CN103377864B - For high current electron beam Measurement of energy spread system and the method for measurement of vacuum electron device - Google Patents
For high current electron beam Measurement of energy spread system and the method for measurement of vacuum electron device Download PDFInfo
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- CN103377864B CN103377864B CN201210132372.0A CN201210132372A CN103377864B CN 103377864 B CN103377864 B CN 103377864B CN 201210132372 A CN201210132372 A CN 201210132372A CN 103377864 B CN103377864 B CN 103377864B
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Abstract
The invention discloses a kind of high current electron beam Measurement of energy spread system, comprise the extremely ferroelectric magnet of vacuum cavity, two, double aperture slit copper body, YAG detector and ccd image collector.Vacuum cavity is flat and cross section is rectangular, its longitudinal direction and plane-parallel; The two poles of the earth of two extremely ferroelectric magnets are arranged on the upper and lower surface of vacuum cavity respectively, to produce the uniform magnetic field perpendicular to horizontal plane in vacuum cavity; Double aperture slit copper body is arranged on the inside of vacuum cavity, and for high current electron beam is become weak current electron beam, and collimation enters vacuum cavity; Electronics YAG detector is positioned on the direction of electronics beam deflection 90 degree of double aperture slit copper body outgoing, for detecting electron beam Spatial Density Distribution; Ccd image collector to fall apart image for catching the electronic energy that YAG detector generates.The present invention can measure hundreds of to 100k ev energy, perveance 0.1 to tens micro-Piao high current electron beam can fall apart relative resolution with can non-dramatic song line.
Description
Technical field
The invention belongs to the test and analysis technology field of microwave vacuum device, be specifically related to measuring system that microwave vacuum device high current electron beam longitudinally can fall apart and method of measurement.
Background technology
Traditional high current electron beam Measurement of energy spread system for vacuum electron device as depicted in figs. 1 and 2.Fig. 1 is the schematic diagram of the electron beam Measurement of energy spread system with the pin hole Faraday cup structure that can add repulsion voltage metal grid mesh.As shown in Figure 1, this system comprises a Faraday cup, and this Faraday cup comprises the urceolus forming stack shell and the electron collection cylinder being positioned at outer barrel.The nozzle of this faraday cylinder is closed by a circular metal plate, and in this sheet, have a pin hole in the heart.Be socketed with a vacuum ceramic dead ring in the outer rim of this nozzle, this vacuum ceramic dead ring installs a metal grid mesh, this metal grid mesh loads a repulsion voltage.Electron beam is incided the electron collection cylinder of Faraday cup inside by described pin hole via this metal grid mesh being loaded with repulsion voltage, by the lead-in wire of electron collection cylinder, micro-electric current is drawn, then measure faling apart of electron beam by the different repulsion voltage loaded and the micro-curent change measured.
This measuring system Problems existing is: one, the physical dimension of Faraday cup is very little, the repulsion voltage that can load is also lower, and the electron beam energy that can detect is only below 10kV, can not detect the high current electron beam of about the 20kV ~ 100kV of obvious relativistic effect; Its two, this system must depend on three-dimensional X.Y scanning system, and its high accuracy vacuum machine telecontrol equipment and operating process are all very complicated; Its three, resolution that what this structure was measured can fall apart is very low, and usual relative resolution only has 5% ~ 10%, therefore can not meet the demand for development of the novel microwave vacuum electron device to high-power, high voltage development far away.
Be the schematic diagram of the system can fallen apart based on the measurement electron beam of two extremely ferromagnetic deflections of the weak current electron beam for high energy acclerator shown in Fig. 2, wherein left figure is attached view, and right figure is end view.As seen from Figure 2, the electron beam of this system via a branch of electron beam by inciding a uniform magnetic field produced by two extremely ferroelectric magnets, thus after producing deflection impact on YAG.The relative resolution that can fall apart of this system can up to 0.1%, but its huge structure is complicated, for accelerator electron beam energy at a few million electro-volt order of magnitude, but it is very low to survey beam current density, namely perveance P is less than or equal to below 0.01 micro-Piao, and survey calculation method is also complicated, needs continuous fine adjustment electron beam voltage, export the data of three to five group YAG records, then calculate relative resolution and distribution of faling apart by three-dimensional matrice group computer dedicated program; The method is for microwave vacuum electronic device, and beam current density is large, and perveance is unconformable at the high current electron beam of 0. one to tens micro-Piao usually.
Therefore, be badly in need of a kind ofly meeting measuring 20 ~ 100kV high current electron beam and faling apart and can improve again electron beam can fall apart detection system and simple and reliable phase of the high current electron beam of resolution of faling apart and should be able to fall apart method of testing of microwave vacuum device development demand.
Summary of the invention
(1) technical problem that will solve
The technical issues that need to address of the present invention are to provide a kind ofly measures a kind of measuring system and method for measurement that microwave vacuum device high current electron beam longitudinally can fall apart, and can fall apart and can improve again electron beam can measure 20 ~ 100kV high current electron beam and to fall apart resolution.
(2) technical scheme
For solving the problems of the technologies described above, the present invention proposes a kind of high current electron beam Measurement of energy spread system, and it comprises a vacuum cavity, two extremely ferroelectric magnets, double aperture slit copper body, a YAG detector and a ccd image collector; Described vacuum cavity is a flat and vacuum cavity that cross section is rectangular, its longitudinal direction and plane-parallel, and makes by without magnetic metal material, and internal vacuum is 1 × 10
-6the Pa order of magnitude; The two poles of the earth of described two extremely ferroelectric magnets are arranged on the upper and lower surface of described vacuum cavity respectively, to produce the uniform magnetic field perpendicular to horizontal plane in described vacuum cavity; Described double aperture slit copper body is arranged on the inside of described vacuum cavity, is made up of oxygen-free copper, and for high current electron beam is become weak current electron beam, and collimation enters vacuum cavity; Described electronics YAG detector is positioned on the direction of electronics beam deflection 90 degree of described double aperture slit copper body outgoing, and it is made up of the crystal mixing Ce element, for detecting electron beam Spatial Density Distribution; Described ccd image collector be positioned at face YAG detector compliant platform on, to fall apart image for catching the electronic energy that YAG detector generates.
According to a preferred embodiment of the present invention, described vacuum cavity comprises: an observation window, for transmitting the image of electron beam space density detector to image acquisition device; A front port and a rear port, described front port and rear port are used for being connected for connecting external equipment.
According to a preferred embodiment of the present invention, the magnetic field of described two extremely ferroelectric magnets is that evenness errors is not more than the low-intensity magnetic field of 1% and adjustable, partially turn 90 degrees to make the microelectronics note main body through described double aperture slit copper body, beat on described YAG detector, described two extremely uniform magnetic field that ferroelectric magnet produces cover whole vacuum cavity.
According to a preferred embodiment of the present invention, described double aperture slit copper body comprises two copper bars and a copper body, the relative side of described two copper bars forms " recessed " font and mutually aims at, thus form two two slits of arranging successively along electron beam incident direction, and described double aperture slit copper body has a cooling device.
According to a preferred embodiment of the present invention, described YAG detector is positioned on the direction of electronics beam deflection 90 degree of described double aperture slit copper body outgoing, and be supported on double aperture slit copper body by a L-type support, wherein L-type support is made by without magnetic metal material.
According to a preferred embodiment of the present invention, described compliant platform is placed on an optical table, and compliant platform and described YAG detector are synchronized with the movement.
According to a preferred embodiment of the present invention, described optical table comprise a servomotor and be connected with servomotor for controlling the double aperture slit copper body kinematic axis that double aperture slit copper body moves, this double aperture slit copper body kinematic axis is connected with the copper body of described double aperture slit copper body.
The present invention also proposes a kind of high current electron beam Measurement of energy spread method, is applied in high current electron beam Measurement of energy spread system, it is characterized in that, comprising the steps: the upper high voltage pulse waveform along having preshoot of formation one, recording preshoot peak value U
a, flat-topped voltage U
b, preshoot voltage difference U
aB=U
a-U
b; The main body of described high current electron beam is turn 90 degrees partially beat on an electron beam space density detector; Catch the electron density distribution image on described electron beam space density detector, find out reflection on this image and accelerate U in the impulse waveform of electron beam
a, U
bcorresponding electron energy position, the ENERGY E of position a
athe highest energy that electronics has, the corresponding electron energy E of the high-order b between narrow and small clear zone
b, and narrow and small clear zone low level b
2corresponding electron energy E
b2; To the b in described electron density distribution figure
2-b does in interval horizontal interscan, take energy as ordinate, brightness is abscissa, just draws the Cyberspace density distribution brightness curve that electron beam can fall apart, calculate the integral curve of this curve according to this brightness curve, this integral curve is exactly the relative distribution of faling apart of electron beam.
According to a preferred embodiment of the present invention, wherein can size and the distance L of the amount of faling apart Δ E on electron density distribution figure
bb2corresponding, and between the energy spectrum region corresponding to preshoot voltage difference U AB EA-EB can be corresponding on spectrogram distance be L
ab, described energy loose amount Δ E=(L
bb2/ L
ab) eU
aB, and resolution of relatively faling apart is Δ E/E
b=(U
aB/ U
b) (L
bb2/ L
ab).
(3) beneficial effect
The present invention breaches existingly not to be had adaptive testing microwave vacuum device electronic to note to be casually arranged with standby shortcoming and to meet the demand of high-power high-voltage microwave vacuum device development, can measure hundreds of electronvolt to 100K ev energy, perveance 0. one to tens micro-Piao high current electron beam can fall apart relative resolution with can non-dramatic song line.
Simultaneously, relative resolution is brought up to about 0.5% and the detection method also simple, intuitive of faling apart based on native system provided from 5% ~ 10% by the present invention, this satisfies the requirement that analysis and design goes out the outstanding electron-optical system of accurate microwave vacuum device, promote the development of novel high-power high voltage microwave vacuum device.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the electron beam Measurement of energy spread system with the pin hole Faraday cup structure that can add repulsion voltage metal grid mesh.
Be the schematic diagram of the system can fallen apart based on the measurement electron beam of two extremely ferromagnetic deflections of the weak current electron beam for high energy acclerator shown in Fig. 2, wherein left figure is vertical view, and right figure is end view;
Fig. 3 A is the structural representation of the high current electron beam Measurement of energy spread system for vacuum electron device of the present invention;
Fig. 3 B is the structural representation of the double aperture slit copper body in the electron beam Measurement of energy spread system of Fig. 3 A;
Fig. 4 is the side schematic view of Fig. 3 A;
Fig. 5 is two pole iron electromagnet structural representations in Fig. 4;
Fig. 6 is high-frequency and high-voltage modulator pulses voltage waveform view;
Fig. 7 is that in the YAG of CCD record, electron beam can fall apart Spatial Density Distribution schematic diagram;
Fig. 8 is that electron beam that computer completes can fall apart intensity map schematic diagram;
Fig. 9 is the relative distribution schematic diagram that can fall apart of high current electron beam that computer completes.
