CN103308168A - Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering - Google Patents
Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering Download PDFInfo
- Publication number
- CN103308168A CN103308168A CN2013102685418A CN201310268541A CN103308168A CN 103308168 A CN103308168 A CN 103308168A CN 2013102685418 A CN2013102685418 A CN 2013102685418A CN 201310268541 A CN201310268541 A CN 201310268541A CN 103308168 A CN103308168 A CN 103308168A
- Authority
- CN
- China
- Prior art keywords
- fabry
- perot
- type cavity
- spectral
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention provides a spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering. A Fabry-Perot cavity scanning filter is added to a grating spectrometer optical path, the length of the cavity of the filter can be modulated, and the modulation range is half of the maximum wavelength of signal light to be detected; when the Fabry-Perot cavity scanning filter is in the initial cavity length, only part of spectral lines in the signal light are filtered out; the part of the spectral lines which are filtered out can be distinguished and acquired by a linear array detector; the length of the Fabry-Perot cavity is changed by using a driver and the other part of the spectral lines in the signal light are filtered out; the other part of the spectral lines which are filtered out can also be distinguished and acquired by the linear array detector; all parts of spectrums acquired under the condition of different cavity lengths are synthesized to achieve spectrum splicing of the wide spectrum range; and an enveloping surface obtained after the spectrum splicing is the detected spectrogram of the signal light. By means of the spectral resolution enhancement method, the spectrum resolution of a grating spectrometer can be effectively improved while the free spectrum range of the grating spectrometer is guaranteed.
Description
Technical field
The invention belongs to the spectral measurement field, particularly a kind of mode based on the Fabry-Perot-type cavity scan-filtering improves the method for grating spectrograph resolution.
Technical background
Spectral analysis technique is the applied optics principle, and structure and a special kind of skill that becomes to grade and measure and analyze to material are widely used in the fields such as physics, chemistry, biology, medical science, uranology, geology, materialogy.Along with the development of research and production technology, spectrum detection technique is applied to the multiple occasions such as environmental monitoring, field detection, the online detection of industry gradually.Yet the routine spectra instrument is bulky, and is portable poor, is not suitable for carrying and promotes on a large scale, therefore need to carry out miniaturized design research to spectrometer.
Modal miniaturization scheme is by on the basis of conventional spectrometers optical texture it simply being dwindled to realize, but the consequence of doing like this is the performance degradation that causes them.For example, the microminiaturization of grating spectrograph need to be shortened the focal length of collimator objective, causes the serious broadening of slit image, has affected greatly spectral resolution.In order to guarantee higher spectral resolution when reducing the spectrometer volume, the common method that increases grating line density or reduce slit width that adopts realizes, and the consequence of doing like this is Free Spectral Range and the capacity usage ratio of having sacrificed spectrometer.The Rowland circle optical system is because simple in structure, throughput is high and be widely used in the microgratings spectrometer, yet its crooked spectrum face makes its spectral resolution be difficult to further raising, although can realize flat field spectrum face by the structure of optimizing concave grating, make high-precision concave grating very difficult.
The line width that utilizes narrow band filter to reduce spectrum also is a kind of common method that improves spectral resolution, for example utilizes fabry-perot filter to survey laser spectrum by the mode of scan-filtering.Yet similar to the dispersion characteristics of grating, the Free Spectral Range of fabry-perot filter and line width be mutually restriction also, and therefore, for obtaining high spectral resolution, its Free Spectral Range is often very narrow." a kind of design and analysis of novel MEMS (micro electro mechanical system) fabry-perot filter " (" Acta Optica ", 2012,32,8,0822005-1) a kind of novel miniature fabry-perot filter has been proposed in the literary composition, this wave filter integrated grating on the basis of traditional fabry-perot filter carries out dispersion, when guaranteeing narrower spectrum width, the Free Spectral Range of wave filter is expanded greatly.Yet this wave filter proposes for the application of wavelength-division multiplex in the optical fiber communication, has mainly solved the narrow problem of traditional fabry-perot filter Free Spectral Range, does not relate to detection and the collection of spectrum, the raising of more not mentioned spectral resolution.
