CN103261106B - The manufacture method of glass plate and device for producing glass sheet - Google Patents
The manufacture method of glass plate and device for producing glass sheet Download PDFInfo
- Publication number
- CN103261106B CN103261106B CN201280003961.7A CN201280003961A CN103261106B CN 103261106 B CN103261106 B CN 103261106B CN 201280003961 A CN201280003961 A CN 201280003961A CN 103261106 B CN103261106 B CN 103261106B
- Authority
- CN
- China
- Prior art keywords
- glass
- space
- temperature
- annealing
- sheet glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011521 glass Substances 0.000 title claims abstract description 220
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 56
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000000137 annealing Methods 0.000 claims abstract description 165
- 238000000465 moulding Methods 0.000 claims abstract description 63
- 238000003280 down draw process Methods 0.000 claims abstract description 4
- 239000005357 flat glass Substances 0.000 claims description 198
- 238000005520 cutting process Methods 0.000 claims description 49
- 238000001816 cooling Methods 0.000 claims description 38
- 239000006060 molten glass Substances 0.000 claims description 35
- 238000002844 melting Methods 0.000 claims description 24
- 230000008018 melting Effects 0.000 claims description 24
- 230000007423 decrease Effects 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000011144 upstream manufacturing Methods 0.000 claims description 9
- 238000009826 distribution Methods 0.000 claims description 5
- 230000009477 glass transition Effects 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract 3
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 239000004973 liquid crystal related substance Substances 0.000 description 15
- 238000005192 partition Methods 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 239000002245 particle Substances 0.000 description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 9
- 229910052593 corundum Inorganic materials 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 229910001845 yogo sapphire Inorganic materials 0.000 description 9
- 229910052681 coesite Inorganic materials 0.000 description 7
- 229910052906 cristobalite Inorganic materials 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- 229910052682 stishovite Inorganic materials 0.000 description 7
- 229910052905 tridymite Inorganic materials 0.000 description 7
- 239000000428 dust Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000006059 cover glass Substances 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 2
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N SnO2 Inorganic materials O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000005352 clarification Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000265 homogenisation Methods 0.000 description 2
- 238000007500 overflow downdraw method Methods 0.000 description 2
- 239000011819 refractory material Substances 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000011449 brick Substances 0.000 description 1
- 238000003426 chemical strengthening reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000004031 devitrification Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000013526 supercooled liquid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/067—Forming glass sheets combined with thermal conditioning of the sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The present invention relates to manufacture method and the device for producing glass sheet of glass plate, wherein, in the time manufacturing glass plate, frit is melted and formation melten glass, and described melten glass is supplied to formed body, described formed body is configured in the molding space being surrounded by the moulding furnace wall of the furnace wall as forming furnace; Use glass tube down-drawing that the melten glass that is supplied to described formed body is shaped to sheet material glass; Afterwards, described sheet material glass is carried out in space coolingly in annealing, described annealing space is the space that is positioned at described molding space below, and it is by the furnace wall of described annealing furnace, the furnace wall of annealing surrounds; Be arranged in described annealing furnace below cut-out space, described sheet material glass after annealing is cut off, thereby formation glass plate, now, carry out air pressure control, make the air pressure of stove space outerpace be greater than the air pressure in the outside of building, described building accommodates described molding space, described annealing space and described cut-out space, and described stove space outerpace is positioned at the top of being divided the described cut-out space in the building space obtaining by the outer surface of the internal face of described building, described moulding furnace wall and the outer surface of described annealing furnace wall.
Description
Technical Field
The present invention relates to a method for manufacturing a glass plate and an apparatus for manufacturing a glass plate.
Background
Conventionally, there is a method of manufacturing a glass plate by using various methods such as a down draw (downdraw) method. For example, in an overflow down draw (overflow down draw) method, which is one of methods for manufacturing a glass sheet, first, molten glass is supplied to a molded body disposed in a molding furnace. Then, the supplied molten glass is caused to overflow from the molded body. Then, the overflowing molten glass is joined at the lower end of the molded body to mold a continuous sheet-like glass (sheet glass). The sheet glass merged at the lower end of the molded body is further conveyed downward and annealed in an annealing furnace. Then, the annealed sheet glass is cut into a desired size in a cutting space to form a glass plate.
In the production of glass sheets, it is required to stably produce glass sheets satisfying predetermined qualities. For example, in the technique disclosed in patent document 1, when a glass sheet is produced by the overflow down-draw method, the pressure in the space outside the forming furnace and/or the annealing furnace is increased, thereby reducing the updraft generated along the sheet glass in the annealing furnace and suppressing the temperature variation in the annealing furnace. Furthermore, in-plane strain is thereby reduced.
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent publication No. 2009-173525
Disclosure of Invention
Problems to be solved by the invention
However, there are also problems as follows: when only the outside space of the forming furnace and/or the annealing furnace is pressurized, it is not possible to stably produce a glass sheet satisfying a predetermined quality. For example, there is a problem that the adhesion of particles to sheet glass or glass plates in a forming furnace or an annealing furnace cannot be sufficiently suppressed. If the particles adhere to the glass plate, there is a problem that the glass plate is damaged. In recent years, as glass sheets have been increased in size, the amount of deflection of the glass sheets in the final processing step (grinding, packing, etc.) of the glass sheets or the display manufacturing step has increased. Therefore, in the final processing step of the glass plate or the display manufacturing step, the damage of the glass plate due to the particles causes a significant problem of breakage of the glass plate.
Accordingly, an object of the present invention is to provide a method for producing a glass sheet and an apparatus for producing a glass sheet, which can solve the above-described problems and can stably produce a glass sheet satisfying a predetermined quality.
Means for solving the problems
The invention of claim 1 is a method for producing a glass plate. The manufacturing method comprises: a melting step of melting a glass raw material to form molten glass; a supply step of supplying the molten glass to a molded body disposed in a molding space surrounded by a furnace wall of a molding furnace, that is, a molding furnace wall; a molding step of molding a sheet glass from a molten glass in the molded body by a down-draw method; an annealing step of annealing the sheet glass in an annealing space surrounded by an annealing furnace wall, which is a space located below the molding space; and a cutting step of cutting the annealed sheet glass in a cutting space located below the annealing furnace.
And performing air pressure control so that the air pressure of a furnace external space, which is located above the cutting space in the building space defined by the inner wall surface of the building, the outer surface of the forming furnace wall, and the outer surface of the annealing furnace wall, is greater than the air pressure of the outside of the building in which the forming space, the annealing space, and the cutting space are accommodated.
The invention of claim 2 is a glass plate manufacturing apparatus. The manufacturing apparatus includes: a forming furnace in which a forming space formed by forming molten glass into sheet glass is surrounded by a forming furnace wall; an annealing furnace located below the forming furnace, the annealing furnace being formed by surrounding an annealing space for annealing the sheet glass with an annealing furnace wall; a cutting device disposed in a cutting space located below the annealing furnace, the cutting device being configured to cut the annealed sheet glass; and a control unit configured to perform air pressure control so that an air pressure of a furnace exterior space, which is located above the cutting space in a building space defined by an inner wall surface of the building, an outer surface of the forming furnace wall, and an outer surface of the annealing furnace wall, is greater than an air pressure of an outside of the building in which the forming space, the annealing space, and the cutting space are accommodated.
