CN103377883B - 具有密度梯度平滑的mos阵列边缘的布局 - Google Patents
具有密度梯度平滑的mos阵列边缘的布局 Download PDFInfo
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- CN103377883B CN103377883B CN201310153862.3A CN201310153862A CN103377883B CN 103377883 B CN103377883 B CN 103377883B CN 201310153862 A CN201310153862 A CN 201310153862A CN 103377883 B CN103377883 B CN 103377883B
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- 210000004027 cell Anatomy 0.000 claims description 80
- 239000004065 semiconductor Substances 0.000 claims description 57
- 238000000034 method Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 23
- 210000000352 storage cell Anatomy 0.000 claims description 9
- 238000003860 storage Methods 0.000 claims description 5
- 230000003139 buffering effect Effects 0.000 description 28
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 21
- 229920005591 polysilicon Polymers 0.000 description 21
- 230000008859 change Effects 0.000 description 19
- 238000005259 measurement Methods 0.000 description 14
- 230000009471 action Effects 0.000 description 7
- 238000004088 simulation Methods 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000013599 spices Nutrition 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000000342 Monte Carlo simulation Methods 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/30—Circuit design
- G06F30/39—Circuit design at the physical level
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2119/00—Details relating to the type or aim of the analysis or the optimisation
- G06F2119/18—Manufacturability analysis or optimisation for manufacturability
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Evolutionary Computation (AREA)
- Geometry (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261640073P | 2012-04-30 | 2012-04-30 | |
US61/640,073 | 2012-04-30 | ||
US13/744,532 US8759163B2 (en) | 2012-04-30 | 2013-01-18 | Layout of a MOS array edge with density gradient smoothing |
US13/744,532 | 2013-01-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103377883A CN103377883A (zh) | 2013-10-30 |
CN103377883B true CN103377883B (zh) | 2016-04-27 |
Family
ID=49323365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310153862.3A Active CN103377883B (zh) | 2012-04-30 | 2013-04-27 | 具有密度梯度平滑的mos阵列边缘的布局 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN103377883B (de) |
DE (1) | DE102013103968B4 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114937557B (zh) * | 2022-05-26 | 2024-06-11 | 北京奕斯伟计算技术股份有限公司 | 电容阵列模组 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101097913A (zh) * | 2006-06-29 | 2008-01-02 | 联发科技股份有限公司 | 电容阵列、电容与电容阵列布局方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4646485B2 (ja) | 2002-06-25 | 2011-03-09 | ルネサスエレクトロニクス株式会社 | 薄膜磁性体記憶装置 |
JP4620942B2 (ja) | 2003-08-21 | 2011-01-26 | 川崎マイクロエレクトロニクス株式会社 | 半導体集積回路のレイアウト方法、そのレイアウト構造、およびフォトマスク |
US7335966B2 (en) * | 2004-02-26 | 2008-02-26 | Triad Semiconductor, Inc. | Configurable integrated circuit capacitor array using via mask layers |
US7849436B2 (en) | 2006-08-11 | 2010-12-07 | Dongbu Hitek Co., Ltd. | Method of forming dummy pattern |
US7866035B2 (en) * | 2006-08-25 | 2011-01-11 | Coolearth Solar | Water-cooled photovoltaic receiver and assembly method |
US8372742B2 (en) | 2010-02-25 | 2013-02-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method, system, and apparatus for adjusting local and global pattern density of an integrated circuit design |
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2013
- 2013-04-19 DE DE102013103968.5A patent/DE102013103968B4/de active Active
- 2013-04-27 CN CN201310153862.3A patent/CN103377883B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101097913A (zh) * | 2006-06-29 | 2008-01-02 | 联发科技股份有限公司 | 电容阵列、电容与电容阵列布局方法 |
Also Published As
Publication number | Publication date |
---|---|
DE102013103968B4 (de) | 2023-05-04 |
CN103377883A (zh) | 2013-10-30 |
DE102013103968A1 (de) | 2013-10-31 |
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