Description of reference numerals in Fig. 3 ~ 9:
1. front port, 2. rear port, 3. copper body, 4. copper bar, 5. double aperture slit copper body kinematic axis, 6. observation window, 7. right angle prism, 8. optical table, 9. compliant platform, 10.L type support, 101. vacuum cavities, 201. two extremely ferroelectric magnets, 301. double aperture slit copper bodies, 401.YAG detector, 501.CCD image acquisition device.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail:
Fig. 3 A is the structural representation of the high current electron beam Measurement of energy spread system for vacuum electron device of the present invention, and Fig. 4 is the side schematic view of Fig. 3 A.From Fig. 3 A, high current electron beam Measurement of energy spread system of the present invention comprises a vacuum cavity 101, two extremely ferroelectric magnets, 201, double aperture slit copper body, 301, YAG detector 401 and an image acquisition device 501.
From Fig. 3 A and Fig. 4, described vacuum cavity 101 is flat and vacuum cavities that cross section is rectangular, and horizontal setting (namely the longitudinal direction of cavity is parallel to the ground).This cavity 101 can be made by without magnetic metal material, as magnetism-free stainless steel 316L, titanium-aluminium alloy etc.The vacuum degree of cavity 101 can reach 1 × 10
-6the Pa order of magnitude.
This vacuum cavity 101 has a front port 1 and a rear port 2, lays respectively at the front-end and back-end of cavity 101, and front port 1 and rear port 2 are for being connected for connecting external equipment, and the direct projection of high current electron beam enters front port 1 and arrives in cavity 101.
According to an embodiment of the invention, this vacuum cavity 101 has an observation window 6.
Seen by Fig. 3 A, described double aperture slit copper body 301 is arranged on the inside of described vacuum cavity 101, and make it just to the electronics beam inciding described vacuum cavity 101, it is for limiting the quantity of the electronics streamer entering cavity 101, and for carrying out collimation adjustment to electronics streamer.
According to an embodiment of the invention, as shown in Figure 3 B, described double aperture slit copper body 301 comprises two copper bars 4 and a copper body 3, relatively forms a double aperture slit by two copper bars 4.Specifically, described copper body 3 is the rectangular structure be made up of oxygen-free copper, front-back is apart from narrow, two slit copper bars of adjustable-width are settled at center, the relative side of two copper bars 4 forms " recessed " font and mutually aims at, thus forms two two slits of arranging successively along electron beam incident direction.Two copper bars are made up of oxygen-free copper, and the depth of parallelism, the error of perpendicularity, all within 0.02mm, regulate the spacing of two copper bars can fine adjustment double aperture slit width, and scope is at 0.1-0.5mm, and the wall thickness 5 of two slits is millimeter.Further, according to the preferred embodiment of the present invention, the periphery of copper bar 4 has cooling device, such as, make recirculated cooling water by this copper bar, to give the cooling of double aperture slit copper body.
According to an embodiment of the invention, vacuum cavity 101 inside includes a tracks, and described double aperture slit copper body 301 is arranged in tracks.
The two poles of the earth of described two extremely ferroelectric magnets 201 are arranged on the upper and lower surface of described flattened rectangular vacuum cavity 101 respectively, so that the uniform magnetic field B (uniformity is about about 1%) perpendicular to horizontal plane can be produced in cavity 101, the magnetic field of described electromagnet 201 regulates by adjusting the winding current of electromagnet, to make the microelectronics note main body through double aperture slit copper body 301 just in time partially turn 90 degrees, beat on described YAG detector 401.
Described YAG detector 401 is positioned on the direction of electronics beam deflection 90 degree of described double aperture slit copper body 301 outgoing, and be supported on double aperture slit copper body 301 by L-type support, wherein L-type support is made by without magnetic metal material.As shown in Figure 3, the center of described YAG detector 401 is equal to the distance of YAG detector 401 with double aperture slit center line to the distance of double aperture slit copper body.
Described ccd image collector 501 faces YAG detector 401.
According to a specific embodiment of the present invention, described ccd image collector 501 is arranged on a compliant platform 9, and when described compliant platform 9 is for ensureing double aperture slit copper body 301 translation in survey engineering, the total distance of light path remains unchanged.Further, compliant platform 9 is placed on an optical table 8, to be synchronized with the movement with double aperture slit copper body 301.Ccd image collector 501 is controlled by industrial computer, to note synchronous acquisition image with incident electron.Preferably, described ccd image collector comprises a right optical prism 7, for by optical path-deflecting 90 degree.
According to a specific embodiment of the present invention, described optical table 8 comprise a servomotor and be connected with servomotor for controlling the double aperture slit copper body kinematic axis 5 that double aperture slit copper body 301 moves, this double aperture slit copper body kinematic axis 5 is connected with the copper body 3 of double aperture slit copper body 5.The present invention makes the running fix precision of copper body 5 within 0.05 millimeter.
Introduce the high current electron beam Measurement of energy spread method for vacuum electron device of the present invention below.
Method of measurement principle of the present invention is: entering vacuum cavity 101 by limiting out a branch of miniature collimation electron beam by double aperture slit when high current electron beam enters double aperture slit, making high current electron beam become weak current electron beam.The pencil of this weak current electron beam is subject to the uniform magnetic field B effect in the Vertical electron note direction that two pole ferromagnets 201 produce and deflects in vacuum cavity 101.When the winding current of adjustment electromagnet, thus to by this beam deflection 90 degree, make it the centre just in time getting to described YAG detector 401, stray magnetic field strength is now:
In formula, m
obe electron rest mass, e is electron charge, and R is beam deflection radius, U
bbe the main accelerating voltage of electron beam, c is the light velocity.
Now, as shown in Figure 7, in Fig. 7, right side is the direction that deflected electron energy is high to the image on YAG detector, the size of the strong and weak representation space electron density of brightness.E shown in figure
ait is the preshoot voltage U of pulse shown in Fig. 6
athe bright line that the electronics accelerated stays, the electronics of the energy that it is above is few and can not show, so this border is very clear, i.e. the position of a shown in Fig. 7.And the E that centre is very bright
bto E
b2interval, large quantities of by the terrace part voltage U of pulse just
bthe electron beam main body accelerated, the electro-optic structure of system under test (SUT) causes spread in energy and the Neng San district that formed just.Middle E
bbe exactly U
benergy Loss part is not had after institute's electron-optical system that is accelerated through is discrete, and E
b2then demonstrate, this electron beam main body is by U
bthe part that after accelerating, conventional is maximum, Δ E=E
b-E
b2it has been exactly electron beam main body discrete portions.
From Fig. 6 ~ 8, method of measurement of the present invention comprises the steps:
Step one, using high-frequency and high-voltage modulator to form a upper high voltage pulse waveform along having preshoot, recording preshoot peak value U
a, flat-topped voltage U
b, preshoot voltage difference U
aB=U
a-U
b; High-voltage pulse used can adopt low-repetition-frequency pulse, pulse or multi-pulse train form;
Step 2, adjustment electromagnet in current value, the magnetic deflection field B that electromagnet is produced in vacuum cavity just in time make electron beam main body partially turn 90 degrees beat on YAG detector, wherein magnetic field intensity:
M in formula
obe electron rest mass, e is electron charge, and R is electronic deflection radius, U
bbe flat part voltage in pulse voltage waveform, c is the light velocity;
Step 3, catches electronics density profile picture on YAG detector by CCD camera, finds out reflection on this image and accelerates U in the impulse waveform of electron beam
a, U
bcorresponding electron Spectrum line position, a position spectral line E
athe spectral line with highest energy, the corresponding spectral line E in high-order b position between narrow and small clear zone
b, and narrow and small clear zone low level b
2corresponding spectral line E
b2; Flat-topped voltage U is caused just because of electro-optic structure in this narrow and small clear zone
baccelerate the spread in energy district of electron beam, discrete magnitude Δ E=E
b-E
b2, size and the distance L of Δ E on electron density distribution figure
bb2corresponding, and correspond to preshoot voltage difference U
aBenergy spectrum region between E
a-E
bon energy spectrogram, corresponding distance is L
ab; Due to U
bin several ten thousand voltage magnitudes, and U
aBin hundreds of voltage magnitude, we can between high energy region E
bnear longitudinal energy coordinate is pressed direct ratio value, just can draw Δ E=(L
bb2/ L
ab) eU
aB, wherein e is electron charge, relative energy resolution ax E/E
b=(U
aB/ U
b) (L
bb2/ L
ab);
Step 4, with computer software to electronics density profile shape b on YAG detector
2-b does in interval horizontal interscan, take energy as ordinate, and brightness is abscissa, just draws the Cyberspace density distribution brightness curve that electron beam can fall apart; Further the normalization of brightness curve inner area is set to 1 again, makes the integral curve of brightness curve with computer, this integral curve is exactly the relative distribution curve that can fall apart of this electron beam.
The high voltage modulator impulse waveform with preshoot is recorded, more smooth U from oscilloscope
band preshoot peak value U
athe electron energy that has corresponding on YAG detector system 401 image produced for making electron beam is E
b, E
a, wherein b-b in b point optional image
2the high level point of section; E
aB=E
a-E
bdistance L on image
abrepresent at E
baffix preshoot difference U on energy foundation
aBthe additional-energy that voltage produces; b-b
2point show respectively U
bpoor through electron-optical system conventional during voltage acceleration electronics, i.e. Δ E respective distances L
bb2; Therefore Δ E=(L this moment can directly be obtained
bb2/ L
ab) eU
aBand electron beam relative energy resolution is Δ E/E
b=(L
bb2/ L
ab) (U
aB/ U
b); Again by b-b
2section wave spectrogram picture does the scanning of horizontal mid line, obtains brightness curve as shown in figure 8, is set to 1 with curve inner area, make the integral curve of this curve, and namely the curve of this Fig. 9 is the relative distribution curve that can fall apart of this high current electron beam.
Present system can insert horizontal high current electron beam the Electron-Optics Analysis instrument and use from front port 1, rear port 2.
Present system can fall apart from 0. 0 one to tens micro-high current electron beams flutterred at hundreds of to ten ten thousand electronvolt, perveance P by testing high voltage completely, thus solve band aperture plate pin hole Faraday cup 3-D scanning constructional device at present, the difficult above high current electron beam of 10k ev energy of surveying can fall apart, solve again the electron beam that high energy acclerator two pole iron electromagnet body structure bulky complex only can survey below the micro-Piao of high current electron beam perveance 0. 01 can fall apart, the difficult note surveying high current electronics can fall apart.Present system substantially increases resolution than the existing pin hole Faraday cup scanning with band aperture plate, makes relative resolution can reach 0.5%, greatly meets the analysis and design requirement of novel high-power high voltage microwave vacuum device electronic optical system.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a high current electron beam Measurement of energy spread system, it is characterized in that, comprise a vacuum cavity (101), two extremely ferroelectric magnets (201), double aperture slit copper body (301), a YAG detector (401) and a ccd image collector (501);
Described vacuum cavity (101) is a flat and vacuum cavity that cross section is rectangular, its longitudinal direction and plane-parallel, and makes by without magnetic metal material, and internal vacuum is 1 × 10
-6the Pa order of magnitude;
The two poles of the earth of described two extremely ferroelectric magnets (201) are arranged on the upper and lower surface of described vacuum cavity (101) respectively, to produce the uniform magnetic field perpendicular to horizontal plane in described vacuum cavity (101);
Described double aperture slit copper body (301) is arranged on the inside of described vacuum cavity (101), be made up of oxygen-free copper, for high current electron beam is become weak current electron beam, and collimation enters vacuum cavity (101), and this double aperture slit copper body (301) comprises two copper bars (4) and a copper body (3), the relative side of described two copper bars (4) forms " recessed " font and mutually aims at, thus forms two two slits of arranging successively along electron beam incident direction;
Described YAG detector (401) is positioned on the direction of electronics beam deflection 90 degree of described double aperture slit copper body (301) outgoing, and it is made up of the crystal mixing Ce element, for detecting electron beam Spatial Density Distribution;
Described ccd image collector (501) be positioned at face YAG detector (401) compliant platform (9) on, to fall apart image for catching the upper electronic energy generated of YAG detector (401).
2. high current electron beam Measurement of energy spread system as claimed in claim 1, it is characterized in that, described vacuum cavity (101) comprising:
An observation window (6), for transmitting the image of electron beam space density detector to image acquisition device;
A front port (1) and a rear port (2), described front port (1) and rear port (2) are for being connected external equipment.
3. high current electron beam Measurement of energy spread system as claimed in claim 1, it is characterized in that, the magnetic field of described two extremely ferroelectric magnets (201) is that evenness errors is not more than the low-intensity magnetic field of 1% and adjustable, partially turn 90 degrees to make the microelectronics note main body through described double aperture slit copper body (301), beat on described YAG detector (401), described two extremely ferroelectric magnets (201) produce uniform magnetic field and cover whole vacuum cavity.
4. high current electron beam Measurement of energy spread system as claimed in claim 1, it is characterized in that, described double aperture slit copper body (301) has a cooling device.
5. high current electron beam Measurement of energy spread system as claimed in claim 1, it is characterized in that, described YAG detector (401) is positioned on the direction of electronics beam deflection 90 degree of described double aperture slit copper body (301) outgoing, be supported on double aperture slit copper body (301) by a L-type support, wherein L-type support is made by without magnetic metal material.
6. high current electron beam Measurement of energy spread system as claimed in claim 1, it is characterized in that, described compliant platform (9) is placed on an optical table (8), and compliant platform (9) and described YAG detector (401) are synchronized with the movement.
7. high current electron beam Measurement of energy spread system as claimed in claim 6, it is characterized in that, described optical table (8) comprise a servomotor and be connected with servomotor for controlling double aperture slit copper body kinematic axis (5) that double aperture slit copper body (301) moves, this double aperture slit copper body kinematic axis (5) is connected with the copper body (3) of described double aperture slit copper body (301).
8. a high current electron beam Measurement of energy spread method, is applied in the high current electron beam Measurement of energy spread system according to any one of claim 1 to 7, it is characterized in that, comprise the steps:
Forming a upper high voltage pulse waveform along having preshoot, recording preshoot peak value U
a, flat-topped voltage U
b, preshoot voltage difference U
aB=U
a-U
b;
The main body of described high current electron beam is turn 90 degrees partially beat on an electron beam space density detector;
Catch the electron density distribution image on described electron beam space density detector, find out reflection on this image and accelerate U in the impulse waveform of electron beam
a, U
bcorresponding electron energy position, the ENERGY E of position a
athe highest energy that electronics has, the corresponding electron energy E of the high-order b between narrow and small clear zone
b, and narrow and small clear zone low level b
2corresponding electron energy E
b2;
To the b in described electron density distribution figure
2-b does in interval horizontal interscan, take energy as ordinate, brightness is abscissa, just draws the Cyberspace density distribution brightness curve that electron beam can fall apart, calculate the integral curve of this curve according to this brightness curve, this integral curve is exactly the relative distribution of faling apart of electron beam.
9. high current electron beam Measurement of energy spread method as claimed in claim 8, is characterized in that,
Wherein can size and the distance L of the amount of faling apart Δ E on electron density distribution figure
bb2corresponding, and correspond to preshoot voltage difference U
aBenergy spectrum region between E
a-E
bon energy spectrogram, corresponding distance is L
ab, described energy loose amount Δ E=(L
bb2/ L
ab) eU
aB, and resolution of relatively faling apart is Δ E/E
b=(U
aB/ U
b) (L
bb2/ L
ab).
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