CN103314284B - 包括键合元件的感测装置 - Google Patents

包括键合元件的感测装置 Download PDF

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Publication number
CN103314284B
CN103314284B CN201180065666.XA CN201180065666A CN103314284B CN 103314284 B CN103314284 B CN 103314284B CN 201180065666 A CN201180065666 A CN 201180065666A CN 103314284 B CN103314284 B CN 103314284B
Authority
CN
China
Prior art keywords
sensing device
absolute pressure
bonding
sensing apparatus
pressure sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180065666.XA
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English (en)
Chinese (zh)
Other versions
CN103314284A (zh
Inventor
B.A.恩格勒
C.D.瓦格纳
M.恩格科
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of CN103314284A publication Critical patent/CN103314284A/zh
Application granted granted Critical
Publication of CN103314284B publication Critical patent/CN103314284B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/26—Oils; Viscous liquids; Paints; Inks
    • G01N33/28—Oils, i.e. hydrocarbon liquids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/26—Oils; Viscous liquids; Paints; Inks
    • G01N33/28—Oils, i.e. hydrocarbon liquids
    • G01N33/2888—Lubricating oil characteristics, e.g. deterioration

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
CN201180065666.XA 2010-11-22 2011-11-22 包括键合元件的感测装置 Expired - Fee Related CN103314284B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US12/951,330 US8261618B2 (en) 2010-11-22 2010-11-22 Device for measuring properties of working fluids
US12/951330 2010-11-22
US12/951,330 2010-11-22
PCT/US2011/061836 WO2012071409A1 (en) 2010-11-22 2011-11-22 Sensing device comprising a bonding element

Publications (2)

Publication Number Publication Date
CN103314284A CN103314284A (zh) 2013-09-18
CN103314284B true CN103314284B (zh) 2015-04-22

Family

ID=45401158

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180065666.XA Expired - Fee Related CN103314284B (zh) 2010-11-22 2011-11-22 包括键合元件的感测装置

Country Status (6)

Country Link
US (1) US8261618B2 (enExample)
EP (1) EP2643672B1 (enExample)
JP (2) JP2013543136A (enExample)
KR (1) KR101356297B1 (enExample)
CN (1) CN103314284B (enExample)
WO (1) WO2012071409A1 (enExample)

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* Cited by examiner, † Cited by third party
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US9589686B2 (en) 2006-11-16 2017-03-07 General Electric Company Apparatus for detecting contaminants in a liquid and a system for use thereof
US9538657B2 (en) 2012-06-29 2017-01-03 General Electric Company Resonant sensor and an associated sensing method
US10914698B2 (en) 2006-11-16 2021-02-09 General Electric Company Sensing method and system
US9658178B2 (en) 2012-09-28 2017-05-23 General Electric Company Sensor systems for measuring an interface level in a multi-phase fluid composition
US9536122B2 (en) 2014-11-04 2017-01-03 General Electric Company Disposable multivariable sensing devices having radio frequency based sensors
US8542023B2 (en) 2010-11-09 2013-09-24 General Electric Company Highly selective chemical and biological sensors
US10598650B2 (en) 2012-08-22 2020-03-24 General Electric Company System and method for measuring an operative condition of a machine
US9746452B2 (en) 2012-08-22 2017-08-29 General Electric Company Wireless system and method for measuring an operative condition of a machine
US9027410B2 (en) * 2012-09-14 2015-05-12 Sensata Technologies, Inc. Hermetically glass sealed pressure sensor
US10684268B2 (en) 2012-09-28 2020-06-16 Bl Technologies, Inc. Sensor systems for measuring an interface level in a multi-phase fluid composition
CN107407589B (zh) 2015-02-18 2020-04-28 Ti集团车辆系统有限责任公司 液位传送器和用于承载液体的装置
WO2017095611A1 (en) * 2015-12-01 2017-06-08 Maxim Integrated Products, Inc. Systems and methods for logging data in harsh environments
DE102017223177A1 (de) 2017-12-19 2019-06-19 Conti Temic Microelectronic Gmbh Druckmesseinheit und Anschlussbaueinheit für ein Kraftfahrzeug-Getriebe.
KR102261637B1 (ko) * 2020-01-14 2021-06-07 주식회사 현대케피코 압력센서 체결구조
FR3119834B1 (fr) * 2021-02-17 2025-02-14 Cent Rech Archit Indu Nautiques Systeme generateur de portance et bateau muni d’un tel systeme

