CN103308442A - Flaw detection device and flaw detection method for nonlinear optical crystal - Google Patents
Flaw detection device and flaw detection method for nonlinear optical crystal Download PDFInfo
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- CN103308442A CN103308442A CN2013101691267A CN201310169126A CN103308442A CN 103308442 A CN103308442 A CN 103308442A CN 2013101691267 A CN2013101691267 A CN 2013101691267A CN 201310169126 A CN201310169126 A CN 201310169126A CN 103308442 A CN103308442 A CN 103308442A
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- laser
- nonlinear optical
- optical crystal
- convergent lens
- failure detector
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Abstract
The invention relates to the technical field of flaw detection of nonlinear optical crystals and in particular relates to a flaw detection device for a nonlinear optical crystal and a using method thereof. The flaw detection device comprises a laser generator, an attenuator, an energy meter, an optical shutter, a convergent lens and a microscope, wherein the laser generator is used for generating laser irradiating the nonlinear optical crystal; the convergent lens is positioned on a light path of the laser and is used for converging the laser to the nonlinear optical crystal; the optical shutter is positioned on a laser light path between the laser generator and the convergent lens and is used for controlling on/off of the laser light path; the energy meter is used for measuring the energy of the laser irradiating the nonlinear optical crystal; the attenuator is used for adjusting the energy of the laser irradiating the nonlinear optical crystal; the microscope is used for observing the flaw conditions of the nonlinear optical crystal under laser irradiation. By utilizing the flaw detection device, the irradiation laser intensity and the flaw conditions of the nonlinear optical crystal to be detected under irradiation of the laser intensity can be conveniently obtained, and multiple groups of continuous flaw detection experiment are conveniently performed.
Description
Technical field
The present invention relates to the optical inspection technical field, particularly a kind of failure detector and method of detection for nonlinear optical crystal.
Background technology
Along with the fast development of laser technology, the application of nonlinear optical crystal is also more and more extensive, plays an important role in every field such as scientific research, commercial production and social life.Especially when realizing the Laser output of solid state laser from infrared band to the ultraviolet region different wave length, the most commonly used and effective method is to utilize nonlinear optical crystal to carry out frequency transformation.In high-energy, high power laser, thereby the easy damage of these crystal causes beam quality to descend, so this crystal-like resisting laser damage ability becomes one of of paramount importance factor of restriction laser output power.Therefore need to detect a flaw to noncrystal optical crystal.Existing failure detector mostly is to adopt the laser direct irradiation to cooperate fractographic method, then provides in the literature experimental data, does not have full and accurate nonlinear optical crystal failure detector and the description of measuring method.
In order to overcome the above problems, the present invention has done useful improvement.
Summary of the invention
The technical matters that (one) will solve
The objective of the invention is to overcome prior art and lacked the shortcoming of measuring failure detector easy to use, provide a kind of can be continuously, the failure detector for nonlinear optical crystal measured of many groups.
Another technical matters that will solve of the present invention provides a kind of method of using above-mentioned failure detector for nonlinear optical crystal.
(2) technical scheme
For a kind of this technical theme of failure detector for nonlinear optical crystal, the present invention is achieved by the following technical solutions:
A kind of failure detector for nonlinear optical crystal comprises laser generator, attenuator, energy meter, optical gate, convergent lens and microscope,
Described laser generator is for generation of the laser of the described nonlinear optical crystal of directive;
Described convergent lens is positioned on the light path of described laser, is used for described laser convergence to described nonlinear optical crystal;
Described optical gate is on the light path from described laser generator to the described laser the described convergent lens, for the break-make of the light path of controlling described laser;
Described energy meter is for the energy of the laser of measuring the described nonlinear optical crystal of directive;
Described attenuator is for the energy of the laser of adjusting the described nonlinear optical crystal of directive;
Described microscope is used for observing the degree of impairment of described nonlinear optical crystal under described Ear Mucosa Treated by He Ne Laser Irradiation.
Further, the focus of described convergent lens drops on the inside of described nonlinear optical crystal.
Further, also comprise controller, described controller is electrically connected with described optical gate, is used for sending light path break-make control signal to described optical gate.
Further, described controller also comprises display, and described display is electrically connected with described microscope, is used for showing the image of microscope.
Further, described energy meter is electrically connected with described controller, and described controller is used for the data that the described energy meter of record storage records.
