CN103308168B - Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering - Google Patents
Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering Download PDFInfo
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Abstract
The invention provides a spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering. A Fabry-Perot cavity scanning filter is added to a grating spectrometer optical path, the length of the cavity of the filter can be modulated, and the modulation range is half of the maximum wavelength of signal light to be detected; when the Fabry-Perot cavity scanning filter is in the initial cavity length, only part of spectral lines in the signal light are filtered out; the part of the spectral lines which are filtered out can be distinguished and acquired by a linear array detector; the length of the Fabry-Perot cavity is changed by using a driver and the other part of the spectral lines in the signal light are filtered out; the other part of the spectral lines which are filtered out can also be distinguished and acquired by the linear array detector; all parts of spectrums acquired under the condition of different cavity lengths are synthesized to achieve spectrum splicing of the wide spectrum range; and an enveloping surface obtained after the spectrum splicing is the detected spectrogram of the signal light. By means of the spectral resolution enhancement method, the spectrum resolution of a grating spectrometer can be effectively improved while the free spectrum range of the grating spectrometer is guaranteed.
Description
Technical field
The invention belongs to spectral measurement field, particularly a kind of mode based on Fabry-Perot-type cavity scan-filtering improves the method for grating spectrograph resolution.
Technical background
Spectral analysis technique is applied optics principle, to a special kind of skill that the structure and composition etc. of material are measured and analyzed, is widely used in the fields such as physics, chemistry, biology, medical science, uranology, geology, materialogy.Along with the development of research and production technology, spectrum detection technique is applied to the multiple occasions such as environmental monitoring, field detection, industrial on-line checkingi gradually.But conventional spectrometer is bulky, portability is poor, is not suitable for carrying with and promotes on a large scale, therefore need to carry out miniaturized design research to spectrometer.
Modal miniaturization scheme realizes by simply reducing it on the basis of conventional spectrometers optical texture, but the consequence done like this is the performance degradation causing them.Such as, the microminiaturization of grating spectrograph needs the focal length of collimator objective to shorten, and causes the serious broadening of slit image, have impact on spectral resolution greatly.In order to ensure higher spectral resolution while reducing spectrometer volume, the usual method increasing grating line density or reduce slit width that adopts realizes, and the consequence done like this is the Free Spectral Range and the capacity usage ratio that sacrifice spectrometer.Rowland circle optical system due to structure simple, throughput is high and be widely used in microgratings spectrometer, but its bending spectrum face makes its spectral resolution be difficult to further raising, although flat field spectrum face can be realized by the structure optimizing concave grating, high-precision concave grating be made very difficult.
The line width utilizing narrow band filter to reduce spectrum is also a kind of common method improving spectral resolution, such as, utilize fabry-perot filter to detect laser spectrum by the mode of scan-filtering.But similar to the dispersion characteristics of grating, Free Spectral Range and the line width of fabry-perot filter also restrict mutually, therefore, for obtaining high spectral resolution, its Free Spectral Range is often very narrow." a kind of design and analysis of novel MEMS (micro electro mechanical system) fabry-perot filter " (" Acta Optica ", 2012,32,8,0822005-1) propose a kind of novel miniature fabry-perot filter in a literary composition, this wave filter is integrated with one block of grating and carries out dispersion on the basis of Traditional Method Fabry-Perot filters, while the narrower spectrum width of guarantee, the Free Spectral Range of wave filter is expanded greatly.But this wave filter proposes for the application of wavelength-division multiplex in optical fiber communication, mainly solve the problem that Traditional Method Fabry-Perot filters Free Spectral Range is narrow, do not relate to detection and the collection of spectrum, the raising of more not mentioned spectral resolution.
Summary of the invention
The technical problem to be solved in the present invention is: for the problem of the resolution reduction that grating spectrograph miniaturization causes, a kind of spectrum simulation method based on Fabry-Perot-type cavity scan-filtering is proposed, the method is utilized only to need on the basis of grating spectrograph, add one piece of Fabry-Perot-type cavity scanning filter, the wavelength originally can not differentiated can be made to pass through spectral scan, differentiated in the time domain, solve the contradiction that grating spectrograph Free Spectral Range and spectral resolution restrict mutually, there is processing simple, with low cost, the advantages such as compatibility is good, all kinds of grating spectrographs can be widely used in, improve spectral resolution.