In addition, as a preferable mode of claim 1, in the air pressure control, the air pressure in the furnace external space is controlled so that a relationship of 0< P1-P2 ≦ 40Pa is satisfied when the air pressure in the furnace external space is P1 and the air pressure outside the building is P2.
In addition, as a preferable mode 2, in the air pressure control, when the air pressure in the shut-off space is P3, the air pressure in the shut-off space is further controlled so that a relationship of 0< P3 — P2 ≦ 40Pa is satisfied.
In addition, as a preferable mode of claim 3, in the gas pressure control, the gas pressure of the cutting space is controlled so that the gas pressure of the annealing space is larger than the gas pressure of the cutting space.
In addition, as a preferable mode of claim 4, in the atmospheric pressure control, the atmospheric pressure in the furnace outer space is controlled so that the atmospheric pressure in the furnace outer space becomes larger as the pressure in the upstream side furnace outer space in the flow direction of the sheet glass becomes larger.
In addition, as a preferable 5 th mode, in the annealing step or the annealing space, in order to apply tension to the flow direction of the sheet glass at the widthwise central portion of the sheet glass, the temperature is controlled so that the cooling rate at the widthwise central portion of the sheet glass is faster than the cooling rates at both widthwise end portions of the sheet glass in a temperature region where the temperature at least the widthwise central portion of the sheet glass is changed from the annealing point temperature of glass plus 150 ℃ to the strain point temperature of glass minus 200 ℃.
In the forming step or the forming space, preferably, in a region where the temperature of the central portion in the width direction of the sheet glass is equal to or higher than the softening point temperature of the glass, the temperature of the sheet glass is controlled so that the temperatures of both end portions in the width direction of the sheet glass are lower than the temperature of the central portion sandwiched between the both end portions, and the temperature of the central portion is uniform. Further, in the annealing step or the annealing space, in order to apply tension in the flow direction of the sheet glass to the central portion in the width direction of the sheet glass, the temperature of the sheet glass is controlled so that the temperature distribution in the width direction of the sheet glass decreases from the central portion to both end portions in a region where the temperature of the central portion of the sheet glass is lower than the softening point temperature of the glass and is equal to or higher than the strain point temperature of the glass. Further, in a temperature region where the temperature of the central portion of the sheet glass is the strain point temperature of the glass, the temperature of the sheet glass is controlled so as to cancel the temperature gradient between the central portion and the both end portions in the width direction of the sheet glass.
In claim 6, a temperature adjusting means for controlling the temperature may be provided in a furnace space formed by the molding space and the annealing space.
In addition, as a preferable 7 th mode, in the annealing step or the annealing space, in order to apply tension in the flow direction of the sheet glass to the central portion in the width direction of the sheet glass, the temperature of the sheet glass is controlled so as to decrease from the both end portions to the central portion of the sheet glass in a region where the temperature of the central portion of the sheet glass is lower than the strain point temperature of the glass.
In addition, as a preferable 8 th mode, in the annealing step or the annealing space, in the conveying roller for conveying the sheet glass, a peripheral speed of the conveying roller provided on a downstream side of a position where a temperature of the sheet glass is equal to or higher than an annealing point temperature of the glass is set to be 0.03% to 2% faster than a peripheral speed of the conveying roller provided in a temperature region where the temperature of the sheet glass is equal to or higher than a glass transition temperature and equal to or lower than a softening point temperature of the glass.
The above-described preferred embodiments 1 to 8 can be applied to the method for producing a glass sheet according to the above-described 1 st aspect and the apparatus for producing a glass sheet according to the above-described 2 nd aspect, respectively, and even a composite embodiment obtained by combining at least 2 of the above-described preferred embodiments 1 to 8 can be applied to the method for producing a glass sheet according to the above-described 1 st aspect and the apparatus for producing a glass sheet according to the above-described 2 nd aspect, respectively.
ADVANTAGEOUS EFFECTS OF INVENTION
The present invention can suppress the adhesion of particles to a glass plate.
Drawings
Fig. 1 is a flowchart of a part of the method for producing a glass plate according to the present embodiment.
Fig. 2 is a schematic view mainly showing a melting device included in the glass sheet manufacturing apparatus.
Fig. 3 is a schematic view showing the interior of a building.
Fig. 4 is a schematic side view of the molding apparatus.
Fig. 5 is a schematic view showing the interior of a building for explaining the space in the building.
Fig. 6 is a control block diagram of the control device.
Fig. 7 is a schematic view showing the interior of a building according to modification 1A.
Fig. 8 is a schematic view showing the interior of a building according to modification 1F.
Detailed Description
The following statements in this specification are defined as follows.
The central portion of the sheet glass means the center in the width direction of the sheet glass.
The end of the sheet glass means a range within 100mm from the edge in the width direction of the sheet glass.
The strain point temperature is a temperature of a glass plate where log η is 14.5 when the viscosity of the glass is represented by η.
The annealing point temperature is the temperature of a glass having a log η of 13.
The softening point temperature is the temperature of a glass having a log η of 7.6.
The glass transition temperature is a temperature of glass at which the supercooled liquid is changed to a glass state.
The inventors of the present invention found that: the reason why sufficient stable production cannot be achieved only by pressurizing the air pressure of the space outside the forming furnace and/or the annealing furnace is due to the magnitude relation of the air pressure between the inside of the building and the outside of the building. More specifically, it was found that the quality of the glass sheet is deteriorated because air flows into the building from the outside of the building when the air pressure inside the building is lower than the air pressure outside the building. Therefore, in order to prevent air from flowing into the building from the outside of the building, it is considered to improve the air tightness of the building, but it is very difficult to completely eliminate the gaps of the building and completely seal the building. Since air flows from a place with higher air pressure to a place with lower air pressure, when the air pressure inside the building is lower than the air pressure outside the building, the air outside the building flows into the building through the gap of the building. Air flowing from the outside of a building through a gap of the building or the like causes adhesion of particles on a glass sheet or a decrease in accuracy of temperature control in a forming furnace or an annealing furnace, and therefore, a glass sheet satisfying a predetermined quality cannot be stably produced. Therefore, the inventors of the present invention have made the following findings: in order to solve the problem of the adhesion of particles to the glass plate, the air pressure inside the building may be made higher than the air pressure outside the building, thereby suppressing the inflow of air outside the building into the building. In addition, the following findings were obtained: in order to suppress a decrease in the accuracy of temperature control in the molding furnace or the annealing furnace, the difference between the atmospheric pressure inside the building and the atmospheric pressure outside the building may be controlled.
A glass plate manufacturing method for manufacturing a glass plate using the glass plate manufacturing apparatus 100 according to the present embodiment will be described below with reference to the drawings.
(outline of the method for producing glass plate)
Fig. 1 is a flowchart of a part of the method for producing a glass plate according to the present embodiment. Hereinafter, a method for manufacturing a glass plate will be described with reference to fig. 1.
The glass plate is produced through various steps in the building B. Specifically, as shown in fig. 1, the glass sheet is manufactured through various steps including a melting step ST1, a refining step ST2, a homogenizing step ST3, a supplying step ST4, a forming step ST5, an annealing step ST6, and a cutting step ST 7. These steps will be explained below.
In the melting step ST1, the glass raw material is heated and melted to form molten glass. In the fining process ST2, the molten glass is fined. In the homogenizing step ST3, the molten glass is homogenized.
In the supply step ST4, the molten glass is supplied to the molding device 300 (see fig. 2) for molding. In the forming step ST5, the molten glass is formed into sheet-like sheet glass SG. The molten glass is preferably formed into a sheet-like sheet glass SG by a down-draw method, particularly an overflow down-draw method. In the annealing step ST6, the sheet glass SG molded in the molding step ST5 is annealed. In the cutting step ST7, the annealed sheet glass SG (see fig. 3) is cut at predetermined intervals to form glass sheets G (see fig. 3).
The glass sheet G cut at predetermined intervals is further cut, ground, polished, cleaned, and inspected to form a glass sheet (the term "glass sheet" means a glass sheet to be finally manufactured without reference numerals).
(outline of glass plate manufacturing apparatus 100)
Fig. 2 is a schematic view mainly showing a melting device 200 included in the glass sheet manufacturing apparatus 100. Fig. 3 is a schematic view of the interior of a building B in which various devices and the like included in the glass sheet manufacturing apparatus 100 are housed or mounted (fig. 3 shows a schematic cross-sectional view of the forming device 300, the forming furnace 40, the lehr 50, and the like). The glass-plate manufacturing apparatus 100 will be explained below.
The glass sheet manufacturing apparatus 100 is disposed in a building B, and mainly includes a melting device 200, a molding device 300, and a cutting device 400.
(constitution of melting apparatus 200)
The melting apparatus 200 is an apparatus for performing the melting step ST1, the clarifying step ST2, the homogenizing step ST3, and the supplying step ST 4. As shown in FIG. 2, the melting apparatus 200 comprises a melting tank 201, a clarifying tank 202, and a stirring tank 203.
The melting tank 201 is a tank for melting the glass raw material. The melting step ST1 is performed in the melting tank 201. The fining vessel 202 is a vessel for removing bubbles from the molten glass melted in the melting vessel 201. The clarification step ST2 is performed in the clarification tank 202. The clarifier 203 stirs the molten glass. The homogenization step ST3 is performed in the stirring tank 203. The melting vessel 201, the clarifying vessel 202, the stirring vessel 203, and the molding apparatus 300 are connected to each other through a glass supply pipe including a1 st pipe 204 and a 2 nd pipe 205.
(constitution of Molding apparatus 300)
Fig. 4 is a schematic side view of the molding apparatus 300. Fig. 5 is a schematic diagram showing the interior of the building B for explaining the space S in the building.
The molding apparatus 300 is an apparatus for performing the molding step ST5 and the annealing step ST 6.
The molding apparatus 300 mainly includes a molded body 310, an atmosphere partition member 320, a cooling roller 330, a cooling temperature adjustment unit 330a, conveying rollers 340a to 340h, and temperature adjustment units 350a to 350g (see fig. 4).
The following describes the structure thereof.
(molded body 310)
As shown in fig. 3, the molded body 310 is located in an upper portion of the molding device 300, and has a function of molding the molten glass (indicated by a symbol MG in fig. 3 and 4) flowing out of the melting device 200 into sheet-like sheet glass. The cross-sectional shape of the molded body 310 cut in the vertical direction has a wedge shape, and is made of bricks.
(atmosphere divider 320)
As shown in fig. 3 and 4, the atmosphere partition member 320 is a plate-like member disposed in the vicinity of the lower end 313 of the molded body 310. The atmosphere partition member 320 is disposed almost horizontally on both sides in the thickness direction of the molten glass, and the molten glass merges at the lower end portion 313 of the molded body 310 and flows downstream in the 1 st direction. The atmosphere partition member 320 functions as a heat insulator. That is, the atmosphere partition member 320 partitions the space above and below it, thereby suppressing heat from moving from the upper side to the lower side of the atmosphere partition member 320.
(Cooling roll 330)
The cooling roller 330 is disposed below the atmosphere partition member 320. The cooling rolls 330 are disposed on both sides in the thickness direction of the molten glass and in the vicinity of both side portions in the width direction thereof, and the molten glass merges at the lower end portion 313 of the molded body 310 and flows downstream in the 1 st direction. The cooling rolls 330 are in contact with both widthwise side portions of the molten glass merged at the lower end portion 313 of the forming body 310, thereby cooling the molten glass. More specifically, the cooling roll 330 pulls down the molten glass to the downstream side in the 1 st direction, thereby cooling while molding the sheet glass SG at a desired thickness. In the present specification, the direction in which the sheet glass SG flows is referred to as the 1 st direction.
Here, the molded body 310, the atmosphere partition member 320, and the cooling roll 330 are disposed in the molding space S1 (a space indicated by oblique left lines in fig. 5). The molding space S1 is a space surrounded by the wall of the molding furnace 40, i.e., the inner surface of the molding furnace wall 41, and the plane FS1 including the upper surface of the partition member 42. The partition member 42 is a member that partitions the forming furnace 40 (the downstream end of the forming furnace wall 41 in the 1 st direction) and the annealing furnace 50 (the upstream end of the annealing furnace wall 51 in the 1 st direction) described later, and is a flat plate-shaped member. The mold oven wall 41 is an oven wall of the mold oven 40, and has a cross-sectional shape cut in the 1 st direction of コ. The molding process ST5 is performed in the molding furnace 40. The space formed by the molding space S1 and the annealing space S2 described later is referred to as a furnace space.
(transfer rollers 340a to 340h)
The conveying rollers 340a to 340h are disposed below the cooling roller 330 with a predetermined interval in the 1 st direction. The conveying rollers 340a to 340h are disposed on both sides in the thickness direction of the sheet glass SG. The conveyance rollers 340a to 340h pull the sheet glass SG downstream in the 1 st direction.
(temperature adjusting means 350a to 350g, cooling temperature adjusting means 330a)
The temperature adjusting units 350a to 350g are devices for adjusting (specifically, raising) the temperature of the sheet glass SG, more specifically, the atmospheric temperature in the vicinity of the sheet glass SG, and the number of the temperature adjusting units 350a to 350g is 2 or more in the 1 st direction and 2 or more in the width direction of the sheet glass SG. The cooling temperature adjusting means 330a is disposed below the cooling roller 330 in the 1 st direction, and adjusts the temperature of the sheet glass SG, more specifically, the atmospheric temperature in the vicinity of the sheet glass SG. The cooling temperature adjustment unit 330a performs cooling so as to reduce the thickness or warpage of the sheet glass SG in a high temperature state immediately after molding.
Here, the cooling temperature adjustment unit 330a is disposed in the molding space S1 (a space indicated by left oblique lines in fig. 5).
