CN204111915U - A kind of vacuum detecting protector - Google Patents
A kind of vacuum detecting protector Download PDFInfo
- Publication number
- CN204111915U CN204111915U CN201420474733.4U CN201420474733U CN204111915U CN 204111915 U CN204111915 U CN 204111915U CN 201420474733 U CN201420474733 U CN 201420474733U CN 204111915 U CN204111915 U CN 204111915U
- Authority
- CN
- China
- Prior art keywords
- touch switch
- metallic bellows
- single crystal
- crystal growing
- growing furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Abstract
The utility model relates to single crystal growing furnace test set technical field, aims to provide a kind of vacuum detecting protector.This kind of vacuum detecting protector comprises touch switch and metallic bellows, open circuit control circuit or the controller of touch switch and single crystal growing furnace are connected, the side of metallic bellows is arranged on the pressure detection mouth of secondary vacuum system, secondary vacuum system communicates with the furnace chamber of single crystal growing furnace, the opposite side of metallic bellows is used for contacting connection with touch switch, and ensure: when the pressure in single crystal growing furnace is standard state, wavy metal end surfaces contacts with touch switch and triggers touch switch; When the pressure in single crystal growing furnace is negative pressure state, metallic bellows compresses, and then wavy metal end surfaces and touch switch disengage.The utility model triggering mode is mechanical type triggerable electronic components and parts, and safety coefficient is high, long service life, and structure is simple, can realize optimal function when low cost.
Description
Technical field
The utility model is about single crystal growing furnace test set technical field, particularly a kind of vacuum detecting protector.
Background technology
Single crystal growing furnace is in rare gas element (argon gas) environment, is dissolved by silicon semiconductor material with graphite resistance heater, with the equipment of monocrystalline growth with czochralski.Be in the negative pressure condition of high temperature when single crystal growing furnace works in furnace chamber, if now mishandle promotes furnace chamber, then major accident can occur, cause structure deteriorate even loss of life and personal injury.And technology traditional is at present monitored the pressure of furnace interior; sequence of control limits all body of heater actions that can destroy furnace pressure under vacuum conditions according to the furnace pressure data that pressure test components and parts feed back, thus the negative pressure state in protection stove.But this traditional technical measures require very high to pressure detection components and parts, it must feed back the pressure actual value of coming out of the stove interior very accurately, if pressure detection components and parts itself occur quality problems, or occur aging after Reusability, arrive lifetime limitation, and continue the words of use, namely the measurement misalignment that there will be components and parts lost efficacy, thus false judgment appears in sequence of control, when being in the negative pressure condition of high temperature in stove, once there is mishandle, heavy losses will be caused.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, provides the detection protector that a kind of safety coefficient is higher, long service life, basic no-failure situation produce.For solving the problems of the technologies described above, solution of the present utility model is:
There is provided a kind of vacuum detecting protector, for monitoring the pressure size in single crystal growing furnace, it is characterized in that, comprising touch switch and metallic bellows, open circuit control circuit or the controller of touch switch and single crystal growing furnace are connected; The side of metallic bellows is arranged on the pressure detection mouth of secondary vacuum system, secondary vacuum system communicates with the furnace chamber of single crystal growing furnace, the opposite side of metallic bellows is used for contacting connection with touch switch, and ensures: when the pressure in single crystal growing furnace is standard state, (single crystal growing furnace internal pressure is at 0.9 P
0≤ P < P
0in scope), wavy metal end surfaces contacts with touch switch and triggers touch switch; (the single crystal growing furnace internal pressure 0 < P < 0.9P when the pressure in single crystal growing furnace is negative pressure state
0in scope), metallic bellows compresses, and then wavy metal end surfaces and touch switch disengage, wherein, P
0it is 1 standard atmospheric pressure;
Metallic bellows contacts connection with touch switch, can produce detection signal, when detection signal seals in blow-on control circuit or access controller, operates single crystal growing furnace by open circuit control circuit or controller; Metallic bellows and touch switch disengage, and when not having detection signal to seal in blow-on control circuit or access controller, do not operate by open circuit control circuit or controller to single crystal growing furnace.
