CN101572280B - Deposition apparatus for manufacturing metal electrode layer of thin film solar cell - Google Patents
Deposition apparatus for manufacturing metal electrode layer of thin film solar cell Download PDFInfo
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- CN101572280B CN101572280B CN2009101464036A CN200910146403A CN101572280B CN 101572280 B CN101572280 B CN 101572280B CN 2009101464036 A CN2009101464036 A CN 2009101464036A CN 200910146403 A CN200910146403 A CN 200910146403A CN 101572280 B CN101572280 B CN 101572280B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention relates to a deposition apparatus for manufacturing a metal electrode layer of a thin film solar cell. The apparatus comprises a chamber and a deposition zone inside the chamber for manufacturing the metal electrode layer. The apparatus further comprises a first sensor for detecting whether a substrate entered in the chamber and sends a first electrical signal; a second sensor for detecting whether a substrate leaves the chamber and sends a second electrical signal; and a control unit for receiving the first electrical signal and the second electrical signal, and switching voltage of the deposition apparatus from an idle state to an operating state after receiving the first electrical signal or switching voltage of the deposition apparatus from the operating state to the idlestate after receiving the second electrical signal. The deposition apparatus has the advantages of greatly reducing waste of electrical energy and target materials and reducing regular maintenance co st of the apparatus, thus saving production cost of the solar cell and avoiding frequent manual operations.
Description
Technical field
The present invention relates to a kind of device that is used to make thin film solar cell, relate in particular to a kind of device that is used to make metal electrode layer of thin film solar cell.
Background technology
In recent years, along with the energy and environment problem is increasingly serious, global photovoltaic industry fast development.A kind of as in numerous photovoltaic technologies of thin film solar cell technology, ripe day by day, photoelectric conversion efficiency and stability improve constantly.Compare with crystal silicon cell, silicon-film solar-cell has photovoltaic output characteristic and energy time of payment still less under the better high temperature, and because it has beautiful outward appearance, the design that is particularly suitable for BIPV (BIPV) is used.Thin film solar cell generally comprises glass substrate, first metal electrode layer, semiconductor layer and second metal electrode layer.At present, the technology that forms metal electrode layer has multiple, relatively more commonly used is to adopt PVD (Physical Vapor Deposition, physical vapour deposition (PVD)) technology, promptly in the precipitation equipment of making the solar cell metal electrode layer, at first by electric field with the gas in the plasma area (such as argon Ar 2), be dissociated into ionic forms, ion quickens the bombardment target under effect of electric field then, make the metallic atom sputter towards periphery on the target and transfer on the substrate, thereby form metal electrode layer at substrate surface.
In the hull cell production process, PVD equipment is to be in normally open, promptly keeps equipment work voltage sustainable supply.Under perfect condition, cell substrate is to enter PVD equipment cavity by the transmission device continuous uninterrupted to carry out the preparation of metal electrode, and at this moment, PVD equipment is best user mode, and the utilization rate of the energy and target also is best.But, in the production process of reality, reason owing to the preorder processing step, time such as the production substrate defective products occurs and removes line etc. than long or substrate, cause described substrate not sent into and carry out the PVD PROCESS FOR TREATMENT in the described cavity by continuous uninterrupted one by one, so it is longer just to make that substrate enters time interval of cavity, after having finished the deposition step of metal electrode layer when a substrate, next substrate does not also slowly arrive, but the electric energy that at this moment is used for PVD technology continues to provide, this just makes can waste a large amount of electric energy in the period of not carrying out metal electrode layer deposition to substrate, in addition, target is also in continual consumption, thereby strengthened the production cost of this technology; In addition, in PVD equipment, be splashed to for fear of metal ion and cause maintenance cost to improve on the wall of equipment chamber and reduce equipment life, generally all baffle plate can be set at device interior, there is not substrate to carry out the preparation of metal electrode layer and in period that target is still continuing to consume at the PVD device interior, the metal that deposits on the baffle plate also can get more and more, and this just makes the replacing of baffle plate and frequency of maintenance increase, and the maintenance cost of equipment is increased.And the scheme that addresses this problem in the prior art is to adopt the power supply of hand switch control to the device that is used to make metal electrode layer of thin film solar cell, and is cumbersome; And, frequent startup with close, also can reduce the service efficiency and the life-span of equipment.
