CN103337985A - Single-surface friction power generator based on transverse friction and preparation method of single-surface friction power generator - Google Patents
Single-surface friction power generator based on transverse friction and preparation method of single-surface friction power generator Download PDFInfo
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Abstract
The invention relates to the technical field of MEMS (Micro-electro-mechanical System) integration processing, in particular to a single-surface friction power generator based on transverse friction and a preparation method of the single-surface friction power generator. The single-surface friction power generator is formed in a manner that two identical structures are arranged in a relatively and mutually horizontal friction manner, wherein each structure comprises five layers; conducting layers are arranged at the outermost layers; thin film layers are adjacent to the conducting layers; thin film nano structure layers are arranged on the other sides of the thin film layers; metal electrodes are arranged on the other sides of the thin film nano structure layers; and metal electrode nano structure layers are arranged on the other sides of the metal electrodes. The single-surface friction power generator has the advantages that compared with the traditional two-layer thin film power generator in a vertical direction, the single-layer structure uses friction in a horizontal direction, and electrode outputs are in the same plane, so that subsequent processing and integration are facilitated; the nano power generator and the preparation method thereof are simple in technology, low in cost, high in productivity, and easy to integrate and process; mass production is available; and the novel structure effectively uses the friction in the horizontal direction in nature.
Description
Technical field
The present invention relates to the integrated processing technique field of MEMS, particularly a kind of single mantle friction generator based on side-friction and preparation method thereof.
Background technology
(Micro-electro-mechanical system MEMS), is the multi-field cross discipline of a new and high technology to MEMS (micro electro mechanical system), and development in recent years is swift and violent, has been subjected to extensive concern.MEMS (micro electro mechanical system) refer to size centimetre below so that littler midget plant, mainly formed by transducer, actuator, little energy three parts.Because reducing gradually of MEMS device size, the development of little energy part far can not be satisfied current demand.Be converted to the research of the energy collecting device of electric energy based on the energy that will exist in the environment (mechanical energy, heat energy, solar energy etc.), for the energy supply of MEMS device has proposed feasible scheme.The energy collecting device of wherein gathering mechanical energy is wherein modal one of a kind of.The mechanical energy energy collecting device has piezoelectric type according to operation principle, and electromagnetic type, electrostatic, friction-type etc. are several.It is high that wherein the energy collecting device of friction-type has output, prepares advantages such as simple, is hot research in recent years.
Wang Zhonglin professor group at first utilizes PET and Kapton material mutual friction charge inducing mutually, forms electric current and voltage output after the separation of charge, the nano generator of formation.[Feng-Ru?Fan,et?al.Nano?Energy,vol.1,pp.328,2012]。In order to improve output performance, professor Wang Zhonglin has proposed to make two friction surfaces separate [Wang, S., Lin rapidly by domes, L.and Wang, Z.L.Nano Letters, vol.12, pp.6339,2012], its output voltage peak value has been brought up to the magnitude of hectovolt.But the nano generator of above-mentioned friction-type all is the vibration that utilizes vertical direction, and output electrode is positioned on two friction plates, is unfavorable for processing integrated.
Summary of the invention
At the deficiencies in the prior art, the objective of the invention is to propose a kind of single mantle friction generator based on side-friction and preparation method thereof, adopt one deck fexible film, with the metal grating structure, constitute microgenerator, when two film occurred level frictions that should design, utilize metal and fexible film to the difference of electric charge constraint ability, can form the charge inducing accumulation at the different materials of same film, thereby form output current.The metal grating structure of this moment as the material of friction, also had been an electrode of nano generator simultaneously both.Wherein the fexible film surface has formed highdensity nanostructure by traditional MEMS processing technology, has greatly increased the roughness of friction surface, thereby further improves the output voltage electric current.The present invention has taked following technical scheme: form by relative, the mutual level friction of two groups of same structures, wherein, described structure comprises five layers, outermost layer is conductive layer, adjacent with conductive layer is thin layer, the thin layer opposite side is provided with the film nano structure sheaf, and film nano structure sheaf opposite side is provided with metal electrode, and the metal electrode opposite side is provided with the metal electrode nanostructured layers.
Metal electrode is palisade, and the metal electrode of two groups of structures is relatively staggered, and the material of metal electrode is aluminium or nickel or copper or silver or gold or platinum.
