is for contacting with the trigger point of touch switch；Corrugated pipe end plane and the distance of touch switch trigger point, can lead to
The position crossing fine setting touch switch is adjusted.
As further improving, one end of described metal bellows is arranged on the pressure detecting mouth of secondary vacuum system, and
By O shape rubber seal rings for seal.
As further improving, described metal bellows is the corrugated tube of resilient material, including the ripple of metal material
Stricture of vagina pipe.
As further improving, the end face that described metal bellows contacts with touch switch is circle, meets S=π R2,
T=(P0-P1)×πR2；Wherein, S, R are respectively the area of the circular end face that metal bellows contacts with touch switch
And radius, the active force suffered by end face that T is contacted with touch switch by metal bellows, P0It is 1 normal atmosphere,
P1Furnace pressure for single crystal growing furnace；Set P1=0.9P0Time, metal bellows departs from touch switch, and R chooses 15mm,
By calculating T=7.13N；
Being coefficient of elasticity according to Hooke's law T=k × △ s wherein k, △ s is needed for metal bellows departs from touch switch
Deflection；Set 2mm ＜ △ s≤5mm, therefore the coefficient of elasticity of metal bellows be between 1.426N/mm～3.515N/mm,
And 3.515N/mm can not get (as △ s=2mm, coefficient of elasticity k==3.515N/mm, as △ s=5mm, bullet
Property coefficient k==1.426N/mm).
Compared with prior art, the invention has the beneficial effects as follows:
Triggering mode is that mechanical type triggers electronic devices and components, and safety coefficient is high, and service life is long, simple in construction, it is possible to
Optimal function is realized in the case of low cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the operation principle schematic diagram of the present invention.
Reference in figure is: 1 touch switch；2 metal bellowss；3 touch switch supports；4 single crystal furnace bodies.
Detailed description of the invention
With detailed description of the invention, the present invention is described in further detail below in conjunction with the accompanying drawings:
A kind of vacuum detecting protection device in Fig. 1 includes touch switch 1 and metal bellows 2, and touch switch props up
Frame 3, for monitoring the pressure size in single crystal growing furnace, during to protect single crystal growing furnace to work, the internal negative pressure condition of high temperature stablizes.
When being in negative pressure state in furnace chamber, through programme-control, all operations of single crystal growing furnace is automatically locked, and operator cannot grasp
Make all to destroy the body of heater action of negative pressure state in single crystal growing furnace；Contrary when being in normal pressure value scope in furnace chamber, single
The all operations of brilliant stove recovers to use the most automatically.
The open circuit of touch switch 1 and single crystal growing furnace controls circuit or controller connects；One end of metal bellows 2 is arranged on
On the pressure detecting mouth of secondary vacuum system, and with O shape rubber seal rings for seal, the furnace chamber phase of pair vacuum system and single crystal growing furnace
Logical, the other end of metal bellows 2 contacts connection with touch switch 1 trigger point, and ensures: when the pressure in single crystal growing furnace
During for normal condition, i.e. during monocrystalline furnace pressure 0.9Po≤P≤Po, metal bellows 2 can trigger touch switch 1；
When the pressure in single crystal growing furnace is negative pressure state, i.e., during monocrystalline furnace pressure 0 ＜ P ＜ 0.9Po, metal bellows 2 can
Depart from the trigger point of touch switch 1.Metal bellows 2, for the end contacted with touch switch 1 trigger point, leaves with shake-up
Close the distance of 1, can be adjusted by the position of fine setting touch switch 1.
Metal bellows 2 contacts connection with the trigger point of touch switch 1, can produce detection signal, and detection signal seals in out
When stove controls in circuit or access controller, circuit can be controlled by open circuit or single crystal growing furnace is operated by controller；Metal
Corrugated tube 2 and touch switch 1 disengage, and do not detect signal and seal in blow-on when controlling in circuit or access controller,
Circuit can not be controlled by open circuit or single crystal growing furnace is operated by controller.
As in figure 2 it is shown, metal bellows 2 is circle for the end face contacted with the trigger point of touch switch 1, meet S=
πR2, T=P0×πR2-P1×πR2；Wherein, S, R respectively metal bellows 2 and touch switch 1 trigger point connect
The circular area of the end face touched and radius, T is suffered by the end face that metal bellows 2 contacts with the trigger point of touch switch 1
Active force, P0It is 1 normal atmosphere, P1For negative pressure in the stove of single crystal growing furnace；Set and work as P1=0.9P0Time, metal wave
Stricture of vagina pipe 2 departs from the trigger point of touch switch 1, and R chooses moderate value 15mm, by calculating T=7.13N；
Being coefficient of elasticity according to Hooke's law T=k × △ s wherein k, △ s is that metal bellows 2 departs from touch switch 1
Trigger point needed for deflection；Set 2mm ＜ △ s≤5mm, as △ s=2mm, coefficient of elasticity k==3.515N/mm,
As △ s=5mm, the coefficient of elasticity of coefficient of elasticity k==1.426N/mm therefore metal bellows 2 at 1.426N/mm～
Between 3.515N/mm, and 3.515N/mm can not get.
