CN111256822A - Spectrum appearance - Google Patents

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Publication number
CN111256822A
CN111256822A CN202010097611.8A CN202010097611A CN111256822A CN 111256822 A CN111256822 A CN 111256822A CN 202010097611 A CN202010097611 A CN 202010097611A CN 111256822 A CN111256822 A CN 111256822A
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CN
China
Prior art keywords
spectrometer
light
light splitting
different wavelengths
light beams
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Pending
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CN202010097611.8A
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Chinese (zh)
Inventor
熊胜军
袁丁
吴红彦
夏征
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Ht Nova Co ltd
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Ht Nova Co ltd
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Priority to CN202010097611.8A priority Critical patent/CN111256822A/en
Publication of CN111256822A publication Critical patent/CN111256822A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The invention discloses a spectrometer, which comprises a light splitting unit, a light receiving unit and a light emitting unit, wherein the light splitting unit is used for emitting received parallel light beams at different wavelengths to form a plurality of light beams with different wavelengths; the imaging system is used for receiving the light beams with different wavelengths and converging and imaging the light beams with different wavelengths to form an optical signal; the light splitting unit is provided with an interference distance and adjusts the wavelength of the parallel light beams by using the interference distance so as to form a plurality of light beams with different wavelengths; by the structure in the light splitting unit, the spectral resolution and the spectral range can be simultaneously considered, and the defects of a micro spectrometer are overcome, so that the micro spectrometer has high spectral resolution and wide spectral range.

Description

Spectrum appearance
Technical Field
The invention relates to the technical field of optical imaging, in particular to a spectrometer.
Background
The spectral resolution and the spectral range formed by a spectrometer based on prism or grating light splitting are mutually restricted, and when the spectral resolution is higher, the spectral range formed by the same detector is narrower. At present, a high spectral resolution and a wide spectral range can be simultaneously realized by using a high-dispersion-power light splitting device, a long optical system focal length and a large-size photoelectric detector, but the size of a spectrometer is increased, and the miniaturization of the spectrometer cannot be realized. In the case of a micro spectrometer system, although the structure size is small, high spectral resolution and wide spectral range cannot be achieved at the same time.
In a spectrometer system, a tunable Fabry-perot (hereinafter referred to as F-P) interferometer is often used to acquire spectral information of a target scene, and the F-P interferometer has a very high spectral resolution and a very small free spectral range (i.e., a maximum wavelength range in which various colors of light interfere greatly and no order overlapping occurs, and is usually used to represent an effective spectral range of the F-P interferometer), but the spectral resolution and the spectral range cannot be considered at the same time. Spectrometer systems with F-P interferometers are commonly used for high resolution spectral analysis over narrow spectral ranges, e.g. for fine spectral characterization in lasers over narrow spectral ranges with a conventional F-P interferometer resolution of 1x10-5cm-1To 1x10-3cm-1Free spectral range of 0.01-0.1cm-1(ii) a The resolution of the near infrared F-P interferometer based on Micro Electro Mechanical System (MEMS) technology is about 40-100cm-1Free spectral range of about 1X10-3cm-1. Therefore, in a micro spectrometer system, how to simultaneously achieve high spectral resolution and a wide spectral range is an urgent problem to be solved.
Disclosure of Invention
In order to solve the above problems in the prior art, a spectrometer is proposed that can simultaneously achieve high spectral resolution and a wide spectral range.
According to an aspect of the invention, there is provided a spectrometer comprising:
the light splitting unit is used for emitting the received parallel light beams with different wavelengths to form a plurality of light beams with different wavelengths;
the imaging system is used for receiving the light beams with different wavelengths and converging and imaging the light beams with different wavelengths to form an optical signal;
the light splitting unit is provided with an interference distance, and the light splitting unit adjusts the wavelength of the parallel light beams by using the interference distance to form a plurality of light beams with different wavelengths.
The light splitting unit comprises a first light splitting piece and a second light splitting piece;
the first light splitting member includes a first face, the second light splitting member includes a second face, the first face and the second face are arranged in parallel, and the interference distance is formed between the first face and the second face.