Further, also be provided with the first completely reflecting mirror and the second completely reflecting mirror on the light path from described laser generator to the described laser the described convergent lens;
From the laser that described laser generator produces, reflex to the input end of described attenuator through described the first completely reflecting mirror;
From the laser that the output terminal of described attenuator penetrates, inject the input end of described optical gate;
From the laser that the output terminal of described optical gate penetrates, reflex to the input end of described convergent lens through described the second completely reflecting mirror;
Laser from the output terminal of described convergent lens penetrates converges on the described nonlinear optical crystal.
Further, on the light path the described optical gate, also be provided with spectroscope from described attenuator, the laser that described spectroscope is used for penetrating from the output terminal of described attenuator is divided into reflected light and transmitted light, and described reflected light is injected described energy meter, and described transmitted light is injected the input end of described optical gate.
Further,, on the light path the described convergent lens, also be provided with for the contracting bundle device of adjusting focal spot from described the second completely reflecting mirror.
Further, also comprise a continuous wave laser that is used to indicate described the second completely reflecting mirror Output of laser direction, the laser direction of the described convergent lens of described the second completely reflecting mirror directive is identical with the direction that described continuous wave laser sends laser.
For a kind of this technical theme of method of detection for nonlinear optical crystal, the present invention is achieved by the following technical solutions:
A kind of method of detection for nonlinear optical crystal comprises the steps:
Step 2 is adjusted described attenuator, and records the energy of the laser of directive described nonlinear optical crystal to be detected a flaw by described energy meter;
(3) beneficial effect
Compare with product with prior art, the present invention has the following advantages:
1, utilize failure detector of the present invention can obtain very easily intensity and the degree of impairment of nonlinear optical crystal to be measured under this laser intensity irradiation of irradiating laser, therefore can carry out very easily continuously many group flaw detection experiments, even can obtain the curve of nonlinear optical crystal degree of impairment and laser irradiation intensity, by more data, make people's features of recognizing the nonlinear optical crystal this respect more.
2, further, by the type selecting of plus lens and the adjustment of contracting bundle device, make the focus of convergent lens fall nonlinear optical crystal to be measured inside, effectively avoid nonlinear optical crystal to be measured surface damage to occur prior to inside, simultaneously, so that the focal shift that self-focusing causes minimizes, fully guarantee the accuracy of measurement result.
3, further, controller also can adopt computing machine, can make things convenient for statistics, and detects in real time damage status.
4, of the present invention simple and reasonable, be easy to realize.
Description of drawings
Fig. 1 is structural representation of the present invention.
In the accompanying drawing, the list of parts of each label representative is as follows:
1, laser generator, 2a, the first completely reflecting mirror, 2b, the second completely reflecting mirror, 3, attenuator, 4, spectroscope, 5, energy meter, 6, optical gate, 7, continuous wave laser, 8, contracting bundle device, 9, convergent lens, 10, microscope, 11, controller, 12, nonlinear optical crystal.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is made a detailed explanation.
A kind of failure detector for nonlinear optical crystal 12 as shown in Figure 1 comprises laser generator 1, and laser generator 1 is for generation of the laser of directive nonlinear optical crystal 12 to be measured;
As shown in Figure 1, the light path along the bright dipping of laser generator 1 is provided with the first completely reflecting mirror 2a, the second completely reflecting mirror 2b, attenuator 3, spectroscope 4 successively, energy meter 5, optical gate 6, contracting bundle device 8 and convergent lens 9.
The energy approach that normal operation energy meter 5 is measured light is that energy meter 5 is arranged on the light path, and the shortcoming of this mode is that light can not pass, and that is to say the energy that can not measure light in irradiation in real time when measuring the energy of light.This preferred embodiment is by spectroscope 4, light is divided into reflected light and incident light, in real time the energy of light is measured, for example energy meter 5 is measured catoptrical energy in the present embodiment, then according to material and the angle of spectroscope 4, calculate the energy of whole laser, here can calculate by area of computer aided, for example can install a computing chip additional and input in advance computing formula at energy meter 5, perhaps directly utilize existing controller 11 to carry out computer aided calculation, can when realizing irradiation, measure in real time laser energy like this.Above-mentioned metering system all can be realized the measurement to laser energy.
Also show among Fig. 1 a continuous wave laser 7 can be set, the direction that continuous wave laser 7 sends light beam is to have indicated a standard irradiation direction, effect is calibration, particularly, can be by adjusting the angle of the second completely reflecting mirror 2b, so that through optical gate 6 outputs and identical with the direction that continuous wave laser 7 sends laser through the laser beam direction after the second completely reflecting mirror 2b reflection.
The controller 11 preferred computers that adopt with display, controller 11 is electrically connected with optical gate 6, can send by controller 11 instruction of control optical gate 6 and then control light path break-make, controls convenient; Controller 11 is electrically connected with energy meter 5, and energy meter 5 absorbs catoptrical energy datum and is sent in real time demonstration on the controller 11, is convenient to show and collects and statistics; Controller 11 is electrically connected with microscope 10, is convenient to amplify to show image, and to storage and the post-processed of image.
The focus of preferred convergent lens 9 drops on the inside of nonlinear optical crystal to be detected a flaw 12, can effectively avoid like this nonlinear optical crystal 12 surfaces prior to occurring damage in the body, that is to say, even damage appears in inner sensing point, nonlinear optical crystal 12 surfaces still remain intact, so that the focal shift that self-focusing causes minimizes, fully guarantee the accuracy of measurement result simultaneously.
During use, nonlinear optical crystal 12 that first will be to be detected a flaw places on the focus of output terminal of convergent lens 9, and nonlinear optical crystal for example can be selected 4 * 4 * 8mm
3Lbo crystal, can also be 3 * 3 * 7mm
3The CBO crystal, or 1 * 1 * 5mm
3The KBBF crystal.Then by to the adjustment with the distance for the treatment of nonlinear optical crystal 12 and contracting bundle device 8 of the focal length type selecting of convergent lens 9, convergent lens 9, so that the focus of convergent lens 9 falls into the inside of nonlinear optical crystal 12, in general, for guaranteeing that the surface can not be affected first, should guarantee that preferably the degree of depth that focus is positioned at nonlinear optical crystal 12 is more than or equal to 8 times of laser gaussian beam Rayleigh distance.
Then adjust attenuator 8, and record the energy of the laser of directives nonlinear optical crystal 12 to be detected a flaw by energy meter 5; That is to say, obtain how more detailed result of detection by measuring multi-group data.Particularly, for example we can set in advance 10 and survey energy level, each level spacing 0.1mJ, and then each energy level is selected 10 test points, 2 pulses of each test point irradiation, pulse width 5ns, exposure light spot diameter are generally at 20 μ m-30 μ m.During measurement, from 10 sensing points of same low-lying level, carry out successively irradiation first, control two pulses of each test point by optical gate 6, surveyed 10 test points after, by adjusting attenuator 3, allow laser energy improve 0.1mJ, the situation of 10 test points under this energy level of detecting a flaw again.The internal injury situation of each test point is transferred to controller 11 storages by microscope 10 and analyzes, and can easily obtain fast a series of data and image like this.
Above embodiment only is used for explanation the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; in the situation that do not break away from the spirit and scope of the present invention; can also make a variety of changes and modification; such as the laser generator that has itself integrated the function etc. of attenuator, so all technical schemes that are equal to also belong to category of the present invention, scope of patent protection of the present invention should be defined by the claims.
Claims (10)
1. failure detector that is used for nonlinear optical crystal is characterized in that: comprise laser generator, attenuator, energy meter, optical gate, convergent lens and microscope,
Described laser generator is for generation of the laser of the described nonlinear optical crystal of directive;
Described convergent lens is positioned on the light path of described laser, is used for described laser convergence to described nonlinear optical crystal;
Described optical gate is on the light path from described laser generator to the described laser the described convergent lens, for the break-make of the light path of controlling described laser;
Described energy meter is for the energy of the laser of measuring the described nonlinear optical crystal of directive;
Described attenuator is for the energy of the laser of adjusting the described nonlinear optical crystal of directive;
Described microscope is used for observing the degree of impairment of described nonlinear optical crystal under described Ear Mucosa Treated by He Ne Laser Irradiation.
2. the failure detector for nonlinear optical crystal according to claim 1, it is characterized in that: the focus of described convergent lens drops on the inside of described nonlinear optical crystal.
3. the failure detector for nonlinear optical crystal according to claim 1, it is characterized in that: also comprise controller, described controller is electrically connected with described optical gate, is used for sending light path break-make control signal to described optical gate.
4. the failure detector for nonlinear optical crystal according to claim 3, it is characterized in that: described controller also comprises display, described display is electrically connected with described microscope, is used for showing the image of microscope.
5. the failure detector for nonlinear optical crystal according to claim 3, it is characterized in that: described energy meter is electrically connected with described controller, and described controller is used for the data that the described energy meter of record storage records.