As further improvement, an end face of described metallic bellows is closed circular end face, and the end face that circular metal corrugated tube is closed is for contacting with the trigger point of touch switch; The distance of corrugated pipe end plane and touch switch trigger point, adjusts by the position of finely tuning touch switch.
As further improvement, one end of described metallic bellows is arranged on the pressure detection mouth of secondary vacuum system, and by O shape rubber seal rings for seal.
As further improvement, described metallic bellows is the corrugated tube of resilient material, comprises the corrugated tube of metal material.
As further improvement, the end face that described metallic bellows contacts with touch switch, for circular, meets S=π R
2, T=(P
0-P
1) × π R
2; Wherein, S, R are respectively area and the radius of the circular end face that metallic bellows contacts with touch switch, the reactive force suffered by the end face that T contacts with touch switch for metallic bellows, P
0be 1 standard atmospheric pressure, P
1for the furnace pressure of single crystal growing furnace; Setting P
1=0.9 P
0time, metallic bellows departs from touch switch, and R chooses 15mm, by calculating T=7.13N;
According to Hook's law T=k × △ s wherein k be coefficient of elasticity, △ s departs from deflection needed for touch switch for metallic bellows; Setting 2mm < △ s≤5mm, therefore the coefficient of elasticity of metallic bellows is between 1.426N/mm ~ 3.515N/mm, and 3.515N/mm can not get (as △ s=2mm, coefficient of elasticity k==3.515N/mm, as △ s=5mm, coefficient of elasticity k==1.426N/mm).
Compared with prior art, the beneficial effects of the utility model are:
Triggering mode is mechanical type triggerable electronic components and parts, and safety coefficient is high, long service life, and structure is simple, can realize optimal function when low cost.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is principle of work schematic diagram of the present utility model.
Reference numeral in figure is: 1 touch switch; 2 metallic bellowss; 3 touch switch supports; 4 single crystal furnace bodies.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is described in further detail:
A kind of vacuum detecting protector in Fig. 1 comprises touch switch 1 and metallic bellows 2, and touch switch support 3, and for monitoring the pressure size in single crystal growing furnace, when working to protect single crystal growing furnace, the internal negative pressure condition of high temperature is stable.When being in negative pressure state in furnace chamber, through time variable control, all operations of single crystal growing furnace is automatically locked, and operator cannot operate all body of heater actions that can destroy negative pressure state in single crystal growing furnace; Contrary to being in normal pressure value scope in furnace chamber, all operations of single crystal growing furnace recovers again to use automatically.
Open circuit control circuit or the controller of touch switch 1 and single crystal growing furnace are connected; One end of metallic bellows 2 is arranged on the pressure detection mouth of secondary vacuum system, and with O shape rubber seal rings for seal, secondary vacuum system communicates with the furnace chamber of single crystal growing furnace, the other end of metallic bellows 2 contacts connection with touch switch 1 trigger point, and ensure: when the pressure in single crystal growing furnace is standard state, namely, during single crystal growing furnace internal pressure 0.9Po≤P≤Po, metallic bellows 2 can trigger touch switch 1; When the pressure in single crystal growing furnace is negative pressure state, namely during single crystal growing furnace internal pressure 0 < P < 0.9Po, metallic bellows 2 can depart from the trigger point of touch switch 1.The end of metallic bellows 2 for contacting with touch switch 1 trigger point, with the distance of touch switch 1, adjusts by the position of finely tuning touch switch 1.
Metallic bellows 2 contacts connection with the trigger point of touch switch 1, can produce detection signal, when detection signal seals in blow-on control circuit or access controller, operates single crystal growing furnace by open circuit control circuit or controller; Metallic bellows 2 and touch switch 1 disengage, and when not having detection signal to seal in blow-on control circuit or access controller, do not operate by open circuit control circuit or controller to single crystal growing furnace.
As shown in Figure 2, metallic bellows 2 is circle for the end face contacted with the trigger point of touch switch 1, meets S=π R
2, T=P
0× π R
2-P
1× π R
2; Wherein, S, R are respectively circular area and the radius of the end face that metallic bellows 2 contacts with touch switch 1 trigger point, the reactive force suffered by the end face that T contacts with the trigger point of touch switch 1 for metallic bellows 2, P
0be 1 standard atmospheric pressure, P
1for negative pressure in the stove of single crystal growing furnace; P is worked as in setting
1=0.9 P
0time, metallic bellows 2 departs from the trigger point of touch switch 1, and R chooses moderate value 15mm, by calculating T=7.13N;
According to Hook's law T=k × △ s wherein k be coefficient of elasticity, △ s departs from deflection needed for the trigger point of touch switch 1 for metallic bellows 2; Setting 2mm < △ s≤5mm, as △ s=2mm, coefficient of elasticity k==3.515N/mm, as △ s=5mm, the coefficient of elasticity of coefficient of elasticity k==1.426N/mm event metallic bellows 2 is between 1.426N/mm ~ 3.515N/mm, and 3.515N/mm can not get.
When being in negative pressure state in furnace chamber, because outside pressure is greater than pressure in furnace chamber, under the effect of pressure, metallic bellows 2 is in compressed state, touch switch 1 cannot be triggered, currently enter blow-on control circuit without detection signal, so operator cannot operate all body of heater actions that can destroy negative pressure state in stove; When reaching within the scope of normal pressure value in furnace chamber, in furnace chamber pressure and outside pressure basically identical, metallic bellows 2 returns to normal, touch switch 1 is triggered in its front end, detection signal enters blow-on control circuit, and all operations recovers to use, and operator can operate normally.
Finally, it should be noted that above what enumerate is only specific embodiment of the utility model.Obviously, the utility model is not limited to above embodiment, can also have a lot of distortion.Such as circular metal corrugated tube 2 can make other shapes; only need to change and calculate the stressed area of corrugated tube; also or the material of corrugated tube is changed to nonmetallic; there is the material of certain elastic force also can realize the function of this patent; all distortion that those of ordinary skill in the art can directly derive or associate from content disclosed in the utility model, all should think protection domain of the present utility model.
Claims (5)
1. a vacuum detecting protector, for monitoring the pressure size in single crystal growing furnace, is characterized in that, comprising touch switch and metallic bellows, and open circuit control circuit or the controller of touch switch and single crystal growing furnace are connected; The side of metallic bellows is arranged on the pressure detection mouth of secondary vacuum system, secondary vacuum system communicates with the furnace chamber of single crystal growing furnace, the opposite side of metallic bellows is used for contacting connection with touch switch, and ensure: when the pressure in single crystal growing furnace is standard state, wavy metal end surfaces contacts with touch switch and triggers touch switch; When the pressure in single crystal growing furnace is negative pressure state, metallic bellows compresses, and then wavy metal end surfaces and touch switch disengage, wherein, and P
0it is 1 standard atmospheric pressure;
Metallic bellows contacts connection with touch switch, can produce detection signal, when detection signal seals in blow-on control circuit or access controller, operates single crystal growing furnace by open circuit control circuit or controller; Metallic bellows and touch switch disengage, and when not having detection signal to seal in blow-on control circuit or access controller, do not operate by open circuit control circuit or controller to single crystal growing furnace.
2. a kind of vacuum detecting protector according to claim 1, is characterized in that, an end face of described metallic bellows is closed circular end face, and the end face that circular metal corrugated tube is closed is for contacting with the trigger point of touch switch; The distance of corrugated pipe end plane and touch switch trigger point, adjusts by the position of finely tuning touch switch.
3. a kind of vacuum detecting protector according to claim 1, is characterized in that, one end of described metallic bellows is arranged on the pressure detection mouth of secondary vacuum system, and by O shape rubber seal rings for seal.
4. a kind of vacuum detecting protector according to claim 1, it is characterized in that, described metallic bellows is the corrugated tube of resilient material, comprises the corrugated tube of metal material.
