CN103365095B - 基于阵列光电传感器的背面离轴对准系统、光刻装置及方法 - Google Patents
基于阵列光电传感器的背面离轴对准系统、光刻装置及方法 Download PDFInfo
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CN103531510A (zh) * | 2013-10-24 | 2014-01-22 | 华东光电集成器件研究所 | 一种半导体电路p+外延图形的转移对准光刻方法 |
CN105022239B (zh) * | 2014-04-25 | 2018-03-02 | 上海微电子装备(集团)股份有限公司 | 背面对准装置及对准方法 |
NL2018755A (en) | 2016-05-25 | 2017-11-30 | Asml Netherlands Bv | Lithographic apparatus |
CN108010875B (zh) * | 2016-10-31 | 2020-04-14 | 中芯国际集成电路制造(上海)有限公司 | 基板校准装置以及检测系统 |
WO2024022006A1 (zh) * | 2022-07-28 | 2024-02-01 | 华为技术有限公司 | 一种校准系统、测校工具及校准方法 |
CN115824285A (zh) * | 2022-12-09 | 2023-03-21 | 合肥御微半导体技术有限公司 | 一种传感器位置校准方法、装置、设备及介质 |
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CN101206300A (zh) * | 2007-11-21 | 2008-06-25 | 上海微电子装备有限公司 | 一种投影光学系统及投影曝光装置 |
CN101576714A (zh) * | 2009-06-09 | 2009-11-11 | 上海微电子装备有限公司 | 光刻设备的对准基准板及其制造工艺方法 |
CN102081312A (zh) * | 2009-11-26 | 2011-06-01 | 上海微电子装备有限公司 | 双面对准装置及其对准方法 |
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CN101206300A (zh) * | 2007-11-21 | 2008-06-25 | 上海微电子装备有限公司 | 一种投影光学系统及投影曝光装置 |
CN101576714A (zh) * | 2009-06-09 | 2009-11-11 | 上海微电子装备有限公司 | 光刻设备的对准基准板及其制造工艺方法 |
CN102081312A (zh) * | 2009-11-26 | 2011-06-01 | 上海微电子装备有限公司 | 双面对准装置及其对准方法 |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee after: Shanghai Micro Electronics Equipment Co., Ltd. Patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. Patentee before: Shanghai Nanpre Mechanics Technology Co., Ltd. |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |