CN103308442B - Flaw detection device and flaw detection method for nonlinear optical crystal - Google Patents
Flaw detection device and flaw detection method for nonlinear optical crystal Download PDFInfo
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- CN103308442B CN103308442B CN201310169126.7A CN201310169126A CN103308442B CN 103308442 B CN103308442 B CN 103308442B CN 201310169126 A CN201310169126 A CN 201310169126A CN 103308442 B CN103308442 B CN 103308442B
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention relates to the technical field of nonlinear optical crystal flaw detection, in particular to a flaw detection device for a nonlinear optical crystal and a using method thereof, wherein the flaw detection device comprises a laser generator, an attenuator, an energy meter, an optical gate, a converging lens and a microscope, wherein the laser generator is used for generating laser which emits to the nonlinear optical crystal; the converging lens is positioned on the optical path of the laser and is used for converging the laser on the nonlinear optical crystal; the optical gate is positioned on a laser light path between the laser generator and the converging lens and used for controlling the on-off of the laser light path; the energy meter is used for measuring the energy of the laser which is emitted to the nonlinear optical crystal; the attenuator is used for adjusting the energy of the laser emitted to the nonlinear optical crystal; the microscope is used for observing the damage condition of the nonlinear optical crystal under laser irradiation. The flaw detection device can conveniently obtain the irradiation laser intensity and the damage condition of the nonlinear optical crystal to be detected under the irradiation of the laser intensity, and is convenient for carrying out continuous multi-group flaw detection experiments.
Description
Technical field
The present invention relates to optical inspection technical field, particularly a kind of failure detector for nonlinear optical crystal and method of detection.
Background technology
Along with the fast development of laser technology, the application of nonlinear optical crystal is also more and more extensive, plays an important role in every field such as scientific research, commercial production and social life.Especially, when realizing solid state laser from infrared band to the Laser output of ultraviolet region different wave length, the most conventional and effective method utilizes nonlinear optical crystal to carry out frequency transformation.In high-energy, high power laser, these crystal easily damage thus cause beam quality to decline, so this crystal-like resisting laser damage ability becomes one of of paramount importance factor of restriction laser output power.Therefore need to detect a flaw to noncrystal optical crystal.Existing failure detector is mostly adopt laser direct irradiation to coordinate fractographic method, then provides experimental data in the literature, not the description of full and accurate nonlinear optical crystal failure detector and measuring method.
In order to overcome the above problems, invention has been useful improvement.
Summary of the invention
(1) technical matters that will solve
The object of the invention is to overcome prior art and lack the shortcoming measuring failure detector easy to use, provide a kind of can continuously, organize the failure detector for nonlinear optical crystal of measurement more.
Another technical matters that will solve of the present invention is to provide a kind of method using the above-mentioned failure detector for nonlinear optical crystal.
(2) technical scheme
For this technical theme of a kind of failure detector for nonlinear optical crystal, the present invention is achieved by the following technical solutions:
For a failure detector for nonlinear optical crystal, comprise laser generator, attenuator, energy meter, optical gate, convergent lens and microscope,
Described laser generator, for generation of the laser of nonlinear optical crystal described in directive;
Described convergent lens, is positioned in the light path of described laser, for described laser is converged to described nonlinear optical crystal;
Described optical gate, in the light path of the described laser from described laser generator to described convergent lens, for controlling the break-make of the light path of described laser;
Described energy meter, for measuring the energy of the laser of nonlinear optical crystal described in directive;
Described attenuator, for adjusting the energy of the laser of nonlinear optical crystal described in directive;
Described microscope, for observing the degree of impairment of described nonlinear optical crystal under described laser irradiates.
Further, the focus of described convergent lens drops on the inside of described nonlinear optical crystal.
Further, also comprise controller, described controller is electrically connected with described optical gate, for sending light path break-make control signal to described optical gate.
Further, described controller also comprises display, and described display is electrically connected with described microscope, for showing the image in microscope.
Further, described energy meter is electrically connected with described controller, and described controller is for recording the data storing described energy meter and record.
Further, the light path of the described laser from described laser generator to described convergent lens is also provided with the first completely reflecting mirror and the second completely reflecting mirror;
From the laser that described laser generator produces, reflex to the input end of described attenuator through described first completely reflecting mirror;
From the laser that the output terminal of described attenuator penetrates, inject the input end of described optical gate;
From the laser that the output terminal of described optical gate penetrates, reflex to the input end of described convergent lens through described second completely reflecting mirror;
From the laser that the output terminal of described convergent lens penetrates, converge on described nonlinear optical crystal.
Further, light path from described attenuator to described optical gate is also provided with spectroscope, described spectroscope is used for the laser that the output terminal from described attenuator penetrates to be divided into reflected light and transmitted light, and described reflected light injects described energy meter, and described transmitted light injects the input end of described optical gate.
Further, the light path from described second completely reflecting mirror to described convergent lens, be also provided with the contracting bundle device for adjusting focal spot.
Further, also comprise the continuous wave laser that is used to indicate described second completely reflecting mirror Output of laser direction, described in described second completely reflecting mirror directive, the laser direction of convergent lens is identical with the direction that described continuous wave laser sends laser.
For this technical theme of a kind of method of detection for nonlinear optical crystal, the present invention is achieved by the following technical solutions:
For a method of detection for nonlinear optical crystal, comprise the steps:
Step 1, is placed in the focus of the output terminal of the described convergent lens of arbitrary described failure detector for nonlinear optical crystal by nonlinear optical crystal to be detected a flaw;
Step 2, adjusts described attenuator, and the energy of laser by described energy meter record directive described nonlinear optical crystal to be detected a flaw;
Step 3, by the degree of impairment of nonlinear optical crystal described in described microscopic examination under described laser irradiates.
(3) beneficial effect
Compare with product with prior art, the present invention has the following advantages:
1, failure detector of the present invention is utilized can to obtain intensity and the degree of impairment of nonlinear optical crystal to be measured under this laser intensity irradiation of irradiating laser very easily, therefore many group flaw detection experiments can be carried out continuously very easily, even can obtain the curve of nonlinear optical crystal degree of impairment and laser irradiation intensity, by more data, make people's feature recognizing nonlinear optical crystal this respect more.
2, further, by the type selecting of plus lens and the adjustment of contracting bundle device, the focus of convergent lens is made to fall nonlinear optical crystal to be measured inner, nonlinear optical crystal surface to be measured is effectively avoided to occur damage prior to inside, simultaneously, the focal shift that self-focusing is caused minimizes, and fully ensures the accuracy of measurement result.
3, further, controller also can adopt computing machine, can facilitate statistics, and detect damage status in real time.
4, of the present invention simple and reasonable, be easy to realize.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
In accompanying drawing, the list of parts representated by each label is as follows:
1, laser generator, 2a, the first completely reflecting mirror, 2b, the second completely reflecting mirror, 3, attenuator, 4, spectroscope, 5, energy meter, 6, optical gate, 7, continuous wave laser, 8, contracting bundle device, 9, convergent lens, 10, microscope, 11, controller, 12, nonlinear optical crystal.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is made a detailed explanation.
A kind of failure detector for nonlinear optical crystal 12 as shown in Figure 1, comprises laser generator 1, and laser generator 1 is for generation of the laser of directive nonlinear optical crystal 12 to be measured;
As shown in Figure 1, along the light path of the bright dipping of laser generator 1, be provided with the first completely reflecting mirror 2a, the second completely reflecting mirror 2b, attenuator 3, spectroscope 4 successively, energy meter 5, optical gate 6, contracting bundle device 8 and convergent lens 9.
Laser generator 1 can adopt pulsed laser, the pulsed laser beam directive first completely reflecting mirror 2a sent, laser changes beam direction after the first completely reflecting mirror 2a, it is made to inject attenuator 3, the effect of attenuator 3 is energy of adjusting light beam, spectroscope 4 is provided with below at attenuator 3, the laser of input can be divided into reflected light and transmitted light by spectroscope 4, reflected light is absorbed by energy meter 5, transmitted light is then mapped on optical gate 6, light beam is passed through by opening or closing optical gate 6 or is interdicted, the second completely reflecting mirror 2b is provided with below at optical gate 6, light beam is after the second completely reflecting mirror reflection, enter contracting bundle device 8, the effect of contracting bundle device 8 can adjust light beam focal spot further, by contracting bundle device 8 after light beam again through convergent lens 9 irradiation in crystals to be measured, whether crystals damages by microscope 10 examinations.
