CN103261106A - Method for manufacturing glass sheet, and apparatus for manufacturing glass sheet - Google Patents
Method for manufacturing glass sheet, and apparatus for manufacturing glass sheet Download PDFInfo
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- CN103261106A CN103261106A CN2012800039617A CN201280003961A CN103261106A CN 103261106 A CN103261106 A CN 103261106A CN 2012800039617 A CN2012800039617 A CN 2012800039617A CN 201280003961 A CN201280003961 A CN 201280003961A CN 103261106 A CN103261106 A CN 103261106A
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- material glass
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/067—Forming glass sheets combined with thermal conditioning of the sheets
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
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- General Chemical & Material Sciences (AREA)
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- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The present invention relates to a method for manufacturing a glass sheet, and an apparatus for manufacturing the glass sheet. During manufacturing of a glass sheet by the present invention, glass raw material is melted to obtain molten glass, and the molten glass is supplied to a mold disposed in a molding space surrounded by molding furnace walls, which are the furnace walls of a molding furnace. A sheet glass is molded by using a downdraw process from the molten glass supplied to the mold. The sheet glass is then annealed in an annealing space which is a space located below the molding space, the annealing space being surrounded by annealing furnace walls, which are the furnace walls of the annealing furnace. The annealed sheet glass is cut in a cutting space located below the annealing furnace, and a glass sheet is obtained. At this time, atmospheric pressure control is performed so that the atmospheric pressure in a furnace-external space located above the cutting space and inside a structure-internal space defined by the outer surfaces of the annealing furnace walls, the outer surfaces of the molding furnace walls, and the inner wall surfaces of a structure for housing the molding space, the annealing space, and the cutting space, is greater than the atmospheric pressure outside the structure.
Description
Technical field
The present invention relates to manufacture method and the sheet glass manufacturing installation of sheet glass.
Background technology
Various methods such as drop-down (down draw) method of existence use are in the past made the method for sheet glass.For example, in overflow down draw (the overflow down draw) method as one of method of making sheet glass, at first, melten glass is supplied in the formed body that is configured in the moulding stove.Then, the melten glass of supply is overflowed from formed body.Then, make the melten glass that overflows be shaped to the glass (sheet material glass) of continuous sheet at the interflow, bottom of formed body.In addition, below the sheet material glass that collaborates in the bottom of formed body further is carried to, and in annealing furnace, anneal.Then, the sheet material severing of glass after will annealing in cutting off the space is desired size, forms sheet glass.
When making sheet glass, require stably to produce the sheet glass that satisfies specified quality.For example, in patent documentation 1 disclosed technology, make under the situation of sheet glass in the use overflow downdraw, air pressure to the outer space of moulding stove and/or annealing furnace pressurizes, the upstream that has reduced the sheet material glass in the annealing furnace thus and produced, and suppressed temperature variation in the annealing furnace.And, reduced plane strain thus.
The prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2009-173525 communique
Summary of the invention
Invent problem to be solved
But also there are the following problems: only under the situation that the outer space of moulding stove and/or annealing furnace is pressurizeed, stably manufactured satisfies the sheet glass of specified quality fully.For example, existence can't fully suppress particle and adhere to such problem to sheet material glass or sheet glass in moulding stove or the annealing furnace.If particle is attached on the sheet glass, then exist problems such as sheet glass generation damages.In addition, in recent years, along with the maximization of sheet glass, the deflection of the sheet glass in the final manufacturing procedure of sheet glass (grinding, bale packing etc.) or the indicating meter manufacturing process increases.Therefore, in the final manufacturing procedure or indicating meter manufacturing process of sheet glass, the damage of the sheet glass that is caused by particle can cause the problem of sheet glass breakage remarkable.
Therefore, problem of the present invention is to provide a kind of manufacture method of sheet glass and the manufacturing installation of sheet glass, and this method can solve aforesaid problem, can stably produce the sheet glass that satisfies specified quality.
Be used for solving the method for problem
The 1st mode of the present invention is a kind of manufacture method of sheet glass.This manufacture method has: the fusion operation wherein, forms melten glass with the frit fusion; Supply with operation, wherein, described melten glass is supplied to formed body, described formed body is configured in by the furnace wall of moulding stove, is the molding space that the moulding furnace wall surrounds; Molding procedure wherein, uses glass tube down-drawing to be shaped to sheet material glass by melten glass in described formed body; Annealing operation wherein, is annealed to described sheet material glass in the space in annealing, and described annealing space is the space that is positioned at described molding space below, and it is by the furnace wall of described annealing furnace, namely the furnace wall of annealing surrounds; Cut off operation, wherein, be arranged in described annealing furnace below the described sheet material glass of cut-out space after to annealing cut off.
Carry out air pressure control, make the air pressure of stove space outerpace greater than the air pressure in the outside of buildings, described buildings accommodates described molding space, described annealing space and described cut-out space, and described stove space outerpace is positioned at the top of being divided the described cut-out space in the buildings space that obtains by the outside surface of the outside surface of the inner-wall surface of described buildings, described moulding furnace wall and described annealing furnace wall.
The 2nd mode of the present invention is a kind of manufacturing installation of sheet glass.This manufacturing installation comprises: the moulding stove, and it is to form by utilizing the moulding furnace wall that the molding space that is shaped to sheet material glass by melten glass is surrounded; Annealing furnace, it is positioned at the below of described moulding stove, and this annealing furnace is to form by utilizing the annealing furnace wall to surround for the annealing space that described sheet material glass is annealed; Shut-off device, it is configured in the cut-out space of the below that is arranged in described annealing furnace, and this shut-off device is used for the described sheet material glass after the annealing is cut off; Control unit, it is used for carrying out air pressure control, make the air pressure of stove space outerpace greater than the air pressure in the outside of buildings, described buildings accommodates described molding space, described annealing space and described cut-out space, and described stove space outerpace is positioned at the top of being divided the described cut-out space in the buildings space that obtains by the outside surface of the outside surface of the inner-wall surface of described buildings, described moulding furnace wall and described annealing furnace wall.
In addition, as preferred the 1st technical scheme, in the control of described air pressure, the air pressure of stove space outerpace is made as P1, the air pressure in the outside of buildings is made as under the situation of P2, according to the mode that the relation of 0＜P1-P2≤40Pa is set up the air pressure of stove space outerpace is controlled.
In addition, as preferred the 2nd technical scheme, in described air pressure control, the air pressure that cuts off the space is made as under the situation of P3, further the air pressure that cuts off the space is controlled according to the mode that the relation of 0＜P3-P2≤40Pa is set up.
In addition, as preferred the 3rd technical scheme, in air pressure control, the air pressure that cuts off the space is controlled greater than the mode of the air pressure that cuts off the space according to the air pressure in annealing space.
In addition, as preferred the 4th technical scheme, in air pressure control, according to the mode that the air pressure the closer to the upstream wing furnace space outerpace of the flow direction of sheet material glass becomes more big the air pressure of stove space outerpace is controlled.
In addition, as preferred the 5th technical scheme, in described annealing operation or described annealing space, for the central part at the width of described sheet material glass, make tension force act on the flow direction of sheet material glass, at least add that from ANNEALING OF GLASS point temperature strain point temperature that 150 ℃ temperature becomes glass deducts the temperature province of 200 ℃ temperature in the temperature of the central part of the width of described sheet material glass, carry out temperature control according to the speed of cooling mode faster than the speed of cooling at the both ends of described width of the central part of the width of described sheet material glass.
In addition, as preferred the 6th technical scheme, in described molding procedure or described molding space, be the zone more than the softening point temperature of glass in the temperature of the central part of the width of described sheet material glass, the uniform mode of temperature that is lower than the temperature of the folded central part in described both ends and described central part according to the temperature at the both ends of the width of described sheet material glass is controlled the temperature of described sheet material glass.Further, in described annealing operation or described annealing space, for the tension force at the flow direction of the central part effect sheet material glass of the width of described sheet material glass, in the softening point temperature and zone strain point temperature at glass more than of temperature less than glass of the described central part of described sheet material glass, the mode that reduces to described both ends from described central part according to the temperature distribution of the width of described sheet material glass is controlled the temperature of described sheet material glass.Further, be in the temperature province of strain point temperature of glass in the temperature of the described central part of described sheet material glass, control the temperature of described sheet material glass according to the mode of the thermograde of the described both ends of the width of eliminating described sheet material glass and described central part.
In the 6th technical scheme, the thermostat unit that is used for the described temperature of control can be arranged on the furnace inner space that is made of described molding space and described annealing space.
In addition, as preferred the 7th technical scheme, in described annealing operation or described annealing space, for the tension force at the flow direction of the central part effect sheet material glass of the width of described sheet material glass, in the zone of temperature less than the strain point temperature of glass of the described central part of described sheet material glass, the mode that reduces to described central part according to the described both ends from described sheet material glass is controlled the temperature of described sheet material glass.
In addition, as preferred the 8th technical scheme, in described annealing operation or described annealing space, in the transfer roller of the described sheet material glass of carrying, making the temperature that is arranged on described sheet material glass is that the circumferential speed of transfer roller in downstream side of the position of ANNEALING OF GLASS point temperature is more than the second-order transition temperature and the circumferential speed of the transfer roller of the temperature province below the softening point temperature of glass fast 0.03%～2% than the temperature that is arranged on described sheet material glass.
Described the 1st～the 8th optimal technical scheme can be applicable to the manufacturing installation of the sheet glass of the manufacture method of sheet glass of described the 1st mode and the 2nd mode separately respectively, further, the compounding technology scheme that obtains even make up at least 2 technical schemes in described the 1st～the 8th the optimal technical scheme also can be applicable to the manufacturing installation of the sheet glass of the manufacture method of sheet glass of the 1st mode and the 2nd mode respectively.
The effect of invention
The particle that utilizes the present invention can suppress on the sheet glass adheres to.
Description of drawings
Fig. 1 is the schema of a part of the manufacture method of the sheet glass that relates to of present embodiment.
Fig. 2 is the synoptic diagram that mainly shows fusing device included in the sheet glass manufacturing installation.
Fig. 3 is the synoptic diagram that interior of building is shown.
Fig. 4 is the side schematic view roughly of shaped device.
Fig. 5 is the synoptic diagram for the expression interior of building in space in the explanation buildings.
Fig. 6 is the control module figure of control device.
Fig. 7 is the synoptic diagram that the interior of building that variation 1A relates to is shown.
Fig. 8 is the synoptic diagram that the interior of building that variation 1F relates to is shown.
Embodiment
Following statement regulation in this specification sheets is as follows.
The central part of sheet material glass refers to the center of sheet material glass width in the width of sheet material glass width.
The end of sheet material glass refers to that edge 100mm from sheet material glass width is with interior scope.
When strain point temperature referred to that glass viscosity is made as η, log η was the temperature of 14.5 sheet glass.
The annealing point temperature refers to that log η is the temperature of 13 glass.
Softening point temperature refers to that log η is the temperature of 7.6 glass.
The temperature of the glass when second-order transition temperature refers to that cooled liquid changes vitreousness into.
The present inventor finds: only pressurize by the air pressure to the outer space of moulding stove and/or annealing furnace and the reason that can't realize sufficient stably manufactured is in the buildings and the buildings outside between the magnitude relationship of air pressure.More specifically, the reason of having found to make the quality of sheet glass to descend is that the air pressure in buildings flows in the buildings from the buildings outside less than air under the situation of the air pressure in the buildings outside.Therefore, outside buildings, in the side inflow buildings, considered to improve the resistance to air loss of buildings in order to prevent air, but the gap of eliminating buildings fully, it is very difficult making it airtight fully.Air flows to the air pressure lower from the air pressure higher position, so under the situation of the air pressure in the buildings less than the air pressure in the buildings outside, the air in the buildings outside can flow in the buildings by the gap of buildings.From the gap by this buildings, the buildings outside etc. and leaked-in air can cause that particle on the sheet glass adheres to or moulding stove or annealing furnace in temperature controlled precise decreasing, therefore can't stably manufactured satisfy the sheet glass of specified quality.Therefore, the present inventor draws following opinion: the problem of adhering to for the particle that solves sheet glass, as long as by making air pressure in the buildings be higher than the air pressure in the buildings outside, the air that suppresses the buildings outside thus flows in the buildings and gets final product.In addition, also draw following opinion: in order to suppress the temperature controlled precise decreasing in moulding stove or the annealing furnace, as long as the difference of the air pressure in the air pressure in the control buildings and the buildings outside.
Below, the glass plate manufacturing method of the sheet glass manufacturing installation 100 that uses present embodiment being made sheet glass with reference to accompanying drawing describes.
(summary of the manufacture method of sheet glass)
Fig. 1 is the schema of a part of the manufacture method of the sheet glass that relates to of present embodiment.Below, use the manufacture method of the sheet glass of Fig. 1 to describe.
Sheet glass is made via various operations in building B and is obtained.Particularly, as shown in Figure 1, sheet glass is made through comprising fusion operation ST1, clarification operation ST2, the operation that homogenizes ST3, supply with operation ST4, molding procedure ST5, annealing operation ST6 and cutting off the various operations of operation ST7.Below, these operations are described.
In fusion operation ST1, by being heated, frit make its fusion form melten glass.In clarification operation ST2, melten glass is clarified.In the operation ST3 that homogenizes, melten glass is homogenized.
In supplying with operation ST4, melten glass is supplied to be used to the shaped device 300 (with reference to Fig. 2) that carries out moulding.In molding procedure ST5, melten glass is shaped to the sheet material glass SG of sheet.Preferably by glass tube down-drawing, particularly overflow downdraw melten glass is shaped to the sheet material glass SG of sheet.In annealing operation ST6, the sheet material glass SG of moulding in molding procedure ST5 is annealed.In cutting off operation ST7, cut off to form sheet glass G (with reference to Fig. 3) with the sheet material glass SG (with reference to Fig. 3) after the annealing thereby every the length of regulation.
Need to prove, after the sheet glass G that the length of regulation has carried out cutting off, further be cut off, thereby and grind and cut/grind, clean, check formation sheet glass (do not mark mark and only be expressed as the sheet glass that sheet glass means final manufacturing).
(summary of sheet glass manufacturing installation 100)
Fig. 2 is the synoptic diagram that mainly shows fusing device included in the sheet glass manufacturing installation 100 200.Fig. 3 is the synoptic diagram (need to prove, represent shaped device 300 and moulding stove 40 and annealing furnace 50 etc. by schematic schematic cross-section among Fig. 3) of inside that holds or be equipped with the building B of various devices contained in the sheet glass manufacturing installation 100 etc.Below sheet glass manufacturing installation 100 is described.
Sheet glass manufacturing installation 100 is configured in the building B, mainly possesses fusing device 200, shaped device 300 and shut-off device 400.
(formation of fusing device 200)
(formation of shaped device 300)
Fig. 4 is the schematic side elevational view of shaped device 300.Fig. 5 is the synoptic diagram for the inside of the expression building B of space S in the explanation buildings.
Shaped device 300 is be used to the device that carries out molding procedure ST5 and annealing operation ST6.
Shaped device 300 mainly has formed body 310, atmosphere partition member 320, cooling roller 330, cooling temperature adjustment unit 330a, transfer roller 340a～340h and temperature adjustment unit 350a～350g (with reference to Fig. 4).
Below its formation is described.
(formed body 310)
As shown in Figure 3, formed body 310 is positioned at the upper section of shaped device 300, and it has the function that the melten glass (representing with symbol M G) that will flow out from fusing device 200 is shaped to the sheet material glass of sheet among Fig. 3, Fig. 4.The cross-sectional shape that formed body 310 cuts off in the vertical direction has wedge-type shape, and it is made of brick.
(atmosphere partition member 320)
As shown in Figure 3 and Figure 4, atmosphere partition member 320 is near the plate-shaped members that are configured in the bottom 313 of formed body 310.Almost horizontal arrangement is in the both sides of the thickness direction of melten glass for atmosphere partition member 320, and described melten glass flows to the downstream side of the 1st direction then at the interflow, 313 places, bottom of formed body 310.Atmosphere partition member 320 is brought into play function as adiabatic material.That is, atmosphere partition member 320 suppresses heat from the downward side shifting of the upside of atmosphere partition member 320 thus by separating its space up and down.
(cooling roller 330)
Cooling roller 330 is configured in the below of atmosphere partition member 320.In addition, cooling roller 330 be disposed at the both sides of thickness direction of melten glass and its width two side portions near, described melten glass flows to the downstream side of the 1st direction then at the interflow, 313 places, bottom of formed body 310.Cooling roller 330 contacts with the two side portions of the width of the melten glass that collaborates at 313 places, bottom of formed body 310, thus this melten glass is cooled off.More specifically, cooling roller 330 is pulled down to the downstream side of the 1st direction with melten glass, cools off in desirable thickness formed sheet glass SG thus.Need to prove that in this specification sheets, the direction that sheet material glass SG is flowed is called the 1st direction.
