CN103308442B - A flaw detection device and flaw detection method for nonlinear optical crystal - Google Patents
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Abstract
本发明涉及非线性光学晶体探伤技术领域，特别涉及一种用于非线性光学晶体的探伤装置和其使用方法，包括激光发生器、衰减器、能量计、光闸、会聚透镜和显微镜，激光发生器用于产生射向非线性光学晶体的激光；会聚透镜位于该激光的光路上，用于将该激光会聚到非线性光学晶体上；光闸位于从激光发生器到会聚透镜之间的激光光路上，用于控制激光光路的通断；能量计用于测量射向非线性光学晶体的激光的能量；衰减器用于调整射向非线性光学晶体的激光的能量；显微镜用于观察非线性光学晶体在激光照射下的损伤情况。利用本探伤装置可方便的获得辐照激光强度和待测非线性光学晶体在该激光强度照射下的损伤情况，便于进行连续多组探伤实验。
The invention relates to the technical field of nonlinear optical crystal flaw detection, in particular to a flaw detection device for nonlinear optical crystals and a method for using the same, including a laser generator, an attenuator, an energy meter, an optical shutter, a converging lens and a microscope. The device is used to generate laser light directed to the nonlinear optical crystal; the converging lens is located on the optical path of the laser, and is used to converge the laser light onto the nonlinear optical crystal; the optical gate is located on the optical path of the laser from the laser generator to the converging lens , used to control the on-off of the laser light path; the energy meter is used to measure the energy of the laser beam shot to the nonlinear optical crystal; the attenuator is used to adjust the energy of the laser beam shot to the nonlinear optical crystal; the microscope is used to observe the nonlinear optical crystal in the Damage under laser irradiation. The flaw detection device can conveniently obtain the irradiated laser intensity and the damage condition of the nonlinear optical crystal to be tested under the irradiation of the laser intensity, and is convenient for carrying out multiple groups of continuous flaw detection experiments.
Description
技术领域technical field
本发明涉及光学探伤技术领域，特别涉及一种用于非线性光学晶体的探伤装置及探伤方法。The invention relates to the technical field of optical flaw detection, in particular to a flaw detection device and a flaw detection method for nonlinear optical crystals.
背景技术Background technique
随着激光技术的快速发展，非线性光学晶体的应用也越来越广泛，在科学研究、工业生产以及社会生活等各个领域发挥着重要的作用。尤其在实现固体激光器从红外波段到紫外区域不同波长的激光输出时，最为常用而又有效的方法便是利用非线性光学晶体进行频率变换。在高能量、大功率激光器中，这些晶体容易损伤从而导致光束质量下降，所以该类晶体的抗激光损伤能力成为了限制激光器输出功率最为重要的因素之一。因此需要对非晶体光学晶体进行探伤。现有探伤装置大都是采用激光直接照射配合显微镜观察的方法，然后在文献中给出实验数据，并没有详实的非线性光学晶体探伤装置和测量方法的描述。With the rapid development of laser technology, the application of nonlinear optical crystals is becoming more and more extensive, playing an important role in various fields such as scientific research, industrial production and social life. Especially when realizing the laser output of solid-state lasers with different wavelengths from the infrared band to the ultraviolet region, the most common and effective method is to use nonlinear optical crystals for frequency conversion. In high-energy and high-power lasers, these crystals are easily damaged, resulting in a decrease in beam quality, so the ability to resist laser damage of such crystals has become one of the most important factors limiting the output power of lasers. Therefore, it is necessary to carry out flaw detection on amorphous optical crystals. Most of the existing flaw detection devices use direct laser irradiation combined with microscope observation, and then give experimental data in the literature, and there is no detailed description of nonlinear optical crystal flaw detection devices and measurement methods.
为了解决以上问题，本发明做了有益改进。In order to solve the above problems, the present invention makes beneficial improvements.