Summary of the invention
The technical problem to be solved in the present invention is: the problem of the decrease resolution that miniaturization causes for grating spectrograph, a kind of spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering is proposed, utilize the method only need to add a Fabry-Perot-type cavity scanning filter on the basis of grating spectrograph, can make the wavelength that originally can not differentiate by spectral scan, in time domain, differentiated, solved the contradiction that grating spectrograph Free Spectral Range and spectral resolution restrict mutually, has processing simple, with low cost, the advantages such as compatibility is good, can be widely used in all kinds of grating spectrographs, improve spectral resolution.
The technical solution adopted for the present invention to solve the technical problems is: a kind of spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering, it is characterized in that: in the grating spectrograph light path, add a Fabry-Perot-type cavity scanning filter, the chamber of wave filter is long adjustable, and modulation range is to treat 1/2 of side flashlight maximum wavelength; When the Fabry-Perot-type cavity scanning filter is in initial cavity length, only the part spectral line in the flashlight is leached; This part spectral line that is filtered off can be differentiated and gather by linear array detector; Utilize driver to change the chamber of Fabry-Perot-type cavity long, the spectral line of another part in the flashlight is leached; This part spectral line that is filtered off also can be differentiated and gather by linear array detector; The long lower each several part spectrum that gathers of different cavity is synthesized, realize the spectrum splicing of wide spectral range; The enveloping surface that obtains after the spectrum splicing is the spectrogram that flashlight is detected, and this spectrogram does not add the grating spectrograph of Fabry-Perot-type cavity scan-filtering relatively, and its resolution has obvious enhancing.
The flashlight angle of divergence in the described grating spectrograph behind collimation should guarantee interference fringe not occur after flashlight is incident to Fabry-Perot-type cavity, and only the flashlight light intensity is modulated, and guarantees the filter function of Fabry-Perot-type cavity;
The chamber mirror area of described Fabry-Perot-type cavity is not less than the area of grating, to guarantee the luminous flux of spectrometer;
The initial cavity length of described Fabry-Perot-type cavity should make the spectral line that is filtered off be differentiated by linear array detector.
Described Fabry-Perot-type cavity scanning filter can be added between collimator objective and the grating, also can be added between grating and the image-forming objective lens, as long as can realize the function of length scanning filtering;
Described grating can separate with Fabry-Perot-type cavity and is positioned over light path, also can become one, and is conducive to the miniaturization of spectrometer;
The chamber face of described Fabry-Perot-type cavity should make chamber face reflectivity greater than 90% for different operation wavelength deposit multilayer dielectric reflection films, and the cavity fineness to guarantee the filter effect of Fabry-Perot-type cavity, reduces detecting error greater than 30;
Described Fabry-Perot-type cavity scanning filter can adopt Piezoelectric Ceramic or MEMS to drive, and type of drive can be that continuous sweep or single-point drive, to adapt to the requirement to driving under the different condition;
The sample frequency of described linear array detector should make the sampling number the when light intensity of Same Wavelength becomes minimum from mxm. after the filtering be no less than 4 times, to guarantee the precision of spectrographic detection.
The present invention compared with prior art has following advantage:
(1) resolution of existing grating spectrograph is subject to the restriction of Rayleigh criterion, and in the process of miniaturization, the serious broadening of slit image causes decrease resolution.The present invention carries out filtering by addition method Fabry-Perot-type cavity in the grating spectrograph light path, the two adjacent wave length that originally can not differentiate is filtered off respectively, overcome to a certain extent the restriction of Rayleigh criterion, make grating spectrograph when guaranteeing original Free Spectral Range, resolution is effectively improved, solved to a certain extent the contradiction that grating spectrograph Free Spectral Range and spectral resolution restrict mutually.Simultaneously, by the scanning of driver to Fabry-Perot-type cavity list order of interference, make it under very little driving stroke, can realize the scanning probe of wide spectral range.