5. a kind of vacuum detecting protector according to claim 1, is characterized in that, the end face that described metallic bellows contacts with touch switch, for circular, meets S=π R
2, T=(P
0-P
1) × π R
2; Wherein, S, R are respectively area and the radius of the circular end face that metallic bellows contacts with touch switch, the reactive force suffered by the end face that T contacts with touch switch for metallic bellows, P
0be 1 standard atmospheric pressure, P
1for the furnace pressure of single crystal growing furnace; Setting P
1=0.9 P
0time, metallic bellows departs from touch switch, and R chooses 15mm, by calculating T=7.13N;
According to Hook's law T=k × △ s wherein k be coefficient of elasticity, △ s departs from deflection needed for touch switch for metallic bellows; Setting 2mm < △ s≤5mm, therefore the coefficient of elasticity of metallic bellows is between 1.426N/mm ~ 3.515N/mm, and 3.515N/mm can not get.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420474733.4U CN204111915U (en) | 2014-08-21 | 2014-08-21 | A kind of vacuum detecting protector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420474733.4U CN204111915U (en) | 2014-08-21 | 2014-08-21 | A kind of vacuum detecting protector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204111915U true CN204111915U (en) | 2015-01-21 |
Family
ID=52329248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420474733.4U Withdrawn - After Issue CN204111915U (en) | 2014-08-21 | 2014-08-21 | A kind of vacuum detecting protector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204111915U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104213187A (en) * | 2014-08-21 | 2014-12-17 | 杭州慧翔电液技术开发有限公司 | Vacuum testing protector |
-
2014
- 2014-08-21 CN CN201420474733.4U patent/CN204111915U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104213187A (en) * | 2014-08-21 | 2014-12-17 | 杭州慧翔电液技术开发有限公司 | Vacuum testing protector |
| CN104213187B (en) * | 2014-08-21 | 2016-09-28 | 杭州慧翔电液技术开发有限公司 | A kind of vacuum detecting protection device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204111915U (en) | A kind of vacuum detecting protector | |
| CN102629414A (en) | Combustible gas leakage detection device | |
| CN208420315U (en) | A kind of detection device of pressure pipeline | |
| CN104213187A (en) | Vacuum testing protector | |
| CN104434170A (en) | Accelerated speed induction type automatic sleeping wireless B-ultrasonic detection system | |
| CN202195858U (en) | Liquid level detector of blast furnace slag flushing pool | |
| CN204575240U (en) | A kind of pressure unit | |
| CN207966153U (en) | A kind of combustible gas detecting device | |
| CN202512707U (en) | Combustible gas leakage detection device | |
| CN103382552B (en) | PCVD board abnormality monitoring method and system | |
| CN204962305U (en) | Oil gas pipeline leaks monitored control system | |
| CN205193521U (en) | Electric circuit protection device | |
| CN203643606U (en) | Dual mode positioning wireless monitoring terminal facilitating external connection | |
| CN203224304U (en) | Thermal expansion display alarm | |
| CN204925014U (en) | Toxic gas early warning safety helmet | |
| CN216621580U (en) | Wisdom gas engineering is with wireless intelligent pressure monitor that detection precision is high | |
| CN203012101U (en) | A wireless detecting system used for a vacuum circuit breaker in a conventional transformer station | |
| CN105806554A (en) | Digital display pressure gauge with hazard warning function | |
| CN204115956U (en) | A kind of instrument with digital display function | |
| CN202651755U (en) | Gas leakage and electrical fire alarm power-off device | |
| CN205898312U (en) | A device for measuring mine equipment bearing temperature | |
| CN204441183U (en) | A kind of vacuum interrupter of pointing out gas leakage | |
| CN206017008U (en) | A kind of hysteresis controls formula blocking warner | |
| CN205001866U (en) | Oil gas pipeline leaks early warning system | |
| CN203552419U (en) | Wireless drive type fuel gas alarm device for residential floor units |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150121 Effective date of abandoning: 20160928 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |