CN105441887B - Magnetic control sputtering device - Google Patents
Magnetic control sputtering device Download PDFInfo
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- CN105441887B CN105441887B CN201410264625.9A CN201410264625A CN105441887B CN 105441887 B CN105441887 B CN 105441887B CN 201410264625 A CN201410264625 A CN 201410264625A CN 105441887 B CN105441887 B CN 105441887B
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- alarm
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- shutter
- inductor
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Abstract
The invention provides a kind of magnetic control sputtering device, including warning system, the warning system includes induction module, alarm control module and alarm module；Wherein, induction module, for detecting whether corresponding baffle plate shutter switchs in place, and testing result is sent to alarm control module；Alarm control module, the testing result for being sent according to the induction module judge whether the shutter switchs in place, and when being judged as NO, to the alarm module output alarm signal；Alarm module, for producing alarm after alarm signal is received.Magnetic control sputtering device provided by the invention, alarm can be produced in time when shutter is not switched in place, so that operating personnel perceive in time, so as to avoid thus caused product exception.
Description
Technical field
The present invention relates to machining technology field, more particularly to a kind of magnetic control sputtering device.
Background technology
The operation principle of magnetron sputtering refers to electronics in the presence of electric field E, is sent out during substrate is flown to ar atmo
Raw collision, makes its ionization produce Ar cations and new electronics；New electronics flies to substrate, and Ar ions accelerate under electric field action
Cathode target is flown to, and with high-energy bombardment target surface, sputters target.In sputtering particle, neutral target atom or point
Son, which is deposited on substrate, forms film, and caused secondary electron can be produced E (electric field) × B (magnetic by electric field and magnetic fields
) signified direction drift, abbreviation E × B drifts, its movement locus is similar to a cycloid.If toroidal magnetic field, then electronics is just
Moved in a circle in the form of approximate cycloid on target surface, their motion path is not only very long, and is bound in close to target table
In the heating region in face, and substantial amounts of Ar is ionized in this region and bombards target, it is achieved thereby that high deposition
Speed.With the increase of collision frequency, the energy expenditure of secondary electron totally, is gradually distance from target surface, and in electric field E effect
Under be eventually deposited on substrate.Because the energy of the electronics is very low, pass to the energy very little of substrate, cause substrate temperature rise compared with
It is low.
Magnetron sputtering is the collision process of incoming particle and target.Incoming particle undergoes the scattering process of complexity in target, and
Target atom is collided, and part momentum is transmitted to target atom, and this target atom collides with other target atoms again, forms cascade process.At this
The target atom of some near surfaces obtains the enough momentum moved out in kind cascade process, leaves target and is sputtered out, deposits
Plated film is formed on substrate.
In order to control the thickness of plated film, it is necessary to be protected using baffle plate shutter to corresponding position on substrate, still
In practical application, due to reasons such as manufacture crafts, shutter can be caused to be turned on and off in place, and be complete in plated film
Carried out in closed environment, operating personnel can not perceive such case in time, so the thickness of plated film or area can be caused not to be inconsistent
Close and require, cause product abnormal.
The content of the invention
An object of the present invention, which is to provide one kind operating personnel can be made to perceive shutter in time, not to be switched in place
Magnetic control sputtering device, so as to avoid thus caused product it is abnormal.
The invention provides a kind of magnetic control sputtering device, including warning system, the warning system includes induction module, report
Alert control module and alarm module, wherein,
Induction module, for detecting whether corresponding baffle plate shutter switchs in place, and testing result is sent to alarm
Control module；
Alarm control module, the testing result for being sent according to the induction module judge whether the shutter opens
Close in place, and when being judged as NO, to the alarm module output alarm signal；
Alarm module, for producing alarm after alarm signal is received.
Preferably, the induction module is specifically used for detecting the shutter in open position or in close stance
When putting, the first testing result is sent to the alarm control module, otherwise, the second detection is sent to the alarm control module and ties
Fruit；
The alarm control module, the also controlling switch with the shutter are connected, for detect it is described
When shutter starts to be turned on and off, judge the second testing result whether is have received in the first preset time, and judging
For it is no when, judge without switch in place.