发明内容Contents of the invention
（一）要解决的技术问题(1) Technical problems to be solved
本发明的目的是克服了现有技术缺乏测量使用方便的探伤装置的缺点，提供一种能够连续、多组测量的用于非线性光学晶体的探伤装置。The purpose of the present invention is to overcome the shortcoming of lack of convenient flaw detection device in the prior art, and provide a flaw detection device for nonlinear optical crystal capable of continuous and multi-group measurement.
本发明另一个要解决的技术问题是提供一种使用上述用于非线性光学晶体的探伤装置的方法。Another technical problem to be solved by the present invention is to provide a method for using the above-mentioned flaw detection device for nonlinear optical crystals.
（二）技术方案(2) Technical solution
对于一种用于非线性光学晶体的探伤装置这一技术主题，本发明是通过以下技术方案实现的：Regarding the technical subject of a flaw detection device for nonlinear optical crystals, the present invention is achieved through the following technical solutions:
一种用于非线性光学晶体的探伤装置，包括激光发生器、衰减器、能量计、光闸、会聚透镜和显微镜，A flaw detection device for nonlinear optical crystals, including a laser generator, an attenuator, an energy meter, an optical gate, a converging lens, and a microscope,
所述激光发生器，用于产生射向所述非线性光学晶体的激光；The laser generator is used to generate laser light directed at the nonlinear optical crystal;
所述会聚透镜，位于所述激光的光路上，用于将所述激光会聚到所述非线性光学晶体上；The converging lens is located on the optical path of the laser light, and is used to converge the laser light onto the nonlinear optical crystal;
所述光闸，位于从所述激光发生器到所述会聚透镜之间的所述激光的光路上，用于控制所述激光的光路的通断；The optical gate is located on the optical path of the laser light between the laser generator and the converging lens, and is used to control the on-off of the optical path of the laser light;
所述能量计，用于测量射向所述非线性光学晶体的激光的能量；The energy meter is used to measure the energy of the laser beam directed at the nonlinear optical crystal;
所述衰减器，用于调整射向所述非线性光学晶体的激光的能量；The attenuator is used to adjust the energy of the laser beam directed at the nonlinear optical crystal;
所述显微镜，用于观察所述非线性光学晶体在所述激光照射下的损伤情况。The microscope is used to observe the damage of the nonlinear optical crystal under the laser irradiation.
进一步，所述会聚透镜的焦点落在所述非线性光学晶体的内部。Further, the focal point of the converging lens falls inside the nonlinear optical crystal.
进一步，还包括控制器，所述控制器与所述光闸电连接，用于向所述光闸发出光路通断控制信号。Further, a controller is further included, the controller is electrically connected to the optical gate, and is used for sending an optical path on-off control signal to the optical gate.
更进一步，所述控制器还包括显示器，所述显示器与所述显微镜电连接，用于显示显微镜中的图像。Furthermore, the controller also includes a display, which is electrically connected to the microscope and used for displaying images in the microscope.
更进一步，所述能量计与所述控制器电连接，所述控制器用于记录存储所述能量计测得的数据。Furthermore, the energy meter is electrically connected to the controller, and the controller is used for recording and storing data measured by the energy meter.
进一步，从所述激光发生器到所述会聚透镜之间的所述激光的光路上还设有第一全反射镜和第二全反射镜；Further, a first total reflection mirror and a second total reflection mirror are also provided on the optical path from the laser generator to the laser light between the converging lens;
从所述激光发生器产生的激光，经过所述第一全反射镜反射到所述衰减器的输入端；The laser light generated from the laser generator is reflected to the input end of the attenuator through the first total reflection mirror;
从所述衰减器的输出端射出的激光，射入所述光闸的输入端；The laser light emitted from the output end of the attenuator is injected into the input end of the optical gate;
从所述光闸的输出端射出的激光，经过所述第二全反射镜反射到所述会聚透镜的输入端；The laser light emitted from the output end of the optical gate is reflected by the second total reflection mirror to the input end of the converging lens;
从所述会聚透镜的输出端射出的激光，会聚到所述非线性光学晶体上。The laser light emitted from the output end of the condensing lens is condensed onto the nonlinear optical crystal.
进一步，从所述衰减器到所述光闸之间的光路上还设有分光镜，所述分光镜用于将从所述衰减器的输出端射出的激光分成反射光和透射光，所述反射光射入所述能量计，所述透射光射入所述光闸的输入端。Further, a beam splitter is also provided on the optical path from the attenuator to the optical gate, and the beam splitter is used to divide the laser light emitted from the output end of the attenuator into reflected light and transmitted light. The reflected light enters the energy meter, and the transmitted light enters the input end of the shutter.
进一步，从所述第二全反射镜到所述会聚透镜之间的光路上，还设有用于调整焦斑的缩束器。Further, on the optical path from the second total reflection mirror to the converging lens, a beam reducer for adjusting the focal spot is also provided.
进一步，还包括一个用于指示所述第二全反射镜输出激光方向的连续激光器，所述第二全反射镜射向所述会聚透镜的激光方向与所述连续激光器发出激光的方向相同。Further, a continuous laser is used to indicate the output laser direction of the second total reflection mirror, and the direction of the laser light emitted by the second total reflection mirror to the converging lens is the same as the direction of the laser light emitted by the continuous laser.
对于一种用于非线性光学晶体的探伤方法这一技术主题，本发明是通过以下技术方案实现的：For the technical subject of a flaw detection method for nonlinear optical crystals, the present invention is achieved through the following technical solutions:
一种用于非线性光学晶体的探伤方法，包括如下步骤：A flaw detection method for nonlinear optical crystals, comprising the steps of:
步骤1，将待探伤的非线性光学晶体置于任一所述的用于非线性光学晶体的探伤装置的所述会聚透镜的输出端的焦点上；Step 1, placing the nonlinear optical crystal to be detected on the focal point of the output end of the converging lens of any one of the flaw detection devices for nonlinear optical crystals;
步骤2，调整所述衰减器，并通过所述能量计记录射向待探伤的所述非线性光学晶体的激光的能量；Step 2, adjusting the attenuator, and recording the energy of the laser beam directed at the nonlinear optical crystal to be detected through the energy meter;
步骤3，通过所述显微镜观察所述非线性光学晶体在所述激光照射下的损伤情况。Step 3, observing the damage condition of the nonlinear optical crystal under the laser irradiation through the microscope.
（三）有益效果(3) Beneficial effects
与现有技术和产品相比，本发明有如下优点：Compared with prior art and product, the present invention has following advantage:
1、利用本发明的探伤装置可以很方便的获得照射激光的强度和待测非线性光学晶体在该激光强度辐照下的损伤情况，因此可以很方便的进行连续多组探伤实验，甚至可以得到非线性光学晶体损伤情况与激光辐照强度的曲线，通过更多的数据，使人们更多了解到非线性光学晶体这方面的特征。1. Using the flaw detection device of the present invention, the intensity of the irradiated laser and the damage condition of the nonlinear optical crystal to be tested under the irradiation of the laser intensity can be easily obtained, so it is very convenient to carry out multiple sets of continuous flaw detection experiments, and even obtain The curve of nonlinear optical crystal damage and laser irradiation intensity, through more data, enables people to learn more about the characteristics of nonlinear optical crystals.
2、进一步，通过汇聚透镜的选型和缩束器的调整，使会聚透镜的焦点落到待测非线性光学晶体内部，有效避免待测非线性光学晶体表面先于内部出现损伤，同时，使得自聚焦引起的焦点偏移最小化，充分保证测量结果的准确性。2. Further, through the selection of the converging lens and the adjustment of the beam reducer, the focus of the converging lens falls inside the nonlinear optical crystal to be tested, which effectively prevents the surface of the nonlinear optical crystal to be tested from being damaged before the interior, and at the same time, makes The focus shift caused by self-focusing is minimized, fully ensuring the accuracy of measurement results.
