CN103308008A - Measurement device and method of element flatness in low temperature state - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及平面度测量技术，特别指一种低温状态下元件平面度的测量装置及方法。The invention relates to flatness measurement technology, in particular to a device and method for measuring element flatness in a low temperature state.
背景技术Background technique
大面阵、长线列是红外焦平面探测器发展的主要方向之一，而为了实现这一目标通常使用的技术是：首先制造较小规模的红外焦平面探测器子模块，再在高平整度的金属基板上进行精密拼接。由于焦平面探测器一般都在77K～100K的低温环境下工作，所以拼接完成的焦平面探测器连同金属基板需要装入低温杜瓦中，由制冷机或液氮通过冷链、金属基板的热传导达使得红外探测器达到要求的工作温度。在超长线列探测器从室温安装到低温应用的过程中，由于冷链、支撑结构和金属基板等材料的热胀系数不同，则必然会导致应力、应变的产生。应力的存在会使金属基板产生形变，这就会使得粘贴在金属基板表面的红外焦平面探测器光学平面偏离光学系统的焦面。在大孔径的光学系统中，系统景深很小，这种偏离会严重影响红外焦平面探测器系统的成像质量。解决低温下大面阵、长线列焦平面探测器的平面度测量问题，从而可以改进探测器安装结构设计，使得探测器在低温下平面度指标满足应用要求。因此低温平面度的测量问题是提高大规模红外焦平面探测器制造质量的重要环节。Large area arrays and long line arrays are one of the main directions for the development of infrared focal plane detectors, and the technology usually used to achieve this goal is: firstly manufacture smaller-scale infrared focal plane detector sub-modules, and then in high flatness Precise splicing on metal substrates. Since the focal plane detectors generally work in a low-temperature environment of 77K to 100K, the spliced focal plane detectors together with the metal substrate need to be placed in a low-temperature Dewar, and the heat conduction of the metal substrate through the cold chain and the metal substrate is carried out by a refrigerator or liquid nitrogen. To make the infrared detector reach the required working temperature. During the process of installing ultra-long line detectors from room temperature to low temperature applications, due to the different thermal expansion coefficients of materials such as cold chains, support structures, and metal substrates, stress and strain will inevitably occur. The existence of stress will cause deformation of the metal substrate, which will cause the optical plane of the infrared focal plane detector pasted on the surface of the metal substrate to deviate from the focal plane of the optical system. In a large-aperture optical system, the depth of field of the system is very small, and this deviation will seriously affect the imaging quality of the infrared focal plane detector system. Solve the problem of flatness measurement of large area array and long-line array focal plane detectors at low temperature, so as to improve the design of detector installation structure, so that the flatness index of detectors at low temperature can meet the application requirements. Therefore, the problem of flatness measurement at low temperature is an important link to improve the manufacturing quality of large-scale infrared focal plane detectors.
由于拼接好的长线列探测器封装于低温杜瓦中，所以通常接触式的测试方法不能达到直接测量探测器平面度的目的。授权公告号为CN 100334425C的专利提出了一种测量焦平面探测器低温形变的测量方法及专用杜瓦，其所述的常规激光高度测试仪（例如Nikon VMR-3020三维影像仪）只能实现较小工作距离的形变测量，且现成仪器只能在竖着方向应用。当焦平面器件的面阵或线度比较大的时候，待测面到低温杜瓦窗口外表面的距离常常大于常规激光高度测试仪的工作距离；另外，由于封装的长线列探测器低温杜瓦窗口要求测试在水平方向经行。所以，现有仪器的测试工作距离、光入射方向都不能满足需求。Since the spliced long-line detectors are packaged in a low-temperature Dewar, the usual contact test method cannot achieve the purpose of directly measuring the flatness of the detectors. The patent with the authorized announcement number CN 100334425C proposes a measurement method for measuring the low-temperature deformation of the focal plane detector and a special Dewar. Deformation measurement with a small working distance, and off-the-shelf instruments can only be applied in the vertical direction. When the area or line of the focal plane device is relatively large, the distance from the surface to be tested to the outer surface of the cryogenic Dewar window is often greater than the working distance of the conventional laser height tester; The window requires the test to run horizontally. Therefore, neither the test working distance nor the incident light direction of the existing instrument can meet the requirements.
发明内容Contents of the invention
有鉴于此，本发明提出了一种低温状态下元件平面度的测量装置及方法，解决了低温下元件平面度的精确测量问题。In view of this, the present invention proposes a device and method for measuring component flatness at low temperature, which solves the problem of accurate measurement of component flatness at low temperature.
本发明的科学原理：Scientific principle of the present invention:
待测元件的低温形变量是通过测量降温前后待测元件表面上各测量点空间位置的变化来实现；具体的说就是通过激光三角法测量各个被测点的空间坐标，通过各个测量点的空间坐标来还原待测元件表面在不同温度下的形貌，并计算相应的温度下待测元件的平面度；所述的激光三角法的测量原理见图1，激光器1-1发出的光束聚焦在待测元件1-2的表面，激光光斑成像于光电探测器1-3表面，通过定标建立激光光斑质心与空间坐标的函数关系，利用该函数关系可以反推出待测元件1-2表面测量点得空间坐标。The low-temperature deformation of the component to be tested is realized by measuring the change of the spatial position of each measurement point on the surface of the component to be tested before and after cooling; specifically, the spatial coordinates of each measured point are measured by laser triangulation, and the spatial coordinates of each measurement point are measured. coordinates to restore the topography of the surface of the component to be measured at different temperatures, and calculate the flatness of the component to be measured at the corresponding temperature; On the surface of the component to be tested 1-2, the laser spot is imaged on the surface of the photodetector 1-3, and the functional relationship between the center of mass of the laser spot and the spatial coordinates is established through calibration, and the surface measurement of the component to be tested 1-2 can be deduced by using this functional relationship point to get the space coordinates.
本发明的技术方案是：Technical scheme of the present invention is:
为实现上述测量方案搭建一种低温状态下元件平面度的测量装置，其包括：激光器2-13、汇聚光学系统2-14、成像光学系统2-15、光电探测器2-16、高精度三维位移平台2-12、专用杜瓦2-1、杜瓦支架2-10、光学避震平台2-11及数据处理系统2-17。In order to realize the above measurement scheme, a device for measuring flatness of components at low temperature is built, which includes: laser 2-13, converging optical system 2-14, imaging optical system 2-15, photodetector 2-16, high-precision three-dimensional Displacement platform 2-12, special Dewar 2-1, Dewar support 2-10, optical shock-absorbing platform 2-11 and data processing system 2-17.
所述的激光器2-13发出的激光束通过所述的汇聚光学系统2-14汇聚并垂直于入射至安放于所述专用杜瓦2-1中的被测元件表面，在表面形成一个激光光斑，由所述的成像光学系统2-15和所述的光电探测器2-16对激光光斑成像，利用激光三角法测量被测元件表面测量点的微位移；所述的数据处理系统2-17利用质心算法计算激光光斑的位置，控制高精度三维位移平台2-12实现二维扫描测量，处理被测元件表面各测量点的微位移的数据并计算被测元件表面平面度。The laser beam emitted by the laser 2-13 is converged by the converging optical system 2-14 and perpendicular to the incident surface of the measured element placed in the special Dewar 2-1, forming a laser spot on the surface , the laser spot is imaged by the imaging optical system 2-15 and the photodetector 2-16, and the micro-displacement of the measurement point on the surface of the measured element is measured by laser triangulation; the data processing system 2-17 Use the centroid algorithm to calculate the position of the laser spot, control the high-precision three-dimensional displacement platform 2-12 to realize two-dimensional scanning measurement, process the data of the micro-displacement of each measurement point on the surface of the tested component and calculate the surface flatness of the tested component.
所述的专用杜瓦包括外壳2-1、内胆2-2和真空夹层2-3，被测元件2-4通过冷链2-5与内胆2-2中得液氮相连，被测元件2-4由带有透光窗口2-6的盖子2-7罩住，并与窗口2-6平行并且垂直于水平面，盖子2-7与外壳真空密封连接，被测元件2-4上贴有测温电阻2-8，用于实时监控被测元件2-4的温度，外壳侧壁有一抽气口2-9。The special-purpose Dewar includes a shell 2-1, an inner tank 2-2 and a vacuum interlayer 2-3, and the measured element 2-4 is connected with the liquid nitrogen in the inner tank 2-2 through a cold chain 2-5, and the measured The component 2-4 is covered by a cover 2-7 with a light-transmitting window 2-6, and is parallel to the window 2-6 and perpendicular to the horizontal plane. The cover 2-7 is connected to the shell in a vacuum-tight manner, and the component under test 2-4 A temperature-measuring resistor 2-8 is affixed for real-time monitoring of the temperature of the measured element 2-4, and an air extraction port 2-9 is provided on the side wall of the shell.
所述的光电探测器2-16采用面阵CCD或位置灵敏探测器。The photodetector 2-16 adopts an area array CCD or a position sensitive detector.
测量方法包括以下几个步骤：The measurement method includes the following steps:
步骤1：将待测元件装入低温杜瓦中，然后对杜瓦经行真空排气，使其真空度达到1×10-3torr以上，已达到良好的隔热效果；Step 1: Put the component to be tested into the low-temperature Dewar, and then vacuum exhaust the Dewar to make the vacuum degree above 1×10 -3 torr, which has achieved a good heat insulation effect;
步骤2：将上述低温杜瓦连同杜瓦支架固定于所述光学避震平台上，使杜瓦内的被测元件表面大致位于上述激光三角位移测量装置的工作范围内；Step 2: Fix the above-mentioned low-temperature Dewar together with the Dewar bracket on the optical shock-absorbing platform, so that the surface of the measured element in the Dewar is roughly within the working range of the above-mentioned laser triangular displacement measurement device;
步骤3：测量装置定标，首先固定低温杜瓦，控制三维位移平台沿激光入射方向移动，记录激光光斑质心坐标与空间坐标的对应关系，并利用二次曲线拟合所需要的定标曲线；Step 3: Calibration of the measurement device, first fix the low-temperature Dewar, control the three-dimensional displacement platform to move along the incident direction of the laser, record the corresponding relationship between the centroid coordinates of the laser spot and the spatial coordinates, and use the quadratic curve to fit the required calibration curve;
步骤4：调节高精度三维位移平台，使被测元件表面待测区域的三个顶点的激光光斑的质心坐标相同，并记录由这三个测量点所决定的高精度三维位移平台移动的平面，作为后续二维扫描的基准面；Step 4: Adjust the high-precision three-dimensional displacement platform so that the coordinates of the center of mass of the laser spots at the three vertices of the area to be measured on the surface of the component under test are the same, and record the moving plane of the high-precision three-dimensional displacement platform determined by these three measurement points. As a reference plane for subsequent 2D scanning;
步骤5：在待测区域中选取合适的扫描测量点，记录常温时每个扫描点上的激光光斑的质心坐标，并由定标曲线换算成空间坐标，完成室温元件平面度测量；Step 5: Select a suitable scanning measurement point in the area to be measured, record the centroid coordinates of the laser spot on each scanning point at room temperature, and convert the calibration curve into spatial coordinates to complete the flatness measurement of room temperature components;
步骤6：向低温杜瓦中灌入液氮，利用测温电阻2-8实时监测待测元件2-4表面温度，上述测量装置在任意时刻扫描步骤5中选取的测量点，记录每个测量点上激光光斑质心坐标，利用定标曲线可以反推出测量点得空间位坐标，实时监测被测元件表面的形变情况；Step 6: Pour liquid nitrogen into the low-temperature Dewar, and use temperature measuring resistors 2-8 to monitor the surface temperature of the component under test 2-4 in real time. The above-mentioned measuring device scans the measuring point selected in step 5 at any time, and records each measurement The centroid coordinates of the laser spot on the point can be deduced from the spatial coordinates of the measurement point by using the calibration curve, and the deformation of the surface of the measured component can be monitored in real time;
步骤7：当待测元件温度和激光光斑质心坐标稳定后，测量装置扫描步骤5中选取的测量点，记录每个测量点上激光光斑质心坐标，利用定标曲线可以反推出被测元件表面测量点得空间坐标并计算出被测元件在此温度下的平面度。Step 7: When the temperature of the component to be measured and the coordinates of the center of mass of the laser spot are stable, the measurement device scans the measurement points selected in step 5, and records the coordinates of the center of mass of the laser spot on each measurement point, and the surface measurement of the component under test can be deduced by using the calibration curve Point the spatial coordinates and calculate the flatness of the measured element at this temperature.
本发明具有如下优点：The present invention has the following advantages:
1.利用激光三角法位移测量原理实现非接触测量，原理简单易于实现，且工作距离可调，使得该装置具有很强的适用性；1. Using the principle of laser triangulation displacement measurement to realize non-contact measurement, the principle is simple and easy to realize, and the working distance is adjustable, which makes the device have strong applicability;
2.利用二次标定函数来计算空间坐标，避免了由系统几何配置不精确而引入的系统误差；2. Use the secondary calibration function to calculate the spatial coordinates, avoiding the system error caused by the inaccurate geometric configuration of the system;
3.采用固定沉重的低温杜瓦的测量模式，降低了有位移平台引入的系统误差；3. The measurement mode of fixed and heavy low-temperature Dewar is adopted, which reduces the systematic error introduced by the displacement platform;
4.可以实时监测待测元件在降温过程中的形变情况。4. It can monitor the deformation of the component under test in the cooling process in real time.
附图说明Description of drawings
图1为激光三角位移测量法原理图。Figure 1 is a schematic diagram of the laser triangulation displacement measurement method.
图2为本发明的测试系统的侧视图。Figure 2 is a side view of the testing system of the present invention.
图3为图2的顶视图。FIG. 3 is a top view of FIG. 2 .
图4为线性定标法和二次定标法的拟合误差曲线。Fig. 4 is the fitting error curve of the linear calibration method and the quadratic calibration method.
具体实施方式：Detailed ways:
以下结合附图和具体配置参数对本发明一种低温状态下元件平面度的测量装置及方法作进一步详细说明，并给出该测量装置采用线性定标和二次定标的精度对比，以及该装置所述具体配置下达到的测量精度。A device and method for measuring the flatness of components in a low temperature state of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific configuration parameters, and a comparison of the accuracy of the measuring device using linear calibration and secondary calibration, and the device The measurement accuracy achieved for the specific configuration described.
参考图2和图3，本专利实施例提供一种低温状态下红外探测器平面度的测量装置及方法，所述测量装置包括专用低温杜瓦2-18，激光器2-13为1mw氦氖激光器，汇聚光学系统2-14为激光括束镜、孔径光阑和80mm焦距的凸透镜，光电探测器2-16为面阵CCD，成像光学系统15为110mm定焦距两倍光学放大镜头，其成像光轴与激光光束的夹角为40°，高精度三维位移平台2-12，杜瓦支架2-18，光学避震平台2-11以及数据处理中心2-17为一台PC机。所述放置于专用低温杜瓦2-18中的红外探测器的金属基板2-4距离透光窗口2-6上表面有60mm，所以测量系统工作距离应该大于60mm。With reference to Fig. 2 and Fig. 3, the embodiment of this patent provides a kind of measuring device and method of infrared detector flatness under low temperature state, and described measuring device comprises special low temperature Dewar 2-18, and laser 2-13 is 1mw helium-neon laser , the converging optical system 2-14 is a laser beam mirror, aperture stop and convex lens with a focal length of 80mm, the photodetector 2-16 is an area array CCD, and the imaging optical system 15 is an optical magnifying lens with a fixed focal length of 110mm. The included angle between the axis and the laser beam is 40°, the high-precision three-dimensional displacement platform 2-12, the Dewar support 2-18, the optical shock-absorbing platform 2-11 and the data processing center 2-17 are a PC. The metal substrate 2-4 of the infrared detector placed in the special low-temperature Dewar 2-18 is 60mm away from the upper surface of the light-transmitting window 2-6, so the working distance of the measurement system should be greater than 60mm.
测量方法：Measurement methods:
1）将拼接完成的红外探测器装入低温杜瓦中，然后对杜瓦经行真空排气，使其真空度达到1×10-3torr以上，已达到良好的隔热效果；1) Put the spliced infrared detector into the low-temperature Dewar, and then vacuum exhaust the Dewar to make the vacuum degree above 1×10 -3 torr, which has achieved a good heat insulation effect;
2）将上述低温杜瓦连同杜瓦支架固定于所述光学避震平台上，使杜瓦内的金属基板大致位于上述激光三角位移测量装置的工作范围内；2) Fix the above-mentioned low-temperature Dewar together with the Dewar bracket on the optical shock-absorbing platform, so that the metal substrate in the Dewar is approximately within the working range of the above-mentioned laser triangular displacement measurement device;
3）测量装置定标，首先固定低温杜瓦，调整成像光学系统2-15和面阵CCD2-16使得激光光斑在CCD中心形成光斑面积最小的像，这时成像光学系统2-15和汇聚光学系统2-14的焦点大致重合；利用质心算法提取激光光斑在CCD面阵上投影的质心坐标，所述的激光光斑质心算法为利用光亮度为权值计算光斑中心坐标的一种算法。利用高精度三维位移平台2-12沿激光光束方向前后移动，每移动10μm，记录下激光光斑质心坐标与空间坐标，由此建立激光光斑的质心坐标与待测点的空间坐标的对映关系，为并利用二次曲线拟合，得到所需要的定标曲线方程；3) Calibration of the measurement device, first fix the low-temperature Dewar, adjust the imaging optical system 2-15 and the area array CCD2-16 so that the laser spot forms an image with the smallest spot area at the center of the CCD, at this time the imaging optical system 2-15 and the converging optics The focal points of systems 2-14 are roughly coincident; the centroid coordinates of the laser spot projected on the CCD array are extracted using the centroid algorithm, and the centroid algorithm of the laser spot is an algorithm for calculating the coordinates of the center of the spot using the brightness as the weight. Use the high-precision three-dimensional displacement platform 2-12 to move back and forth along the direction of the laser beam, and record the centroid coordinates and spatial coordinates of the laser spot every time it moves 10 μm, thereby establishing the mapping relationship between the centroid coordinates of the laser spot and the spatial coordinates of the point to be measured, To obtain the required calibration curve equation and use quadratic curve fitting;
4）调节高精度三维位移平台，使被测元件表面待测区域的三个顶点的激光光斑的质心坐标相同，并记录有这三个测量点所决定的高精度三维位移平台移动的平面，作为后续二维扫描的基准面；4) Adjust the high-precision three-dimensional displacement platform so that the coordinates of the center of mass of the laser spots at the three vertices on the surface of the component to be measured are the same, and record the moving plane of the high-precision three-dimensional displacement platform determined by these three measurement points as datum plane for subsequent 2D scans;
5）在待测区域中选取合适的扫描测量点，记录常温时每个扫描点上的激光光斑的质心坐标，并由定标曲线换算成空间坐标，完成室温元件平面度测量；5) Select a suitable scanning measurement point in the area to be measured, record the centroid coordinates of the laser spot on each scanning point at room temperature, and convert the calibration curve into spatial coordinates to complete the flatness measurement of room temperature components;
6）专用杜瓦2-18加入液氮后，通过测温电阻2-8获得金属基板2-4实时的温度数据，再对已选取好的测量点进行扫描测量，可以获得各个点得空间坐标数据，实时显示测量面的形变情况。当金属基板2-4温度和各测量点的激光光斑质心位置稳定后，就能得到红外焦平面探测器低温工作时的平面度；6) After the special Dewar 2-18 is added with liquid nitrogen, the real-time temperature data of the metal substrate 2-4 is obtained through the temperature measuring resistance 2-8, and then the selected measurement points are scanned and measured to obtain the spatial coordinates of each point The data shows the deformation of the measuring surface in real time. When the temperature of the metal substrate 2-4 and the position of the center of mass of the laser spot at each measurement point are stable, the flatness of the infrared focal plane detector at low temperature can be obtained;
二次定标法与系统测量精度：Secondary calibration method and system measurement accuracy:
由于测量系统在直入射模式下，激光光斑的物象关系是非线性的，所以在高精度测量时不宜使用线性定标法。在我们所关心的测量范围内，直入射式成像系统的光学放大倍率可近似为线性变化的，利用二次定标法可以提高测量的精度。图4.给出了在上述实施例的具体配置下线性定标法和二次定标法的拟合误差，线性定标法的拟合方差为0.59μm，二次定标法的拟合方差为0.23μm。Since the object-image relationship of the laser spot is nonlinear in the direct incident mode of the measurement system, it is not suitable to use the linear calibration method in high-precision measurement. In the measurement range we care about, the optical magnification of the direct-incidence imaging system can be approximated as a linear change, and the measurement accuracy can be improved by using the quadratic calibration method. Fig. 4. has provided the fitting error of linear calibration method and quadratic calibration method under the specific configuration of above-mentioned embodiment, and the fitting variance of linear calibration method is 0.59 μ m, the fitting variance of quadratic calibration method is 0.23 μm.
利用二次定标法，对本系统经行了测量精度实验。表1给出了在100μm量程内，本测量系统和商用松下HL-C2高精度激光三角位移传感器的测试结果对比（HL-C2的主要指标：工作距离110±15mm，激光束直径Φ80μm）。实验结果表明本测量系统在上述工作条件下测量误差极限（3σ）小于1.2μm。Using the quadratic calibration method, the measurement accuracy experiment of the system has been carried out. Table 1 shows the comparison of test results between this measurement system and the commercial Panasonic HL-C2 high-precision laser triangular displacement sensor in the range of 100 μm (the main indicators of HL-C2: working distance 110±15mm, laser beam diameter Φ80μm). The experimental results show that the measurement error limit (3σ) of the measurement system is less than 1.2 μm under the above working conditions.
表1测量精度对比实验Table 1 Measurement accuracy comparison experiment
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