The position of the first light splitting part is adjustable, and the interference distance is adjusted by adjusting the position of the first light splitting part;
the first light splitting part and the second light splitting part are sequentially arranged along the light beam transmission direction.
The first light splitting component is a prism group or a parallel glass plate group.
The second beam splitter is a prism group or a diffraction grating group.
Wherein the spectrometer further comprises:
an incident unit for receiving an incident light source;
and the collimation system is used for collimating the incident light source to form the parallel light beam.
Wherein the collimating system is a lens.
Wherein, the incidence unit is an incidence slit or an incidence pinhole.
The spectrometer further comprises a detection unit for converting the optical signal into an electrical signal.
The detection unit is a linear array detector or an area array detector.
The spectrometer of the invention can realize the following beneficial effects: by the structure in the light splitting unit, the spectral resolution and the spectral range can be simultaneously considered, and the defects of a micro spectrometer are overcome, so that the micro spectrometer has high spectral resolution and wide spectral range.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention. In the drawings, like reference numerals are used to indicate like elements. The drawings in the following description are directed to some, but not all embodiments of the invention. For a person skilled in the art, other figures can be derived from these figures without inventive effort.
FIG. 1 is a schematic diagram of the overall structure of a spectrometer as presented in an exemplary embodiment of the present application;
FIG. 2 is a schematic diagram of the overall structure of a spectrometer as presented in another exemplary embodiment of the present application;
FIG. 3 is a schematic diagram of the overall structure of a spectrometer as presented in another exemplary embodiment of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. It should be noted that the embodiments and features of the embodiments in the present application may be arbitrarily combined with each other without conflict.
The application provides a spectrometer for solving the problem that high spectral resolution and wide spectral range cannot be achieved simultaneously. The spectrometer comprises a light splitting unit, and the light splitting unit is used for emitting the received parallel light beams with different wavelengths to form a plurality of light beams with different wavelengths. And the imaging system is used for receiving the light beams with different wavelengths and converging and imaging the light beams with different wavelengths to form an optical signal. The light splitting unit has an interference distance, and the wavelength of the parallel light beams is adjusted by the light splitting unit by using the interference distance to form a plurality of light beams with different wavelengths. The spectrometer provided by the application is simple in structure, and high spectral resolution and wide spectral range are achieved through the light splitting unit under a tiny size.
The spectrometer is described in detail below with reference to the accompanying drawings.
As shown in fig. 1, in an exemplary embodiment of the present application, a spectrometer includes a light splitting unit 1 for emitting parallel light beams received at different wavelengths to form a plurality of light beams with different wavelengths. The imaging system 2 is configured to receive a plurality of light beams with different wavelengths, and converge and image the light beams with different wavelengths to form an optical signal, where the imaging system 2 is a lens group, for example, the imaging system 2 may be a classical four-group six-lens double-gauss lens group, the imaging system 2 is configured to receive the light beam dispersed and filtered by the light splitting unit 1, and converge the light beam to an imaging surface, and since the light incidence angles of the different wavelengths are different, the converted light beam is imaged at different positions on the image surface after being converted by the imaging system 2, but the above-mentioned specific limitations on the structure of the imaging system 2 are only an exemplary description, and do not limit the present application, as long as the imaging function can be implemented. In this embodiment, however, the spectroscopic unit 1 and the imaging system 2 are disposed in this order in the light beam transmission direction. The light splitting unit 1 has an interference distance d, and the light splitting unit 1 adjusts the wavelength of the parallel light beams by using the interference distance d to form a plurality of light beams with different wavelengths, so that the maximum value of wavelength interference and tuning of a free spectral range are realized.
As shown in fig. 1, in this embodiment, the light splitting unit 1 includes a first light splitting member 11 and a second light splitting member 12, the first light splitting member 11 includes a first surface, the second light splitting member 12 includes a second surface, the first surface and the second surface are relatively parallel and adjacently disposed, and an interference distance d is formed between the first surface and the second surface. The position of the first beam splitter 11 is adjustable, and the interference distance d is adjusted by adjusting the position of the first beam splitter 11, and the first beam splitter 11 and the second beam splitter 12 are sequentially arranged along the light beam transmission direction.
As shown in fig. 1, in this embodiment, the first beam splitter 11 may be a prism set, and the second beam splitter 12 is also a prism set. The first beam splitter 11 is a moving prism group, the second beam splitter 12 is a fixed prism group, a first surface of the moving prism group is adjacent to and parallel to a second surface of the fixed prism group, and a certain distance is formed between the first surface and the second surface, which is an interference distance d, the first surface of the moving prism group and the second surface of the fixed prism group are both plated with a high-reflection reflective film, an optical resonant cavity, i.e., an F-P interference cavity, is formed between the first surface plated with the reflective film and the second surface plated with the reflective film, and parallel light beams are converted by the F-P interference cavity to form a plurality of light beams with different wavelengths. Meanwhile, in order to obtain different spectral resolutions and spectral ranges, on the premise that the first surface and the second surface are kept parallel, the movable prism group is moved along the direction indicated by an arrow in fig. 1 to adjust the interference distance d of the F-P interference cavity, so that the maximum value of wavelength interference and the range of a free spectrum are tuned, the spectrum projected by the F-P interference cavity is an equal-frequency interval spectral frequency comb taking the range of the free spectrum as a period, and after the spectrum is subjected to spatial dispersion by the movable prism group and the fixed prism group, spectral components with different wavelengths of the spectral frequency comb are emitted at different angles, and are mapped onto the imaging system 2 and converged into an optical signal.
In this embodiment, the free spectral range FSR satisfies the following formula:
FSR=1/2d
wherein d is an interference distance;
the spectral resolution of the F-P interferometer is:
Resolution=FSR/F
wherein F is fineness;
for example, to obtain 160cm-1The interferometer distance d is 1/2 FSR 31.25 μm;
for example, if the integrated fineness F of F-P is better than 20, the spectral Resolution of the F-P interferometer is better than Resolution (FSR/F) 160cm-1/20=8cm-1
As shown in fig. 1, in this embodiment, the interference distance d is adjusted by slightly shifting the first beam splitting element 11 (moving prism group), so as to realize tunable filtering of the spectrum splitting unit 1, and complete scanning of a spectrum can be completed by performing equal-frequency-interval spectrum scanning acquisition more than or equal to 20 times for the spectrometer system, and when the scanning frequency is set to 20 times, the spectrum scanning time is set to be between spectrum scanningAt an interval of 8cm-1
In another exemplary embodiment of the present application, as shown in fig. 2, the first light splitting element 11 may be a parallel glass plate set, the second light splitting element 12 is a fixed prism set, a first surface of the parallel glass plate set is disposed adjacent to and parallel to a second surface of the fixed prism set, and a certain distance is provided between the first surface and the second surface, which is an interference distance d, and the first surface of the parallel glass plate set and the second surface of the fixed prism set are both coated with a reflective film having high reflectivity, and an optical resonant cavity, i.e., an F-P interference cavity, is formed between the first surface coated with the reflective film and the second surface coated with the reflective film, and parallel light beams are converted by the F-P interference cavity to form a plurality of light beams with different wavelengths. Meanwhile, in order to obtain different spectral resolutions and spectral ranges, on the premise that the first surface and the second surface are kept parallel, the parallel glass plate group is moved along the direction indicated by the arrow in fig. 2 to adjust the interference distance d of the F-P interference cavity, so that the maximum value of wavelength interference and the range of a free spectrum are tuned, the spectrum projected by the F-P interference cavity is an equal-frequency interval spectrum frequency comb taking the free spectrum range as a period, and after the spectrum is subjected to spatial dispersion by the parallel glass plate group and the fixed prism group, spectral components with different wavelengths of the spectrum frequency comb are emitted at different angles, and are mapped onto the imaging system 2 and converged into an optical signal.
As shown in fig. 3, in another exemplary embodiment of the present application, the first beam splitter 11 is a moving prism set, and the second beam splitter is a diffraction grating set, and the combination principle of the moving prism set and the diffraction grating set is consistent with the combination principle of the moving prism set and the fixed prism set, which is not described herein again.