3、进一步，控制器还可采用计算机，可以方便统计数据，并实时检测损伤状况。3. Furthermore, the controller can also use a computer, which can facilitate statistical data and detect damage in real time.
4、本发明的结构简单合理，易于实现。4. The structure of the present invention is simple and reasonable, and easy to realize.
附图说明Description of drawings
图1是本发明的结构示意图。Fig. 1 is a structural schematic diagram of the present invention.
附图中，各标号所代表的部件列表如下：In the accompanying drawings, the list of parts represented by each label is as follows:
1、激光发生器，2a、第一全反射镜，2b、第二全反射镜，3、衰减器，4、分光镜，5、能量计，6、光闸，7、连续激光器，8、缩束器，9、会聚透镜，10、显微镜，11、控制器，12、非线性光学晶体。1. Laser generator, 2a, first total reflection mirror, 2b, second total reflection mirror, 3. attenuator, 4. beam splitter, 5. energy meter, 6. shutter, 7. continuous laser, 8. shrink Beamer, 9, converging lens, 10, microscope, 11, controller, 12, nonlinear optical crystal.
具体实施方式Detailed ways
下面结合附图对本发明的具体实施方式做一个详细的说明。The specific implementation manner of the present invention will be described in detail below in conjunction with the accompanying drawings.
如图1所示的一种用于非线性光学晶体12的探伤装置，包括激光发生器1，激光发生器1用于产生射向待测的非线性光学晶体12的激光；A flaw detection device for a nonlinear optical crystal 12 as shown in Figure 1, comprising a laser generator 1, the laser generator 1 is used to generate laser light directed to the nonlinear optical crystal 12 to be tested;
如图1所示，沿着激光发生器1的出光的光路，依次设有第一全反射镜2a、第二全反射镜2b、衰减器3、分光镜4，能量计5、光闸6、缩束器8和会聚透镜9。As shown in Figure 1, along the light path of the laser generator 1, a first total reflection mirror 2a, a second total reflection mirror 2b, an attenuator 3, a beam splitter 4, an energy meter 5, an optical gate 6, Beam reducer 8 and converging lens 9.
激光发生器1可采用脉冲激光器，发出的脉冲激光光束射向第一全反射镜2a，激光经第一全反射镜2a后改变光束方向，使其射入衰减器3，衰减器3的作用是可调整光束的能量，在衰减器3后面设置有分光镜4，分光镜4能将输入的激光分为反射光和透射光，反射光被能量计5吸收，透射光则射到光闸6上，通过打开或关闭光闸6使得光束通过或被遮断，在光闸6后面设有第二全反射镜2b，光束经第二全反射镜反射后，进入缩束器8，缩束器8的作用是可以进一步调整光束焦斑，通过缩束器8后的光束再经过会聚透镜9辐照到待测晶体体内，晶体内部是否损伤通过显微镜10实施检测。The laser generator 1 can adopt a pulsed laser, and the pulsed laser beam sent shoots to the first total reflection mirror 2a, and the laser beam changes the beam direction after passing through the first total reflection mirror 2a, so that it is injected into the attenuator 3, and the effect of the attenuator 3 is The energy of the light beam can be adjusted. Behind the attenuator 3, there is a beam splitter 4. The beam splitter 4 can divide the input laser light into reflected light and transmitted light. The reflected light is absorbed by the energy meter 5, and the transmitted light is shot on the optical gate 6. , by opening or closing the shutter 6 so that the light beam passes or is blocked, a second total reflection mirror 2b is arranged behind the shutter 6, and the light beam enters the beam reducer 8 after being reflected by the second total reflection mirror, and the beam reducer 8 The effect is that the focal spot of the beam can be further adjusted, and the beam passing through the beam reducer 8 is then irradiated into the crystal body to be tested through the converging lens 9 , and whether there is damage inside the crystal is detected through the microscope 10 .
