CN103308008A - Measurement device and method of element flatness in low temperature state - Google Patents
Measurement device and method of element flatness in low temperature state Download PDFInfo
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Abstract
The invention discloses a measurement device and method of the element flatness in a low temperature state. The measurement device comprises a laser device, a convergence optical system, an imaging optical system, a photoelectric detector, a high-accuracy three-dimensional displacement platform, a special dewar, a dewar support, an optical suspension platform and a data processing device. An element to be tested is placed in the special dewar; light beams emitted by the laser device are vertically irradiated onto the surface of the element to be tested through the convergence optical system, laser spots are imaged through the imaging optical system and the photoelectric detector, and micrometric displacement of measurement points on the surface of the element to be tested is measured in a laser triangulation method; and the data processing device calculates the positions of the laser spots in a centroiding algorithm, controls the high-accuracy three-dimensional displacement platform to achieve two-dimensional scanning measurement and calculates the flatness of the surface of the element to be tested. The measurement device and method have the advantages that the measurement device achieves non-contact measurement through the displacement measurement principle of the laser triangulation method, the principle is simple and practical, the working distance can be adjusted, and therefore the measurement device has strong applicability.
Description
Technical field
The present invention relates to measurement of planeness technology, refer in particular to measurement mechanism and the method for element flatness under a kind of low-temperature condition.
Background technology
Big face battle array, long alignment are one of main directions of infrared focal plane detector development, and for the normally used technology of realizing this goal be: at first make infrared focal plane detector submodule on a small scale, carry out precision at the metal substrate of high-flatness again and splice.Because focus planardetector is generally all worked under the low temperature environment of 77K～100K, so the focus planardetector finished of splicing need be packed into together with metal substrate in the cooled cryostat, reached by the heat conduction by cold chain, metal substrate of refrigeration machine or liquid nitrogen and to make infrared eye meet the requirements of working temperature.Be installed to from room temperature the process of cryogenic applications at the super long alignment detector, because the coefficient of thermal expansion of materials such as cold chain, supporting construction and metal substrate is different, then will inevitably cause the generation of stress, strain.The existence of stress can make metal substrate produce deformation, and this will make the infrared focal plane detector optical flat that sticks on metallic substrate surfaces depart from the focal plane of optical system.In wide-aperture optical system, system's depth of field is very little, this image quality that can have a strong impact on the infrared focal plane detector system that departs from.Solve the measurement of planeness problem of big face battle array, long alignment focus planardetector under the low temperature, thereby can improve the design of detector mounting structure, make detector at low temperatures the flatness index satisfy application requirements.Therefore the measurement problem of low temperature flatness is to improve the important step of extensive infrared focal plane detector workmanship.
Because the long detector array that splicing is good is packaged in the cooled cryostat, so the method for testing of common contact can not reach the purpose of direct measurements explorer flatness.Granted publication number has proposed a kind of measuring method and special-purpose Dewar of measuring the focus planardetector low temperature deformation for the patent of CN 100334425C, its described conventional laser height tester (for example Nikon VMR-3020 3-dimensional image instrument) can only realize the distortion measurement of less operating distance, and ready-made instrument can only be used in endways direction.When the face battle array of focal plane device or dimension are bigger, to be measured to the distance of cooled cryostat window outside surface usually greater than the operating distance of conventional laser height tester; In addition, because the long detector array cooled cryostat window of encapsulation requires test in the horizontal direction through row.So the test job distance of existing instrument, light incident direction all can not satisfy the demands.
Summary of the invention
In view of this, the present invention proposes measurement mechanism and the method for element flatness under a kind of low-temperature condition, solved the accurate measurement problem of element flatness under the low temperature.
The principles of science of the present invention:
The low temperature deformation amount of element under test is to realize by the variation of measuring each measurement point locus on the element under test surface, cooling front and back; Be exactly the volume coordinate by each measured point of laser triangulation specifically, reduce the pattern of element under test surface under different temperatures by the volume coordinate of each measurement point, and calculate the flatness of element under test under the corresponding temperature; The measuring principle of described laser triangulation is seen Fig. 1, the light beam that laser instrument 1-1 sends focuses on the surface of element under test 1-2, laser facula images in photodetector 1-3 surface, set up the funtcional relationship of laser facula barycenter and volume coordinate by calibration, utilize this funtcional relationship can instead release element under test 1-2 surface measurement put the space coordinate.