Citations (2)

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EP0167144A2 (en) * 1984-07-05 1986-01-08 Hitachi, Ltd. A pressure sensor and a method of arranging a pressure sensor
US5454270A (en) * 1994-06-06 1995-10-03 Motorola, Inc. Hermetically sealed pressure sensor and method thereof

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JPS553623A (en) * 1978-06-22 1980-01-11 Nissan Motor Co Ltd Semiconductor pressure sensor
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US4743302A (en) 1986-06-06 1988-05-10 Vlsi Packaging Materials, Inc. Low melting glass composition
JPH0355874Y2 (enExample) * 1986-02-27 1991-12-13
JPS64432A (en) * 1987-06-23 1989-01-05 Hitachi Ltd Semiconductor pressure transducer
US5186055A (en) * 1991-06-03 1993-02-16 Eaton Corporation Hermetic mounting system for a pressure transducer
US5663109A (en) 1992-10-19 1997-09-02 Quantum Materials, Inc. Low temperature glass paste with high metal to glass ratio
US5334558A (en) 1992-10-19 1994-08-02 Diemat, Inc. Low temperature glass with improved thermal stress properties and method of use
SE516716C2 (sv) * 1994-04-14 2002-02-19 Mks Instr Tryckgivare för mätning av trycket hos en fluid
JP2809385B2 (ja) * 1994-11-29 1998-10-08 信越ポリマー株式会社 半導体素子接続用配線基板および半導体素子接続構造
US7109842B1 (en) * 1998-12-07 2006-09-19 Honeywell International Inc. Robust fluid flow and property microsensor made of optimal material
JP2001106545A (ja) 1999-07-30 2001-04-17 Hoya Corp ガラス基板、半導体センサの製造方法および半導体センサ
US6401545B1 (en) * 2000-01-25 2002-06-11 Motorola, Inc. Micro electro-mechanical system sensor with selective encapsulation and method therefor
JP2001272295A (ja) * 2000-03-27 2001-10-05 Tadahiro Kato 圧力測定センサ
US20040043479A1 (en) * 2000-12-11 2004-03-04 Briscoe Cynthia G. Multilayerd microfluidic devices for analyte reactions
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JP2004071698A (ja) * 2002-08-02 2004-03-04 Hitachi Metals Ltd 半導体パッケージ
JP3914245B2 (ja) 2003-06-27 2007-05-16 ヤマト電子株式会社 封着加工用無鉛ガラス材とこれを用いた封着加工物及び封着加工方法
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JP4963159B2 (ja) * 2004-11-19 2012-06-27 日本碍子株式会社 圧電／電歪デバイス
JP4983176B2 (ja) 2006-09-14 2012-07-25 セイコーエプソン株式会社 圧力センサの製造方法
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Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0167144A2 (en) * 1984-07-05 1986-01-08 Hitachi, Ltd. A pressure sensor and a method of arranging a pressure sensor
US5454270A (en) * 1994-06-06 1995-10-03 Motorola, Inc. Hermetically sealed pressure sensor and method thereof

Also Published As

Publication number Publication date
KR101356297B1 (ko) 2014-01-28
KR20130072262A (ko) 2013-07-01
US8261618B2 (en) 2012-09-11
EP2643672B1 (en) 2019-10-30
CN103314284A (zh) 2013-09-18
JP2013543136A (ja) 2013-11-28
WO2012071409A1 (en) 2012-05-31
US20120125115A1 (en) 2012-05-24
EP2643672A1 (en) 2013-10-02
JP2017072587A (ja) 2017-04-13

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150422

Termination date: 20171122