6. the failure detector for nonlinear optical crystal according to claim 1 is characterized in that: also be provided with the first completely reflecting mirror and the second completely reflecting mirror on the light path from described laser generator to the described laser the described convergent lens;
From the laser that described laser generator produces, reflex to the input end of described attenuator through described the first completely reflecting mirror;
From the laser that the output terminal of described attenuator penetrates, inject the input end of described optical gate;
From the laser that the output terminal of described optical gate penetrates, reflex to the input end of described convergent lens through described the second completely reflecting mirror;
Laser from the output terminal of described convergent lens penetrates converges on the described nonlinear optical crystal.
7. the failure detector for nonlinear optical crystal according to claim 6, it is characterized in that: on the light path the described optical gate, also be provided with spectroscope from described attenuator, the laser that described spectroscope is used for penetrating from the output terminal of described attenuator is divided into reflected light and transmitted light, described reflected light is injected described energy meter, and described transmitted light is injected the input end of described optical gate.
8. the failure detector for nonlinear optical crystal according to claim 6 is characterized in that:, also be provided with for the contracting bundle device of adjusting focal spot on the light path the described convergent lens from described the second completely reflecting mirror.
9. the failure detector for nonlinear optical crystal according to claim 6, it is characterized in that: also comprise a continuous wave laser that is used to indicate described the second completely reflecting mirror Output of laser direction, the laser direction of the described convergent lens of described the second completely reflecting mirror directive is identical with the direction that described continuous wave laser sends laser.
10. a method of detection that is used for nonlinear optical crystal is characterized in that, comprises the steps:
Step 1 places focus such as the output terminal of convergent lens as described in the arbitrary described failure detector for nonlinear optical crystal of claim 1 to 9 with nonlinear optical crystal to be detected a flaw;
Step 2 is adjusted described attenuator, and records the energy of the laser of directive described nonlinear optical crystal to be detected a flaw by described energy meter;
Step 3 is by the degree of impairment of the described nonlinear optical crystal of described microscopic examination under described Ear Mucosa Treated by He Ne Laser Irradiation.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997043684A1 (en) * | 1996-04-10 | 1997-11-20 | The Regents Of The University Of California | Minimizing radiation damage in nonlinear optical crystals |
| JPH11108794A (en) * | 1997-09-30 | 1999-04-23 | Nikon Corp | Laser durability measuring device |
| JP2001099753A (en) * | 1999-09-29 | 2001-04-13 | Nikon Corp | Method and device for evaluating optical element laser durability and exposing device |
| JP2001141651A (en) * | 1999-11-11 | 2001-05-25 | Mitsubishi Cable Ind Ltd | JUDGMENT METHOD FOR OPTICAL DAMAGE-RESISTANT PROPERTY OF MgO-DOPED LiNbO3 CRYSTAL AND ITS USE |
| CN102500923A (en) * | 2011-09-21 | 2012-06-20 | 长春理工大学 | Preparation device for preparing functional micro-nano materials on silicon surfaces based on femtosecond laser and method |
| CN102608019A (en) * | 2012-03-23 | 2012-07-25 | 中国矿业大学 | Device and method for measuring laser irradiation optical thin film damage threshold in high-temperature environment |
| CN102778426A (en) * | 2012-06-29 | 2012-11-14 | 西北核技术研究所 | Laser damage testing device for optical thin film |
-
2013
- 2013-05-09 CN CN201310169126.7A patent/CN103308442B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997043684A1 (en) * | 1996-04-10 | 1997-11-20 | The Regents Of The University Of California | Minimizing radiation damage in nonlinear optical crystals |
| JPH11108794A (en) * | 1997-09-30 | 1999-04-23 | Nikon Corp | Laser durability measuring device |
| JP2001099753A (en) * | 1999-09-29 | 2001-04-13 | Nikon Corp | Method and device for evaluating optical element laser durability and exposing device |
| JP2001141651A (en) * | 1999-11-11 | 2001-05-25 | Mitsubishi Cable Ind Ltd | JUDGMENT METHOD FOR OPTICAL DAMAGE-RESISTANT PROPERTY OF MgO-DOPED LiNbO3 CRYSTAL AND ITS USE |
| CN102500923A (en) * | 2011-09-21 | 2012-06-20 | 长春理工大学 | Preparation device for preparing functional micro-nano materials on silicon surfaces based on femtosecond laser and method |
| CN102608019A (en) * | 2012-03-23 | 2012-07-25 | 中国矿业大学 | Device and method for measuring laser irradiation optical thin film damage threshold in high-temperature environment |
| CN102778426A (en) * | 2012-06-29 | 2012-11-14 | 西北核技术研究所 | Laser damage testing device for optical thin film |
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