(2) for the traditional raster spectrometer, if the hot spot of adjacent wavelength is overlapping, and judge that according to Rayleigh criterion this overlapping hot spot just in time can not differentiate, think that then adjacent wavelength difference is spectral resolution.Fig. 3 (a) is the width of cloth spectrum schematic diagram that the computer simulation grating spectrograph detects.Wherein, dotted line is the spectral signature peak of necessary being in the flashlight, and solid line represents the spectrogram that detected by spectrometer after this several spectral signatures peak superposes mutually.Obviously, the later spectrogram that superposes becomes a wide ripple bag, and the spectral signature peak can not be differentiated fully.At this moment, if after collimated light is incident to grating, utilize movable Fabry-Perot chamber to carry out scan-filtering, but solid line is respectively the spectrogram that is detected after the long Fabry-Perot chamber filtering by different cavity on the basis of Fig. 3 (a) in the part spectral line in the filtering spectrogram then, Fig. 3 (b) and Fig. 3 (c).Obviously, this moment, the spectrogram that obtains only contained in the flashlight Partial Feature peak relatively far apart, had eliminated that adjacent feature peak in the former spectrogram superposes mutually and situation about can not differentiate reflects the corresponding wavelength value of characteristic peak really.The filtered spectrogram in the long Fabry-Perot of different cavity chamber is synthesized, can obtain total spectral information, realize the enhancing of spectral resolution.The present invention has solved the contradiction that grating spectrograph Free Spectral Range and spectral resolution restrict mutually to a certain extent, has simple, with low cost, the compatible advantage such as good of processing, can be widely used in all kinds of grating spectrographs, improves spectral resolution.
(3) the present invention compares with existing grating spectrograph, in the situation that system dimension and Free Spectral Range are identical, can obtain higher spectral resolution, be specially adapted in the grating spectrograph miniaturization process, to the compensation of decrease resolution, can effectively promote the combination property of microgratings spectrometer.
Description of drawings
Fig. 1 utilizes the Fabry-Perot-type cavity scanning filter to improve the structural representation of grating spectrograph resolution in the embodiment of the invention 1;
Among the figure: the 1st, flashlight input optical fibre, the 2nd, slit, the 3rd, collimator objective, the 4th, Fabry-Perot-type cavity scanning filter, the 5th, transmission grating, the 6th, image-forming objective lens, the 7th, detector;
Fig. 2 utilizes the Fabry-Perot-type cavity scanning filter to improve the structural representation of grating spectrograph resolution in the embodiment of the invention 2;
Among the figure: the 1st, flashlight input optical fibre, the 2nd, slit, the 3rd, collimator objective, the 4th, Fabry-Perot-type cavity scanning filter, the 5th, transmission grating, the 6th, image-forming objective lens, the 7th, detector;
Fig. 3 is that the present invention realizes the principle schematic that spectral resolution strengthens;
Fig. 4 is the flashlight spectrogram that is detected by detector when only grating beam splitting being arranged in the embodiment of the invention 1 Computer Simulation spectral detection system;
Fig. 5 be the embodiment of the invention 1 Computer Simulation in grating spectrograph behind the addition method Fabry-Perot-type cavity scanning filter, when the Fabry-Perot-type cavity scanning filter is in initial cavity when long, the part spectrogram that is detected by detector;
Fig. 6 be the embodiment of the invention 1 Computer Simulation in grating spectrograph behind the addition method Fabry-Perot-type cavity scanning filter, when Fabry-Perot-type cavity scanning filter chamber is long when changing a certain size, the part spectrogram that is detected by detector;
Fig. 7 is that the embodiment of the invention 1 Computer Simulation behind the addition method Fabry-Perot-type cavity scanning filter, grows the each several part spectrogram of filtering, collection to synthesize splicing different Fabry-Perot-type cavities in grating spectrograph, obtains the total spectrogram of flashlight;
Fig. 8 is the flashlight spectrogram that is detected by detector when only grating beam splitting being arranged in the embodiment of the invention 2 Computer Simulation spectral detection systems;
Fig. 9 be the embodiment of the invention 2 Computer Simulations in grating spectrograph behind the addition method Fabry-Perot-type cavity scanning filter, when the Fabry-Perot-type cavity scanning filter is in initial cavity when long, the part spectrogram that is detected by detector;
Figure 10 be the embodiment of the invention 2 Computer Simulations in grating spectrograph behind the addition method Fabry-Perot-type cavity scanning filter, when Fabry-Perot-type cavity scanning filter chamber is long when changing a certain size, the part spectrogram that is detected by detector;
Figure 11 is that the embodiment of the invention 2 Computer Simulations behind the addition method Fabry-Perot-type cavity scanning filter, grow the each several part spectrogram of filtering, collection to synthesize splicing different Fabry-Perot-type cavities in grating spectrograph, obtains the total spectrogram of flashlight.
Embodiment
Introduce in detail the present invention below in conjunction with the drawings and the specific embodiments.But following embodiment only limits to explain the present invention, and protection scope of the present invention should comprise the full content of claim, and namely can realize the full content of claim of the present invention to the technician in field by following examples.