Summary of the invention
In order to solve above-mentioned the problems of the prior art, the invention provides a kind of precipitation equipment that is used to make metal electrode layer of thin film solar cell, this device can be controlled its power supply state, the maintenance cost that has significantly reduced the waste of electric energy and target and reduced equipment automatically.
In order to realize the foregoing invention purpose, one aspect of the present invention provides a kind of precipitation equipment that is used to make metal electrode layer of thin film solar cell, comprises the deposition region that a cavity and being used in described cavity are made described metal electrode layer, also comprises:
First sensor is arranged at the porch of described precipitation equipment, is used for detecting the cavity that whether has substrate to enter described precipitation equipment, and in detecting the cavity that substrate enters described precipitation equipment the time, sends first signal of telecommunication;
Second transducer is arranged at the exit of described precipitation equipment, and whether be used for detecting has substrate to leave from the cavity of described precipitation equipment, and when detecting substrate and leave from the cavity of described precipitation equipment, sends second signal of telecommunication;
Control unit is used to receive described first signal of telecommunication and described second signal of telecommunication, and after receiving described first signal of telecommunication voltage of described precipitation equipment is switched to operating state voltage from idle condition voltage, to form metal electrode layer at described substrate surface; And when receiving described second signal of telecommunication and not receiving described first signal of telecommunication in the given time, the voltage of described precipitation equipment is switched to idle condition voltage from operating state voltage; The voltage that voltage during wherein said idle condition keeps ionic condition and target material surface is kept clean for the gas that only is suitable for making described deposition region.
As preferably, the position that described first sensor is arranged at the porch of described precipitation equipment is adjustable:
As preferably, the position that described second transducer is arranged at the exit of described precipitation equipment is adjustable;
The present invention provides a kind of precipitation equipment that is used to make metal electrode layer of thin film solar cell on the other hand, comprises the deposition region that a cavity and being used in described cavity are made described metal electrode layer, it is characterized in that, also comprises:
First sensor is arranged at the porch of described precipitation equipment, is used for detecting the cavity that whether has substrate to enter described precipitation equipment, and in detecting the cavity that substrate enters described precipitation equipment the time, sends first signal of telecommunication;
Second transducer is arranged at the exit of described precipitation equipment, and whether be used for detecting has substrate to leave from the cavity of described precipitation equipment, and when detecting substrate and leave from the cavity of described precipitation equipment, sends second signal of telecommunication;
Delay unit is used to receive described second signal of telecommunication that described second transducer sends, and sends second signal of telecommunication through time-delay after prolonging the scheduled time;
Control unit, be used to receive described first signal of telecommunication of described first sensor transmission and described second signal of telecommunication that described delay unit sends through time-delay, and after receiving described first signal of telecommunication, the voltage of described precipitation equipment is switched to operating state voltage from idle condition voltage, to form metal electrode layer at described substrate surface; And receive described through time-delay second signal of telecommunication and when not receiving described first signal of telecommunication, the voltage of described precipitation equipment is switched to idle condition voltage from operating state voltage; Wherein, the voltage that keeps ionic condition and target material surface is kept clean for the gas that only is suitable for making described deposition region of the voltage during described idle condition.
As preferably, the described first sensor and second transducer are photoelectric sensor;
Beneficial effect of the present invention is: by first and second transducers are installed, make precipitation equipment of the present invention when making the solar cell metal electrode layer, can between idle condition and operating state, automatically switch, promptly, automatically switching to operating state when needing work has enough voltage to make metal electrode layer to guarantee the deposition region, switch to idle condition when not needing work, only provide and keep the required suitable lower voltage in deposition region, thereby not only greatly reduce the waste of electric energy and target, also reduced the cost of equipment periodic maintenance, thereby saved the production cost of solar cell, simultaneously, avoided frequent manual operations.
Description of drawings
Structural representation when the device that Fig. 1 is used to make solar cell back electrode metal level for the embodiment of the invention one detects substrate and enters.
Fig. 2 is the structured flowchart of the embodiment of the invention one.