As shown in fig. 1-3, in this embodiment the spectrometer further comprises an entrance cell 3 for receiving an incident light source. The incidence unit 3 may be an incidence slit, or the incidence unit 3 may also be an incidence pinhole, and as shown in the light beam transmission direction, the incidence unit 3 is located before the light splitting unit 1 and serves as an incidence spatial filter of the spectrometer. The spectrometer further comprises a collimation system 4 for collimating the incident light source into a parallel light beam. The collimating system 4 is a lens, and the collimating function of the incident light source can be realized by selecting the lens, for example, the collimating system 4 can be two groups of double-cemented achromatic lenses, and the collimating system 4 is arranged between the incident unit 3 and the light splitting unit 1 along the light beam transmission direction.
As shown in fig. 1-3, in this embodiment the spectrometer further comprises a detection unit 5 for converting the optical signal into an electrical signal, the detection unit 5 being arranged after the imaging system 2, i.e. at the end of the spectrometer, in the direction of transmission of the light beam. In order to ensure the response spectrum range and cover the designed waveband range of the spectrometer, the detection unit 5 may be a linear array detector or an area array detector, specifically, for example, the detection unit 5 may be a CCD, cmos, InGaAs array or photodiode array, and the specific limitation of the detection unit 5 is only an exemplary description, and does not limit the present application, as long as the conversion of the optical signal can be achieved.
The above-described aspects may be implemented individually or in various combinations, and such variations are within the scope of the present invention.
It is to be noted that, in this document, the terms "comprises", "comprising" or any other variation thereof are intended to cover a non-exclusive inclusion, so that an article or apparatus including a series of elements includes not only those elements but also other elements not explicitly listed or inherent to such article or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of additional like elements in the article or device comprising the element.
The above embodiments are merely to illustrate the technical solutions of the present invention and not to limit the present invention, and the present invention has been described in detail with reference to the preferred embodiments. It will be understood by those skilled in the art that various modifications and equivalent arrangements may be made without departing from the spirit and scope of the present invention and it should be understood that the present invention is to be covered by the appended claims.

Claims (10)

1. A spectrometer, the spectrometer comprising:
the light splitting unit is used for emitting the received parallel light beams with different wavelengths to form a plurality of light beams with different wavelengths;
the imaging system is used for receiving the light beams with different wavelengths and converging and imaging the light beams with different wavelengths to form an optical signal;
the light splitting unit is provided with an interference distance, and the light splitting unit adjusts the wavelength of the parallel light beams by using the interference distance to form a plurality of light beams with different wavelengths.
2. The spectrometer of claim 1, wherein the light splitting cell comprises a first light splitting element and a second light splitting element;
the first light splitting member includes a first face, the second light splitting member includes a second face, the first face and the second face are arranged in parallel, and the interference distance is formed between the first face and the second face.
3. The spectrometer of claim 2, wherein the first beam splitter is adjustable in position, the interference distance being adjusted by adjusting the position of the first beam splitter;
the first light splitting part and the second light splitting part are sequentially arranged along the light beam transmission direction.
4. The spectrometer of claim 2, wherein the first beam splitting element is a set of prisms or a set of parallel glass plates.
5. The spectrometer of claim 2, wherein the second beam splitting element is a prism assembly or a diffraction grating assembly.
6. The spectrometer of claim 1, wherein the spectrometer further comprises:
an incident unit for receiving an incident light source;
and the collimation system is used for collimating the incident light source to form the parallel light beam.
7. The spectrometer of claim 6, wherein the collimating system is a lens.
8. The spectrometer of claim 6, wherein the entrance cell is an entrance slit or an entrance pinhole.
9. The spectrometer of claim 1, further comprising a detection unit for converting the optical signal into an electrical signal.
10. The spectrometer of claim 9, wherein the detection unit is a line array detector or an area array detector.
CN202010097611.8A 2020-02-17 2020-02-17 Spectrum appearance Pending CN111256822A (en)

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