Embodiments of the invention 1 are that the raising Free Spectral Range is the method for the grating spectrograph resolution of 800nm～1000nm.As shown in Figure 1, grating spectrograph is comprised of slit 2, collimator objective 3, transmission grating 5, image-forming objective lens 6 and detector 7.Measured signal light is 200 μ m by core diameter, numerical aperture is that 0.22 optical fiber 1 is directed into grating spectrograph, slit 2 width are 50 μ m, be that to be incident to the cycle after collimator objective 3 collimation of 75mm be 600l/mm through focal length, bore is on the transmission grating 5 of 20mm,-1 order diffraction light is that the image-forming objective lens 6 of 75mm carries out focal imaging through focal length, spectrum is gathered on imaging surface by linear array detector 7.Fig. 4 is the spectrogram that this grating spectrograph of computer simulation detects, wherein dotted line is the spectral signature peak of necessary being in the hypothesis flashlight, consider that the computer data processing power is limited, only choose the wavelength coverage (also can choose the wavelength coverage of 800～810nm or 990nm～1000nm) of 900～910nm in the calculating, the wavelength interval is 1nm, and solid line represents the spectrogram that detector detects.Obviously, the resolution of grating spectrograph can't be differentiated each characteristic peak of interval 1nm and come less than 1nm.
Add a Fabry-Perot-type cavity scanning filter 4 between the collimator objective 3 of above-mentioned grating spectrograph and transmission grating 5, this wave filter at first carries out filtering to flashlight, and filtered flashlight carries out dispersion by transmission grating 5 again.The clear aperture of wave filter is 25.4mm, and initial cavity length is 300 μ m, and the long modulation range in chamber is 500nm, and fineness is 30, utilizes piezoelectric ceramics to carry out turntable driving, and sweep frequency is 1Hz, and the detector sample frequency is 200Hz, and being equivalent to sampling step length is 5nm.When the Fabry-Perot-type cavity scanning filter is in the long 300 μ m of initial cavity, only the part spectral line in the flashlight is leached, as shown in Figure 5, wherein dotted line is the spectral signature peak of necessary being in the hypothesis flashlight, wavelength coverage is 900～910nm, and the wavelength interval is 1nm, the part spectrogram of solid line for leaching under initial cavity is long, obviously, this part spectral line that is filtered off can be differentiated by linear array detector fully; Utilize the chamber of piezoelectric ceramic actuator change Fabry-Perot-type cavity long, then another part spectral line in the flashlight is filtered off, and shown in solid line among Fig. 6, this part spectral line that is filtered off also can be differentiated by linear array detector; Continue to change Fabry-Perot-type cavity long, and the spectrum under each chamber length is gathered, until chamber length increases to 300.5 μ m; After the Fabry-Perot-type cavity scan-filtering finishes, the long lower each several part spectrum that gathers of different cavity is synthesized, realize the spectrum splicing of wide spectral range; The enveloping surface that obtains after the spectrum splicing is the spectrogram that flashlight is detected, as shown in Figure 7, obviously, spectral envelope face after synthetic is the actual spectrum in the reflected signal light truly, the spectrum that originally can not differentiate is differentiated, under the prerequisite that does not change Free Spectral Range, Effective Raise the spectral resolution of grating spectrograph.
Embodiments of the invention 2 are that the raising Free Spectral Range is the method for the grating spectrograph resolution of 380nm～760nm.As shown in Figure 2, grating spectrograph is comprised of slit 2, collimator objective 3, transmission grating 5, image-forming objective lens 6 and detector 7.Measured signal light is 100 μ m by core diameter, numerical aperture is that 0.22 optical fiber 1 is directed into grating spectrograph, slit 2 width are 25 μ m, be that to be incident to the cycle after collimator objective 3 collimation of 60mm be 600l/mm through focal length, bore is on the transmission grating 5 of 10mm,-1 order diffraction light is that the image-forming objective lens 6 of 60mm carries out focal imaging through focal length, spectrum is gathered on imaging surface by linear array detector 7.Fig. 8 is the spectrogram that this grating spectrograph of computer simulation detects, wherein dotted line is the spectral signature peak of necessary being in the hypothesis flashlight, consider that the computer data processing power is limited, only choose the wavelength coverage (also can choose the wavelength coverage of 380～386nm or 754nm～760nm) of 570～576nm in the calculating, the wavelength interval is 0.5nm, and solid line represents the spectrogram that detector detects.Obviously, the resolution of grating spectrograph can't be differentiated each characteristic peak of interval 0.5nm and come less than 0.5nm.
Between the transmission grating of above-mentioned grating spectrograph and focusing objective len, add a Fabry-Perot-type cavity scanning filter 4, and transmission grating 5 and Fabry-Perot-type cavity scanning filter 4 are carried out integrated, utilize this wave filter that-1 order diffraction light of grating is carried out scan-filtering.The clear aperture of wave filter is 10mm, and initial cavity length is 120 μ m, and the long modulation range in chamber is 380nm, and fineness is 60, utilizes MEMS to carry out single-point and drives, and the driving step-length is 4nm.When the Fabry-Perot-type cavity scanning filter is in the long 120 μ m of initial cavity, only the part spectral line in the flashlight is leached, as shown in Figure 9, wherein dotted line is the spectral signature peak of necessary being in the hypothesis flashlight, wavelength coverage is 570～576nm, and the wavelength interval is 0.5nm, the part spectrogram of solid line for leaching under initial cavity is long, obviously, this part spectral line that is filtered off can be differentiated by linear array detector fully; Utilize the MEMS driver long with the chamber of the driving step-size change Fabry-Perot-type cavity of 4nm, then another part spectral line in the flashlight is filtered off, and shown in solid line among Figure 10, this part spectral line that is filtered off also can be differentiated by linear array detector; Continue to change Fabry-Perot-type cavity long, and the spectrum under each chamber length is gathered, until chamber length increases to 120.38 μ m; After the Fabry-Perot-type cavity scan-filtering finishes, the long lower each several part spectrum that gathers of different cavity is synthesized, realize the spectrum splicing of wide spectral range; The enveloping surface that obtains after the spectrum splicing is the spectrogram that flashlight is detected, as shown in figure 11, obviously, the spectral envelope face after synthetic is the actual spectrum in the reflected signal light truly, originally the spectrum that can not differentiate is differentiated, Effective Raise the spectral resolution of grating spectrograph.
The non-elaborated part of the present invention belongs to techniques well known.
The above; only be part embodiment of the present invention, but protection scope of the present invention is not limited to this, any those skilled in the art are in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.
Claims (9)
1. spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering, it is characterized in that: in the grating spectrograph light path, add a Fabry-Perot-type cavity scanning filter, the chamber of wave filter is long adjustable, and modulation range is to treat 1/2 of side flashlight maximum wavelength; When the Fabry-Perot-type cavity scanning filter is in initial cavity length, only the part spectral line in the flashlight is leached; This part spectral line that is filtered off can be differentiated and gather by linear array detector; Utilize driver to change the chamber of Fabry-Perot-type cavity long, the spectral line of another part in the flashlight is leached; This part spectral line that is filtered off also can be differentiated and gather by linear array detector; The long lower each several part spectrum that gathers of different cavity is synthesized, realize the spectrum splicing of wide spectral range; The enveloping surface that obtains after the spectrum splicing is the spectrogram that flashlight is detected, and this spectrogram does not add the grating spectrograph of Fabry-Perot-type cavity scan-filtering relatively, and its resolution has obvious enhancing.
2. a kind of spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: the flashlight angle of divergence in the described grating spectrograph behind collimation should guarantee interference fringe not occur after flashlight is incident to Fabry-Perot-type cavity, and only the flashlight light intensity is modulated, guarantee the filter function of Fabry-Perot-type cavity.
3. a kind of spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: the chamber mirror area of described Fabry-Perot-type cavity is not less than the area of grating, to guarantee the luminous flux of spectrometer.
4. a kind of spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: the initial cavity length of described Fabry-Perot-type cavity should make the spectral line that is filtered off be differentiated by linear array detector.
5. a kind of spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: described Fabry-Perot-type cavity scanning filter is added between collimator objective and the grating, or be added between grating and the image-forming objective lens, as long as can realize the function of length scanning filtering.
6. a kind of spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering according to claim 1 is characterized in that: described grating separates with Fabry-Perot-type cavity and is positioned over light path, or becomes one, and is conducive to the miniaturization of spectrometer.
7. a kind of spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: the chamber face of described Fabry-Perot-type cavity should be for different operation wavelength deposit multilayer dielectric reflection films, make chamber face reflectivity greater than 90%, the cavity fineness is greater than 30, to guarantee the filter effect of Fabry-Perot-type cavity, reduce detecting error.