The material of thin layer be polytetrafluoroethylene (polytetrafluoroetylene, PTFE) or polyethylene terephthalate (Polyethylene terephthalate, PET) or polyimides (Polyimide, PI).
The material of conductive layer is gold or metal materials such as silver or platinum or copper or aluminium or titanium or tungsten.
The material of conductive layer is indium tin metal oxide or semi-conducting materials such as III-V compounds of group or highly doped silicon.
Described metal palisade thickness of electrode is 100nm – 2000 μ m.
Described thin layer thickness is 5 μ m –, 2000 μ m.
The thickness of described conductive layer is 50nm – 3000nm.
A kind of single mantle friction mechanism of power generation Preparation Method based on side-friction comprises the steps:
Step 1: (Reactive Ion Etching, RIE) the positive plasma bombardment thin layer surface of Chan Shenging makes thin layer one side surface form irregular film nano structure sheaf to utilize reactive ion etching process.
Step 2: utilize sputter or evaporation or chemical vapor deposition method, produce complete metal electrode at film nano structure sheaf one side surface;
Step 3: utilize the photoresist mask to realize graphical metal electrode by photoetching, thereby obtain the metal electrode of grating structure;
Step 4: utilize the method for water-bath heating to obtain the metal electrode nanostructured layers by the temperature and time of controlling heating at metal electrode one side surface;
Step 5: utilize evaporation or sputter or chemical vapor deposition method, make conductive layer on thin layer opposite side surface.
Described reactive ion etching process parameter comprises: coil power is 300W – 600W; Etching gas is O
2, CF
4, Ar
2Dull and stereotyped power is 50W-300W; Etch period is 20s-100s.
Advantage of the present invention is: the double-layer films generator with traditional vertical direction is compared, this single layer structure has utilized the frictional force of horizontal direction, and electrode output is on same plane, be conducive to follow-up processing and integrated, the nano generator that the present invention proposes and preparation method thereof technology is simple, cost is low, productive rate is high, can produce in batches, is easy to the friction that integrated processing and the new structure that proposes have effectively utilized the occurring in nature horizontal direction.
Description of drawings
Fig. 1 is nano generator structural representation of the present invention;
The palisade aluminium electrode stereoscan photograph that Fig. 2 has nanostructure for nano generator of the present invention;
Fig. 3 is nano generator test result figure of the present invention, and its output voltage range is approximately 8-30V;
Fig. 4 is the test result figure of 1 μ F electric capacity charging for nano generator of the present invention;
Fig. 5 is the test result figure of electric capacity charging for nano generator of the present invention.
Embodiment
When considered in conjunction with the accompanying drawings, by the reference following detailed, can more completely understand the present invention better and learn wherein many attendant advantages easily, but accompanying drawing described herein is used to provide further understanding of the present invention, constitute a part of the present invention.
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
Embodiment: to shown in Figure 5, comprise aluminium electrode 2, aluminium electrode nanostructured layers 2-1, PTFE thin layer 3, the film nano structure sheaf 3-1 of conductive layer 1, grating structure as Fig. 1, preparation process is as follows:
Step 1: positive plasma bombardment PTFE thin layer 3 surfaces that utilize reactive ion etching process to produce make PTFE thin layer 3 one side surfaces form irregular film nano structure sheaf 3-1.
Step 2: utilize sputter or evaporation or chemical vapor deposition method, the complete aluminium electrode of producing at film nano structure sheaf 3-1 one side surface;
Step 3: utilize the photoresist mask to realize graphical metal electrode by photoetching, thereby obtain the aluminium electrode 2 of grating structure;
Step 4: utilize the method for water-bath heating to obtain aluminium electrode nanostructured layers 2-1 by the temperature and time of controlling heating at aluminium electrode 2 one side surfaces of grating structure, preparation parameter is: 80 ℃ of temperature 70 ℃ –, time 10min – 20min;
Step 5: utilize evaporation or sputter or chemical vapor deposition method, make conductive layer 1 on thin layer 3 opposite sides surface, be metal or the semi-conducting material of good conductivity, metals like gold, silver, platinum, copper, aluminium, titanium, tungsten etc.; Semi-conducting material comprises indium tin metal oxide (ITO), III-V compounds of group, highly doped silicon etc., and thickness is 50nm – 2000nm.