The conveyance rollers 340a to 340h and the temperature adjustment units 350a to 350g are disposed in the annealing space S2 (a space indicated by right oblique hatching in fig. 5). The annealing space S2 is a space formed by the annealing furnace 50 disposed below the forming furnace 40. More specifically, it is a space surrounded by the furnace wall of the annealing furnace 50, that is, the inner surface of the annealing furnace wall 51, the plane FS2 including the lower surface of the partition member 42, and the plane FS3 including the 1 st direction downstream end surface of the annealing furnace wall 51.
In the annealing space S2, the sheet glass SG is pulled downstream in the 1 ST direction by the conveying rollers 340a to 340h, and thereby an annealing step ST6 of annealing the sheet glass SG (moving the sheet glass SG from the viscous region to the elastic region via the viscoelastic region) is performed. In the annealing step ST6, the temperature adjusting units 350a to 350g adjust the temperature of the sheet glass SG so as to suppress the plane strain and the thermal shrinkage rate of the sheet glass SG. In the vicinity of each of the temperature adjusting units 350a to 350g, 2 or more temperature sensors as atmosphere temperature detecting means for detecting the atmosphere temperature in the vicinity of the sheet glass SG are arranged along the width direction of the sheet glass SG. Here, the 2 or more temperature sensors are referred to as a temperature sensor unit 380 (see fig. 6).
(cutting device 400)
The cutting device 400 performs a cutting process ST 7. The cutting apparatus 400 is disposed in a cutting space S3 (described below) located below the annealing furnace 50. The cutting device 400 cuts the sheet glass SG flowing toward the 1 st direction downstream side in the forming device 300 from a direction perpendicular to the longitudinal surface of the sheet glass SG. Thereby, the sheet glass SG forms 2 or more glass plates G having a predetermined length.
(space S in building)
The building space S is a space surrounded by the inner surface of the building B, excluding the mold furnace wall 41 and the mold space S1, and the annealing furnace wall 51 and the annealing space S2 (see the shaded portion of the grid in fig. 5). The building space S is a space defined by the inner surface (inner wall surface) of the building B in which the molding space S1, the annealing space S2, and the cutting space S3 are accommodated, the outer surface of the molding furnace wall 41, and the outer surface of the annealing furnace wall 51.
The space S in the building is partitioned into 2 or more spaces by the plates 411, 412, and 413 disposed in the building B. The plates 411, 412, and 413 function as partition members for partitioning the space S in the building into 2 or more spaces. Specifically, the building space S is partitioned by the plates 411, 412, 413 into a forming furnace outer upper space S5, a forming furnace outer lower space S6, an annealing furnace outer space S7, and a cutting space S3. However, the number of plates (the number of partitions of the space in the building) and the height position in the 1 st direction at which the plates are provided are not particularly limited.
The molding furnace outer upper space S5 is a space sandwiched between the plate 411 and the lower surface of the upper part of the building B in the building space S. The plate 411 is disposed at a position close to the upper portion of the forming body 310 and at substantially the same height as the upper portion of the forming furnace wall 41.
The forming furnace outer lower space S6 is a space formed on the downstream side in the 1 st direction from the forming furnace outer upper space S5. Specifically, the forming furnace outer lower space S6 is a space sandwiched between the plates 411 and 412 in the building space S. The plate 412 is disposed so that the height position thereof is located in the vicinity of the 1 st direction downstream end of the formed furnace wall 41. The forming furnace outer lower space S6 includes a region a1 corresponding to the formed body 310 (specifically, the installation position and the height position of the formed body 310 are the same).
The annealing furnace external space S7 is a space formed on the downstream side in the 1 st direction from the forming furnace external lower space S6. The lehr outside space S7 is a space sandwiched by the plates 412 and 413 in the building space S. The bed 413 is disposed at a position at which the height position thereof is located near the 1 st direction downstream end of the annealing furnace wall 51.
The lehr exterior space S7 is a space in which the atmospheric temperature of the glass sheet G flowing through the lehr space S2 at the same height position as the lehr exterior space S7 (i.e., corresponding to the distance from the lower surface of the sheet 412 to the upper surface of the sheet 413) is, for example, 800 to 110 ℃; alternatively, the lehr exterior space S7 is a space including a space for changing the glass sheet G flowing in the annealing space S2 from (annealing point temperature +5 ℃ C.) to (strain point temperature-5 ℃ C.).
The cutting space S3 is a space formed on the downstream side of the annealing furnace external space S7 in the 1 st direction. Specifically, the cut space S3 is a space sandwiched between the plate 413 and the upper surface of the lower part of the building B in the building space S.
Here, the forming furnace wall 41 and the annealing furnace wall 51 are made of, for example, a refractory material, a heat insulating material, or the like. In addition, a well-known refractory material used in the construction of general buildings can be applied to the building B.
(control device 500)
Fig. 6 is a control block diagram of the control device 500.
The control device 500 is composed of a CPU (central processing unit), a ROM (read only memory), a RAM (random access memory), a hard disk, and the like, and functions as a control unit that controls various devices included in the glass sheet manufacturing apparatus 100.
Specifically, as shown in fig. 6, the control device 500 performs drive control of the 1 st drive unit 390 and drive control of the 2 nd drive unit 450, the 1 st drive unit 390 performing temperature adjustment control of the temperature adjustment units 350a to 350g, and the 2 nd drive unit 450 driving the cooling roller 330, the conveying rollers 340a to 340h, the cutting device 400, and the like. The temperature adjustment control by the cooling temperature adjustment unit 330a is performed based on the ambient temperature in the vicinity of the sheet glass SG detected by the temperature sensor unit provided in the molding space S1. The temperature adjustment control of the temperature adjustment units 350a to 350g is performed based on the atmospheric temperature in the vicinity of the sheet glass SG detected by the temperature sensor unit 380.
Further, the control device 500 controls the air pressure in the building space S formed by the inner surface of the building B. This will be described later. The various sensors described in fig. 6 will also be described later.
(Molding of sheet glass SG in the Molding apparatus 300)
The process of forming the sheet glass SG in the forming apparatus 300 will be described below.
First, the molten glass supplied from the melting apparatus 200 to the molded body 310 through the supply port 311 flows into the groove 312 opened above the molded body 310. Then, it is made to overflow the groove portion 312. The molten glass overflowing the groove 312 is caused to flow along both side surfaces of the molded body 310 toward the downstream side in the 1 st direction, and then joined at the lower end 313 as shown in fig. 3. The molten glass merged at the lower end 313 flows down to the downstream side in the 1 st direction. The viscosity of the glass at the time of starting flowing down after leaving the molded body 310 is, for example, 105.7Poise-107.5Poise.
The molten glass flowing downstream in the 1 st direction is drawn down downstream in the 1 st direction by cooling rolls disposed on both sides in the thickness direction so as to sandwich both ends in the width direction. At this time, the molten glass is cooled (rapidly cooled) while being molded into sheet-like sheet glass SG. The sheet glass is rapidly cooled by the cooling roller 330 so that the viscosity at both ends of the sheet glass becomes, for example, 109.0Poise-1010.5Poise. The sheet glass SG pulled down by the cooling roller 330 is further pulled down to the lower side by the conveying rollers 340a to 340h, and annealing is performed at the same time.