The technical solution adopted for the present invention to solve the technical problems is: a kind of spectrum simulation method based on Fabry-Perot-type cavity scan-filtering, it is characterized in that: in grating spectrograph light path, add a Fabry-Perot-type cavity scanning filter, the chamber of wave filter is long adjustable, and modulation range is treat side flashlight maximum wavelength 1/2; When Fabry-Perot-type cavity scanning filter be in initial cavity long time, only the part spectral line in flashlight is leached; This part spectral line be filtered off can be differentiated by linear array detector and gather; Utilize the chamber of driver change Fabry-Perot-type cavity long, the spectral line of another part in flashlight is leached; This part spectral line be filtered off also can be differentiated by linear array detector and gather; Long for the different cavity lower each several part spectrum gathered is synthesized, realizes the spectrum splicing of wide spectral range; The enveloping surface obtained after spectrum splicing is the spectrogram that flashlight is detected, and this spectrogram does not add the grating spectrograph of Fabry-Perot-type cavity scan-filtering relatively, and its resolution has obvious enhancing.
The flashlight angle of divergence in described grating spectrograph after collimation should ensure that flashlight does not occur interference fringe after being incident to Fabry-Perot-type cavity, and only modulates flashlight light intensity, ensures the filter function of Fabry-Perot-type cavity;
The chamber mirror area of described Fabry-Perot-type cavity is not less than the area of grating, to ensure the luminous flux of spectrometer;
The initial cavity length of described Fabry-Perot-type cavity should enable the spectral line be filtered off be differentiated by linear array detector.
Described Fabry-Perot-type cavity scanning filter can be added between collimator objective and grating, also can be added between grating and image-forming objective lens, as long as can realize the function of length scanning filtering;
Described grating can be separated with Fabry-Perot-type cavity and be positioned over light path, also can become one, and is conducive to the miniaturization of spectrometer;
The face, chamber of described Fabry-Perot-type cavity should for different operation wavelength deposit multilayer dielectric reflection films, and make face, chamber reflectivity be greater than 90%, cavity fineness is greater than 30, to ensure the filter effect of Fabry-Perot-type cavity, reduce detecting error;
Described Fabry-Perot-type cavity scanning filter can adopt Piezoelectric Ceramic or MEMS to drive, and type of drive can be that continuous sweep or single-point drive, to adapt under different condition the requirement driven;
The sampling number when light intensity of Same Wavelength becomes minimum from mxm. after the sample frequency of described linear array detector should make filtering is no less than 4 times, to ensure the precision of spectrographic detection.
The present invention compared with prior art tool has the following advantages:
(1) resolution of existing grating spectrograph is subject to the restriction of Rayleigh criterion, and in the process of miniaturization, the serious broadening of slit image, causes resolution to reduce.The present invention carries out filtering by addition method Fabry-Perot-type cavity in grating spectrograph light path, originally the two adjacent wave length can not differentiated are filtered off respectively, overcome the restriction of Rayleigh criterion to a certain extent, make grating spectrograph while the original Free Spectral Range of guarantee, resolution is effectively improved, solves the contradiction that grating spectrograph Free Spectral Range and spectral resolution restrict mutually to a certain extent.Meanwhile, by the scanning of driver to Fabry-Perot-type cavity list order of interference, make it can realize the scanning probe of wide spectral range under very little driving stroke.