一般使用能量计5测量光的能量的方法是将能量计5设置在光路上，这种方式的缺点是在测量光的能量时，光不能穿过，也就是说不能在辐照的同时实时测量光的能量。本优选实施例是通过分光镜4，将光分成反射光和入射光，来实时对光的能量进行测量，例如本实施例中能量计5测量反射光的能量，然后根据分光镜4的材质和角度，计算出整个激光的能量，这里可通过计算机辅助进行计算，例如可在能量计5上加装一个计算芯片并事先输入计算公式，或者直接利用现有控制器11进行计算机辅助计算，这样可在实现辐照的同时实时测量激光能量。上述测量方式都可实现对激光能量的测量。The general way to use the energy meter 5 to measure the energy of light is to set the energy meter 5 on the light path. The disadvantage of this method is that when measuring the energy of light, the light cannot pass through, that is to say, it cannot be measured in real time while irradiating. The energy of light. In this preferred embodiment, light is divided into reflected light and incident light by spectroscope 4 to measure the energy of light in real time. For example, in this embodiment, energy meter 5 measures the energy of reflected light, and then according to the material and Angle, calculate the energy of whole laser, can calculate by computer aid here, for example can install a calculation chip on energy meter 5 and input calculation formula in advance, or directly utilize existing controller 11 to carry out computer aided calculation, can like this Laser energy is measured in real time while irradiating. All of the above measurement methods can realize the measurement of laser energy.
图1中还示出了可以设置一个连续激光器7，连续激光器7发出光束的方向是指示了一个标准辐照方向，作用是校准，具体说来，可以通过调整第二全反射镜2b的角度，使得经过光闸6输出并经过第二全反射镜2b反射后的激光光束方向与连续激光器7发出激光的方向相同。Also shown in Fig. 1 can be provided with a continuous laser 7, the direction of the beam emitted by the continuous laser 7 is to indicate a standard irradiation direction, and the effect is to calibrate, specifically, by adjusting the angle of the second total reflection mirror 2b, The direction of the laser beam output through the optical gate 6 and reflected by the second total reflection mirror 2 b is the same as the direction in which the continuous laser 7 emits laser light.
控制器11优选采用带有显示器的电脑，控制器11与光闸6电连接，可以通过控制器11发出控制光闸6进而控制光路通断的指令，控制更加方便；控制器11与能量计5电连接，能量计5吸收到反射光的能量数据被传送到控制器11上实时显示，便于显示收集和统计数据；控制器11与显微镜10电连接，便于放大显示图像，以及对图像的存储和后期处理。The controller 11 preferably adopts a computer with a display, and the controller 11 is electrically connected with the optical gate 6, and can send an instruction to control the optical gate 6 and then control the on-off of the optical path through the controller 11, and the control is more convenient; the controller 11 and the energy meter 5 Electrically connected, the energy data absorbed by the energy meter 5 to the reflected light is transmitted to the controller 11 for real-time display, which is convenient for displaying collection and statistical data; the controller 11 is electrically connected with the microscope 10, which is convenient for zooming in and displaying images, and for image storage and post processing.
优选会聚透镜9的焦点落在待探伤的非线性光学晶体12的内部，这样能有效避免非线性光学晶体12表面先于体内出现损伤，也就是说，即使内部探测点出现损伤，非线性光学晶体12表面仍保持完好，同时使得自聚焦引起的焦点偏移最小化，充分保证测量结果的准确性。Preferably, the focal point of the converging lens 9 falls inside the nonlinear optical crystal 12 to be detected, which can effectively prevent the surface of the nonlinear optical crystal 12 from being damaged before the body, that is to say, even if the internal detection point is damaged, the nonlinear optical crystal 12 The surface is still intact, and at the same time, the focus shift caused by self-focusing is minimized, which fully guarantees the accuracy of the measurement results.