Preferably, the alarm control module is additionally operable to, and is judging to receive the induction module in the first preset time
After the second testing result sent, determine whether receive the first testing result in the second preset time, if so, then sentencing
Fixed switch in place, switchs in place if it is not, then judgement is no.
Preferably, the induction module includes the first inductor and the second inductor, and first inductor is used in institute
Shutter is stated in open position, exports first detection signal, when the shutter is not in open position, the inspection of output second
Survey signal；Second inductor is used for when the shutter is in closed position, first detection signal is exported, described
Shutter exports the second detection signal not at closed position；The induction module is used for having inductor in two inductors
When exporting first detection signal, the first testing result is exported to the alarm control module, otherwise, to the alarm control module
Export the second testing result.
Preferably, first inductor and the second inductor are infrared inductor, and the alarm control module is can
Programmed logic controller PLC,
The output end of first inductor and second inductor is parallel to the same pin on PLC, and described first
Detection signal and the first testing result are high level, and the second detection signal and the second testing result are low level；
The magnetic control sputtering device also includes removable detection plate, and a breach is provided with the removable detection plate,
The removable detection plate is moved with the shutter, and when the shutter is in the open position, the removable inspection
Breach on drafting board is relative with the first inductor；When the shutter closed positions, the breach in the removable detection plate
It is relative with the second inductor.
Preferably, the induction module and the alarm module are multiple, and each induction module is respectively used to detect
Whether the shutter switchs different positions, and each induction module corresponds to an alarm module；
The alarm control module is specifically used for described in the testing result judgement sent according to an induction module
When shutter is not switched in place, alarm signal is sent to alarm module corresponding to the induction module.
Preferably, the alarm module is indicator lamp.
Preferably, the alarm control module is additionally operable to, when judging that the shutter is not switched in place to the magnetic
Control the master control system input alarm signal of sputter equipment.
Preferably, alarm is additionally provided with the alarm control module and removes module, and module quilt is removed in the alarm
During triggering, alarm clear signal is sent to the alarm module；
The alarm module, it is additionally operable to stop production after the alarm clear signal of the alarm control module transmission is received
Raw alarm.
Magnetic control sputtering device provided by the invention, alarm can be produced in time when shutter is not switched in place, so as to
Operating personnel are made to perceive in time, so as to avoid thus caused product exception.
Brief description of the drawings
Fig. 1 is a kind of structural representation of magnetron sputtering board warning system provided in an embodiment of the present invention；
Fig. 2 is the structural representation of another magnetron sputtering board warning system provided in an embodiment of the present invention.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is further described.Following examples are only
For clearly illustrating technical scheme, and can not be limited the scope of the invention with this.
The invention provides a kind of magnetic control sputtering device, including warning system, as shown in figure 1, warning system includes sensing
Module 101, alarm control module 102 and alarm module 103：
Induction module 101, for detecting whether corresponding baffle plate shutter switchs in place, and testing result is sent to
Alarm control module；
Alarm control module 102, it is connected with induction module 101, the testing result for being sent according to induction module 101 is sentenced
Whether the shutter that breaks switchs in place, and when being judged as NO, to the output alarm signal of alarm module 103；
Alarm module 103, it is connected with alarm control module 102, for producing alarm after alarm signal is received.
In magnetic control sputtering device provided by the invention, including for detecting whether shutter switchs warning system in place,
Alarm can be produced in time when shutter is not switched in place, so that operating personnel perceive in time, so as to avoid thus drawing
The product risen is abnormal.
Preferably, induction module 101 is specifically used for detecting the shutter in open position or in closed position
When, the first testing result is sent to alarm control module 102, otherwise, the second testing result is sent to alarm control module 102；
Alarm control module 102, the also controlling switch with the shutter are connected, for detecting the shutter
When starting to be turned on and off, judge the second testing result whether is have received in the first preset time, and when being judged as NO,
Judge without switch in place.
It will be understood by those skilled in the art that open position here refers to open the location of shutter when in place,
Closed position refers to close the location of shutter when in place.For magnetic control sputtering device, its shutter is not opened
Opening can cause the area to the plated film of substrate inadequate in place, if be not turned on completely, can cause that substrate can not be plated
Film, it is impossible to close the thickness that can then cause the thickness of substrate coating to be more than needs in place.Therefore whether induction module is needed to opening
Open and detected in place, it is also desirable to whether closing and detecting in place.
If in embodiments of the present invention using designing a kind of (such as the most common design of relatively simple induction module
It is that, when shutter is in open position or at closed position, induction module exports high level, on shutter is not on
When stating any position, induction module output low level), it is likely that a kind of caused situation is, when shutter is needing to open
When, it is not turned at all, and be in original closed position, then induction module can still send corresponding letter to alarm control module
Number, show that shutter is in suitable position, be thus likely to cause the erroneous judgement of alarm control module, it is believed that shutter is
Through opening in place, alarm is not exported.Accordingly, it is also possible to when shutter is not turned off at all, alarm control module
It is mistakenly considered shutter to have been switched off in place, does not export alarm.
In order to avoid such case, in the preferred embodiment of the invention, the induction module is specifically used for detecting
Shutter is stated in open position or at closed position, the first testing result is sent to alarm control module 102, otherwise, to
Alarm control module 102 sends the second testing result；
Alarm control module 102, the also controlling switch with the shutter are connected, for detecting the shutter
When starting to be turned on and off, judge the second testing result whether is have received in the first preset time, and when being judged as NO,
Judge without switch in place.
In practical application, shutter controlling switch can be made when controlling shutter to be turned on or off, while to
Alarm control module sends control signal, and such alarm control module can learn that shutter position will by control signal
Start to change.
Because the second testing result shows no shutter neither in open position nor in closed position, then alarm control
Molding block at least illustrates after it is determined that shutter position will start change if it have received the second testing result
Shutter has had been detached from open position (or closed position), setting in motion.So avoid to be not turned on completely or complete
The full erroneous judgement for being not turned off causing alarm control module.
Here the first preset time can set a shorter time, such as 1s or 1.5s, if at this
Interior the second detection signal being still not received by, then it is assumed that shutter could not be opened (or closing).
Further alarm control module 102 is additionally operable to, and is judging to receive the induction module in the first preset time
After the second testing result sent, determine whether receive the first testing result in the second preset time, if so, then sentencing
Fixed switch in place, switchs in place if it is not, then judgement is no.
Advantage of this is that it is determined that after shutter setting in motions (being turned on or off), enter alarm control module
One step judges whether shutter moves in place.
Preferably, the second preset time here can move to closed position with shutter reality by open position
Time (or the time of open position is moved to always by closed position).
The embodiment of the present invention additionally provides a kind of mode for simply realizing above-mentioned induction module, is specially：
Induction module is formed using two inductors, the first inductor 1011 is used in the shutter in open position
When, first detection signal is exported, when the shutter is not in open position, exports the second detection signal；Second inductor
1012 are used for when the shutter is in closed position, first detection signal are exported, in the shutter not in closed position
When, export the second detection signal；When the induction module is used to have in two inductors inductor output first detection signal,
The first testing result is exported to alarm control module 102, otherwise, the second testing result is exported to alarm control module 102.Certainly
This is only a kind of preferred embodiment of the present invention, and those skilled in the art can also use other modes to design above-mentioned sensing
Module, specifically which kind of mode is protection scope of the present invention is had no effect on using.
Preferably, the first inductor 1011 and the second inductor 1012 are infrared inductor, and alarm control module 102 is
Programmable logic controller (PLC) PLC, the annexation of modules can be in now above-mentioned warning system：
The output end of first inductor 1011 and the second inductor 1012 is parallel to the same pin on PLC, and described first
Detection signal and the first testing result are high level, and the second detection signal and the second testing result are low level；
Magnetic control sputtering device also includes removable detection plate 104, and a breach is provided with removable detection plate 104, can
Mobile detection plate is moved with shutter, and when shutter is in the open position, and may move breach in detection plate 104 and the
One inductor 1011 is relative；When the shutter closed positions, breach and the second sense in the removable detection plate 104
Answer device 1012 relative.So, when shutter is in the open position, because the infrared ray of the first inductor 1011 is not hindered
Gear, then can export high level to alarm control module 102, and corresponding second inductor 102 exports low level, finally entered
PLC level is high level；Similarly, when shutter is in the closed position, the first inductor 1011 output low level, second
1012 defeated low and high level of inductor, the level for finally entering PLC are high level；If shutter does not move to any bit
To put, then the first inductor 1011 and the second inductor 1012 export low level, and the level for finally entering PLC is low level,
PLC judges that now shutter is neither in closed position nor in open position.