Technical scheme of the present invention is:
For realizing that above-mentioned measurement scheme builds the measurement mechanism of element flatness under a kind of low-temperature condition, it comprises: laser instrument 2-13, converge optical system 2-14, imaging optical system 2-15, photodetector 2-16, high-precision three-dimensional displacement platform 2-12, special-purpose Dewar 2-1, Dewar support 2-10, optics shock-absorbing platform 2-11 and data handling system 2-17.
The laser beam that described laser instrument 2-13 sends converges that optical system 2-14 converges and perpendicular to being incident to the detected element surface that is placed among the described special-purpose Dewar 2-1 by described, form a laser facula on the surface, by described imaging optical system 2-15 and the laser facula imaging of described photodetector 2-16, utilize the micrometric displacement of laser triangulation detected element surface measurement point; Described data handling system 2-17 utilizes centroid algorithm to calculate the position of laser facula, control high-precision three-dimensional displacement platform 2-12 realizes the two-dimensional scan measurement, handles the data of the micrometric displacement of each measurement point of detected element surface and also calculates the detected element surface planarity.
Described special-purpose Dewar comprises shell 2-1, inner bag 2-2 and vacuum interlayer 2-3, detected element 2-4 by among cold chain 2-5 and the inner bag 2-2 liquid nitrogen links to each other, detected element 2-4 is covered by the lid 2-7 that has optical transmission window 2-6, and it is parallel with window 2-6 and perpendicular to surface level, lid 2-7 is connected with shell vacuum seal, post temperature detecting resistance 2-8 on the detected element 2-4, be used for the temperature of monitoring detected element 2-4 in real time, side wall of outer shell has a bleeding point 2-9.
Described photodetector 2-16 adopts area array CCD or position sensitive detector.
Measuring method comprises following step:
Step 1: element under test is packed in the cooled cryostat, then to Dewar through the row vacuum exhaust, make its vacuum tightness reach 1 * 10
-3More than the torr, reached good effect of heat insulation;
Step 2: above-mentioned cooled cryostat is fixed on the described optics shock-absorbing platform together with the Dewar support, makes the interior detected element surface of Dewar roughly be positioned at the working range of above-mentioned laser triangulation displacement measuring device;
Step 3: the measurement mechanism calibration, at first fixedly cooled cryostat is controlled the three-D displacement platform and is moved along the laser incident direction, the corresponding relation of recording laser facula mass center coordinate and volume coordinate, and utilize the needed calibration curve of conic fitting;
Step 4: regulate the high-precision three-dimensional displacement platform, make the center-of-mass coordinate of laser facula on three summits in zone to be measured, detected element surface identical, and the high-precision three-dimensional displacement platform that determined by these three measurement points of the record plane of moving, as the reference field of follow-up two-dimensional scan;
Step 5: in zone to be measured, choose suitable scanning survey point, the center-of-mass coordinate of record laser facula on each analyzing spot during normal temperature, and be converted into volume coordinate by calibration curve, finish the measurement of planeness of room temperature element;
Step 6: in cooled cryostat, pour into liquid nitrogen, utilize temperature detecting resistance 2-8 to monitor element under test 2-4 surface temperature in real time, the measurement point that above-mentioned measurement mechanism is chosen in the scanning step 5 at any time, record laser facula center-of-mass coordinate on each measurement point, utilize calibration curve can instead release measurement point and get the space bit coordinate, monitor the deformation situation on detected element surface in real time;
Step 7: after element under test temperature and laser facula center-of-mass coordinate are stable, the measurement point of choosing in the measurement mechanism scanning step 5, record laser facula center-of-mass coordinate on each measurement point, utilize calibration curve can instead release the detected element surface measurement put space coordinate and calculate the flatness of detected element under this temperature.
The present invention has following advantage:
1. utilize laser triangulation displacement measurement principle to realize non-cpntact measurement, principle simply is easy to realize, and operating distance is adjustable, makes this device have very strong applicability;
2. utilize the secondary calibration function to come the computer memory coordinate, avoided the systematic error of being introduced by system's geometric configuration out of true;
3. adopt the measurement pattern of fixing heavy cooled cryostat, reduced the systematic error that has displacement platform to introduce;
4. can monitor the deformation situation of element under test in temperature-fall period in real time.