The method that general use energy meter 5 measures the energy of light is arranged in light path by energy meter 5, and the shortcoming of this mode is that light can not pass, while irradiation, that is can not measure the energy of light in real time when measuring the energy of light.This preferred embodiment is by spectroscope 4, light is divided into reflected light and incident light, in real time the energy of light is measured, such as, in the present embodiment, energy meter 5 measures the energy of reflected light, then according to material and the angle of spectroscope 4, calculate the energy of whole laser, here calculate by area of computer aided, such as can install a computing chip additional and input computing formula in advance on energy meter 5, or directly utilize existing controller 11 to carry out computer aided calculation, while realizing irradiation, laser energy can be measured in real time like this.Above-mentioned metering system all can realize the measurement to laser energy.
Also show in Fig. 1 and a continuous wave laser 7 can be set, the direction that continuous wave laser 7 sends light beam indicates a standard irradiation direction, effect is calibration, particularly, can by the angle of adjustment second completely reflecting mirror 2b, make to export and laser beam direction after the second completely reflecting mirror 2b reflects is identical with the direction that continuous wave laser 7 sends laser through optical gate 6.
Controller 11 preferably adopts the computer with display, and controller 11 is electrically connected with optical gate 6, can send the instruction controlling optical gate 6 and then control light path break-make, control convenient by controller 11; Controller 11 is electrically connected with energy meter 5, and the energy datum that energy meter 5 absorbs reflected light is sent on controller 11 and shows in real time, is convenient to display and collects and statistics; Controller 11 is electrically connected with microscope 10, is convenient to amplify display image, and to the storage of image and post-processed.
The focus of preferred convergent lens 9 drops on the inside of nonlinear optical crystal 12 to be detected a flaw, can effectively avoid nonlinear optical crystal 12 surface prior to there is damage in body like this, that is, even if there is damage in internal detection point, nonlinear optical crystal 12 surface still remains intact, the focal shift simultaneously making self-focusing cause minimizes, and fully ensures the accuracy of measurement result.
During use, be first placed in the focus of the output terminal of convergent lens 9 by nonlinear optical crystal 12 to be detected a flaw, nonlinear optical crystal such as can select 4 × 4 × 8mm
3lbo crystal, can also be 3 × 3 × 7mm
3cBO crystal, or 1 × 1 × 5mm
3kBBF crystal.Then by the focal length type selecting of convergent lens 9, convergent lens 9 and treat the distance of nonlinear optical crystal 12 and contract and restraint the adjustment of device 8, the focus of convergent lens 9 is made to fall into the inside of nonlinear optical crystal 12, in general, for ensureing that surface can not first be affected, preferably should ensure that the degree of depth that focus is positioned at nonlinear optical crystal 12 is more than or equal to 8 times of laser gaussian beam Rayleigh distance.
Then adjust attenuator 8, and recorded the energy of the laser of directive nonlinear optical crystal to be detected a flaw 12 by energy meter 5; That is, how more detailed result of detection is obtained by measuring multi-group data.Particularly, such as we can pre-set 10 detection energy levels, and each level spacing 0.1mJ, then each energy level selects 10 test points, 2 pulses of each test point irradiation, and pulse width 5ns, exposure light spot diameter is generally at 20 μm-30 μm.During measurement, first from 10 sensing points of same low-lying level, carry out irradiation successively, two pulses of each test point are controlled, after having surveyed 10 test points, by adjustment attenuator 3 by optical gate 6, laser energy is allowed to improve 0.1mJ, then the situation of 10 test points under this energy level of detecting a flaw.The internal injury situation of each test point is transferred to controller 11 by microscope 10 and stores and analyze, and easily can obtain a series of data and image fast like this.
Above embodiment is only for illustration of the present invention; and be not limitation of the present invention; the those of ordinary skill of relevant technical field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; the laser generator such as had itself is integrated with the function etc. of attenuator, and therefore all equivalent technical schemes also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (9)
1. for a failure detector for nonlinear optical crystal, it is characterized in that: comprise laser generator, attenuator, energy meter, optical gate, convergent lens and microscope,
Described laser generator, for generation of the laser of nonlinear optical crystal described in directive;
Described convergent lens, is positioned in the light path of described laser, for described laser is converged to described nonlinear optical crystal; The focus of described convergent lens drops on the inside of described nonlinear optical crystal, and the degree of depth that described focus is positioned at described nonlinear optical crystal is more than or equal to 8 times of the Gaussian beam Rayleigh distance of described laser;
Described optical gate, in the light path of the described laser from described laser generator to described convergent lens, for controlling the break-make of the light path of described laser;
Described energy meter, for measuring the energy of the laser of nonlinear optical crystal described in directive;
Described attenuator, for adjusting the energy of the laser of nonlinear optical crystal described in directive;
Described microscope, for observing the degree of impairment of described nonlinear optical crystal under described laser irradiates.