The sheet glass SG pulled down by the conveying rollers 340a to 340h is then cut by the cutting device 400 at predetermined intervals to form 2 or more glass sheets G.
(control of air pressure in space S in building)
In the present embodiment, the air pressure in the furnace external space S4 is controlled. The furnace outer space S4 is a space surrounded by the outer surface of the forming furnace wall 41, the outer surface of the annealing furnace wall 51, and the inner surface of the building B, and is a space located above the cutting space S3, in other words, a space formed by removing the cutting space S3 (i.e., a space formed by the forming furnace outer upper space S5, the forming furnace outer lower space S6, and the annealing furnace outer space S7) from the building inner space S.
The air pressure control step of controlling the air pressure in the furnace external space S4 is started when, for example, the homogenization step ST3 is performed. That is, the air pressure control step is performed before the molding step ST5 and the annealing step ST 6.
In the present embodiment, for air pressure control, blowers 421, 422, 423 for pressurizing the respective spaces are disposed outside the forming furnace outer upper space S5, the forming furnace outer lower space S6, and the lehr outer space S7 (i.e., outside the wall that is separated from the building B). Further, in order to control the atmospheric pressure, detection means for detecting the atmospheric pressures of the forming furnace outer upper space S5, the forming furnace outer lower space S6, and the annealing furnace outer space S7, that is, the 1 st pressure sensor 431, the 2 nd pressure sensor 432, and the 3 rd pressure sensor 433 (see fig. 6) are disposed in the respective spaces. The method of performing the air pressure control is not limited to the air blowing, and a method of performing air blowing and air discharging in combination, a method of adjusting the pressure difference by using an air lock (damper), or the like may be applied; and so on.
In the air pressure control, the air pressures in the spaces S5, S6, and S7 are detected by using the various pressure sensors 431, 432, 433, and the air pressure in the furnace external space S4 (for example, the rotation speed in the case of an engine) is controlled so that the air pressure P1 in the furnace external space S4 is greater than the air pressure (atmospheric pressure) P2 outside the building B, and the air pressure in the furnace external space S4 is controlled by controlling the operation (for example, the rotation speed in the case of an engine) of the 2 nd drive unit 450 (for example, an engine) for driving the blowers 421, 422, 423.
Specifically, the control is performed so that the value obtained by subtracting P2 from P1 is greater than 0 and equal to or less than 40 Pa. That is, the 2 nd driving unit 450 is controlled so that the relationship of the following expression 1 is established.
(formula 1)0< P1-P2 ≤ 40Pa
The value obtained by subtracting P2 from P1 is more preferably 1Pa to 40Pa, still more preferably 2Pa to 35Pa, yet more preferably 3Pa to 25Pa, and yet more preferably 4Pa to 15 Pa.
Further, in the air pressure control step, it is preferable that the air pressure in the furnace outer space S4 is controlled so that the air pressure in the furnace outer space S4 increases as the sheet glass SG moves upstream in the flow direction. More specifically, it is preferably: the atmospheric pressure in the space S5 above the outside of the forming furnace > the atmospheric pressure in the space S6 below the outside of the forming furnace > the atmospheric pressure in the space S7 outside the annealing furnace.
(control of Cooling of sheet glass SG)
In the present embodiment, the cooling of the sheet glass SG may be controlled in the forming space S1 and the annealing space S2. Specifically, the sheet glass SG may be cooled as described below by the cooling temperature adjusting unit 330a, the temperature adjusting units 350a to 350g, the conveying rollers 340a to 340h, and the cooling roller 330 in accordance with an instruction from the control device 500.
For example, when the sheet glass SG is caused to flow to the downstream side in the annealing space S2 using the cooling roller 330 and the conveying rollers 340a to 340h, the tension is caused to effectively act on the flow direction (1 st direction) of the sheet glass SG, whereby the warp of the sheet glass SG can be suppressed. Further, it is also possible to suppress the occurrence of wave-shaped deformation in the adjacent region adjacent to the portion flowing while being nipped between the rollers.
In order to effectively apply tension to the flow direction (1 st direction) of the sheet glass SG, for example, in a region in the molding space S1 where the temperature of the central portion in the width direction of the sheet glass SG is equal to or higher than the softening point temperature of the glass, the temperature of the sheet glass SG is controlled such that both end portions (ear portions) in the width direction of the sheet glass SG are lower than the temperature of the central portion and the temperature of the central portion is uniform. Further, in the annealing space S2, in order to cause tensile stress in the conveyance direction to act on the widthwise central portion of the sheet glass SG, the temperature of the sheet glass SG is controlled so that the widthwise temperature distribution of the sheet glass SG decreases from the central portion to both end portions in a region where the widthwise central portion of the sheet glass SG has a temperature less than the softening point temperature and equal to or greater than the strain point temperature. Further, in a temperature region where the temperature of the central portion in the width direction of the sheet glass SG is the strain point temperature of the glass, the temperature of the sheet glass SG is controlled so as to eliminate the temperature gradient between the central portion and both end portions (ear portions) in the width direction of the sheet glass SG. Thereby, the tensile stress in the conveyance direction is applied to the widthwise central portion of the sheet glass SG.
The temperature control of the sheet glass SG is based on the premise that a region where the temperature of the sheet glass SG is equal to or higher than the softening point temperature is present in the molding space S1. Therefore, in order to perform the temperature control, the cooling temperature adjustment means 330a is provided in the molding space S1. However, a region where the temperature of the sheet glass SG is equal to or higher than the softening point temperature may exist in the annealing space S2. In this case, the cooling temperature adjustment means 330a is provided in the annealing space S2 for the purpose of the temperature control.
In the annealing space S2, in order to apply the tension in the conveyance direction to the central portion of the sheet glass SG, the temperature of the sheet glass SG may be controlled so as to decrease from both end portions (ear portions) in the width direction of the sheet glass SG toward the central portion in the width direction of the sheet glass SG in a region where the temperature of the central portion in the width direction of the sheet glass SG is near the strain point temperature of the glass and is lower than the strain point temperature. Thus, in the region near the strain point temperature and less than the strain point temperature in the widthwise central portion of the sheet glass SG, the tensile stress in the conveyance direction can be constantly applied to the widthwise central portion of the sheet glass SG.
In the present embodiment, as will be described later, although variation in the thermal shrinkage rate of the glass sheet can be reduced, further, by adjusting the cooling rate of the sheet glass SG after molding, variation in the thermal shrinkage rate can be suppressed, and in addition, deformation of the glass sheet can be suppressed, warpage can be suppressed, and the absolute value of the thermal shrinkage rate can be reduced.
Specifically, in the annealing space S2, when the sheet glass SG is annealed while being conveyed by the conveying rollers 340a to 340h, the temperature is defined as a temperature range from a temperature obtained by adding 150 ℃ to the annealing point temperature of the sheet glass SG to a temperature obtained by subtracting 200 ℃ from the strain point temperature of the sheet glass SG. In this case, it is preferable that the cooling rate of the central portion of the sheet glass SG in the width direction is faster than the cooling rates of the both end portions of the sheet glass SG at least in the temperature region, and the temperature of the sheet glass SG is changed from a state in which the temperature of the central portion of the sheet glass SG in the width direction is higher than the temperature of the both end portions to a state in which the temperature of the central portion is lower than the temperature of the both end portions. Thereby, a tensile stress can be applied to the flow direction (1 st direction) of the sheet glass SG at the center portion in the width direction of the sheet glass SG. By applying a tensile stress to the flow direction of the sheet glass SG, and even the glass plate can be further suppressed from warping.
In the annealing step, from the viewpoint of suppressing the deformation of the wave shape from being generated in the adjacent region adjacent to the portion of the sheet glass SG flowing while being nipped between the rollers, it is preferable that the peripheral speed of the conveyance roller provided downstream of the position where the temperature of the central portion of the sheet glass SG is the annealing point temperature is faster than the peripheral speed of the conveyance roller provided in the temperature region where the temperature of the central portion of the sheet glass SG is equal to or higher than the glass transition temperature and equal to or lower than the softening point temperature, for example, by 0.03% to 2%. By adjusting the peripheral speed of the conveying roller in this manner, tensile stress can be applied to the flow direction (1 st direction) of the sheet glass SG.
(preferred mode of glass plate)
A preferred embodiment of a glass plate produced by using the glass plate production apparatus and the glass plate production method according to the present embodiment will be described below. The present invention is not limited to the following embodiments.
This embodiment is suitable for manufacturing a glass plate having a thickness of 0.01mm to 1.5 mm. Since the smaller the thickness of the glass plate, the smaller the amount of heat retained by the glass, it becomes difficult to perform temperature control of the sheet glass in the annealing space (here, not only temperature control in the 1 st direction of the sheet glass but also temperature control in the width direction of the sheet glass). Therefore, the present invention, which can stabilize the molding space S1 and the annealing space S2, is applied to the production of glass sheets having a thickness of 0.01mm to 0.5mm, which is a great advantage. In addition, for the above reasons, the present invention is also suitable for producing a glass film having a very small heat retention of 0.01mm to 0.1 mm.
As the glass plate becomes larger, the planar strain is more likely to occur, and it becomes difficult to control the temperature of the sheet glass SG. Therefore, the effect of the present invention is remarkable for a glass plate having a length in the width direction of 2000mm or more and a length in the longitudinal direction of 2000mm or more.
In addition, the glass plate is preferably suitable for a liquid crystal display and an organic EL (organic electro-Luminescence) display which have strict quality requirements. In addition, the present invention can also be applied to cover glass (CoverGlass), cover glass for displays and housings of mobile terminals, touch panels, and glass plates for solar cells. Particularly, the liquid crystal display device is suitable for a liquid crystal display device using Low Temperature Polysilicon (LTPS) TFT (thin film transistor) which has strict requirements on a glass plate.
The heat shrinkage ratio is preferably 100ppm or less when the glass plate is heated from 50 ℃ to 550 ℃ at 10 ℃/min, held at 550 ℃ for 1 hour, cooled to 50 ℃ at 10 ℃/min, heated to 550 ℃ again at 10 ℃/min, held at 550 ℃ for 1 hour, and cooled to 50 ℃ at 10 ℃/min. More preferably 0ppm to 60ppm, still more preferably 0ppm to 40pm, and still more preferably 0ppm to 20 ppm.
The heat shrinkage ratio is an elongation/initial length × 106(ppm) was calculated. The following methods are used to measure the thermal shrinkage. First, a diamond pen (diamondpen) was used to scribe parallel lines at both ends of a glass plateThe marking line of (1). Next, the glass plate was cut into two pieces perpendicular to the marking line, and 1 of them was subjected to heat treatment (as described above, heat treatment in which treatment of holding at 550 ℃ for 1 hour was repeated 2 times). Then, the heat-treated glass plate was aligned with another glass plate to measure the amount of displacement of the mark line.
In particular, when TFTs are formed on a glass plate in the production of a display, unevenness in thermal shrinkage rate is more likely to cause display defects in a display panel than when the thermal shrinkage rate is high or low. In this regard, it is important to suppress variation in the heat shrinkage rate. The variation in the thermal shrinkage rate of the glass sheet produced according to the embodiment is preferably ± 2.85% or less. Here, the unevenness in thermal shrinkage rate means an upper limit (+) and a lower limit (-) at which, when the thermal shrinkage rate is measured by the above-described method at 3 positions in the width direction of the glass sheet (for example, at a position in the central portion and at positions near both end portions in the width direction), the measured values at these positions fluctuate from the average value thereof. The variation in the heat shrinkage ratio is preferably less than ± 2.80%, more preferably ± 2.75% or less, and still more preferably ± 2.65% or less.
The maximum value of the plane strain of the glass plate is preferably 0nm to 1.7 nm. Preferably 0nm to 1.5nm, more preferably 0nm to 1.0nm, and still more preferably 0nm to 0.7 nm. The plane strain can be measured by a birefringence measurement device manufactured by UNIOPT.
Here, since the liquid crystal display and the organic EL display require high-precision assembly, the present invention, which can reduce the variation in the thermal shrinkage rate of the glass plate used for the liquid crystal display or the organic EL display, is particularly suitable for manufacturing a glass plate for a liquid crystal display or a glass plate for an organic EL display.
When the warp of the glass sheet is measured by the following method, the maximum value of the warp is in the range of from 0 to 0.2mm, preferably from 0mm to 0.15mm, more preferably from 0mm to 0.1mm, further preferably from 0mm to 0.05mm, and further preferably from 0mm to 0.05 mm.
The warpage was measured as follows. First, 2 or more small plates (about 400mm square) were cut out from a glass plate. Next, the warpage was measured for each small plate at the corner 4 portions and the central 4 portions on the front and back sides (i.e., the warpage was measured at 16 portions in total). For example, when warp of 8 small boards is measured, measurement data of warp at 16 sites × 8, that is, 128 sites in total is obtained. Then, the maximum value in the measurement data is assumed to be the above range. In the present embodiment, the maximum value of the warp measured by 2 or more small plates is defined as the warp of the glass plate.
Further, as a glass plate for a flat panel display (a liquid crystal display, a plasma display, or the like), a glass plate containing the following components in mass% is exemplified.
SiO2: 50 to 70 mass percent,
Al2O3: 5 to 25 mass percent,
B2O3: 0 to 15 mass%,
MgO: 0 to 10 mass%,
CaO: 0 to 20 mass%,
SrO: 0 to 20 mass%,
BaO: 0 to 10 mass%,
ZrO2: 0 to 10 mass%.
A glass plate for an organic EL display, a glass plate formed with an LTPS-TFT, or a glass plate formed with an oxide semiconductor is required to have a smaller thermal shrinkage rate than a glass plate formed with an α -Si (amorphous silicon) -TFT. In order to reduce the thermal shrinkage, the time for the annealing step of the glass sheet may be increased, or the strain point temperature of the glass may be increased. However, if the time for the annealing step of the glass sheet is increased, the size of the manufacturing apparatus is increased, which is not preferable. As the glass plate having a small heat shrinkage rate, for example, a glass plate having the following composition and characteristics can be mentioned.
SiO2: 52 to 78 mass%,
Al2O3: 3 to 25 mass percent,
B2O3: 1 to 15 mass percent,
RO (where RO is the total amount of the total components contained in the glass sheet of MgO, CaO, SrO and BaO): 3 to 20% by mass of a binder,
a glass plate having a strain point of 680 ℃ or higher and a thermal shrinkage rate of 60ppm or less as measured by the above-mentioned method.
Alternatively, the following glass sheets:
SiO2: 57 to 75 mass percent,
Al2O3: 8 to 25 mass percent,
B2O3: 3 to 11 mass% (excluding 11 mass%)
CaO: 0 to 20 mass%,
MgO: 0 to 15 mass%.
In this case, if any one of the following conditions or 2 or more is satisfied, the glass sheet is more suitable for an LTPS-TFT.
In order to further increase the strain point temperature,
preferably (SiO)2+Al2O3)/B2O38 to 20 and/or SiO2+Al2O3Is 75% by mass or more.
In addition, CaO/B is preferably used2O3Is 0.6 or more.
Further, in order to further increase the strain point temperature, the mass ratio (SiO) is preferable2+Al2O3) The ratio of the/RO is 7.5 or more.
Alternatively, in order to lower the resistivity of the glass, it is preferable to contain 0.01 to 1 mass% of Fe2O3。
Further, in order to achieve a high strain point temperature of the glass sheet and to prevent the devitrification temperature from rising, it is preferable to set the CaO/RO to 0.65 or more.
In addition, when considering application to mobile equipment such as a mobile communication terminal, the total content of SrO and BaO is preferably 0 to 3.3% from the viewpoint of weight reduction.
In addition, R is2O (wherein, R2O is Li2O、Na2O and K2Total amount of components contained in the glass plate in O) may be eluted from the glass to deteriorate TFT characteristics, and therefore when used as a glass plate for a liquid crystal display, it is preferable that R is not substantially contained2O (alkali-free glass). However, by instead including a specific amount of the above-mentioned component in the glass, the deterioration of TFT characteristics can be suppressed, the basicity of the glass can be improved, and the metal having a fluctuating valence can be easily oxidized to exhibit the clarity. Further, since the resistivity of the glass can be reduced, breakage of the melting tank in the melting step and the like can be suppressed. Thus, R2O is 0 to 2.0%, more preferably 0.1 to 1.0%, and further preferably 0.2 to 0.5%. In addition, in R2Among O, K which is less likely to elute from the glass and deteriorate the TFT characteristics is preferably contained2O。K2The content of O is 0 to 2.0%, more preferably 0.1 to 1.0%, and still more preferably 0.2 to 0.5%.
After the chemical strengthening, a glass sheet containing the following components in mass% can be exemplified as a glass sheet suitable for a cover glass or a glass sheet for a solar cell.
SiO2: 50 to 70 mass percent,
Al2O3: 5 to 20 mass percent,
Na2O: 6 to 30 mass percent,
Li2O: 0 to 8 mass%,
B2O3: 0 to 5 mass%,
K2O: 0 to 10 mass%,
MgO: 0 to 10 mass%,
CaO: 0 to 20 mass%,
ZrO2: 0 to 10 mass%.
(characteristics)
It is considered that air flowing into the building from the outside of the building through a gap of the building or the like contains particles such as dust, and therefore, if the air adheres to the sheet glass in the annealing furnace or the cut glass plate, damage may occur. Further, it is considered that when the particles flow into the rising air flow generated along the sheet glass in the annealing furnace, the particles adhere to the sheet glass, and bubbles or projections are formed on the surface of the sheet glass. In such a case, the surface quality of the glass sheet is deteriorated, and therefore, it may be difficult to stably produce the glass sheet.
Further, although the temperature inside the forming furnace or the annealing furnace is controlled by the heater so as not to fluctuate, a gap is present outside the region where the sheet glass is cut in the forming furnace or the annealing furnace, and it is very difficult to completely eliminate the gap. Therefore, if air outside the building flows into the building, the relationship between the air pressure difference between the furnace outer space and the furnace inner space is lost, and the air in the furnace outer space flows into the forming furnace or the annealing furnace through the gap between the forming furnace and the annealing furnace, which may deteriorate the accuracy of temperature control in the forming furnace or the annealing furnace. At this time, the temperature of the air flowing into the forming furnace or the annealing furnace is lower than the temperature in the forming furnace or the annealing furnace subjected to temperature management. That is, only the region of the molten glass or sheet glass that is in contact with the air flowing into the forming furnace or lehr is rapidly cooled. For example, if a certain region of molten glass is locally and rapidly cooled in a forming furnace, the viscosity of only that region increases, and when the glass is formed into sheet glass and then stretched by rollers in the downstream, only the region of high viscosity in the sheet glass cannot be sufficiently stretched, resulting in occurrence of variation in the thickness of the glass sheet. In addition, as described above, in the annealing furnace, the temperature distribution in the width direction of the sheet glass is controlled in order to reduce warpage, plane strain, and thermal shrinkage. Therefore, when a certain region of the sheet glass is locally rapidly cooled in the annealing furnace, the thermal shrinkage rate of only the region is locally increased, which causes variation in the thermal shrinkage rate.
In order to solve the above problem, it is preferable to suppress the inflow of air outside the building into the building by making the air pressure inside the building higher than the air pressure outside the building. However, if the air pressure in the building is excessively higher than the air pressure outside the building, a large amount of air in the building may flow to the outside of the building, and the air pressure or temperature in the building may fluctuate. Alternatively, if the air pressure in the furnace outer space and/or the cutting space becomes too high, the amount of air flowing from the furnace outer space and/or the cutting space into the furnace inner space increases, and an updraft along the sheet glass tends to occur. Therefore, the difference between the air pressure inside the building and the air pressure outside the building is preferably more than 0Pa to 40 Pa. That is, in the air pressure control of the present embodiment, it is preferable to control the blower so that the value obtained by subtracting the air pressure P2 outside the building B from the air pressure P1 in the furnace external space S4 is greater than 0 and 40Pa or less.
By performing the control as described above, it is possible to suppress the deterioration in quality of the glass sheet due to the particles, and also suppress the deterioration in quality of the glass sheet such as warpage and thermal shrinkage unevenness, and it is possible to stably produce a glass sheet satisfying the quality of the particles, warpage and thermal shrinkage unevenness.
Further, by controlling the variation in the temperature of the molding space S1, it is possible to suppress the variation in the thickness of the glass sheet.
Further, the annealing space S2 is a space including a region where the temperature of the sheet glass SG changes from the temperature near the annealing point temperature to the temperature near the strain point temperature, but variation in the thermal shrinkage rate can be reduced by suppressing temperature variation in the annealing space S2. In the annealing space S2, since the variation in the atmospheric temperature in the vicinity of the sheet glass SG at the annealing point or higher can be suppressed, the deformation and warpage of the glass sheet can be suppressed. In the annealing space S2, since the variation in the atmospheric temperature in the vicinity of the sheet glass SG at or below the strain point temperature can be suppressed, the warp of the glass sheet and the like can be suppressed. Here, the sheet glass SG is a continuous plate until it is cut. Therefore, in a region where the temperature of the sheet glass is equal to or lower than the strain point temperature, if the warp shape of the sheet glass changes, the sheet glass in the region equal to or higher than the strain point temperature is affected, and variation in the heat shrinkage rate occurs. On the other hand, in the present embodiment, by suppressing the fluctuation of the atmospheric temperature in the region where the temperature of the sheet glass SG is equal to or lower than the strain point temperature, the unevenness of warpage, planar strain, and thermal shrinkage can be suppressed.