Description of drawings
Fig. 1 is laser triangulation displacement-measurement procedure schematic diagram.
Fig. 2 is the side view of test macro of the present invention.
Fig. 3 is the top view of Fig. 2.
Fig. 4 is the fit error curve of linear scaled method and secondary scaling method.
Embodiment:
Be described in further detail below in conjunction with accompanying drawing and concrete configuration parameter measurement mechanism and the method to element flatness under a kind of low-temperature condition of the present invention, and provide the precision contrast that this measurement mechanism adopts linear scaled and secondary calibration, and the measuring accuracy that is issued to of the described concrete configuration of this device.
Referring to figs. 2 and 3, this patent embodiment provides measurement mechanism and the method for infrared eye flatness under a kind of low-temperature condition, described measurement mechanism comprises special low temperature Dewar 2-18, laser instrument 2-13 is the 1mw helium-neon laser, converging optical system 2-14 is that laser is drawn together Shu Jing, the convex lens of aperture diaphragm and 80mm focal length, photodetector 2-16 is area array CCD, imaging optical system 15 focuses apart from twice optical loupes head for 110mm, the angle of its imaging optical axis and laser beam is 40 °, high-precision three-dimensional displacement platform 2-12, Dewar support 2-18, optics shock-absorbing platform 2-11 and the 2-17 of data processing centre (DPC) are a PC.The described metal substrate 2-4 that is positioned over the infrared eye among the special low temperature Dewar 2-18 has 60mm apart from optical transmission window 2-6 upper surface, so the measuring system operating distance should be greater than 60mm.
Measuring method:
1) infrared eye that splicing is finished is packed in the cooled cryostat, then to Dewar through the row vacuum exhaust, make its vacuum tightness reach 1 * 10
-3More than the torr, reached good effect of heat insulation;
2) above-mentioned cooled cryostat is fixed on the described optics shock-absorbing platform together with the Dewar support, makes the interior metal substrate of Dewar roughly be positioned at the working range of above-mentioned laser triangulation displacement measuring device;
3) measurement mechanism calibration, at first fixing cooled cryostat, adjust imaging optical system 2-15 and area array CCD 2-16 and make laser facula be formed centrally the picture of facula area minimum in CCD, at this moment imaging optical system 2-15 roughly overlaps with the focus that converges optical system 2-14; Utilize centroid algorithm to extract the center-of-mass coordinate of laser facula projection on CCD face battle array, described laser facula centroid algorithm is to utilize luminance brightness to calculate a kind of algorithm of spot center coordinate for weights.Utilize high-precision three-dimensional displacement platform 2-12 to move forward and backward along the laser beam direction, every movement 10 μ m, note laser facula center-of-mass coordinate and volume coordinate, set up the enantiomorphic relationship of the volume coordinate of the center-of-mass coordinate of laser facula and tested point thus, for and utilize conic fitting, obtain needed calibration curve equation;
4) regulate the high-precision three-dimensional displacement platform, make the center-of-mass coordinate of laser facula on three summits in zone to be measured, detected element surface identical, and record the plane that high-precision three-dimensional displacement platform that these three measurement points determine moves, as the reference field of follow-up two-dimensional scan;
5) in zone to be measured, choose suitable scanning survey point, the center-of-mass coordinate of record laser facula on each analyzing spot during normal temperature, and be converted into volume coordinate by calibration curve, finish the measurement of planeness of room temperature element;
6) after special-purpose Dewar 2-18 adds liquid nitrogen, obtain the real-time temperature data of metal substrate 2-4 by temperature detecting resistance 2-8, again the measurement point of having chosen carried out scanning survey, can obtain each put the space coordinate data, show the deformation situation of measurement face in real time.After the laser facula centroid position of metal substrate 2-4 temperature and each measurement point is stable, the flatness in the time of just obtaining the infrared focal plane detector low-temperature working;
Secondary scaling method and The measuring precision:
Because measuring system is under straight incident mode, the image relation of laser facula is non-linear, so should not use the linear scaled method when high-acruracy survey.In the measurement range that we are concerned about, the optics enlargement ratio of straight incident-type imaging system can be approximately linear change, utilizes the secondary scaling method can improve the precision of measurement.Fig. 4. provided the error of fitting at concrete configuration lower linear scaling method and the secondary scaling method of above-described embodiment, the match variance of linear scaled method is 0.59 μ m, and the match variance of secondary scaling method is 0.23 μ m.
Utilize the secondary scaling method, to native system through having gone the measuring accuracy experiment.Table 1 has provided in 100 μ m ranges, the test result contrast (leading indicator of HL-C2: operating distance 110 ± 15mm, lasing beam diameter Φ 80 μ m) of this measuring system and the commercial HL-C2 of Panasonic high-precision laser three angular displacement sensors.Experimental result show this measuring system under above-mentioned condition of work the measuring error limit (3 σ) less than 1.2 μ m.
Table 1 measuring accuracy contrast experiment
Claims (4)
1. the measurement mechanism of element flatness under the low-temperature condition, it comprises laser instrument (2-13), converge optical system (2-14), imaging optical system (2-15), photodetector (2-16), high-precision three-dimensional displacement platform (2-12), special-purpose Dewar (2-1), Dewar support (2-10), optics shock-absorbing platform (2-11) and data handling system (2-17), it is characterized in that: the laser beam that described laser instrument (2-13) sends converges that optical system (2-14) converges and perpendicular to being incident to the detected element surface that is placed in the described special-purpose Dewar (2-1) by described, form a laser facula on the surface, to the laser facula imaging, utilize the micrometric displacement of laser triangulation detected element surface measurement point by described imaging optical system (2-15) and described photodetector (2-16); Described data handling system (2-17) utilizes centroid algorithm to calculate the position of laser facula, control high-precision three-dimensional displacement platform (2-12) is realized the two-dimensional scan measurement, handles the micrometric displacement data of each measurement point of detected element surface and also calculates the detected element surface planarity.
2. the measurement mechanism of element flatness under a kind of low-temperature condition according to claim 1, it is characterized in that: described special-purpose Dewar comprises shell (2-1), inner bag (2-2) and vacuum interlayer (2-3), detected element (2-4) is by must linking to each other by liquid nitrogen in cold chain (2-5) and the inner bag (2-2), detected element (2-4) is covered by the lid that has optical transmission window (2-6) (2-7), and it is parallel with window (2-6) and perpendicular to surface level, lid (2-7) is connected with shell vacuum seal, post temperature detecting resistance (2-8) on the detected element (2-4), be used for the temperature of monitoring detected element (2-4) in real time, side wall of outer shell has a bleeding point (2-9).
3. the measurement mechanism of element flatness under a kind of low-temperature condition according to claim 1 is characterized in that: described photodetector (2-16) employing area array CCD or position sensitive detector.
4. measuring method based on element flatness under the low-temperature condition of the described device of claim 1 is characterized in that may further comprise the steps:
Step 1: element under test is packed in the cooled cryostat, then to Dewar through the row vacuum exhaust, make its vacuum tightness reach 1 * 10
-3More than the torr, reached good effect of heat insulation;
Step 2: above-mentioned cooled cryostat is fixed on the described optics shock-absorbing platform together with the Dewar support, makes the interior detected element surface of Dewar roughly be positioned at the working range of above-mentioned laser triangulation displacement measuring device;
Step 3: the measurement mechanism calibration, at first fixedly cooled cryostat is controlled the three-D displacement platform and is moved along the laser incident direction, the corresponding relation of recording laser facula mass center coordinate and volume coordinate, and utilize the needed calibration curve of conic fitting;
Step 4: regulate the high-precision three-dimensional displacement platform, make the center-of-mass coordinate of laser facula on three summits in zone to be measured, detected element surface identical, and the high-precision three-dimensional displacement platform that determined by these three measurement points of the record plane of moving, as the reference field of follow-up two-dimensional scan;
Step 5: in zone to be measured, choose suitable scanning survey point, the center-of-mass coordinate of record laser facula on each analyzing spot during normal temperature, and be converted into volume coordinate by calibration curve, finish the measurement of planeness of room temperature element;
Step 6: in cooled cryostat, pour into liquid nitrogen, utilize temperature detecting resistance 2-8 to monitor element under test (2-4) surface temperature in real time, the measurement point that above-mentioned measurement mechanism is chosen in the scanning step 5 at any time, record laser facula center-of-mass coordinate on each measurement point, utilize calibration curve can instead release measurement point and get the space bit coordinate, monitor the deformation situation on detected element surface in real time;
Step 7: after element under test temperature and laser facula center-of-mass coordinate are stable, the measurement point of choosing in the measurement mechanism scanning step 5, record laser facula center-of-mass coordinate on each measurement point, utilize calibration curve can instead release the detected element surface measurement put space coordinate and calculate the flatness of detected element under this temperature.
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| CN103487000A (en) * | 2013-09-26 | 2014-01-01 | 无锡俊达测试技术服务有限公司 | Device for testing flat face of object |
| CN108514413A (en) * | 2018-04-04 | 2018-09-11 | 漫迪医疗仪器（上海）有限公司 | Dewar biology Magnetic Detection System and its design method/system, readable storage medium storing program for executing |
| CN109211113A (en) * | 2018-11-28 | 2019-01-15 | 信利光电股份有限公司 | Equipment based on laser measurement object size |
| CN109253696A (en) * | 2018-11-28 | 2019-01-22 | 信利光电股份有限公司 | Equipment based on structural light measurement object size |
| CN109269413A (en) * | 2018-11-28 | 2019-01-25 | 信利光电股份有限公司 | Equipment based on time-of-flight method measurement object size |
| CN109974583A (en) * | 2019-04-11 | 2019-07-05 | 南京信息工程大学 | A kind of non-contact optical element surface surface shape measurement device and method |
| CN110514120A (en) * | 2019-08-26 | 2019-11-29 | 北京卫星环境工程研究所 | Displacement measurement system for vacuum low-temperature environment |
| CN110715638A (en) * | 2019-11-27 | 2020-01-21 | 湖南大合新材料有限公司 | Method for detecting flatness of crystal |
| CN113188472A (en) * | 2021-04-29 | 2021-07-30 | 中国科学院长春光学精密机械与物理研究所 | Low-temperature surface shape detection device and method for large-area-array image sensor |
| CN114565664A (en) * | 2021-12-27 | 2022-05-31 | 北京控制工程研究所 | Modulation-based centering method and system |
| CN114688950A (en) * | 2022-05-31 | 2022-07-01 | 陕西建工第一建设集团有限公司 | Aluminum alloy plate flattening detection device for building construction |
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| CN103487000A (en) * | 2013-09-26 | 2014-01-01 | 无锡俊达测试技术服务有限公司 | Device for testing flat face of object |
| CN108514413B (en) * | 2018-04-04 | 2023-09-22 | 漫迪医疗仪器（上海）有限公司 | Dewar biological magnetic detection system, design method/system thereof and readable storage medium |
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| CN109253696A (en) * | 2018-11-28 | 2019-01-22 | 信利光电股份有限公司 | Equipment based on structural light measurement object size |
| CN109269413A (en) * | 2018-11-28 | 2019-01-25 | 信利光电股份有限公司 | Equipment based on time-of-flight method measurement object size |
| CN109974583A (en) * | 2019-04-11 | 2019-07-05 | 南京信息工程大学 | A kind of non-contact optical element surface surface shape measurement device and method |
| CN109974583B (en) * | 2019-04-11 | 2024-03-26 | 南京信息工程大学 | Non-contact optical element surface shape measuring device and method |
| CN110514120A (en) * | 2019-08-26 | 2019-11-29 | 北京卫星环境工程研究所 | Displacement measurement system for vacuum low-temperature environment |
| CN110715638A (en) * | 2019-11-27 | 2020-01-21 | 湖南大合新材料有限公司 | Method for detecting flatness of crystal |
| CN113188472A (en) * | 2021-04-29 | 2021-07-30 | 中国科学院长春光学精密机械与物理研究所 | Low-temperature surface shape detection device and method for large-area-array image sensor |
| CN114565664A (en) * | 2021-12-27 | 2022-05-31 | 北京控制工程研究所 | Modulation-based centering method and system |
| CN114565664B (en) * | 2021-12-27 | 2023-08-11 | 北京控制工程研究所 | Centering method and system based on modulation |
| CN114688950A (en) * | 2022-05-31 | 2022-07-01 | 陕西建工第一建设集团有限公司 | Aluminum alloy plate flattening detection device for building construction |
| CN114688950B (en) * | 2022-05-31 | 2022-08-23 | 陕西建工第一建设集团有限公司 | Aluminum alloy plate flattening detection device for building construction |
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