8. a kind of spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: described Fabry-Perot-type cavity scanning filter can adopt Piezoelectric Ceramic or MEMS to drive, type of drive is for being that continuous sweep or single-point drive, to adapt to the requirement to driving under the different condition.
9. a kind of spectral resolution Enhancement Method based on the Fabry-Perot-type cavity scan-filtering according to claim 1, it is characterized in that: the sample frequency of described linear array detector should make the sampling number the when light intensity of Same Wavelength becomes minimum from mxm. after the filtering be no less than 4 times, to guarantee the precision of spectrographic detection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310268541.8A CN103308168B (en) | 2013-06-28 | 2013-06-28 | Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310268541.8A CN103308168B (en) | 2013-06-28 | 2013-06-28 | Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103308168A true CN103308168A (en) | 2013-09-18 |
| CN103308168B CN103308168B (en) | 2015-07-08 |
Family
ID=49133644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310268541.8A Expired - Fee Related CN103308168B (en) | 2013-06-28 | 2013-06-28 | Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103308168B (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103822717A (en) * | 2014-02-19 | 2014-05-28 | 中国科学院光电研究院 | Method for enhancing broadband interference spectral resolution and spectrograph |
| CN104236713A (en) * | 2014-10-21 | 2014-12-24 | 中国科学院光电研究院 | Fabry-Perot interference spectrum imaging instrument |
| CN105333815A (en) * | 2015-11-05 | 2016-02-17 | 北京交通大学 | Super lateral resolution surface three-dimensional online interference measuring system based on spectral dispersion line scanning |
| CN105823558A (en) * | 2016-04-27 | 2016-08-03 | 西安应用光学研究所 | Gap-variable Fabry-Perot interference type long-wave infrared dual mode spectral imaging system |
| CN106017685A (en) * | 2016-05-13 | 2016-10-12 | 中国海洋大学 | Sweep-frequency spectrum measurement method based on virtual image phase array |
| CN107941339A (en) * | 2017-12-19 | 2018-04-20 | 湖南宏动光电有限公司 | Hyperspectral imaging devices and method based on periodicity interference membrane system FP chamber scannings |
| CN109186644A (en) * | 2018-08-29 | 2019-01-11 | 北京航天控制仪器研究所 | Spectrum splices probe beam deflation type distributed fiberoptic sensor and signal demodulating method |
| CN111256822A (en) * | 2020-02-17 | 2020-06-09 | 北京华泰诺安技术有限公司 | Spectrum appearance |
| CN111289107A (en) * | 2020-03-31 | 2020-06-16 | 北京科益虹源光电技术有限公司 | Laser spectrum on-line measuring device and method |
| CN111999036A (en) * | 2020-08-10 | 2020-11-27 | 中国科学院光电技术研究所 | Method for calibrating tuning position of F-P filter by using acousto-optic modulator |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1442677A (en) * | 2003-04-09 | 2003-09-17 | 重庆大学 | Micro integration method-amber cavity array optical spectrum detector |
| CN101476936A (en) * | 2009-01-19 | 2009-07-08 | 杭州电子科技大学 | Fabry-Perot cavity based array type miniature optical spectrometer |
| CN103162828A (en) * | 2013-02-26 | 2013-06-19 | 浙江大学 | Ultrahigh resolution spectrograph based on tunable Fabry-Perot filter and array detector spectrograph |
-
2013
- 2013-06-28 CN CN201310268541.8A patent/CN103308168B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1442677A (en) * | 2003-04-09 | 2003-09-17 | 重庆大学 | Micro integration method-amber cavity array optical spectrum detector |
| CN101476936A (en) * | 2009-01-19 | 2009-07-08 | 杭州电子科技大学 | Fabry-Perot cavity based array type miniature optical spectrometer |
| CN103162828A (en) * | 2013-02-26 | 2013-06-19 | 浙江大学 | Ultrahigh resolution spectrograph based on tunable Fabry-Perot filter and array detector spectrograph |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103822717B (en) * | 2014-02-19 | 2017-01-25 | 中国科学院光电研究院 | Method for enhancing broadband interference spectral resolution and spectrograph |
| CN103822717A (en) * | 2014-02-19 | 2014-05-28 | 中国科学院光电研究院 | Method for enhancing broadband interference spectral resolution and spectrograph |
| CN104236713A (en) * | 2014-10-21 | 2014-12-24 | 中国科学院光电研究院 | Fabry-Perot interference spectrum imaging instrument |