Described aluminium electrode nanostructured layers 2-1 thickness is 10nm-1 μ m.
Described thin layer 3 thickness are 5 μ m –, 2000 μ m.
Described film nano structure sheaf 3-1 thickness is 10nm-1 μ m.
The thickness of described conductive layer 1 is 50nm – 3000nm.
More than a kind of single nano surface generator based on side-friction provided by the present invention and preparation method thereof is described in detail, more than be described with reference to the exemplary embodiment of accompanying drawing to the application.Those skilled in the art should understand that; above-mentioned embodiment only is the example of lifting for illustrative purposes; rather than be used for limiting; all in the application instruction and the claim protection range under do any modification, be equal to replacement etc., all should be included in the claimed scope of the application.
Claims (10)
1. single mantle friction generator based on side-friction, it is characterized in that: form by relative, the mutual level friction of two groups of same structures, wherein, described structure comprises five layers, outermost layer is conductive layer, and adjacent with conductive layer is thin layer, and the thin layer opposite side is provided with the film nano structure sheaf, film nano structure sheaf opposite side is provided with metal electrode, and the metal electrode opposite side is provided with the metal electrode nanostructured layers.
2. a kind of single mantle friction generator based on side-friction according to claim 1, it is characterized in that: metal electrode is grating structure, and the metal electrode of two groups of structures is relatively staggered, and the material of metal electrode is aluminium or nickel or copper or silver or gold or platinum.
3. a kind of single mantle friction generator based on side-friction according to claim 1, it is characterized in that: the material of thin layer is polytetrafluoroethylene or polyethylene terephthalate or polyimides.
4. a kind of single mantle friction generator based on side-friction according to claim 1, it is characterized in that: the material of conductive layer is gold or metal materials such as silver or platinum or copper or aluminium or titanium or tungsten.
5. a kind of single mantle friction generator based on side-friction according to claim 1, it is characterized in that: the material of conductive layer is indium tin metal oxide or semi-conducting materials such as III-V compounds of group or highly doped silicon.
6. a kind of single mantle friction generator based on side-friction according to claim 2, it is characterized in that: the metal electrode thickness of described grating structure is 100nm – 2000 μ m.
7. a kind of single mantle friction generator based on side-friction according to claim 3, it is characterized in that: described thin layer thickness is 5 μ m –, 2000 μ m.
8. a kind of single mantle friction generator based on side-friction according to claim 3, it is characterized in that: the thickness of described conductive layer is 50nm – 3000nm.
9. a kind of single mantle friction mechanism of power generation Preparation Method based on side-friction according to claim 1 is characterized in that comprising the steps:
Step 1: the positive plasma bombardment thin layer surface that utilizes reactive ion etching process to produce makes thin layer one side surface form irregular film nano structure sheaf.
Step 2: utilize sputter or evaporation or chemical vapor deposition method, produce complete metal electrode at film nano structure sheaf one side surface;
Step 3: utilize the photoresist mask to realize graphical metal electrode by photoetching, thereby obtain the metal electrode of grating structure;
Step 4: utilize the method for water-bath heating to obtain the metal electrode nanostructured layers by the temperature and time of controlling heating at metal electrode one side surface;
Step 5: utilize evaporation or sputter or chemical vapor deposition method, make conductive layer on thin layer opposite side surface.
10. a kind of single mantle friction mechanism of power generation Preparation Method based on side-friction according to claim 9, it is characterized in that in the described step 1): described reactive ion etching process parameter comprises: coil power is 300W – 600W; Etching gas is O
2, CF
4, Ar
2Dull and stereotyped power is 50W-300W; Etch period is 20s-100s.
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| CN103523743A (en) * | 2013-10-28 | 2014-01-22 | 北京大学 | Miniature friction energy harvester and method for manufacturing same |
| CN103643227A (en) * | 2013-12-04 | 2014-03-19 | 天津大学 | Polyimide and silver nanoflower composite film and preparation method thereof |
| CN103825489A (en) * | 2014-02-27 | 2014-05-28 | 国家纳米科学中心 | Rotary friction power generator, voltage stabilization output circuit and power supply device |
| CN104065297A (en) * | 2014-05-06 | 2014-09-24 | 北京大学 | Friction generator based on existing floors |
| CN104600114A (en) * | 2013-11-01 | 2015-05-06 | 北京纳米能源与系统研究所 | Friction electric field effect transistor |
| CN104856662A (en) * | 2015-06-10 | 2015-08-26 | 京东方科技集团股份有限公司 | Portable physiological parameter detection device and physiological parameter detection method |
| CN104980060A (en) * | 2014-04-09 | 2015-10-14 | 北京纳米能源与系统研究所 | Triboelectric nanometer generator capable of collecting liquid mechanical energy and power generating method thereof |
| CN104980059A (en) * | 2014-04-04 | 2015-10-14 | 北京纳米能源与系统研究所 | Electric signal output device containing periodic bending structure |
| WO2017020290A1 (en) * | 2015-08-06 | 2017-02-09 | 深圳麦克韦尔股份有限公司 | Electronic cigarette and power supply apparatus thereof |
| CN111665937A (en) * | 2020-05-25 | 2020-09-15 | 东华大学 | Integrated self-driven full-textile gesture recognition data glove |
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| CN103523743A (en) * | 2013-10-28 | 2014-01-22 | 北京大学 | Miniature friction energy harvester and method for manufacturing same |
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| CN104600114A (en) * | 2013-11-01 | 2015-05-06 | 北京纳米能源与系统研究所 | Friction electric field effect transistor |
| CN104600114B (en) * | 2013-11-01 | 2019-02-19 | 北京纳米能源与系统研究所 | Rub field effect transistor |
| CN103643227A (en) * | 2013-12-04 | 2014-03-19 | 天津大学 | Polyimide and silver nanoflower composite film and preparation method thereof |
| CN103643227B (en) * | 2013-12-04 | 2016-02-03 | 天津大学 | A kind of polyimide silver and preparation method thereof |
| CN103825489B (en) * | 2014-02-27 | 2016-05-04 | 北京纳米能源与系统研究所 | Revolving frictional generator, voltage-stabilizing output circuit and electric supply installation |
| CN103825489A (en) * | 2014-02-27 | 2014-05-28 | 国家纳米科学中心 | Rotary friction power generator, voltage stabilization output circuit and power supply device |
| CN104980059B (en) * | 2014-04-04 | 2018-10-16 | 北京纳米能源与系统研究所 | A kind of output device of the electrical signal including Cyclic flexion structure |
| CN104980059A (en) * | 2014-04-04 | 2015-10-14 | 北京纳米能源与系统研究所 | Electric signal output device containing periodic bending structure |
| CN104980060A (en) * | 2014-04-09 | 2015-10-14 | 北京纳米能源与系统研究所 | Triboelectric nanometer generator capable of collecting liquid mechanical energy and power generating method thereof |
| WO2015154693A1 (en) * | 2014-04-09 | 2015-10-15 | 北京纳米能源与系统研究所 | Triboelectric nanogenerator harvesting liquid mechanical energy and electricity generation method |
| CN104980060B (en) * | 2014-04-09 | 2017-05-10 | 北京纳米能源与系统研究所 | Triboelectric nanometer generator capable of collecting liquid mechanical energy and power generating method thereof |
| CN104065297A (en) * | 2014-05-06 | 2014-09-24 | 北京大学 | Friction generator based on existing floors |
| CN104856662A (en) * | 2015-06-10 | 2015-08-26 | 京东方科技集团股份有限公司 | Portable physiological parameter detection device and physiological parameter detection method |
| WO2016197684A1 (en) * | 2015-06-10 | 2016-12-15 | 京东方科技集团股份有限公司 | Portable physiological parameter detection device and physiological parameter detection method |
| CN107404936A (en) * | 2015-08-06 | 2017-11-28 | 深圳麦克韦尔股份有限公司 | Electronic cigarette and its supply unit |
| WO2017020290A1 (en) * | 2015-08-06 | 2017-02-09 | 深圳麦克韦尔股份有限公司 | Electronic cigarette and power supply apparatus thereof |
| CN107404936B (en) * | 2015-08-06 | 2020-12-04 | 深圳麦克韦尔科技有限公司 | Electronic cigarette and power supply device thereof |
| CN111665937A (en) * | 2020-05-25 | 2020-09-15 | 东华大学 | Integrated self-driven full-textile gesture recognition data glove |
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