(2) for conventional grating spectrometer, if the hot spot of adjacent wavelength is overlapping, and judge that this overlapping hot spot just in time can not be differentiated according to Rayleigh criterion, then think that adjacent wavelength difference is spectral resolution.Fig. 3 (a) is the width spectrum schematic diagram that computer simulation grating spectrograph detects.Wherein, dotted line is the spectral signature peak of necessary being in flashlight, and solid line represents the spectrogram arrived by spectrometer detection after these spectral signature peaks superpose mutually.Obviously, superposing later spectrogram becomes a wide ripple bag, and spectral signature peak can not be differentiated completely.Now, if after collimated light is incident to grating, movable Fabry-Perot chamber is utilized to carry out scan-filtering, then can part spectral line in filtering spectrogram, in Fig. 3 (b) and Fig. 3 (c), solid line is the spectrogram detected after the Fabry-Perot chamber filtering grown by different cavity on the basis of Fig. 3 (a) respectively.Obviously, the spectrogram now obtained, only containing Partial Feature peak relatively far apart in flashlight, eliminates adjacent feature peak in former spectrogram and mutually superposes and situation about can not differentiate, reflect the wavelength value corresponding to characteristic peak really.The filtered spectrogram in long for different cavity Fabry-Perot chamber is synthesized, total spectral information can be obtained, realize the enhancing of spectral resolution.The present invention to some extent solves the contradiction that grating spectrograph Free Spectral Range and spectral resolution restrict mutually, has simple, with low cost, the compatible advantage such as good of processing, can be widely used in all kinds of grating spectrographs, improve spectral resolution.
(3) the present invention is compared with existing grating spectrograph, when system dimension and Free Spectral Range identical, higher spectral resolution can be obtained, be specially adapted in grating spectrograph miniaturization process, to the compensation that resolution reduces, the combination property of microgratings spectrometer effectively can be promoted.
Accompanying drawing explanation
Fig. 1 is the structural representation utilizing Fabry-Perot-type cavity scanning filter to improve grating spectrograph resolution in the embodiment of the present invention 1;
In figure: 1 is flashlight input optical fibre, and 2 is slits, and 3 is collimator objectives, 4 is Fabry-Perot-type cavity scanning filters, and 5 is transmission gratings, and 6 is image-forming objective lens, and 7 is detectors;
Fig. 2 is the structural representation utilizing Fabry-Perot-type cavity scanning filter to improve grating spectrograph resolution in the embodiment of the present invention 2;
In figure: 1 is flashlight input optical fibre, and 2 is slits, and 3 is collimator objectives, 4 is Fabry-Perot-type cavity scanning filters, and 5 is transmission gratings, and 6 is image-forming objective lens, and 7 is detectors;
Fig. 3 is the principle schematic that the present invention realizes spectrum simulation;
Fig. 4 only has the flashlight spectrogram detected by detector during grating beam splitting in the embodiment of the present invention 1 Computer Simulation spectral detection system;
Fig. 5 be the embodiment of the present invention 1 Computer Simulation in grating spectrograph after addition method Fabry-Perot-type cavity scanning filter, when Fabry-Perot-type cavity scanning filter be in initial cavity long time, the partial spectrum figure detected by detector;
Fig. 6 be the embodiment of the present invention 1 Computer Simulation in grating spectrograph after addition method Fabry-Perot-type cavity scanning filter, when Fabry-Perot-type cavity scanning filter chamber is long change a certain size time, the partial spectrum figure detected by detector;
Fig. 7 is that each several part spectrogram of long for different Fabry-Perot-type cavity lower filtering, collection after addition method Fabry-Perot-type cavity scanning filter, is carried out synthesis splicing, obtains the spectrogram that flashlight is total by the embodiment of the present invention 1 Computer Simulation in grating spectrograph;
Fig. 8 only has the flashlight spectrogram detected by detector during grating beam splitting in the embodiment of the present invention 2 Computer Simulation spectral detection system;
Fig. 9 be the embodiment of the present invention 2 Computer Simulation in grating spectrograph after addition method Fabry-Perot-type cavity scanning filter, when Fabry-Perot-type cavity scanning filter be in initial cavity long time, the partial spectrum figure detected by detector;
Figure 10 be the embodiment of the present invention 2 Computer Simulation in grating spectrograph after addition method Fabry-Perot-type cavity scanning filter, when Fabry-Perot-type cavity scanning filter chamber is long change a certain size time, the partial spectrum figure detected by detector;
Figure 11 is that each several part spectrogram of long for different Fabry-Perot-type cavity lower filtering, collection after addition method Fabry-Perot-type cavity scanning filter, is carried out synthesis splicing, obtains the spectrogram that flashlight is total by the embodiment of the present invention 2 Computer Simulation in grating spectrograph.