使用时，先将待探伤的非线性光学晶体12置于会聚透镜9的输出端的焦点上，非线性光学晶体例如可以选择4×4×8mm3的LBO晶体、还可以是3×3×7mm3的CBO晶体，或者是1×1×5mm3的KBBF晶体。然后通过对会聚透镜9的焦距选型、会聚透镜9与待非线性光学晶体12的距离、以及缩束器8的调整，使得会聚透镜9的焦点落入非线性光学晶体12的内部，一般来说，为保证表面不会先受到影响，最好应保证焦点位于非线性光学晶体12内的深度大于等于激光高斯光束瑞利距离的8倍。When in use, first place the non-linear optical crystal 12 to be detected on the focal point of the output end of the converging lens 9, for example, the non-linear optical crystal can be an LBO crystal of 4×4×8mm 3 or 3×3×7mm 3 CBO crystals, or 1×1×5mm 3 KBBF crystals. Then by selecting the focal length of the converging lens 9, the distance between the converging lens 9 and the nonlinear optical crystal 12, and the adjustment of the beam reducer 8, the focal point of the converging lens 9 falls into the inside of the nonlinear optical crystal 12, generally In other words, in order to ensure that the surface will not be affected first, it is best to ensure that the depth of the focal point in the nonlinear optical crystal 12 is greater than or equal to 8 times the Rayleigh distance of the laser Gaussian beam.
然后调整衰减器8，并通过能量计5记录射向待探伤的非线性光学晶体12的激光的能量；也就是说，通过测量多组数据得到更多更详细的探测结果。具体说来，例如我们可以预先设置10个探测能级，每个能级间隔0.1mJ，然后每个能级选择10个测试点，每个测试点辐照2个脉冲，脉冲宽度5ns，辐照光斑直径一般在20μm-30μm。测量时，先从同一低能级的10个探测点开始，依次进行辐照，通过光闸6来控制每个测试点的两个脉冲，测完10个测试点后，通过调整衰减器3，让激光能量提高0.1mJ，再探伤该能级下的10个测试点的情况。各测试点的内部损伤情况通过显微镜10传输到控制器11存储和分析，这样可以很方便快速的得到一系列的数据和图像。Then adjust the attenuator 8, and use the energy meter 5 to record the energy of the laser beam directed at the non-linear optical crystal 12 to be detected; that is, more and more detailed detection results can be obtained by measuring multiple sets of data. Specifically, for example, we can pre-set 10 detection energy levels, each energy level interval is 0.1mJ, and then select 10 test points for each energy level, and each test point irradiates 2 pulses with a pulse width of 5ns. The spot diameter is generally 20μm-30μm. When measuring, start with 10 detection points of the same low energy level, and irradiate in turn, and control the two pulses of each test point through the shutter 6. After measuring 10 test points, adjust the attenuator 3 so that Increase the laser energy by 0.1mJ, and then detect the situation of 10 test points under this energy level. The internal damage condition of each test point is transmitted to the controller 11 for storage and analysis through the microscope 10, so that a series of data and images can be obtained conveniently and quickly.
以上实施方式仅用于说明本发明，而并非对本发明的限制，有关技术领域的普通技术人员，在不脱离本发明的精神和范围的情况下，还可以做出各种变化和变型，例如有的激光发生器本身集成了衰减器的功能等，因此所有等同的技术方案也属于本发明的范畴，本发明的专利保护范围应由权利要求限定。The above embodiments are only used to illustrate the present invention, but not to limit the present invention. Those of ordinary skill in the relevant technical field can make various changes and modifications without departing from the spirit and scope of the present invention, for example, The laser generator itself integrates the function of the attenuator, etc., so all equivalent technical solutions also belong to the category of the present invention, and the patent protection scope of the present invention should be limited by the claims.
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