Herein, formed body 310, atmosphere partition member 320 and cooling roller 330 are configured among the molding space S1 (space of representing with left side oblique line of Fig. 5).Molding space S1 is by the furnace wall of moulding stove 40, is the inner face of moulding furnace wall 41 and the top plane FS1 that comprises partition member 42 and the space that surrounds.Need to prove that partition member 42 is the parts that are separated into moulding stove 40 (downstream end of the 1st direction of moulding furnace wall 41) and annealing furnace described later 50 (upstream extremity of the 1st direction of annealing described later furnace wall 51), it has used the parts of writing board shape.Moulding furnace wall 41 refers to the furnace wall of moulding stove 40, and the cross-sectional shape that cuts off along the 1st direction has the shape of コ.In moulding stove 40, carry out molding procedure ST5.To be called furnace inner space by the space that molding space S1 and annealing space S 2 described later constitute.
(transfer roller 340a～340h)
(temperature adjustment unit 350a～350g, cooling temperature adjustment unit 330a)
Herein, cooling is configured in the molding space S1 (space of representing with left side oblique line among Fig. 5) with temperature adjustment unit 330a.
In addition, transfer roller 340a～340h and temperature adjustment unit 350a～350g are configured in the annealing space S 2 (space of representing with right side oblique line of Fig. 5).Annealing space S 2 refers to the space that the annealing furnace 50 by the below that is configured in moulding stove 40 forms.More specifically, its be by the furnace wall of annealing furnace 50, namely anneal furnace wall 51 inner face, comprise partition member 42 following plane FS2, comprise the furnace wall 51 of annealing the plane FS3 of downstream end face of the 1st direction and the space that surrounds.
In annealing space S 2, utilize transfer roller 340a～340h with the downstream side traction of sheet material glass SG to the 1st direction, make the annealing operation ST6 of sheet material glass SG annealing (passing to Hookean region through the visco-elasticity zone from adhesive region) thus.Among the annealing operation ST6, the temperature of the sheet material glass of temperature adjustment unit 350a～350g SG is adjusted in order to suppress plane strain and the percent thermal shrinkage of sheet material glass SG.Need to prove, temperature adjustment unit 350a～350g separately near, dispose the temperature sensor of the atmosphere temperature detecting unit that the conduct more than 2 detects near the atmosphere temperature the sheet material glass SG along the width of sheet material glass SG.This temperature sensor more than 2 is called temperature sensor unit 380 (with reference to Fig. 6) herein.
(shut-off device 400)
In shut-off device 400, cut off operation ST7.Shut-off device 400 is configured in the cut-out space S 3 (description) of the below that is arranged in annealing furnace 50.Shut-off device 400 is from cutting off with respect to the vertical direction of the length face of the sheet material glass SG sheet material glass SG to the downstream side that flows to the 1st direction shaped device 300.Thus, sheet material glass SG forms the sheet glass G with specified length more than 2.
(space S in the buildings)
Space S refers to the space of having removed moulding furnace wall 41 and molding space S1 and annealing furnace wall 51 and annealing space S 2 (with reference to the dash area of the grid of Fig. 5) in the space that the inner face by building B surrounds in the buildings.Space S is by the inner face (inner-wall surface) that accommodates molding space S1, annealing space S 2 and cut off the building B of space S 3 in the buildings, the outside of the outside of moulding furnace wall 41 and annealing furnace wall 51 and the space that marks off.
Space S is separated into space more than 2 because being configured in the interior plate 411,412,413 of building B in the buildings.Plate 411,412,413 has as the effect that is used for space S in the buildings is divided into the partition member in the space more than 2.Particularly, space S is separated into the outside superjacent air space S5 of moulding stove, below, moulding stove outside space S 6, annealing furnace space outerpace S7 and cuts off space S 3 by plate 411,412,413 in the buildings.But, be not particularly limited for the quantity of plate (the separation number in space in the buildings) and the height location in the 1st direction that is provided with plate.
The outside superjacent air space S5 of moulding stove be in buildings in the space S below the top of plate 411 and building B folded space.Plate 411 be configured in its height location close to the top of formed body 310 and with the position of the almost identical height in top of moulding furnace wall 41.
Below, moulding stove outside space S 6 is formed in the space than the downstream side of more close the 1st direction of the outside superjacent air space S5 of moulding stove.Particularly, moulding stove outside below space S 6 be in buildings in the space S by the folded space of plate 411 and plate 412.Near plate 412 is positioned at the 1st direction of moulding furnace wall 41 according to its height location the mode of downstream end disposes.The regional A1 that moulding stove outside below space S 6 comprises is 310 corresponding with formed body (particularly, formed body 310 the position is set identical with height location).
Annealing furnace space outerpace S7 is formed in the space than the downstream side of below, moulding stove outside space S 6 more close the 1st directions.Annealing furnace space outerpace S7 be in buildings in the space S by the folded space of plate 412 and plate 413.Bed 413 is configured in the position that its height location is positioned at the downstream end of the 1st direction that approaches annealing furnace wall 51.
In addition, annealing furnace space outerpace S7 is that to make the atmosphere temperature of the sheet glass G that flows in the annealing space S 2 of identical with the height location of annealing furnace space outerpace S7 (namely be equivalent to slave plate 412 below distance above plate 413) for example be 800 ℃～110 ℃ space; Perhaps, annealing furnace space outerpace S7 comprises the space that makes the sheet glass G that flows become the space of (strain point temperature-5 ℃) from (annealing point temperature+5 ℃) in annealing space S 2.
Cut off space S 3 and be formed in the space in downstream side of the 1st direction of annealing furnace space outerpace S7.Particularly, cutting off space S 3 is that above the bottom by plate 413 and building B folded space in the space S in buildings.
Herein, moulding furnace wall 41 and annealing furnace wall 51 for example are made of refractory materials or thermal insulation material etc.In addition, for building B, employed well-known refractory body etc. in the time of can being suitable for the construction of buildings in general.
(control device 500)
Fig. 6 is the control module figure of control device 500.
Particularly, as shown in Figure 6, control device 500 is used for carrying out the driving control of the 1st driver element 390 and the driving control of the 2nd driver element 450, described the 1st driver element 390 is used for carrying out the temperature adjustment control of temperature adjustment unit 350a～350g, and described the 2nd driver element 450 is used for driving cooling roller 330, transfer roller 340a～340h, shut-off device 400 etc.Need to prove that cooling is controlled near the atmosphere temperature that is based on by the temperature sensor unit detected sheet material glass SG that is arranged on molding space S1 with the temperature adjustment of temperature adjustment unit 330a and carried out.In addition, the temperature adjustment of temperature adjustment unit 350a～350g control is based on by near the atmosphere temperature the temperature sensor unit 380 detected sheet material glass SG and is undertaken.
In addition, the air pressure of space S is controlled in the buildings that further inner face by building B formed of control device 500.To narrate in the back this.In addition, also narrate in the back about the various sensors described in Fig. 6.
(moulding of the sheet material glass SG in the shaped device 300)
Below, the process that moulding in the shaped device 300 is obtained sheet material glass SG describes.
At first, be supplied to the mobile slot part of extremely above formed body 310, opening 312 of melten glass of formed body 310 via supplying opening 311 from fusing device 200.Then, make it in slot part 312 overflows.The melten glass of overflow in slot part 312 is flowed to the downstream side of the 1st direction along two sides of formed body 310, as shown in Figure 3, the interflow, 313 places in the bottom.The melten glass at interflow, 313 places flows down to the downstream side of the 1st direction in the bottom.In the moment that begins to flow down leaving formed body 310, the viscosity of glass for example is 10
5.7Pool～10
7.5Pool.
The cooling roller of the both sides of the melten glass that flows down to the downstream side of the 1st direction by being configured in thickness direction is drop-down to the downstream side of the 1st direction in the mode that the both ends of width are held.At this moment, melten glass when being shaped to the sheet material glass SG of sheet, be cooled (fast cooling).Utilization makes the viscosity at the place, both ends of sheet material glass be for example 10 based on the quick cooling of cooling roller 330
9.0Pool～10
10.5Pool.Utilize transfer roller 340a～340h will be cooled roller 330 drop-down sheet material glass SG further be pulled down to the below, meanwhile anneal.
In addition, be transmitted after the drop-down sheet material glass SG of roller 340a～340h by shut-off device 400 and cut off in the mode every the length of regulation, form the sheet glass G more than 2.
(control of the air pressure of space S in the buildings)
In the present embodiment, carry out the air pressure control of stove space outerpace S4.Stove space outerpace S4 is the space that the inner face by outside, the building B of the outside of moulding furnace wall 41, annealing furnace wall 51 surrounds, and be the space that is positioned at the superjacent air space that cuts off space S 3, in other words, it is to remove the space that cuts off space S 3 (that is the space that is made of the outside superjacent air space S5 of moulding stove, moulding stove outside below space S 6 and annealing furnace space outerpace S7) and form in buildings the space S.
The air pressure control operation that the air pressure of stove space outerpace S4 is controlled for example begins in the operation ST3 that homogenizes.That is, air pressure control operation was carried out before molding procedure ST5 and annealing operation ST6.
In the present embodiment, in order to carry out air pressure control, the outside of space S 6 and annealing furnace space outerpace S7 below the outside superjacent air space S5 of moulding stove, the moulding stove outside outside of the wall of building B (that is, across) disposes the fan 421,422,423 that pressurizes for to space separately.In addition, in order to carry out air pressure control, in space separately, dispose detecting unit that the air pressure to space S 6 and annealing furnace space outerpace S7 below the outside superjacent air space S5 of moulding stove, the moulding stove outside detects, i.e. the 1st pressure transmitter 431, the 2nd pressure transmitter 432 and the 3rd pressure transmitter 433 (with reference to Fig. 6).Need to prove that the method for carrying out air pressure control is not limited to blow, also can the applicable combination air-supply and the air draft method of carrying out or utilize air-lock (damper) to wait to adjust pressure difference method; Etc..
In air pressure control, use the air pressure of various pressure transmitters 431,432,433 pairs of each space S 5, S6, S7 to detect, thus according to the air pressure P1 of the stove space outerpace S4 mode greater than air pressure (normal atmosphere) P2 in the outside of building B, to the action (for example being rotating speed under the situation of engine) that is used for driving fan 421,422,423 the 2nd driver element 450 (for example engine) thus the air pressure of control stove space outerpace S4.
Particularly, the value that deducts P2 according to P1 for greater than 0 and mode below the 40Pa control.That is, the mode of setting up according to the relation of following formula 1 is controlled the 2nd driver element 450.
(formula 1) 0＜P1-P2≤40Pa
Need to prove that the value that P1 deducts P2 is 1Pa～40Pa, more preferably 2Pa～35Pa, more preferably 3Pa～25Pa, more preferably 4Pa～15Pa more preferably.
Further, in air pressure control operation, preferably according to the closer to the upstream side of the flow direction of sheet material glass SG then the more big mode of air pressure of stove space outerpace S4 control the air pressure of stove space outerpace S4.More specifically, be preferably: the air pressure of the air pressure＞annealing furnace space outerpace S7 of the air pressure of the outside superjacent air space S5 of moulding stove＞below, moulding stove outside space S 6.
(Cooling Control of sheet material glass SG)
In the present embodiment, can in molding space S1 and annealing space S 2, carry out the Cooling Control of sheet material glass SG.Particularly, can make cooling carry out the cooling of sheet material glass SG as described below according to the indication of control device 500 with temperature adjustment unit 330a, temperature adjustment unit 350a～350g, transfer roller 340a～340h, cooling roller 330.
For example, when using cooling roller 330 and transfer roller 340a～340h to make sheet material glass SG mobile to the downstream side in annealing space S 2, make tension force act on the flow direction (the 1st direction) of sheet material glass SG effectively, can suppress the warpage of sheet material glass SG thus.In addition, also can be suppressed at the distortion that produces the waveform shape in the neighboring region that is adjacent to the part that is clamped between each roller and flows.
In order to make tension force act on the flow direction (the 1st direction) of sheet material glass SG effectively, for example in molding space S1 and the temperature of the central part of the width of sheet material glass SG be in the zone more than the softening point temperature of glass, the uniform mode of temperature that is lower than the temperature of central part and central part according to the both ends (ear) of the width of sheet material glass SG is controlled the temperature of sheet material glass SG.Further, in annealing space S 2, act on the width central part of sheet material glass SG for the tensile stress that makes the carrying direction, the temperature of the central part of the width of sheet material glass SG be less than softening point temperature and the zone more than strain point temperature in, the mode that reduces from central part to both ends according to the temperature distribution of the width of sheet material glass SG is controlled the temperature of sheet material glass SG.Further, be in the temperature province of strain point temperature of glass in the temperature of the central part of the width of sheet material glass SG, control the temperature of sheet material glass SG according to both ends (ear) and the mode of the thermograde of central part of the width of eliminating sheet material glass SG.Thus, make the tensile stress of carrying direction act on the central part of the width of sheet material glass SG.
For the control of the temperature of above-mentioned sheet material glass SG, it is that the temperature with sheet material glass SG be that zone more than the softening point temperature is present among the molding space S1 is prerequisite.Therefore, in order to carry out said temperature control, in molding space S1, be provided with cooling temperature adjustment unit 330a.But the temperature of sheet material glass SG is that the above zone of softening point temperature also is present in the annealing space S 2 sometimes.In this case, in order to carry out said temperature control, will cool off with temperature adjustment unit 330a and be arranged in the space S 2 of annealing.
In addition, in annealing space S 2, act on the central part of sheet material glass SG for the tension force that makes the carrying direction, also can be near the strain point temperature of temperature at glass of the central part of the width of sheet material glass SG and in the zone less than strain point temperature, control the temperature of sheet material glass SG according to the mode that reduces to the central part of the width of sheet material glass SG from the both ends (ear) of the width of sheet material glass SG.Thus, near the strain point temperature of the central part of the width of sheet material glass SG and in the zone less than strain point temperature, can make tensile stress on the carrying direction act on the central part of the width of sheet material glass SG all the time.
In the present embodiment, as described later, can reduce the inequality of the percent thermal shrinkage of sheet glass, but further pass through the speed of cooling of the sheet material glass SG after the adjustment moulding, except the inequality that can suppress percent thermal shrinkage, can also suppress the distortion of sheet glass, suppress warpage, and reduce the absolute value of percent thermal shrinkage.
Particularly, in annealing space S 2, when when using transfer roller 340a～340h carrying sheet material glass SG to anneal, be defined as from the annealing point temperature of sheet material glass SG add 150 ℃ and temperature to the strain point temperature of sheet material glass SG deduct 200 ℃ and temperature till temperature province.At this moment, preferably, at least in the said temperature zone, the speed of cooling of the central part of the width of sheet material glass SG is faster than the speed of cooling at the both ends of sheet material glass SG, and the change of state that makes sheet material glass SG be higher than the both ends of sheet material glass SG from the temperature of the central part of the width of sheet material glass SG is the state that the temperature of central part is lower than both ends.Thus, can make tensile stress act on the flow direction (the 1st direction) of sheet material glass SG at the central part of the width of sheet material glass SG.By making tensile stress act on the flow direction of sheet material glass SG, can further suppress the warpage of sheet material glass SG even sheet glass.
In annealing operation, from and the neighboring region of being clamped between each roller of sheet material glass SG and the part adjacency that flows, suppressing the viewpoint of the distortion of generation waveform shape as mentioned above sets out, the temperature that preferably makes the middle body that is arranged on sheet material glass SG is that the circumferential speed of transfer roller in downstream side of the position of annealing point temperature is that the circumferential speed of transfer roller of the temperature province more than the second-order transition temperature and below the softening point temperature is fast than the temperature of the middle body that is arranged on sheet material glass SG, for example fast 0.03%～2%.By so the circumferential speed of transfer roller being adjusted, can make tensile stress act on the flow direction (the 1st direction) of sheet material glass SG thus.
(optimal way of sheet glass)
Below the manufacture method of the sheet glass manufacturing installation that uses present embodiment and sheet glass made the sheet glass that obtains optimal way describe.Need to prove that the present invention is not limited to following manner.
The thickness that present embodiment is suitable for making sheet glass is the sheet glass of 0.01mm～1.5mm.The more thin then glass of sheet glass to possess heat more little, the temperature control of the sheet material glass in the space that therefore is difficult to anneal (, be not only the temperature control of the 1st direction of sheet material glass herein, also comprise the temperature control on the width of sheet material glass) becomes difficult.Therefore, be the sheet glass of 0.01mm～0.5mm for making thickness of slab, it is bigger to be suitable for the advantage of the present invention that can make molding space S1 and anneal space S 2 stabilizations.In addition, for above-mentioned reasons, the present invention also is suitable for making the glassy membrane that glass is possessed the very little 0.01mm～0.1mm of heat.
The more big then more easy generation plane strain of sheet glass and make the temperature control of carrying out above-mentioned sheet material glass SG become difficult.Therefore, be more than the 2000mm and the length of length direction is sheet glass more than the 2000mm for the length of width, effect of the present invention is remarkable.
In addition, the preferred glass plate is applicable to the liquid-crystal display of quality requirements strictness, organic EL (Organic Electro-Luminescence, organic electroluminescent) indicating meter.In addition, can also be applicable to the indicating meter of cover glass (Cover Glass), mobile termination etc. or the sheet glass that framework is used cover glass, contact panel and solar cell.Be particularly suitable for to the strict use of sheet glass the liquid-crystal display of low temperature polycrystalline silicon (LTPS:Low Temperature Poly Silicon)-TFT (Thin Film Transistor, thin film transistor).
In addition, sheet glass is warming up to till 550 ℃ from 50 ℃ with 10 ℃/minute, 550 ℃ keep 1 hour after, be cooled to till 50 ℃ with 10 ℃/minute, be warming up to till 550 ℃ with 10 ℃/minute again, 550 ℃ keep 1 hour after, be cooled to till 50 ℃ with 10 ℃/minute, the percent thermal shrinkage of this moment is preferably below the 100ppm.0ppm～60ppm more preferably, more preferably 0ppm～40pm further is preferably 0ppm～20ppm.
Need to prove that percent thermal shrinkage is with elongation/initial length * 10
6(ppm) calculate.Measuring method as percent thermal shrinkage has following method.At first, use diamond pen (diamond pen) to mark the parallel marking line at the two ends of sheet glass.Then, according to the mode perpendicular to mark line sheet glass is cut off with being divided into two, to wherein 1 heat-treat (as mentioned above, for carrying out 2 times repeatedly 550 ℃ of thermal treatments that keep 1 hour processing).Then, the sheet glass after the thermal treatment and another sheet glass to last, are measured the side-play amount of mark line thus.
Particularly in the making of indicating meter TFT is formed under the situation on the sheet glass, than the height of percent thermal shrinkage, the easier display pannel that becomes of the inequality of percent thermal shrinkage shows bad reason.In this, the inequality of inhibition percent thermal shrinkage is important.Inequality by the percent thermal shrinkage of the sheet glass of embodiment manufacturing is preferably ± below 2.85%.Herein, the inequality of percent thermal shrinkage refers to, in the position (near for example position the both ends of the position of central part and width) at 3 positions of the width of sheet glass when utilizing aforesaid method that percent thermal shrinkage is measured, the measured value of these positions is its mean value and the upper limit (+) and the lower limit (-) that change relatively.The inequality of percent thermal shrinkage is preferably less than ± 2.80%, more preferably ± and below 2.75%, more preferably ± below 2.65%.
In addition, the maximum value of the plane strain of sheet glass is preferably 0nm～1.7nm.Be preferably 0nm～1.5nm, more preferably 0nm～1.0nm, 0nm～0.7nm more preferably.Need to prove that plane strain can be measured by the double refraction detection device that UNIOPT company makes.
Here, liquid-crystal display and OLED display require high-precision assembling, and the present invention that therefore can reduce the percent thermal shrinkage inequality of liquid-crystal display or the employed sheet glass of OLED display is particularly suitable for making liquid-crystal display with sheet glass or OLED display sheet glass.
The warpage of sheet glass is under situation about measuring by following method, the maximum value of warpage is the scope till 0 to 0.2mm, is preferably 0mm～0.15mm, more preferably 0mm～0.1mm, more preferably 0mm～0.05mm, 0mm～0.05mm more preferably again.
The mensuration of warpage is measured by as described below.At first cut out platelet (about 400mm is square) more than 2 from sheet glass.Then, for each platelet, measure the warpage (that is, measuring the warpage that amounts to 16 positions) at 4 positions, angle and 4 positions of central part respectively at pros and cons.For example, under the situation of the warpage of measuring 8 platelets, obtain 16 position * 8 slice, the i.e. determination data of the warpage at totally 128 positions.Then, suppose that the maximum value in this determination data is above-mentioned scope.Need to prove, in the present embodiment, will utilize the platelet more than 2 to measure the maximum value of the warpage that obtains as the warpage of sheet glass.
In addition, as the sheet glass of flat-panel monitor (liquid-crystal display or plasma display etc.) usefulness, example has gone out with quality % to represent that sheet glass contains the sheet glass of following composition.
SiO
2: 50 quality %～70 quality %,
Al
2O
3: 5 quality %～25 quality %,
B
2O
3: 0～15 quality %,
MgO:0～10 quality %,
CaO:0～20 quality %,
SrO:0～20 quality %,
BaO:0～10 quality %,
ZrO
2: 0～10 quality %.
Compare with the sheet glass that is formed with α-Si (amorphous silicon, non-crystalline silicon)-TFT, be used for the sheet glass of OLED display, the sheet glass that is formed with the sheet glass of LTPS-TFT or is formed with oxide semiconductor requires percent thermal shrinkage littler.In order to reduce percent thermal shrinkage, can make time of annealing operation of sheet glass elongated or the strain point temperature of glass is uprised.But, elongated as if the time of the annealing operation that makes sheet glass, then need to make manufacturing installation to maximize, therefore not preferred.As the less sheet glass of percent thermal shrinkage, for example can enumerate the sheet glass with composition described as follows and characteristic.
SiO
2: 52 quality %～78 quality %,
Al
2O
3: 3 quality %～25 quality %,
B
2O
3: 1 quality %～15 quality %,
RO (wherein, RO is the total amount of total composition of containing of the sheet glass among MgO, CaO, SrO and the BaO): 3 quality %～20 quality %,
Strain point is more than 680 ℃, and is sheet glass below the 60ppm by the percent thermal shrinkage that aforesaid method is measured.
Or, following sheet glass:
SiO
2: 57 quality %～75 quality %,
Al
2O
3: 8 quality %～25 quality %,
B
2O
3: 3 quality %～11 quality % (except the 11 quality %),
CaO:0～20 quality %,
MgO:0～15 quality %.
At this moment, if satisfy in the following condition each or more than 2, then be more suitable for the sheet glass in LTPS-TFT.
For the further strain point temperature that improves,
Preferably make (SiO
2+ Al
2O
3)/B
2O
3Be 8～20 and/or make SiO
2+ Al
2O
3Be more than the 75 quality %.
In addition, preferably make CaO/B
2O
3Be more than 0.6.
Further, in order further to improve strain point temperature, preferred mass is than (SiO
2+ Al
2O
3)/RO is more than 7.5.
Perhaps, in order to make the resistivity decreased of glass, preferably contain the Fe of 0.01 quality %～1 quality %
2O
3
Further, in order to make sheet glass realize higher strain point temperature and to prevent the rising of devitrification temperature, preferably making CaO/RO is more than 0.65.
In addition, if consideration is applicable to the mobile apparatus as mobile communication terminal etc., then from light-weighted viewpoint, the total containing ratio of preferred SrO and BaO is 0～3.3%.
Need to prove R
2O (wherein, R
2O is Li
2O, Na
2O and K
2The total amount of total composition that the sheet glass among the O contains) might be from glass stripping and make the TFT deterioration in characteristics, therefore as liquid-crystal display with under the situation of sheet glass, preferably in fact do not contain R
2O (non-alkali glass).But, make the mentioned component that contains specified quantitative in the glass on the contrary, the deterioration of TFT characteristic can be suppressed thus, and the basicity of glass can be improved, easily make the burning of valence mumber change, thereby make its performance clarification property.In addition, because the resistivity of glass is reduced, therefore also can suppress to fuse the breakage of the fusion groove in the operation etc.Therefore, R
2O is 0～2.0%, more preferably 0.1%～1.0%, more preferably 0.2%～0.5%.Need to prove, at R
2Among the O, preferably contain the most difficult stripping from glass and make the K of TFT deterioration in characteristics
2O.K
2The content of O is 0～2.0%, more preferably 0.1%～1.0%, more preferably 0.2%～0.5%.
In addition, implemented chemical enhanced after, as being applicable to that cover glass or solar cell with the sheet glass of sheet glass, for example can example go out the sheet glass of representing to contain following composition with quality %.
SiO
2: 50 quality %～70 quality %,
Al
2O
3: 5 quality %～20 quality %,
Na
2O:6 quality %～30 quality %,
Li
2O:0～8 quality %,
B
2O
3: 0～5 quality %,
K
2O:0～10 quality %,
MgO:0～10 quality %,
CaO:0～20 quality %,
ZrO
2: 0～10 quality %.
(feature)
It is believed that the air that flows in the buildings via the gap of buildings etc. from the buildings outside contains particles such as dust, therefore if be attached to the sheet material glass in the annealing furnace or cut off after sheet glass on, then can cause producing damage.In addition, it is believed that if above-mentioned particle flows into the upstream that produces along sheet material glass in the annealing furnace, then the attached work of particle meeting is on glass at sheet material, forms bubble or thrust at the sheet material glass surface.Under these circumstances, can cause that the surface quality of sheet glass worsens, therefore might be difficult to stably produce sheet glass.
In addition, though utilize well heater to control according to the mode that does not produce temperature variation in moulding stove or the annealing furnace, in moulding stove or annealing furnace, still have the gap outside the zone of the cut-out of carrying out sheet material glass, it is very difficult eliminating this gap fully.Therefore, if the air in the buildings outside flows in the buildings, the then relation of the draught head in stove space outerpace and furnace interior space collapse, the air of stove space outerpace flows in moulding stove or the annealing furnace via the gap of moulding stove or annealing furnace, might cause the precise decreasing of the temperature treatment control in moulding stove or the annealing furnace.At this moment, the temperature of the air of inflow moulding stove or annealing furnace is lower than moulding stove or the interior temperature of annealing furnace of having carried out temperature treatment.That is in melten glass or the sheet material glass, only be that the zone that contacts with the air that flows into above-mentioned moulding stove or annealing furnace is cooled off fast.For example, if certain zone of melten glass is cooled off partly fast in the moulding stove, then viscosity that only should the zone raises, after being shaped to sheet material glass, when in the downstream, utilizing roller to stretch, only the zone that the viscosity in the sheet material glass is high can't stretch fully, thereby causes producing the deviation of the thickness of slab of sheet glass.In addition, as mentioned above, in annealing furnace, in order to reduce warpage, plane strain, and percent thermal shrinkage, the temperature distribution of the width of sheet material glass is controlled.Therefore, in annealing furnace, if certain zone of sheet material glass cooled off partly fast, then percent thermal shrinkage that only should the zone becomes greatly partly, so can cause producing the inequality of percent thermal shrinkage.
In order to address the above problem, preferably make the interior air pressure of buildings be higher than the air pressure in the buildings outside, the air that suppresses the buildings outside thus flows in the buildings.But, if make the interior air pressure of buildings excessively be higher than the air pressure in the buildings outside, then cause the air in the buildings to flow to the buildings outside in a large number sometimes, the air pressure in the buildings or temperature generation change.Perhaps, if stove space outerpace and/or the air pressure that cuts off the space become too high, then from the stove space outerpace and/or cut off the space and increase to the air influx in furnace interior space, be easy to generate along the upstream of sheet material glass.Therefore, the difference of the air pressure in the air pressure in the buildings and the buildings outside is preferably above 0Pa～40Pa.That is, in the control of the air pressure of present embodiment, preferably according to the air pressure P1 of stove space outerpace S4 deduct the building B outside air pressure P2 value for greater than 0 and mode below the 40Pa control fan.
And, by carrying out aforesaid control, except the quality that can suppress to cause because of particle worsened, the quality that can also suppress the unequal sheet glass of warpage, thermal contraction worsened, and satisfied particle, warpage, and the sheet glass of the quality of the inequality of thermal contraction thereby can stably make.
In addition, by the change of the temperature of molding space S1 being controlled the unequal of the thickness of slab that can suppress sheet glass thus.
In addition, annealing space S 2 is temperature of comprising sheet material glass SG near the space in the zone that becomes near the temperature the strain point temperature annealing point temperature, but by suppressing the temperature variation of annealing space S 2, can reduce the inequality of percent thermal shrinkage.In addition, in annealing space S 2, can suppress near the change of the atmosphere temperature of the above sheet material glass SG of annealing point, therefore can suppress distortion or the warpage of sheet glass.In addition, in annealing space S 2, can suppress near the change of the atmosphere temperature of the following sheet material glass SG of strain point temperature, therefore can suppress the warpage of sheet glass etc.Herein, sheet material glass SG is the continuous plate of a slice till being cut off.Therefore, in the temperature of sheet material glass is zone below the strain point temperature, if the warped shapes of sheet material glass changes, then also can the sheet material glass in the zone more than the strain point temperature be exerted an influence, cause producing the inequality of percent thermal shrinkage.On the other hand, in the present embodiment, the temperature that suppresses sheet material glass SG is the change of the atmosphere temperature in the following zone of strain point temperature, can suppress warpage, plane strain, and the inequality of thermal contraction thus.
Be difficult to eliminate the gap fully from the wall of buildings.Therefore, consider that utilizing chimney effect to make also produces upstream in the stove space outerpace.Need to prove that near the furnace wall, envrionment temperature is more high, therefore easily produce upstream.In addition, by making the lower zone of the higher gas flow temperature of temperature also produce convection current thus.It is believed that this is because the atmosphere temperature of buildings inwall side is lower than the furnace wall side.That is, along the inwall generation downdraft of buildings, and along furnace wall generation upstream, produce bigger convection current thus.
Therefore, in the present embodiment, more control fan by the more big mode of upstream side air pressure of the 1st direction according to the air pressure that makes stove space outerpace S4.Thus, in stove space outerpace S4, can suppress along the moulding furnace wall 41 of moulding stove 40 or the outside of the annealing furnace wall 51 of annealing furnace 50 and the airflow that rises.Therefore, can make the temperature-stable of the outside of moulding furnace wall 41 or annealing furnace wall 51 as far as possible.Therefore, can suppress the temperature variation of moulding space S 1 or annealing space S 2.
Stove space outerpace S4 is split into the outside superjacent air space S5 of moulding stove, below, moulding stove outside space S 6, reaches annealing furnace space outerpace S7.Therefore, even if along moulding furnace wall 41 or the airflow that produce to rise of the outside of annealing furnace wall 51, also can make this airflow the scope of the 1st direction narrow (that is, this airflow can be rested in each space S 5～S7).That is, therefore the barometric distribution that makes stove space outerpace S4 can suppress to produce and spread all over a plurality of spaces (for example, spread all among space S 5～S7 at least 2 above spaces) bigger airflow that rises between the space more than 2 and more big the closer to upstream side.
Thus, the temperature of the outside of moulding furnace wall 41 or annealing furnace wall 51 is more stable.Therefore, can reduce moulding space S 1 or annealing in the space S 2 to Temperature Influence, make the temperature of molding space S1 or annealing space S 2 more stable.
(variation)
More than, based on accompanying drawing present embodiment is illustrated, but concrete formation is not limited to above-mentioned embodiment, can in the scope of the clou that does not break away from invention, change.
(variation 1A)
Fig. 7 is the synoptic diagram of inside that the building B of this variation 1A is shown.
The upstream that produces along sheet material glass can kick up the glass smear metal that when cutting off sheet material glass, produces or the dust that from buildings outside, comprises the air in the side inflow buildings, and can make it be attached to mobile sheet material glass in molding space or annealing space.The glass smear metal meeting that is attached to sheet material glass forms bubble or thrust at the sheet material glass surface, and the quality of glass pane surface is descended.In addition, dust also can make the quality of glass pane surface descend.In addition, the air in space can take place to change significantly according to the situation (temperature, wind speed etc.) outside the buildings in the side inflow buildings outside buildings, therefore because air space in the side inflow buildings from buildings outside, cause being difficult to control air pressure and the temperature in the interior space of buildings.
Therefore, in the air pressure control of air pressure control operation, preferably control greater than the mode of the air pressure P2 in the building B outside according to the air pressure P3 that cuts off space S 3.Thus, air side inflow outside buildings that can prevent from containing dust etc. cuts off the space, even can suppress the reduction of the surface quality of sheet glass.
In this case, dispose the fan 424 that pressurizes for to cut-out space S 3 in the outside that cuts off space S 3.In addition, in cutting off space S 3, be provided with the 4th pressure transmitter (not shown) for detection of the air pressure P3 that cuts off space S 3.
Need to prove, be more than the specified pressure if cut off the air pressure in space, then easily produces to stove (moulding stove and annealing furnace) flowing air stream, might the temperature in molding space and annealing space be exerted an influence.
Therefore, preferably according to the air pressure P3 that cuts off space S 3 deduct the building B outside air pressure P2 value for greater than 0 and mode below the 40Pa cut off the air pressure control of space S 3.That is, preferably carry out air pressure control according to the mode that following formula 2 is set up.
(formula 2) 0＜P3-P2≤40Pa
Thus, can suppress the inflow of air in the building B of building B lateral, but therefore the precision temperature of cutting off space S in space S 3 even the buildings is well controlled gentle pressure-controlled.In addition, can suppress inflow cut-out space S 3 such as dust, can prevent that therefore the surface quality of sheet glass from worsening.
In addition, except above-mentioned embodiment, also can be in air pressure control, control fan 424 (namely by monitoring the value that is detected by the 4th pressure transmitter and the 5th pressure transmitter (not shown), the air pressure of space S 3 is cut off in control), make the air pressure P4 of annealing space S 2 greater than the air pressure P3 that cuts off space S 3 thus.Need to prove that so-called the 5th pressure transmitter refers to detect the pressure transmitter of the air pressure P4 of annealing space S 2.
Thus, can suppress from cutting off space S 3 to annealing space S 2 flowing air stream.In addition, can also carry out air pressure control the closer to the more big mode of the upstream side of the 1st direction according to the air pressure of annealing space S 2.Thus, can suppress the temperature variation of moulding space S 1 and annealing space S 2.
(variation 1B)
In the above-described embodiment, dispose the plate 411,412,413 of bringing into play function as the physical property partition member, thereby be formed with the space more than 2, but be not limited to this, as long as to carry out air pressure control the closer to the more big mode of the upstream side air pressure of the 1st direction, just can bring into play the effect identical with above-mentioned embodiment.
(variation 1C)
In the above-described embodiment, stove space outerpace S4 is pressurizeed.But, may not make the air pressure of stove space outerpace S4 greater than the air pressure of molding space S1 or annealing space S 2.For example, even reduce moulding space S 1 or the air pressure of annealing space S 2 and the draught head of stove space outerpace S4, also can reduce the air capacity that spills from the air pressure of molding space S1 or annealing space S 2, and can suppress along the upstream of sheet glass G generation, be effective therefore.
(variation 1D)
Fig. 8 is the synoptic diagram of inside that the building B of this variation 1F is shown.As shown in Figure 8, stove space outerpace S4 also can be split into the moulding stove space outerpace S10 that comprises the outside superjacent air space S5 of moulding stove and below, moulding stove outside space S 6, and 3 spaces of annealing furnace space outerpace S7.Under these circumstances, also can bring into play the effect identical with above-mentioned embodiment.
In addition, might not make the air pressure of stove space outerpace S4 more big the closer to the upstream side air pressure of the 1st direction, be higher than the air pressure of annealing furnace space outerpace S7 by the air pressure that makes moulding stove space outerpace S10 at least, also can be suppressed at the generation of the upstream that the stove space outerpace produces.This is because the temperature of moulding furnace wall 41 is very big with the temperature head of annealing furnace wall 51, therefore 41 easily produces bigger upstream from annealing furnace wall 51 to the moulding furnace wall.In addition, also be because: as mentioned above, in order to improve the quality of sheet glass, especially preferably reduce the temperature variation in moulding stove 40 and the annealing furnace 50.
Embodiment
Below embodiments of the invention are described.
(embodiment 1)
Be that the mode of 5Pa is controlled the air pressure of stove space outerpace S4 according to the difference of the air pressure P2 in the air pressure of stove space outerpace S4 and the building B outside.Then, to carry out thickness be 0.7mm, be of a size of the liquid-crystal display of 2200mm * 2500mm with the manufacturing of sheet glass.The containing ratio of each composition of sheet glass is as described below.
SiO
260 quality %
Al
2O
319.5 quality %
B
2O
310 quality %
CaO5 quality %
SrO5 quality %
SnO
20.5 quality %
(embodiment 2)
The difference of the air pressure P2 in the air pressure P1 of stove space outerpace S4 and the building B outside is 20Pa, in addition, utilizes the method identical with embodiment 1 to carry out the manufacturing of liquid-crystal display usefulness sheet glass.
(embodiment 3)
The difference of the air pressure P2 in the air pressure P1 of stove space outerpace S4 and the building B outside is beyond the 35Pa, in addition, utilizes the method identical with embodiment 1 to carry out the manufacturing of liquid-crystal display usefulness sheet glass.
(embodiment 4)
The difference of the air pressure P2 in the air pressure P1 of stove space outerpace S4 and the building B outside is 50Pa, in addition, utilizes the method identical with embodiment 1 to carry out the manufacturing of liquid-crystal display usefulness sheet glass.
(comparative example 1)
The difference of the air pressure P2 in the air pressure P1 of stove space outerpace S4 and the building B outside be-5Pa (that is, the air pressure P2 in the building B outside is higher than the air pressure of stove space outerpace S4), in addition, utilizes the method identical with embodiment 1 to carry out the manufacturing of liquid-crystal display usefulness sheet glass
Then, under aforesaid condition, utilize aforesaid method (method described in the optimal way of (7) sheet glass) that the liquid-crystal display that manufacturing obtains is measured with the inequality of the thermal contraction of sheet glass.In addition, the visual observation liquid-crystal display is used the surface of sheet glass, and the situation to damage unconfirmed is OK, and the situation that confirms damage is NG, estimates thus.Embodiment 1～4 and comparative example 1 measurement result separately shown in the following table 1.
[table 1]
As mentioned above, need only the air pressure of controlling stove space outerpace S4 according to the mode of 0＜P1-P2, then can be suppressed at and produce damage on the glass pane surface.In addition, need only the air pressure of controlling stove space outerpace S4 according to the mode of 0＜P1-P2≤40Pa, then can further suppress the inequality of percent thermal shrinkage.Need to prove, even if the containing ratio of each composition of sheet glass (quality %) is SiO
261%, Al
2O
319.5%, B
2O
310%, CaO9%, SnO
20.3%, R
2O0.2% also can obtain and above-mentioned same result.
The explanation of symbol
40 moulding stoves
50 annealing furnaces
100 sheet glass manufacturing installations
310 formed bodys
The B buildings
The MG melten glass
Claims (16)
1. the manufacture method of a sheet glass, it has:
The fusion operation wherein, forms melten glass with the frit fusion;
Supply with operation, wherein, described melten glass is supplied to formed body, the furnace wall that described formed body is configured in by the moulding stove is the molding space that the moulding furnace wall surrounds;
Molding procedure wherein, uses glass tube down-drawing to be shaped to sheet material glass by melten glass in described formed body;
Annealing operation wherein, is annealed to described sheet material glass in the space in annealing, and described annealing space is the space that is positioned at described molding space below, and it is to be surrounded by the furnace wall of namely annealing, the furnace wall of described annealing furnace; With
Cut off operation, wherein, be arranged in described annealing furnace below the described sheet material glass of cut-out space after to annealing cut off,
Carry out air pressure control, make the air pressure of stove space outerpace greater than the air pressure in the outside of buildings, described buildings accommodates described molding space, described annealing space and described cut-out space, and described stove space outerpace is positioned at the top of being divided the described cut-out space in the buildings space that obtains by the outside surface of the outside surface of the inner-wall surface of described buildings, described moulding furnace wall and described annealing furnace wall.
2. the manufacture method of sheet glass as claimed in claim 1, wherein,
In described air pressure control operation, the air pressure of described stove space outerpace is made as P1, the air pressure in the outside of described buildings is made as under the situation of P2, according to the mode that the relation of 0＜P1-P2≤40Pa is set up the air pressure of described stove space outerpace is controlled.
3. the manufacture method of sheet glass as claimed in claim 1, wherein,
In described air pressure control operation, the air pressure in described cut-out space is made as P3, the air pressure in the outside of described buildings is made as under the situation of P2, further the air pressure in described cut-out space is controlled according to the mode that the relation of 0＜P3-P2≤40Pa is set up.
4. the manufacture method of sheet glass as claimed in claim 3, wherein,
In described air pressure control operation, the air pressure in described cut-out space is controlled greater than the mode of the air pressure in described cut-out space according to the air pressure in described annealing space.
5. as the manufacture method of claim 3 or 4 described sheet glass, wherein,
In described air pressure control operation, according to the mode that the air pressure the closer to the described stove space outerpace of upstream side of the flow direction of described sheet material glass becomes more big the air pressure of described stove space outerpace is controlled.
6. as the manufacture method of each described sheet glass of claim 1～5, wherein,
In described annealing operation,
For making tension force, the central part at the width of described sheet material glass acts on the flow direction of sheet material glass,
At least add from ANNEALING OF GLASS point temperature that in the temperature of the central part of the width of described sheet material glass 150 ℃ temperature becomes the temperature province of the temperature that deducts 200 ℃ from the strain point temperature of glass,
The speed of cooling mode faster than the speed of cooling at the both ends of described width according to the central part of the width of described sheet material glass carried out temperature control.
7. as the manufacture method of each described sheet glass of claim 1～6, wherein,
In the zone more than the temperature of the central part of the width of described sheet material glass is the softening point temperature of glass, the uniform mode of temperature that is lower than the temperature of the folded central part in described both ends and described central part according to the temperature at the both ends of the width of described sheet material glass is controlled the temperature of described sheet material glass
And, for the tension force at the flow direction of the central part effect sheet material glass of the width of described sheet material glass, in the temperature of the described central part of described sheet material glass is softening point temperature and the zone more than the strain point temperature at glass less than glass, the mode that reduces to described both ends from described central part according to the temperature distribution of the width of described sheet material glass is controlled the temperature of described sheet material glass
Be in the temperature province of strain point temperature of glass in the temperature of the described central part of described sheet material glass, control the temperature of described sheet material glass according to the mode of the thermograde of the described both ends of the width of eliminating described sheet material glass and described central part.
8. as the manufacture method of each described sheet glass of claim 1～7, wherein,
For the tension force at the flow direction of the central part effect sheet material glass of the width of described sheet material glass, in the zone of temperature less than the strain point temperature of glass of the described central part of described sheet material glass, the mode that reduces to described central part according to the described both ends from described sheet material glass is controlled the temperature of described sheet material glass.
9. as the manufacture method of each described sheet glass of claim 1～8, wherein,
In described annealing operation, at the transfer roller that is used for the described sheet material glass of carrying, making the temperature that is arranged on described sheet material glass is the circumferential speed of transfer roller in downstream side of the position of ANNEALING OF GLASS point temperature, is more than the second-order transition temperature and the circumferential speed of the transfer roller of the temperature province below the softening point temperature of glass fast 0.03%～2% than the temperature that is arranged on described sheet material glass.
10. the manufacturing installation of a sheet glass, it comprises:
The moulding stove, it is by utilizing the moulding furnace wall to form surrounding for the molding space that is shaped to sheet material glass by melten glass;
Annealing furnace, it is positioned at the below of described moulding stove, and this annealing furnace is to form by utilizing the annealing furnace wall to surround for the annealing space that described sheet material glass is annealed;
Shut-off device, it is configured in the cut-out space of the below that is positioned at described annealing furnace, and this shut-off device is used for the described sheet material glass after the annealing is cut off;
The air pressure control unit, it is used for carrying out air pressure control, make the air pressure of stove space outerpace greater than the air pressure in the outside of buildings, described buildings accommodates described molding space, described annealing space and described cut-out space, and described stove space outerpace is positioned at the top of being divided the described cut-out space in the buildings space that obtains by the outside surface of the outside surface of the inner-wall surface of described buildings, described moulding furnace wall and described annealing furnace wall.
11. the manufacturing installation of sheet glass as claimed in claim 10, wherein, described air pressure control unit comprises for the fan that air is fed through from the outside of described buildings in the described stove space outerpace.
12. the manufacturing installation of sheet glass as claimed in claim 11, wherein, described air pressure control unit comprises the pressure transmitter that the air pressure of described stove space outerpace is measured of being used for that is arranged on described stove space outerpace, described air pressure control unit also comprises control device, this control device is according to the detected result of described pressure transmitter, drives described fan according to the air pressure of described stove space outerpace greater than the mode of the air pressure in the outside of described buildings.
13. as the manufacturing installation of each described sheet glass of claim 10～12, wherein,
Further in described annealing space, comprise the temperature adjustment unit,
In the described temperature adjustment unit, for the central part at the width of described sheet material glass makes tension force act on the flow direction of sheet material glass, at least add from ANNEALING OF GLASS point temperature that in the temperature of the central part of the width of described sheet material glass 150 ℃ temperature becomes the temperature province of the temperature that deducts 200 ℃ from the strain point temperature of glass, carry out temperature control according to the speed of cooling mode faster than the speed of cooling at the both ends of described width of the central part of the width of described sheet material glass.
14. as the manufacturing installation of each described sheet glass of claim 10～13, wherein,
In the furnace inner space that is constituted by described molding space and described annealing space, be provided with the temperature adjustment unit,
In described temperature adjustment unit, it is the zone more than the softening point temperature of glass in the temperature of the central part of the width of described sheet material glass, the uniform mode of temperature that is lower than the temperature of the folded central part in described both ends and described central part according to the temperature at the both ends of the width of described sheet material glass is controlled the temperature of described sheet material glass
For the tension force at the flow direction of the central part effect sheet material glass of the width of described sheet material glass, in the temperature of the described central part of described sheet material glass is softening point temperature and the zone more than the strain point temperature at glass less than glass, the mode that reduces to described both ends from described central part according to the temperature distribution of the width of described sheet material glass is controlled the temperature of described sheet material glass
Be in the temperature province of strain point temperature of glass in the temperature of the described central part of described sheet material glass, control the temperature of described sheet material glass according to the mode of the thermograde of the described both ends of the width of eliminating described sheet material glass and described central part.
15. as the manufacturing installation of each described sheet glass of claim 10～14, wherein,
Be provided with the temperature adjustment unit in described annealing space,
In the described temperature adjustment unit, for the tension force at the flow direction of the central part effect sheet material glass of the width of described sheet material glass, in the zone of temperature less than the strain point temperature of glass of the described central part of described sheet material glass, the mode that reduces to described central part according to the described both ends from described sheet material glass is controlled the temperature of described sheet material glass.
16. as the manufacturing installation of each described sheet glass of claim 10～15, wherein,
In described annealing space, be provided with the transfer roller for the described sheet material glass of carrying,
Described transfer roller is rotated, in described transfer roller, the temperature that is arranged on described sheet material glass is the circumferential speed of transfer roller in downstream side of the position of ANNEALING OF GLASS point temperature, is more than the second-order transition temperature and the circumferential speed of the transfer roller of the temperature province below the softening point temperature of glass fast 0.03%～2% than the temperature that is arranged on described sheet material glass.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-205568 | 2011-09-21 | ||
| JP2011205568 | 2011-09-21 | ||
| PCT/JP2012/006024 WO2013042379A1 (en) | 2011-09-21 | 2012-09-21 | Method for manufacturing glass sheet, and apparatus for manufacturing glass sheet |
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| Publication Number | Publication Date |
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| CN103261106A true CN103261106A (en) | 2013-08-21 |
| CN103261106B CN103261106B (en) | 2016-05-18 |
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| CN201280003961.7A Active CN103261106B (en) | 2011-09-21 | 2012-09-21 | The manufacture method of glass plate and device for producing glass sheet |
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| Country | Link |
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| JP (1) | JP5848329B2 (en) |
| CN (1) | CN103261106B (en) |
| TW (1) | TWI600622B (en) |
| WO (1) | WO2013042379A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104944748A (en) * | 2014-03-31 | 2015-09-30 | 安瀚视特控股株式会社 | Method for manufacturing glass substrate, and device for manufacturing glass substrate |
| CN114394736A (en) * | 2021-12-20 | 2022-04-26 | 彩虹显示器件股份有限公司 | Device and method for controlling forming curvature of substrate glass |
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| WO2014163130A1 (en) * | 2013-04-05 | 2014-10-09 | 日本電気硝子株式会社 | Glass substrate and slow-cooling method for same |
| JP6346485B2 (en) * | 2014-03-31 | 2018-06-20 | ＡｖａｎＳｔｒａｔｅ株式会社 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
| JP6007277B2 (en) * | 2014-03-31 | 2016-10-12 | ＡｖａｎＳｔｒａｔｅ株式会社 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
| JP6031613B2 (en) * | 2014-06-30 | 2016-11-24 | ＡｖａｎＳｔｒａｔｅ株式会社 | Sheet glass manufacturing method and sheet glass manufacturing apparatus |
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- 2012-09-21 WO PCT/JP2012/006024 patent/WO2013042379A1/en active Application Filing
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| CN101821209A (en) * | 2007-12-25 | 2010-09-01 | 日本电气硝子株式会社 | Process and apparatus for producing glass plate |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104944748A (en) * | 2014-03-31 | 2015-09-30 | 安瀚视特控股株式会社 | Method for manufacturing glass substrate, and device for manufacturing glass substrate |
| CN104944748B (en) * | 2014-03-31 | 2017-10-20 | 安瀚视特控股株式会社 | The manufacture method of glass substrate and the manufacture device of glass substrate |
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Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2013042379A1 (en) | 2015-03-26 |
| TWI600622B (en) | 2017-10-01 |
| WO2013042379A1 (en) | 2013-03-28 |
| TW201317186A (en) | 2013-05-01 |
| CN103261106B (en) | 2016-05-18 |
| JP5848329B2 (en) | 2016-01-27 |
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