Embodiment
The present invention is introduced in detail below in conjunction with the drawings and the specific embodiments.But following embodiment is only limitted to explain the present invention, and protection scope of the present invention should comprise the full content of claim, and namely can realize the full content of the claims in the present invention to the technician in field by following examples.
Embodiments of the invention 1 improve the method that Free Spectral Range is the grating spectrograph resolution of 800nm ~ 1000nm.As shown in Figure 1, grating spectrograph is made up of slit 2, collimator objective 3, transmission grating 5, image-forming objective lens 6 and detector 7.Measured signal light is 200 μm by core diameter, numerical aperture be 0.22 optical fiber 1 be directed into grating spectrograph, slit 2 width is 50 μm, after the focal length collimator objective 3 that is 75mm collimates, be incident to the cycle is 600l/mm, bore is on the transmission grating 5 of 20mm, the image-forming objective lens 6 that-1 order diffraction light is 75mm through focal length carries out focal imaging, is gathered on imaging surface by linear array detector 7 to spectrum.Fig. 4 is the spectrogram that this grating spectrograph of computer simulation detects, wherein dotted line is the spectral signature peak of necessary being in hypothesis flashlight, consider that computer digital animation is limited in one's ability, the wavelength coverage (also can choose the wavelength coverage of 800 ~ 810nm or 990nm ~ 1000nm) of 900 ~ 910nm is only chosen in calculating, wavelength interval is 1nm, and solid line represents the spectrogram that detector detects.Obviously, each characteristic peak of interval 1nm, less than 1nm, cannot be differentiated and come by the resolution of grating spectrograph.
Between the collimator objective 3 and transmission grating 5 of above-mentioned grating spectrograph, add a Fabry-Perot-type cavity scanning filter 4, first this wave filter carries out filtering to flashlight, and filtered flashlight carries out dispersion by transmission grating 5 again.The clear aperture of wave filter is 25.4mm, and initial cavity length is 300 μm, and the long modulation range in chamber is 500nm, and fineness is 30, utilizes piezoelectric ceramics to carry out turntable driving, and sweep frequency is 1Hz, and detector sample frequency is 200Hz, and being equivalent to sampling step length is 5nm.When Fabry-Perot-type cavity scanning filter is in long 300 μm of initial cavity, only the part spectral line in flashlight is leached, as shown in Figure 5, wherein dotted line is the spectral signature peak of necessary being in hypothesis flashlight, wavelength coverage is 900 ~ 910nm, and wavelength interval is 1nm, and solid line is the partial spectrum figure leached under initial cavity is long, obviously, this part spectral line be filtered off can be differentiated by linear array detector completely; Utilize the chamber of piezoelectric ceramic actuator change Fabry-Perot-type cavity long, then another part spectral line in flashlight is filtered off, and as shown in solid line in Fig. 6, this part spectral line be filtered off also can be differentiated by linear array detector; Continue to change Fabry-Perot-type cavity long, and the spectrum under the length of each chamber is gathered, until chamber is long be increased to 300.5 μm; After Fabry-Perot-type cavity scan-filtering terminates, long for the different cavity lower each several part spectrum gathered is synthesized, realizes the spectrum splicing of wide spectral range; The enveloping surface obtained after spectrum splicing is the spectrogram that flashlight is detected, as shown in Figure 7, obviously, spectral envelope face after synthesis can actual spectrum truly in reflected signal light, originally the spectrum can not differentiated is differentiated, under the prerequisite not changing Free Spectral Range, effectively improve the spectral resolution of grating spectrograph.
Embodiments of the invention 2 improve the method that Free Spectral Range is the grating spectrograph resolution of 380nm ~ 760nm.As shown in Figure 2, grating spectrograph is made up of slit 2, collimator objective 3, transmission grating 5, image-forming objective lens 6 and detector 7.Measured signal light is 100 μm by core diameter, numerical aperture be 0.22 optical fiber 1 be directed into grating spectrograph, slit 2 width is 25 μm, after the focal length collimator objective 3 that is 60mm collimates, be incident to the cycle is 600l/mm, bore is on the transmission grating 5 of 10mm, the image-forming objective lens 6 that-1 order diffraction light is 60mm through focal length carries out focal imaging, is gathered on imaging surface by linear array detector 7 to spectrum.Fig. 8 is the spectrogram that this grating spectrograph of computer simulation detects, wherein dotted line is the spectral signature peak of necessary being in hypothesis flashlight, consider that computer digital animation is limited in one's ability, the wavelength coverage (also can choose the wavelength coverage of 380 ~ 386nm or 754nm ~ 760nm) of 570 ~ 576nm is only chosen in calculating, wavelength interval is 0.5nm, and solid line represents the spectrogram that detector detects.Obviously, each characteristic peak of interval 0.5nm, less than 0.5nm, cannot be differentiated and come by the resolution of grating spectrograph.
A Fabry-Perot-type cavity scanning filter 4 is added between the transmission grating and focusing objective len of above-mentioned grating spectrograph, and transmission grating 5 and Fabry-Perot-type cavity scanning filter 4 are carried out integrated, utilize-1 order diffraction light of this wave filter to grating to carry out scan-filtering.The clear aperture of wave filter is 10mm, and initial cavity length is 120 μm, and the long modulation range in chamber is 380nm, and fineness is 60, utilizes MEMS to carry out single-point driving, and driving step-length is 4nm.When Fabry-Perot-type cavity scanning filter is in long 120 μm of initial cavity, only the part spectral line in flashlight is leached, as shown in Figure 9, wherein dotted line is the spectral signature peak of necessary being in hypothesis flashlight, wavelength coverage is 570 ~ 576nm, and wavelength interval is 0.5nm, and solid line is the partial spectrum figure leached under initial cavity is long, obviously, this part spectral line be filtered off can be differentiated by linear array detector completely; Utilize MEMS driver long with the chamber of the driving step-size change Fabry-Perot-type cavity of 4nm, then another part spectral line in flashlight is filtered off, and as shown in solid lines in figure 10, this part spectral line be filtered off also can be differentiated by linear array detector; Continue to change Fabry-Perot-type cavity long, and the spectrum under the length of each chamber is gathered, until chamber is long be increased to 120.38 μm; After Fabry-Perot-type cavity scan-filtering terminates, long for the different cavity lower each several part spectrum gathered is synthesized, realizes the spectrum splicing of wide spectral range; The enveloping surface obtained after spectrum splicing is the spectrogram that flashlight is detected, as shown in figure 11, obviously, the spectral envelope face after synthesis can actual spectrum truly in reflected signal light, originally the spectrum can not differentiated is differentiated, effectively improves the spectral resolution of grating spectrograph.
Non-elaborated part of the present invention belongs to techniques well known.
The above; be only part embodiment of the present invention, but protection scope of the present invention is not limited thereto, any those skilled in the art are in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.
Claims (8)
1. the spectrum simulation method based on Fabry-Perot-type cavity scan-filtering, it is characterized in that: in grating spectrograph light path, add a Fabry-Perot-type cavity scanning filter, the chamber of wave filter is long adjustable, and modulation range is treat side flashlight maximum wavelength 1/2; When Fabry-Perot-type cavity scanning filter be in initial cavity long time, only the part spectral line in flashlight is leached; This part spectral line be filtered off can be differentiated by linear array detector and gather; Utilize the chamber of driver change Fabry-Perot-type cavity long, the spectral line of another part in flashlight is leached; This part spectral line be filtered off also can be differentiated by linear array detector and gather; Long for the different cavity lower each several part spectrum gathered is synthesized, realizes the spectrum splicing of wide spectral range; The enveloping surface obtained after spectrum splicing is the spectrogram that flashlight is detected, and this spectrogram does not add the grating spectrograph of Fabry-Perot-type cavity scan-filtering relatively, and its resolution has obvious enhancing;
Under the flashlight angle of divergence in described grating spectrograph after collimation, ensure that flashlight does not occur interference fringe after being incident to Fabry-Perot-type cavity, and only flashlight light intensity is modulated, ensure the filter function of Fabry-Perot-type cavity.
2. a kind of spectrum simulation method based on Fabry-Perot-type cavity scan-filtering according to claim 1, is characterized in that: the chamber mirror area of described Fabry-Perot-type cavity is not less than the area of grating, to ensure the luminous flux of spectrometer.