When being in negative pressure state in furnace chamber, owing to outside pressure is more than pressure in furnace chamber, under the effect of pressure, metal
Corrugated tube 2 is in compressive state, it is impossible to trigger touch switch 1, enters blow-on currently without detection signal and controls circuit, institute
Cannot operate with operator and all can destroy the body of heater action of negative pressure state in stove；When reaching normal pressure value model in furnace chamber
When enclosing interior, in furnace chamber, pressure is basically identical with outside pressure, and metal bellows 2 returns to normal, and its front end is triggered shake-up and opened
Closing 1, detection signal enters blow-on and controls circuit, and all operations recovers to use, and operator can operate normally.
It is only the specific embodiment of the present invention finally it should be noted that listed above.It is clear that the invention is not restricted to
Above example, it is also possible to have many variations.Such as circular metal corrugated tube 2 can make other shapes, the most only needs
Change the area calculating corrugated tube stress, also or the material of corrugated tube is changed to nonmetallic, have certain bullet
The material of power also can realize the function of this patent, and those of ordinary skill in the art can from present disclosure directly
The all deformation derived or associate, are all considered as protection scope of the present invention.
Claims (5)
1. a vacuum detecting protection device, for monitoring the pressure size in single crystal growing furnace, it is characterised in that include touching
The open circuit of dynamic switch and metal bellows, touch switch and single crystal growing furnace controls circuit or controller connects；Metal bellows
Side be arranged on the pressure detecting mouth of secondary vacuum system, secondary vacuum system communicates with the furnace chamber of single crystal growing furnace, wavy metal
The opposite side of pipe for contacting connection with touch switch, and ensures: when the pressure in single crystal growing furnace is normal condition, metal
Corrugated pipe end plane contacts with touch switch and triggers touch switch；When the pressure in single crystal growing furnace is negative pressure state, metal wave
Stricture of vagina pipe compresses, and then wavy metal end surfaces disengages with touch switch；
Metal bellows contacts connection with touch switch, can produce detection signal, detection signal seal in blow-on control circuit or
Time in access controller, circuit can be controlled by open circuit or single crystal growing furnace is operated by controller；Metal bellows and shake-up
Switch disengages, and does not detect signal and seals in blow-on when controlling in circuit or access controller, it is impossible to by open circuit control
Single crystal growing furnace is operated by circuit or controller.
A kind of vacuum detecting protection device the most according to claim 1, it is characterised in that described metal bellows
End face be the circular end face closed, the end face that circular metal corrugated tube is closed is for connecing with the trigger point of touch switch
Touch；Corrugated pipe end plane and the distance of touch switch trigger point, can be adjusted by the position of fine setting touch switch.
A kind of vacuum detecting protection device the most according to claim 1, it is characterised in that described metal bellows
One end be arranged on the pressure detecting mouth of secondary vacuum system, and by O shape rubber seal rings for seal.
A kind of vacuum detecting protection device the most according to claim 1, it is characterised in that described metal bellows
It it is the corrugated tube of resilient material.
A kind of vacuum detecting protection device the most according to claim 1, it is characterised in that described metal bellows
The end face contacted with touch switch is circle, meets S=π R2, T=(P0-P1)×πR2；Wherein, S, R are respectively
The area of the circular end face contacted with touch switch for metal bellows and radius, T is metal bellows and touch switch institute
The active force suffered by end face of contact, P0It is 1 normal atmosphere, P1Furnace pressure for single crystal growing furnace；Set P1=0.9
P0Time, metal bellows departs from touch switch, and R chooses 15mm, by calculating T=7.13N；
Being coefficient of elasticity according to Hooke's law T=k × △ s wherein k, △ s is needed for metal bellows departs from touch switch
Deflection；Set 2mm ＜ △ s≤5mm, therefore the coefficient of elasticity of metal bellows be between 1.426N/mm～3.515N/mm,
And 3.515N/mm can not get.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410414824.3A CN104213187B (en) | 2014-08-21 | 2014-08-21 | A kind of vacuum detecting protection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410414824.3A CN104213187B (en) | 2014-08-21 | 2014-08-21 | A kind of vacuum detecting protection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104213187A CN104213187A (en) | 2014-12-17 |
| CN104213187B true CN104213187B (en) | 2016-09-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410414824.3A Active CN104213187B (en) | 2014-08-21 | 2014-08-21 | A kind of vacuum detecting protection device |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1605780A (en) * | 2003-10-08 | 2005-04-13 | 太平洋工业株式会社 | Pressure control valve |
| CN102242396A (en) * | 2011-06-23 | 2011-11-16 | 西安隆基硅材料股份有限公司 | Automatic protection method for lifting operation of auxiliary chamber of single crystal furnace |
| CN204111915U (en) * | 2014-08-21 | 2015-01-21 | 杭州慧翔电液技术开发有限公司 | A kind of vacuum detecting protector |
-
2014
- 2014-08-21 CN CN201410414824.3A patent/CN104213187B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1605780A (en) * | 2003-10-08 | 2005-04-13 | 太平洋工业株式会社 | Pressure control valve |
| CN102242396A (en) * | 2011-06-23 | 2011-11-16 | 西安隆基硅材料股份有限公司 | Automatic protection method for lifting operation of auxiliary chamber of single crystal furnace |
| CN204111915U (en) * | 2014-08-21 | 2015-01-21 | 杭州慧翔电液技术开发有限公司 | A kind of vacuum detecting protector |
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| Publication number | Publication date |
|---|---|
| CN104213187A (en) | 2014-12-17 |
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