| CN105333815A (en) * | 2015-11-05 | 2016-02-17 | 北京交通大学 | Super lateral resolution surface three-dimensional online interference measuring system based on spectral dispersion line scanning |
| CN105333815B (en) * | 2015-11-05 | 2018-04-10 | 北京交通大学 | A kind of super online interferometer measuration system of lateral resolution surface three dimension based on the scanning of spectrum colour loose wire |
| CN105823558A (en) * | 2016-04-27 | 2016-08-03 | 西安应用光学研究所 | Gap-variable Fabry-Perot interference type long-wave infrared dual mode spectral imaging system |
| CN106017685A (en) * | 2016-05-13 | 2016-10-12 | 中国海洋大学 | Sweep-frequency spectrum measurement method based on virtual image phase array |
| CN107941339A (en) * | 2017-12-19 | 2018-04-20 | 湖南宏动光电有限公司 | Hyperspectral imaging devices and method based on periodicity interference membrane system FP chamber scannings |
| CN109186644A (en) * | 2018-08-29 | 2019-01-11 | 北京航天控制仪器研究所 | Spectrum splices probe beam deflation type distributed fiberoptic sensor and signal demodulating method |
| CN109186644B (en) * | 2018-08-29 | 2021-07-09 | 北京航天控制仪器研究所 | Spectrum splicing optical frequency domain reflection type distributed optical fiber sensor and signal demodulation method |
| CN111256822A (en) * | 2020-02-17 | 2020-06-09 | 北京华泰诺安技术有限公司 | Spectrum appearance |
| CN111289107A (en) * | 2020-03-31 | 2020-06-16 | 北京科益虹源光电技术有限公司 | Laser spectrum on-line measuring device and method |
| CN111289107B (en) * | 2020-03-31 | 2022-03-11 | 北京科益虹源光电技术有限公司 | Laser spectrum on-line measuring device and method |
| CN111999036A (en) * | 2020-08-10 | 2020-11-27 | 中国科学院光电技术研究所 | Method for calibrating tuning position of F-P filter by using acousto-optic modulator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103308168B (en) | 2015-07-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103308168B (en) | Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering | |
| EP2320214B1 (en) | Measurement device and method for downhole spectroscopy | |
| CN104422681A (en) | Raman spectrometer | |
| CN105424185A (en) | Computer assisted full-waveband spectrometer wavelength calibration method | |
| AU2010325963A1 (en) | Fabry-perot fourier transform spectrometer | |
| CN106404713A (en) | Double-detector micro near-infrared spectrometer with whole spectral band of 800-2,500nm | |
| CN106596421A (en) | Fabry-Perot interferometric wide spectrum frequency-selecting collection device of spatial light modulator | |
| CN103471992A (en) | Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer | |
| CN104777146A (en) | All-optical-fiber raman spectrometer | |
| CN104698068A (en) | High-spatial resolution laser biaxial differential confocal spectrum-mass spectrometry microimaging method and device | |
| CN103196879A (en) | Laser-induced fluorescence spectrum detection device | |
| CN105628671A (en) | Apparatus and method for obtaining Raman scattering spectrum | |
| CN105510297A (en) | Raman fluorescence spectrum testing system and optical signal collector thereof | |
| CN110118762A (en) | Flame CH base is synchronous with NO molecule or selective excitation measuring device and method | |
| CN101858785A (en) | Device for improving spectral quality of micro-spectrometer | |
| CN101526397B (en) | Spectrometer | |
| CN203164121U (en) | Laser-induced fluorescence spectrum detection device | |
| JP2021512338A (en) | Micro wideband spectroscopic analyzer | |
| CN102607702A (en) | Optical-frequency-domain vernier-method spectrometer with broadband reference light source | |
| CN203688070U (en) | Raman spectrometer detecting high scattering medium | |
| CN103344335B (en) | Intermediate infrared spectrograph based on MEMS detector | |
| CN110686709A (en) | Signal demodulation method of cascade optical fiber chirped grating | |
| CN104422680A (en) | Raman signal acquisition device | |
| CN104990908A (en) | Laser biax confocal induced breakdown-Raman spectrum imaging detection method and device | |
| JP2018518669A (en) | Optical analysis system with optical delivery of an optical conduit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150708 Termination date: 20170628 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |