CN103262266A - 包括选择性发射极的太阳能电池的制造方法 - Google Patents

包括选择性发射极的太阳能电池的制造方法 Download PDF

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Publication number
CN103262266A
CN103262266A CN2011800480183A CN201180048018A CN103262266A CN 103262266 A CN103262266 A CN 103262266A CN 2011800480183 A CN2011800480183 A CN 2011800480183A CN 201180048018 A CN201180048018 A CN 201180048018A CN 103262266 A CN103262266 A CN 103262266A
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China
Prior art keywords
solar cell
cell substrate
glassy layer
alloy
dopant
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Pending
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CN2011800480183A
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English (en)
Chinese (zh)
Inventor
乔兰塔·奥考斯卡-奥策尔
乔格·伊森伯格
安德里亚斯·特佩
马蒂亚斯·盖格
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Centrotherm Photovoltaics AG
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Centrotherm Photovoltaics AG
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Filing date
Publication date
Priority claimed from DE102010033030A external-priority patent/DE102010033030A1/de
Priority claimed from DE102010054182A external-priority patent/DE102010054182A1/de
Application filed by Centrotherm Photovoltaics AG filed Critical Centrotherm Photovoltaics AG
Publication of CN103262266A publication Critical patent/CN103262266A/zh
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/068Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0236Special surface textures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Sustainable Development (AREA)
  • Photovoltaic Devices (AREA)
CN2011800480183A 2010-08-02 2011-08-02 包括选择性发射极的太阳能电池的制造方法 Pending CN103262266A (zh)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
DE102010033030.2 2010-08-02
DE102010033030A DE102010033030A1 (de) 2010-08-02 2010-08-02 Verfahren zur Herstellung einer Solarzelle mit einem selektiven Emitter
DE102010044313 2010-09-03
DE102010044313.1 2010-09-03
DE102010054182.6 2010-12-10
DE102010054182A DE102010054182A1 (de) 2010-09-03 2010-12-10 Verfahren zur Herstellung einer Solarzelle mit einem selektiven Emitter
PCT/DE2011/075181 WO2012022349A2 (de) 2010-08-02 2011-08-02 Verfahren zur herstellung einer solarzelle mit einem selektiven emitter

Publications (1)

Publication Number Publication Date
CN103262266A true CN103262266A (zh) 2013-08-21

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011800480183A Pending CN103262266A (zh) 2010-08-02 2011-08-02 包括选择性发射极的太阳能电池的制造方法

Country Status (4)

Country Link
EP (1) EP2601691A2 (de)
KR (1) KR20130108271A (de)
CN (1) CN103262266A (de)
WO (1) WO2012022349A2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107394012A (zh) * 2017-08-18 2017-11-24 常州亿晶光电科技有限公司 一种硅片激光掺杂se的扩散工艺
CN110896116A (zh) * 2018-09-10 2020-03-20 浙江清华柔性电子技术研究院 晶体硅太阳能电池扩散层及其制备方法、电池、组件
CN111180530A (zh) * 2019-12-27 2020-05-19 天津爱旭太阳能科技有限公司 一种选择性发射极电池的制备方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8664015B2 (en) * 2011-10-13 2014-03-04 Samsung Sdi Co., Ltd. Method of manufacturing photoelectric device
DE102012018746A1 (de) * 2012-09-21 2014-03-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Dotierung von Halbleitersubstraten
US8912071B2 (en) 2012-12-06 2014-12-16 International Business Machines Corporation Selective emitter photovoltaic device
CN104157736A (zh) * 2014-08-15 2014-11-19 内蒙古日月太阳能科技有限责任公司 太阳能电池制备方法及太阳能电池

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6429037B1 (en) * 1998-06-29 2002-08-06 Unisearch Limited Self aligning method for forming a selective emitter and metallization in a solar cell
US7615393B1 (en) * 2008-10-29 2009-11-10 Innovalight, Inc. Methods of forming multi-doped junctions on a substrate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010010813A1 (de) 2010-03-03 2011-09-08 Centrotherm Photovoltaics Ag Verfahren zur Dotierung eines Halbleitersubstrats und Solarzelle mit zweistufiger Dotierung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6429037B1 (en) * 1998-06-29 2002-08-06 Unisearch Limited Self aligning method for forming a selective emitter and metallization in a solar cell
US7615393B1 (en) * 2008-10-29 2009-11-10 Innovalight, Inc. Methods of forming multi-doped junctions on a substrate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107394012A (zh) * 2017-08-18 2017-11-24 常州亿晶光电科技有限公司 一种硅片激光掺杂se的扩散工艺
CN110896116A (zh) * 2018-09-10 2020-03-20 浙江清华柔性电子技术研究院 晶体硅太阳能电池扩散层及其制备方法、电池、组件
CN111180530A (zh) * 2019-12-27 2020-05-19 天津爱旭太阳能科技有限公司 一种选择性发射极电池的制备方法

Also Published As

Publication number Publication date
KR20130108271A (ko) 2013-10-02
WO2012022349A2 (de) 2012-02-23
EP2601691A2 (de) 2013-06-12
WO2012022349A3 (de) 2013-07-18

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Application publication date: 20130821