3. a kind of spectrum simulation method based on Fabry-Perot-type cavity scan-filtering according to claim 1, is characterized in that: the initial cavity of described Fabry-Perot-type cavity is long enables the spectral line be filtered off be differentiated by linear array detector.
4. a kind of spectrum simulation method based on Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: described Fabry-Perot-type cavity scanning filter is added between collimator objective and grating, or be added between grating and image-forming objective lens, as long as the function of length scanning filtering can be realized.
5. a kind of spectrum simulation method based on Fabry-Perot-type cavity scan-filtering according to claim 1, is characterized in that: described grating is separated with Fabry-Perot-type cavity and is positioned over light path, or becomes one, is conducive to the miniaturization of spectrometer.
6. a kind of spectrum simulation method based on Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: the chamber of described Fabry-Perot-type cavity is in the face of different operation wavelength deposit multilayer dielectric reflection films, face, chamber reflectivity is made to be greater than 90%, cavity fineness is greater than 30, to ensure the filter effect of Fabry-Perot-type cavity, reduce detecting error.
7. a kind of spectrum simulation method based on Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: described Fabry-Perot-type cavity scanning filter adopts Piezoelectric Ceramic or MEMS to drive, type of drive for being that continuous sweep or single-point drive, to adapt under different condition the requirement driven.
8. a kind of spectrum simulation method based on Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: the sampling number when light intensity of Same Wavelength becomes minimum from mxm. after the sample frequency of described linear array detector makes filtering is no less than 4 times, to ensure the precision of spectrographic detection.
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| CN103822717B (en) * | 2014-02-19 | 2017-01-25 | 中国科学院光电研究院 | Method for enhancing broadband interference spectral resolution and spectrograph |
| CN104236713B (en) * | 2014-10-21 | 2017-10-27 | 中国科学院光电研究院 | A kind of Fabry Perot interference spectrum imagers |
| CN105333815B (en) * | 2015-11-05 | 2018-04-10 | 北京交通大学 | A kind of super online interferometer measuration system of lateral resolution surface three dimension based on the scanning of spectrum colour loose wire |
| CN105823558A (en) * | 2016-04-27 | 2016-08-03 | 西安应用光学研究所 | Gap-variable Fabry-Perot interference type long-wave infrared dual mode spectral imaging system |
| CN106017685A (en) * | 2016-05-13 | 2016-10-12 | 中国海洋大学 | Sweep-frequency spectrum measurement method based on virtual image phase array |
| CN107941339A (en) * | 2017-12-19 | 2018-04-20 | 湖南宏动光电有限公司 | Hyperspectral imaging devices and method based on periodicity interference membrane system FP chamber scannings |
| CN109186644B (en) * | 2018-08-29 | 2021-07-09 | 北京航天控制仪器研究所 | Spectrum splicing optical frequency domain reflection type distributed optical fiber sensor and signal demodulation method |
| CN111256822A (en) * | 2020-02-17 | 2020-06-09 | 北京华泰诺安技术有限公司 | Spectrum appearance |
| CN111289107B (en) * | 2020-03-31 | 2022-03-11 | 北京科益虹源光电技术有限公司 | Laser spectrum on-line measuring device and method |
| CN111999036A (en) * | 2020-08-10 | 2020-11-27 | 中国科学院光电技术研究所 | Method for calibrating tuning position of F-P filter by using acousto-optic modulator |
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| CN1442677A (en) * | 2003-04-09 | 2003-09-17 | 重庆大学 | Micro integration method-amber cavity array optical spectrum detector |
| CN103162828A (en) * | 2013-02-26 | 2013-06-19 | 浙江大学 | Ultrahigh resolution spectrograph based on tunable Fabry-Perot filter and array detector spectrograph |
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| CN1442677A (en) * | 2003-04-09 | 2003-09-17 | 重庆大学 | Micro integration method-amber cavity array optical spectrum detector |
| CN103162828A (en) * | 2013-02-26 | 2013-06-19 | 浙江大学 | Ultrahigh resolution spectrograph based on tunable Fabry-Perot filter and array detector spectrograph |
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