CN209978841U - Transmission rotational symmetry aspheric surface detection equipment - Google Patents
Transmission rotational symmetry aspheric surface detection equipment Download PDFInfo
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- CN209978841U CN209978841U CN201921263819.1U CN201921263819U CN209978841U CN 209978841 U CN209978841 U CN 209978841U CN 201921263819 U CN201921263819 U CN 201921263819U CN 209978841 U CN209978841 U CN 209978841U
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Abstract
The utility model provides a transmission rotational symmetry aspheric surface check out test set, this equipment includes the laser instrument that sets gradually on the light path, collimating lens, focusing lens, the lens tray that awaits measuring, beam expanding lens and wavefront sensor, a first driver for driving focusing lens and removing along the optical axis direction, a second driver for driving the lens tray that awaits measuring and following the XY direction translation of perpendicular optical axis, a third driver for driving beam expanding lens and removing along the optical axis direction, and rotary displacement ware, rotate the lens that awaits measuring of placing in the spacing hole of lens of the lens tray that awaits measuring. The detection equipment can be used for quickly detecting the high-precision errors such as the processing eccentricity of the lens.
Description
Technical Field
The utility model relates to an optical element detects, especially a transmission rotational symmetry aspheric surface check out test set.
Background
The aspheric optical element has outstanding advantages in the aspects of improving aberration correction capability, improving imaging quality, simplifying optical system structure and the like, and is increasingly applied to optical systems. The aspheric plastic optical lens has the advantages of light weight, assembly space saving, impact resistance, easy generation of various geometric shapes and the like, and is widely applied in various fields such as industry, medical treatment, consumer electronics and the like. However, plastic lenses undergo heating, injection, pressure holding, cooling, and the like in the injection molding process, which results in aspherical lenses being prone to stress birefringence, refractive index unevenness, and errors in geometry such as profile, decentration, and asymmetry. Machining precision and speed are greatly improved along with the development of science and technology, but due to the influence of machining process errors, the quality of the lens needs to be detected at higher speed and higher precision. The main efficiency limiting factor for the current aspheric injection molding production is that most of the current measurement devices take a long time. The same lens requires different process instrumentation, which is time consuming for mass produced lenses. Especially in the detection of high-precision interferometers and contourmeters, the higher the required precision, the more difficult the measurement, and the longer the required test time. It would be very meaningful to have a primary screening of the lenses that can be achieved before high precision measurements.
The following lens detection schemes are commonly used at present: 1. an interferometer: the detection accuracy of the interferometer is high, but for this purpose, a certain compensation element is required to compensate for errors, and for a large aspheric surface, a split joint method is possibly adopted, which results in a limited dynamic range of the test and requires a longer test time. The detection of the local large aspheric surface degree of the aspheric surface is difficult, and in order to improve the resolution, the scanning interference in different areas is needed, and the whole three-dimensional surface shape and the error of the aspheric surface are obtained in a splicing mode. The requirement on the position control precision of the machine and the precision of a splicing algorithm is high, and especially the scanning splicing of the edge area with large aspheric surface slope is realized. Two times of clamping and adjustment are needed when two surfaces are measured, so that the consumed time is long. 2. Surface profiler: the method can be used for detecting the surface shape errors of two surfaces of the lens, and the detection process usually adopts discrete point sampling surface shape reconstruction. The section surface shape of the aspheric lens is scanned by a measuring head in a micro step along the direction of the mold filling flow channel and the direction vertical to the mold filling flow channel, and the surface shape deviation error of the mirror surface is calculated by the mirror surface design parameters input by internal software. The requirements of the position positioning precision of the measuring head and the displacement precision of the penetration measurement are higher, and the higher the precision required by the test, the larger the aspheric degree, and the longer the test time.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a main aim at overcomes prior art not enough, provides a transmission rotational symmetry aspheric surface check out test set, can be used for carrying out the high accuracy to lens machining error fast effectively and detect.
The utility model provides a transmission rotational symmetry aspheric surface check out test set, includes laser instrument, collimating lens, focusing lens, the lens tray that awaits measuring, beam expanding lens and wavefront sensor that set gradually on the light path, and with focusing lens looks coupling is used for the drive focusing lens is along the first driver of optical axis direction removal, with the lens tray that awaits measuring couples and is used for the drive the lens tray that awaits measuring is along the second driver of perpendicular optical axis XY direction translation, with beam expanding lens looks coupling is used for the drive the third driver that beam expanding lens removed along the optical axis direction, and with the lens tray that awaits measuring cooperatees the rotary displacement ware that sets up, rotary displacement ware is used for placing the lens that awaits measuring in the lens spacing hole of lens tray rotates to realize rotatory wavefront measurement.
Further:
the laser is a monochromatic semiconductor laser.
And light emitted by the laser enters the collimating lens through single-mode fiber coupling.
The wavefront sensor is a shack hartmann wavefront sensor.
A pinhole is arranged between the focusing lens and the lens tray to be measured.
The second driver is connected with the moving platform, and drives the moving platform to translate along the X Y direction perpendicular to the optical axis to drive the lens tray to translate.
The rotary displacer is mounted with the moving platform for simultaneous translation in the direction X Y with the moving platform.
The rotary shifter realizes 360-degree rotation through a direct-current servo motor.
The utility model has the advantages that:
the utility model provides a transmission rotational symmetry aspheric surface check out test set can be used to detect lens machining error based on wavefront sensing. With this inspection apparatus, by rotating the lens to be tested during wavefront measurement, a wavefront Coma aberration rotation characteristic is generated and this information is collected by the wavefront sensor. Use the utility model discloses a during check out test set, can contrast the testing result that utilizes wavefront Coma aberration rotation characteristic to obtain with the parameter of standard component to carry out quick high accuracy to errors such as lens processing eccentricity and detect, accomplish the screening of lens. Compared with the prior art, the utility model discloses check out test set based on wavefront sensing has fast online, and the device is simple, with low costs, environmental disturbance influence advantage such as little, the utility model discloses a data that check out test set recorded are comprehensive, more can reflect the operating condition in the effective bore of lens to measuring time has very big promotion.
Drawings
Fig. 1 is a schematic structural view of a transmission rotationally symmetric aspheric surface detection apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a rotary displacer according to an embodiment of the present invention;
fig. 3 is a schematic block diagram of a system configuration according to an embodiment of the present invention.
Detailed Description
The embodiments of the present invention will be described in detail below. It should be emphasized that the following description is merely exemplary in nature and is not intended to limit the scope of the invention or its application.
Referring to fig. 1 to 3, in an embodiment, a transmissive rotationally symmetric aspheric surface inspection apparatus includes a laser 1, a collimating lens 3, a focusing lens 4, a lens tray 6 to be inspected, a beam expander 7, a wavefront sensor 8, a first driver coupled to the focusing lens 4 for driving the focusing lens 4 to move along an optical axis, a second driver coupled to the lens tray 6 to be inspected for driving the lens tray 6 to move along an XY direction perpendicular to the optical axis, a third driver coupled to the beam expander 7 for driving the beam expander 7 to move along the optical axis, and a rotational shifter 9 disposed in cooperation with the lens tray 6 to be inspected, where the rotational shifter 9 is configured to rotate a lens 10 to be inspected placed in a lens limiting hole of the lens tray 6 to be inspected, to enable rotational wavefront measurement. The utility model discloses in, XY direction is the X axle direction and the Y axle direction of rectangular coordinate system under the normal meaning promptly.
In a preferred embodiment, the laser 1 is a monochromatic semiconductor laser.
In a preferred embodiment, the light emitted by the laser 1 is coupled into the collimating lens 3 via a single mode optical fiber 2.
In a preferred embodiment, the wavefront sensor 8 is a shack hartmann wavefront sensor.
In a preferred embodiment, a pinhole 5 is provided between the focusing lens and the lens tray to be tested.
In a preferred embodiment, the inspection apparatus further includes a moving platform (not shown) for carrying the lens tray 6 to be inspected, and the second driver is connected to the moving platform, and drives the lens tray 6 to be inspected to translate by driving the moving platform to translate along the direction X Y perpendicular to the optical axis.
In a more preferred embodiment, the rotary displacer 9 is mounted with the moving platform for simultaneous translation in direction X Y with the moving platform.
In a preferred embodiment, the rotary displacer 9 is made to rotate 360 ° by means of a dc servomotor.
The following describes specific embodiments and applications of the present inspection apparatus for inspecting ophthalmic lenses.
The wavefront detection device as shown in fig. 1 to 3, a main light source is a monochromatic semiconductor laser 1 with adjustable power, a light-passing single-mode fiber 2 is coupled into a collimating lens 3, in order to improve the quality of light beams passing through the devices, a focusing lens is added behind the collimating lens 3 to focus the light beams onto a pinhole 5, an approximately ideal small point light source is obtained, the point light source with a certain NA passes through a lens to be measured, a parallel light beam can be approximately obtained by adjusting the distance between a point light source and a lens 10 to be measured, a beam expander 7 with a certain multiplying power is added in order to fully utilize the effective area of a wavefront detector, and at the moment, the parallel light reaches a shack hartmann wavefront sensor 8 after being expanded by the beam expander 7.
The wavefront detection device is shown in fig. 1, the lens tray to be detected can drive the moving platform through the second driver, so that the translation in the XY direction is realized, the continuous positioning measurement is realized, and the rotation measurement of the lens on the lens tray to be detected can be realized through the rotary shifter. The beam expander can realize displacement along the optical axis direction through the control of the third driver. Because the beam expander is used for amplifying the wavefront to be measured, the actual shape of the wavefront is not influenced by changing the amplification factor.
The rotary displacement device can control the rotary displacement by a stepping motor. A small rotary shifter is designed at the position of a limiting hole of the lens tray to be measured, 360-degree rotation can be achieved through the direct-current servo motor, the lens to be measured can be moved to a focusing position through an X/Y driver at the position of the lens tray to be measured, and rotary wavefront measurement is achieved.
When the device is used, the light spot signals obtained by the wavefront sensor 8 can be sent to a computer through a collecting card to carry out wavefront algorithm processing, a wavefront diagram is reconstructed, and the fitting coefficient of a Fringe Zernike polynomial is obtained. The tested node is the rotational symmetry center of the third-order Coma aberration, and the quality of the lens can be analyzed and judged according to the size and the direction of the node and the rotary vector diameter obtained through detection.
Specifically, during detection, the optimal focusing position is adjusted, collimation of the optical system is tested, system calibration is performed based on the wave surface of the wavefront system (an ideal standard ball can be adopted), and the position of the lens limiting hole is adjusted to achieve calibration. Specifically, with the system, before the lens to be tested is placed on the lens tray to be tested, the first driver is controlled to search two positions symmetrical about the focal plane of the focusing lens, so that the wave fronts are concentric; controlling the third driver to find two positions which are symmetrical about the focal plane of the beam expander so that the wave fronts are concentric; and placing a standard ball in the lens limiting hole at the set position of the lens tray to be detected, controlling the first driver and the second driver to adjust the focusing position of the standard ball, and searching the positions of the focusing lens and the lens tray to be detected corresponding to the situation of obtaining the wavefront close to the plane.
And rotating the lens to be measured k times by a rotary shifter, wherein k > is 4, acquiring information by the wavefront sensor every time, and acquiring and recording a three-order Coma aberration rotation distribution diagram of the single view field. The distribution map and parameter range of the vector diameter can be compared with a standard test lens, and the size of the eccentricity error can be determined according to the deviation. The detection result can be used for judging the processing quality of the injection molding aspheric surface.
The foregoing is a more detailed description of the present invention, taken in conjunction with the specific/preferred embodiments thereof, and it is not intended that the invention be limited to the specific embodiments shown and described. For those skilled in the art to which the invention pertains, a plurality of alternatives or modifications can be made to the described embodiments without departing from the concept of the invention, and these alternatives or modifications should be considered as belonging to the protection scope of the invention.
Claims (8)
1. The utility model provides a transmission rotational symmetry aspheric surface check out test set which characterized in that, includes laser instrument, collimating lens, focusing lens, the lens tray that awaits measuring, beam expanding lens and wavefront sensor that sets gradually on the light path, and with focusing lens looks coupling is used for driving focusing lens is along the first driver of optical axis direction removal, with the lens tray that awaits measuring looks coupling is used for driving the lens tray that awaits measuring is along the second driver of the XY direction translation of perpendicular optical axis, with beam expanding lens looks coupling is used for driving beam expanding lens is along the third driver of optical axis direction removal, and with the rotatory displacer that lens tray that awaits measuring cooperatees and sets up, rotatory displacer is used for rotating the lens that awaits measuring that places in the lens spacing hole of lens tray that awaits measuring to realize rotatory wavefront measurement.
2. The transmissive rotationally symmetric aspheric detection device of claim 1, wherein the laser is a monochromatic semiconductor laser.
3. The transmissive rotationally symmetric aspheric detection device of claim 1, where the light from the laser is coupled into the collimating lens through a single mode fiber.
4. The transmissive rotationally symmetric aspheric detection device of claim 1, wherein a pinhole is provided between the focusing lens and the lens tray under test.
5. The transmissive rotationally symmetric aspheric detection device of claim 1, wherein the wavefront sensor is a shack hartmann wavefront sensor.
6. The transmissive rotationally symmetric aspheric inspection device of any of claims 1 to 5, further comprising a translation stage for carrying the lens tray under test, wherein the second driver is coupled to the translation stage for driving the translation stage in translation in direction X Y perpendicular to the optical axis.
7. The transmissive rotationally symmetric aspheric detection device of claim 6, wherein the rotary displacer is mounted with the moving stage for simultaneous translation in direction X Y with the moving stage.
8. The transmissive rotationally symmetric aspheric detection device according to any of claims 1 to 5, characterized in that the rotary displacer is rotatable through a 360 ° range by means of a DC servo motor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921263819.1U CN209978841U (en) | 2019-08-06 | 2019-08-06 | Transmission rotational symmetry aspheric surface detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921263819.1U CN209978841U (en) | 2019-08-06 | 2019-08-06 | Transmission rotational symmetry aspheric surface detection equipment |
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| CN209978841U true CN209978841U (en) | 2020-01-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110319793A (en) * | 2019-08-06 | 2019-10-11 | 清华大学深圳研究生院 | A kind of transmission rotational symmetric aspheric detection system and method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110319793A (en) * | 2019-08-06 | 2019-10-11 | 清华大学深圳研究生院 | A kind of transmission rotational symmetric aspheric detection system and method |
| CN110319793B (en) * | 2019-08-06 | 2024-03-22 | 清华大学深圳研究生院 | Transmission rotation symmetry aspheric surface detection system and method |
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