Structural representation when the device that Fig. 3 is used to make solar cell back electrode metal level for the embodiment of the invention one detects substrate and leaves.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
Embodiment one,
Figure 1 shows that the structural representation of precipitation equipment that is used to make metal electrode layer of thin film solar cell of the embodiment of the invention.Described device comprises cavity 1, deposition region 2, first sensor 4, second transducer 5 and control unit 6.The transmission device that is used to transmit substrate 3 runs through described cavity 1, and described first sensor 4 is arranged at an end of described cavity 1, and whether be used for detecting has substrate 3 to enter described cavity 1 by described transmission device.Described second transducer 5 is arranged at the other end of described cavity 1, and whether be used for detecting has substrate 3 to leave from described cavity 1 by described transmission device.Described first sensor 4 all is connected (as shown in Figure 2) with described control unit 6 with second transducer 5, to send first signal of telecommunication and second signal of telecommunication to control unit 6 respectively.Described control unit 6 is controlled the voltage of supplying with described precipitation equipment according to first signal of telecommunication that receives from first sensor 4 or from second signal of telecommunication that second transducer 5 receives.For example, when substrate 3 enters in the described cavity 1 by described transmission device, first sensor 4 has detected substrate and will enter in the described cavity 1 (as shown in Figure 1), then send first signal of telecommunication to control unit 6, the voltage that described control unit 6 receives behind described first signal of telecommunication precipitation equipment switches to operating state voltage from idle condition voltage, the substrate 3 in the cavity 1 that enters precipitation equipment is carried out the deposition of metal electrode layer; After the metal electrode layer deposition on substrate 3 surfaces is finished, when substrate 3 is left in it by the other end of described cavity 1 by described transmission device, second transducer 5 has detected substrate 3 will leave described cavity 1 (as shown in Figure 3), then send second signal of telecommunication to control unit 6, described control unit 6 receives described second signal of telecommunication, and this fashion does not receive first signal of telecommunication, then the voltage with described precipitation equipment switches to idle condition voltage from operating state voltage, and the idle condition voltage of supplying with this moment only need guarantee to make the gas in the described precipitation equipment to keep ionic forms and target material surface is kept clean getting final product.Here the voltage of precipitation equipment is switched to idle condition voltage rather than makes precipitation equipment quit work be because, when target not in working order the time, when quitting work fully, thereby target material surface can be subjected to the compromised quality that the influence of residual aqueous vapor or oxygen etc. in the cavity makes target material surface, when working on again after target is impaired, must earlier target material surface be wasted a period of time, that is, the part that target material surface is impaired consumes carries out the glass substrate sputter again.The more target of meeting additive decrementation like this; And be that precipitation equipment is provided with idle condition voltage, can keep target in working order, voltage is lower, just consumes very a spot of target, can guarantee the target material surface cleaning simultaneously and is not subjected to the pollution of residual aqueous vapor or oxygen etc. in the cavity.
In the present embodiment, because the electric energy that described precipitation equipment consumes when idle condition is far smaller than the electric energy that consumes in working order, when precipitation equipment is in idle condition for a long time, can significantly reduces the waste of electric energy and target, thereby effectively save production cost.
Embodiment two,
The embodiment of the invention is an example with embodiment one, and wherein the first sensor 4 and second transducer 5 are photoelectric sensor 4 and photoelectric sensor 5, and control unit 6 is programmable logic controller (PLC) PLC 6.
When each substrate 3 is delivered into time interval in the cavity 1 of the described precipitation equipment of present embodiment when longer by transmission device, photoelectric sensor 4 has detected substrate 3 and will enter in the described cavity 1, then send first signal of telecommunication to programmable logic controller (PLC) PLC 6, the direct voltage that described programmable logic controller (PLC) PLC 6 receives behind described first signal of telecommunication the deposition region 2 in the described precipitation equipment cavity 1 switches to operating state voltage from idle condition voltage, forms electrode metal layer so that the metallic atom on the described deposition region 2 is sputtered onto the surface of described substrate 3; When the substrate 3 that has formed electrode metal layer when the surface is left from cavity 1 by the other end of described cavity 1 by described transmission device, photoelectric sensor 5 has detected substrate 3 will leave described cavity 1, then send second signal of telecommunication to programmable logic controller (PLC) PLC6, the direct voltage operating state voltage that described programmable logic controller (PLC) PLC 6 receives behind described second signal of telecommunication the deposition region 2 in the described precipitation equipment cavity 1 switches to idle condition voltage, and guarantees that described idle condition voltage is for making the gas maintenance ionic condition precipitation equipment in and making target material surface keep the voltage of cleaning.So next substrate arrive during this period of time in, be idle condition in the cavity 1 always, and compare for operating state in the prior art always, present embodiment has significantly reduced waste of electric energy, thereby has effectively saved electricity consumption.
In another embodiment, 2 voltage frequently switches for fear of the deposition region, the position that first sensor 4 is arranged on the porch of cavity 1 is adjustable, and perhaps to be arranged on the position in the exit of cavity 1 be adjustable to second transducer 5, to guarantee the continuity of technology.This adjustable extent is decided according to concrete manufacturing parameter, for example according to the transfer rate of transmission device, the speed of production of preorder technology, the size of substrate etc.The principle of adjusting is to enter the inlet of cavity 1 through very short time with regard to new substrate is arranged after substrate 3 leaves the outlet of cavity 1, and then the voltage of deposition region 2 does not switch.By adjusting the position of the first sensor 4 and/or second transducer 5, promptly adjust the distance between the first sensor 4 and second transducer 5, make and after substrate 3 leaves the outlet of cavity 1, be less than or equal to certain short scheduled time (in this case with regard to the inlet that new substrate is arranged enters cavity 1, first sensor has just sent first signal of telecommunication in the shorter scheduled time after second transducer 5 sends second signal of telecommunication) time, the voltage of described precipitation equipment will remain on operating state voltage, and not switch to idle condition voltage.
In another embodiment of the present invention, the precipitation equipment that is used for making metal electrode layer of thin film solar cell also comprises delay unit except the cavity 1, deposition region 2, first sensor 4, second transducer 5 and the control unit 6 that comprise the embodiment of the invention one.In the present embodiment, when having detected substrate and enter in the cavity 1, first sensor 4 sends first signal of telecommunication to control unit 6, when having detected substrate and leave, second transducer 5 sends second signal of telecommunication to delay unit from cavity 1, after delay unit carries out the time-delay of the scheduled time to second signal of telecommunication that receives, will send to control unit 6 through second signal of telecommunication of time-delay.Control unit 6, the voltage with precipitation equipment after receiving first signal of telecommunication that first sensor 4 sends switches to operating state voltage from idle condition voltage; And receiving second signal of telecommunication that delay unit sends when not receiving simultaneously first signal of telecommunication that first sensor 4 sends through time-delay, the voltage of precipitation equipment is switched to idle condition voltage from operating state voltage.By being set, delay unit avoid the voltage of deposition region 1 frequently to switch in the present embodiment, to guarantee the continuity of technology, this delay unit is decided according to concrete manufacturing parameter equally to the time range that second signal of telecommunication prolongs, for example the speed of production of the transfer rate of transmission device, preorder technology, the size of substrate etc.
Certainly, the above embodiment is a preferred implementation of the present invention, should be understood that; for those skilled in the art; under the prerequisite that does not break away from the principle of the invention, can also make some improvements and modifications, these improvements and modifications also are considered as protection scope of the present invention.
Claims (6)
1. a precipitation equipment that is used to make metal electrode layer of thin film solar cell comprises the deposition region that a cavity and being used in described cavity are made described metal electrode layer, it is characterized in that, also comprises:
First sensor is arranged at the porch of described precipitation equipment, is used for detecting the cavity that whether has substrate to enter described precipitation equipment, and in detecting the cavity that substrate enters described precipitation equipment the time, sends first signal of telecommunication;
Second transducer is arranged at the exit of described precipitation equipment, and whether be used for detecting has substrate to leave from the cavity of described precipitation equipment, and when detecting substrate and leave from the cavity of described precipitation equipment, sends second signal of telecommunication;
Control unit is used to receive described first signal of telecommunication and described second signal of telecommunication, and after receiving described first signal of telecommunication voltage of described precipitation equipment is switched to operating state voltage from idle condition voltage, to form metal electrode layer at described substrate surface; And when receiving described second signal of telecommunication and not receiving described first signal of telecommunication in the given time, the voltage of described precipitation equipment is switched to idle condition voltage from operating state voltage; Wherein said idle condition voltage makes the gas maintenance ionic condition of described deposition region and the voltage that target material surface is kept clean for only being suitable for, and described target is used to be provided for making the metallic atom of described metal electrode layer.
2. precipitation equipment according to claim 1 is characterized in that, the position that described first sensor is arranged at the porch of described precipitation equipment is adjustable.
3. precipitation equipment according to claim 1 is characterized in that, the position that described second transducer is arranged at the exit of described precipitation equipment is adjustable.
4. precipitation equipment according to claim 1 is characterized in that, the described first sensor and second transducer are photoelectric sensor.
5. a precipitation equipment that is used to make metal electrode layer of thin film solar cell comprises the deposition region that a cavity and being used in described cavity are made described metal electrode layer, it is characterized in that, also comprises:
First sensor is arranged at the porch of described precipitation equipment, is used for detecting the cavity that whether has substrate to enter described precipitation equipment, and in detecting the cavity that substrate enters described precipitation equipment the time, sends first signal of telecommunication;
Second transducer is arranged at the exit of described precipitation equipment, and whether be used for detecting has substrate to leave from the cavity of described precipitation equipment, and when detecting substrate and leave from the cavity of described precipitation equipment, sends second signal of telecommunication;
Delay unit is used to receive described second signal of telecommunication that described second transducer sends, and sends second signal of telecommunication through time-delay after delay scheduled time;
Control unit, be used to receive described first signal of telecommunication of described first sensor transmission and described second signal of telecommunication that described delay unit sends through time-delay, and after receiving described first signal of telecommunication, the voltage of described precipitation equipment is switched to operating state voltage from idle condition voltage, to form metal electrode layer at described substrate surface; And receive described through time-delay second signal of telecommunication and when not receiving described first signal of telecommunication, the voltage of described precipitation equipment is switched to idle condition voltage from operating state voltage; Wherein said idle condition voltage makes the gas maintenance ionic condition of described deposition region and the voltage that target material surface is kept clean for only being suitable for, and described target is used to be provided for making the metallic atom of described metal electrode layer.
6. precipitation equipment according to claim 5 is characterized in that, the described first sensor and second transducer are photoelectric sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101464036A CN101572280B (en) | 2009-06-01 | 2009-06-01 | Deposition apparatus for manufacturing metal electrode layer of thin film solar cell |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101464036A CN101572280B (en) | 2009-06-01 | 2009-06-01 | Deposition apparatus for manufacturing metal electrode layer of thin film solar cell |
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| CN101572280A CN101572280A (en) | 2009-11-04 |
| CN101572280B true CN101572280B (en) | 2011-03-02 |
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| CN2009101464036A Expired - Fee Related CN101572280B (en) | 2009-06-01 | 2009-06-01 | Deposition apparatus for manufacturing metal electrode layer of thin film solar cell |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102800560B (en) * | 2011-05-26 | 2015-04-01 | 联景光电股份有限公司 | Method for automatically monitoring manufacturing procedure |
| CN105441887B (en) * | 2014-06-13 | 2017-11-10 | 北大方正集团有限公司 | Magnetic control sputtering device |
| TWI575343B (en) * | 2015-12-23 | 2017-03-21 | 迅得機械股份有限公司 | Manufacturing process monitoring method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1688737A (en) * | 2002-09-25 | 2005-10-26 | 先进能源工业公司 | High peak power plasma pulsed supply with arc handling capacity |
| CN1853004A (en) * | 2003-09-19 | 2006-10-25 | 应用材料公司 | Apparatus and method of detecting the electroless deposition endpoint |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1688737A (en) * | 2002-09-25 | 2005-10-26 | 先进能源工业公司 | High peak power plasma pulsed supply with arc handling capacity |
| CN1853004A (en) * | 2003-09-19 | 2006-10-25 | 应用材料公司 | Apparatus and method of detecting the electroless deposition endpoint |
Non-Patent Citations (1)
| Title |
|---|
| JP特开平11-172436A 1999.06.29 |
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Granted publication date: 20110302 Termination date: 20160601 |