2. the failure detector for nonlinear optical crystal according to claim 1, is characterized in that: also comprise controller, and described controller is electrically connected with described optical gate, for sending light path break-make control signal to described optical gate.
3. the failure detector for nonlinear optical crystal according to claim 2, it is characterized in that: described controller also comprises display, described display is electrically connected with described microscope, for showing the image in microscope.
4. the failure detector for nonlinear optical crystal according to claim 2, is characterized in that: described energy meter is electrically connected with described controller, and described controller is for recording the data storing described energy meter and record.
5. the failure detector for nonlinear optical crystal according to claim 1, is characterized in that: the light path of the described laser from described laser generator to described convergent lens is also provided with the first completely reflecting mirror and the second completely reflecting mirror;
From the laser that described laser generator produces, reflex to the input end of described attenuator through described first completely reflecting mirror;
From the laser that the output terminal of described attenuator penetrates, inject the input end of described optical gate;
From the laser that the output terminal of described optical gate penetrates, reflex to the input end of described convergent lens through described second completely reflecting mirror;
From the laser that the output terminal of described convergent lens penetrates, converge on described nonlinear optical crystal.
6. the failure detector for nonlinear optical crystal according to claim 5, it is characterized in that: the light path from described attenuator to described optical gate is also provided with spectroscope, described spectroscope is used for the laser that the output terminal from described attenuator penetrates to be divided into reflected light and transmitted light, described reflected light injects described energy meter, and described transmitted light injects the input end of described optical gate.
7. the failure detector for nonlinear optical crystal according to claim 5, is characterized in that: the light path from described second completely reflecting mirror to described convergent lens, is also provided with the contracting bundle device for adjusting focal spot.
8. the failure detector for nonlinear optical crystal according to claim 5, it is characterized in that: also comprise the continuous wave laser that is used to indicate described second completely reflecting mirror Output of laser direction, described in described second completely reflecting mirror directive, the laser direction of convergent lens is identical with the direction that described continuous wave laser sends laser.
9. for a method of detection for nonlinear optical crystal, it is characterized in that, comprise the steps:
Step 1, nonlinear optical crystal to be detected a flaw is placed in as arbitrary in claim 1 to 9 as described in for nonlinear optical crystal failure detector as described in the focus of output terminal of convergent lens;
Step 2, adjusts described attenuator, and the energy of laser by described energy meter record directive described nonlinear optical crystal to be detected a flaw;
Step 3, by the degree of impairment of nonlinear optical crystal described in described microscopic examination under described laser irradiates.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102500923A (en) * | 2011-09-21 | 2012-06-20 | 长春理工大学 | Preparation device for preparing functional micro-nano materials on silicon surfaces based on femtosecond laser and method |
| CN102608019A (en) * | 2012-03-23 | 2012-07-25 | 中国矿业大学 | Device and method for measuring laser irradiation optical thin film damage threshold in high-temperature environment |
| CN102778426A (en) * | 2012-06-29 | 2012-11-14 | 西北核技术研究所 | Laser damage testing device for optical thin film |
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| US5805329A (en) * | 1996-04-10 | 1998-09-08 | The Regents Of The University Of California | Minimizing radiation damage in nonlinear optical crystals |
| JPH11108794A (en) * | 1997-09-30 | 1999-04-23 | Nikon Corp | Laser durability measuring device |
| JP2001099753A (en) * | 1999-09-29 | 2001-04-13 | Nikon Corp | Method and device for evaluating optical element laser durability and exposing device |
| JP2001141651A (en) * | 1999-11-11 | 2001-05-25 | Mitsubishi Cable Ind Ltd | JUDGMENT METHOD FOR OPTICAL DAMAGE-RESISTANT PROPERTY OF MgO-DOPED LiNbO3 CRYSTAL AND ITS USE |
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| CN102500923A (en) * | 2011-09-21 | 2012-06-20 | 长春理工大学 | Preparation device for preparing functional micro-nano materials on silicon surfaces based on femtosecond laser and method |
| CN102608019A (en) * | 2012-03-23 | 2012-07-25 | 中国矿业大学 | Device and method for measuring laser irradiation optical thin film damage threshold in high-temperature environment |
| CN102778426A (en) * | 2012-06-29 | 2012-11-14 | 西北核技术研究所 | Laser damage testing device for optical thin film |
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