As can be seen that this preferred embodiment, it is designed and the attachment structure of inside is all very simple, is easy to reality
It is existing.
Preferential, induction module 101 and alarm module 103 are multiple, and each induction module 101 is respectively used to detect
Whether the shutter switchs different positions, and each induction module corresponds to an alarm module；
Alarm control module 102 is specifically used for described in the testing result judgement sent according to an induction module 101
When shutter is not switched in place, alarm signal is sent to alarm module 103 corresponding to the induction module 101.
In such manner, it is possible to allow for multiple different positions that (position here refers to that substrate is processed in different positions
When corresponding shutter position), detection shutter whether detection switch in place.
It is a kind of situation comprising three induction modules shown in Fig. 2, the first induction module 201a, the second induction module
201b, the 3rd induction module 201c, now correspond respectively to three shutter controlling switches, the first controlling switch (access Fig. 2
In #a), the second controlling switch (access #b in Fig. 2), the 3rd controlling switch (#c in access Fig. 2), and corresponding three reports
Alert module, the first alarm module 203a, the second alarm module 203b, the 3rd alarm module 203c.When the first controlling switch is to PLC
After (or close) signal is opened in input, PLC starts to detect whether to receive the first induction module in the first preset time defeated
Enter to be changed into low level.If PLC judges that shutter is not switched in place, to the first alarm module according to the first induction module
201a sends out output alarm signal, instruction the first alarm module 201a alarms.
Preferably, alarm module 103 here can use indicator lamp.Compared to other modes (such as alarm bell), energy
Which enough more easily discriminate operating personnel to be not turned on or close in place in Working position.
Preferably, alarm control module 102 is additionally operable to, when judging that the shutter is not switched in place to the magnetic
Control the master control system input alarm signal of sputter equipment.Accordingly even when operating personnel do not have found to alarm, master control can also be made
System processed stops the processing to substrate in time after current technique is completed.
Preferably, alarm is additionally provided with alarm control module 102 and removes module, and removes module 102 in alarm and is touched
During hair, alarm clear signal is sent to alarm module 103；
Alarm module 103, it is additionally operable to stop production after the alarm clear signal of the alarm control module transmission is received
Raw alarm.
So, operating personnel can stop warning system after warning message is learnt by pressing alarm removing module
Alarm.
Preferably, as shown in Fig. 2 alarm here understands that module is reset buttons.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, some improvements and modifications can also be made, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (9)
1. a kind of magnetic control sputtering device, it is characterised in that including warning system, the warning system includes induction module, alarm
Control module and alarm module, wherein
Induction module, for detecting whether corresponding baffle plate shutter switchs in place, and testing result is sent to controlling alarm
Module；
Alarm control module, the testing result for being sent according to the induction module judge whether the shutter switchs
Position, and when being judged as NO, to the alarm module output alarm signal；
Alarm module, for producing alarm after alarm signal is received.
2. magnetic control sputtering device as claimed in claim 1, it is characterised in that
The induction module is specifically used for detecting the shutter in open position or at closed position, to described
Alarm control module sends the first testing result, otherwise, the second testing result is sent to the alarm control module；
The alarm control module, the also controlling switch with the shutter are connected, for detecting that the shutter opens
When beginning is turned on and off, judge the second testing result whether is have received in the first preset time, and when being judged as NO, sentence
Fixed no switch is in place.
3. magnetic control sputtering device as claimed in claim 2, it is characterised in that
The alarm control module is additionally operable to, and is judging that the second of the induction module transmission is received in the first preset time examines
After surveying result, determine whether receive the first testing result in the second preset time, if so, then judge switch in place,
If it is not, then judge without switch in place.
4. magnetic control sputtering device as claimed in claim 2 or claim 3, it is characterised in that
The induction module includes the first inductor and the second inductor, and first inductor is used to exist in the shutter
During open position, first detection signal is exported, when the shutter is not in open position, exports the second detection signal；It is described
Second inductor is used for when the shutter is in closed position, exports first detection signal, is not being closed in the shutter
During closed position, the second detection signal is exported；The induction module is used for having the detection of inductor output first in two inductors
During signal, the first testing result is exported to the alarm control module, otherwise, to the detection of alarm control module output second
As a result.
5. magnetic control sputtering device as claimed in claim 4, it is characterised in that first inductor and the second inductor are
Infrared inductor, the alarm control module are programmable logic controller (PLC) PLC,
The output end of first inductor and second inductor is parallel to the same pin on PLC, first detection
Signal and the first testing result are high level, and the second detection signal and the second testing result are low level；
The magnetic control sputtering device also includes removable detection plate, and a breach is provided with the removable detection plate, described
Removable detection plate is moved with the shutter, and when the shutter is in the open position, the removable detection plate
On breach it is relative with the first inductor；When the shutter closed positions, the breach in the removable detection plate and
Two inductors are relative.
6. magnetic control sputtering device as claimed in claim 1, it is characterised in that the induction module and the alarm module are
It is multiple, and each induction module is respectively used to detect whether the shutter switchs different positions, and each sensing mould
Block corresponds to an alarm module；
The alarm control module is specifically used for judging that the shutter does not have in the testing result sent according to an induction module
When having switch in place, alarm signal is sent to alarm module corresponding to the induction module.
7. magnetic control sputtering device as claimed in claim 6, it is characterised in that the alarm module is indicator lamp.
8. magnetic control sputtering device as claimed in claim 1, it is characterised in that the alarm control module is additionally operable to, and is being judged
The shutter without switch in place when to the magnetic control sputtering device master control system input alarm signal.
9. magnetic control sputtering device as claimed in claim 1, it is characterised in that alarm is additionally provided with the alarm control module
Module is removed, and when the alarm is removed module and is triggered, alarm clear signal is sent to the alarm module；
The alarm module, it is additionally operable to stop producing report after the alarm clear signal of the alarm control module transmission is received
It is alert.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410264625.9A CN105441887B (en) | 2014-06-13 | 2014-06-13 | Magnetic control sputtering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410264625.9A CN105441887B (en) | 2014-06-13 | 2014-06-13 | Magnetic control sputtering device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105441887A CN105441887A (en) | 2016-03-30 |
| CN105441887B true CN105441887B (en) | 2017-11-10 |
Family
ID=55552510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410264625.9A Active CN105441887B (en) | 2014-06-13 | 2014-06-13 | Magnetic control sputtering device |
Country Status (1)
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| CN (1) | CN105441887B (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2373841Y (en) * | 1998-11-06 | 2000-04-12 | 郑庆生 | Alarm device |
| JP4473323B2 (en) * | 2007-04-26 | 2010-06-02 | キヤノンアネルバ株式会社 | Sputtering film forming method, electronic device manufacturing method, and sputtering apparatus |
| CN101381860B (en) * | 2007-09-04 | 2010-05-26 | 上海华虹Nec电子有限公司 | Magnetron sputtering apparatus |
| CN101572280B (en) * | 2009-06-01 | 2011-03-02 | 无锡尚德太阳能电力有限公司 | Deposition apparatus for manufacturing metal electrode layer of thin film solar cell |
| CN103382552B (en) * | 2012-05-04 | 2015-08-19 | 无锡华润上华科技有限公司 | PCVD board abnormality monitoring method and system |
| CN104746034B (en) * | 2013-12-31 | 2017-09-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | PVD chamber blocks disc detector and PVD chamber |
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Effective date of registration: 20220726 Address after: 518116 founder Microelectronics Industrial Park, No. 5, Baolong seventh Road, Baolong Industrial City, Longgang District, Shenzhen, Guangdong Province Patentee after: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. Address before: 100871, fangzheng building, 298 Fu Cheng Road, Beijing, Haidian District Patentee before: PEKING UNIVERSITY FOUNDER GROUP Co.,Ltd. Patentee before: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. |