It is difficult to completely eliminate the gap from the wall of the building. Therefore, it is considered that the updraft is also generated in the furnace outer space by the chimney effect. The closer to the furnace wall, the higher the ambient temperature, and therefore the updraft is likely to occur. In addition, convection is also generated by flowing a gas having a relatively high temperature to a region having a relatively low temperature. It is considered that this is because the atmospheric temperature on the inner wall side of the building is lower than that on the furnace wall side. That is, a down-draft is generated along the inner wall of the building and an up-draft is generated along the furnace wall, thereby generating a large convection.
Therefore, in the present embodiment, the blower is controlled so that the pressure of the furnace outer space S4 becomes higher toward the upstream side in the 1 st direction. Thus, in the furnace outer space S4, the air flow rising along the outer surface of the forming furnace wall 41 of the forming furnace 40 or the annealing furnace wall 51 of the annealing furnace 50 can be suppressed. Therefore, the temperature of the outer surface of the mold oven wall 41 or the annealing oven wall 51 can be stabilized as much as possible. Therefore, temperature fluctuations in the molding space S1 or the annealing space S2 can be suppressed.
The furnace external space S4 is divided into a forming furnace external upper space S5, a forming furnace external lower space S6, and an annealing furnace external space S7. Therefore, even if an air flow rising along the outer surface of the mold oven wall 41 or the annealing oven wall 51 is generated, the range of the air flow in the 1 st direction can be narrowed (that is, the air flow can be retained in the spaces S5 to S7). That is, since the gas pressure in the furnace outer space S4 is distributed among 2 or more spaces and is increased toward the upstream side, it is possible to suppress the generation of a large air flow which rises over a plurality of spaces (for example, over at least 2 or more spaces among the spaces S5 to S7).
This makes the temperature of the outer surface of the mold oven wall 41 or the annealing oven wall 51 more stable. Therefore, the influence on the temperature in the molding space S1 or the annealing space S2 can be reduced, making the temperature of the molding space S1 or the annealing space S2 more stable.
(modification example)
While the present embodiment has been described above with reference to the drawings, the specific configuration is not limited to the above embodiment, and may be modified within a range not departing from the central concept of the invention.
(modification 1A)
Fig. 7 is a schematic view showing the interior of the building B of modification 1A.
The ascending air current generated along the sheet glass lifts glass chips generated when the sheet glass is cut or dust contained in air flowing into the building from the outside of the building and causes it to adhere to the sheet glass flowing in the forming space or the annealing space. The glass chips adhering to the sheet glass form bubbles or protrusions on the surface of the sheet glass, and the quality of the surface of the glass sheet is deteriorated. In addition, the dust also degrades the quality of the glass sheet surface. In addition, since the air flowing into the building space from the outside of the building greatly varies depending on the conditions (temperature, wind speed, etc.) outside the building, it is difficult to control the air pressure and temperature in the building space because the air flows into the building space from the outside of the building.
Therefore, in the air pressure control step, it is preferable to control the air pressure P3 of the cut space S3 to be higher than the air pressure P2 outside the building B. This prevents air containing dust and the like from flowing into the cutting space from the outside of the building, and even suppresses a decrease in the surface quality of the glass sheet.
In this case, the blower 424 for pressurizing the cut space S3 is disposed outside the cut space S3. Further, a 4 th pressure sensor (not shown) for detecting the air pressure P3 of the cut space S3 is provided in the cut space S3.
When the atmospheric pressure in the cutting space is equal to or higher than a predetermined pressure, an air flow flowing into the furnace (the forming furnace and the annealing furnace) is likely to be generated, and the temperature of the forming space and the annealing space may be affected.
Therefore, it is preferable that the air pressure control of the cut space S3 is performed so that the value obtained by subtracting the air pressure P2 outside the building B from the air pressure P3 of the cut space S3 is greater than 0 and 40Pa or less. That is, it is preferable to perform the air pressure control so that the following expression 2 is satisfied.
(formula 2)0< P3-P2 ≤ 40Pa
This can suppress the inflow of air into the building B from outside the building B, and therefore, the temperature control and the air pressure control of the cut space S3, and even the building space S, can be performed with high accuracy. In addition, since the inflow of dust and the like into the cutting space S3 can be suppressed, the surface quality of the glass sheet can be prevented from deteriorating.
In addition to the above-described embodiments, the air pressure control may be performed such that the air pressure P4 in the annealing space S2 is higher than the air pressure P3 in the cutting space S3 by monitoring values detected by the 4 th pressure sensor and the 5 th pressure sensor (not shown) and controlling the blower 424 (that is, controlling the air pressure in the cutting space S3). The 5 th pressure sensor is a pressure sensor for detecting the gas pressure P4 in the annealing space S2.
This can suppress the flow of air from the cutting space S3 to the annealing space S2. Further, the gas pressure may be controlled so that the gas pressure in the annealing space S2 becomes larger toward the upstream side in the 1 st direction. This can suppress temperature fluctuations in the molding space S1 and the annealing space S2.
(modification 1B)
In the above embodiment, the plates 411, 412, and 413 functioning as physical partitioning members are arranged so as to form 2 or more spaces, but the present invention is not limited thereto, and the same effect as the above embodiment can be obtained by performing air pressure control so that the air pressure becomes larger on the upstream side in the 1 st direction.
(modification 1C)
In the above embodiment, the furnace outer space S4 is pressurized. However, it is not always necessary to make the gas pressure in the furnace external space S4 higher than the gas pressure in the molding space S1 or the annealing space S2. For example, even if the difference between the gas pressure in the molding space S1 or the annealing space S2 and the gas pressure in the furnace external space S4 is small, the amount of air leaking from the molding space S1 or the annealing space S2 can be reduced, and the generation of updraft along the glass sheet G can be suppressed, which is effective.
(modification 1D)
Fig. 8 is a schematic view showing the interior of building B of modification 1D. As shown in fig. 8, the furnace outer space S4 may be divided into 3 spaces including a forming furnace outer space S10 including a forming furnace outer upper space S5 and a forming furnace outer lower space S6, and an annealing furnace outer space S7. In this case, the same effects as those of the above embodiment can be obtained.
Further, it is not always necessary that the gas pressure in the outer furnace space S4 be higher on the upstream side in the 1 st direction, and the generation of the updraft generated in the outer furnace space can be suppressed by making at least the gas pressure in the forming outer furnace space S10 higher than the gas pressure in the annealing furnace outer space S7. This is because the difference between the temperature of the oven wall 41 and the temperature of the annealing oven wall 51 is very large, and therefore a larger updraft tends to occur from the annealing oven wall 51 to the oven wall 41. In addition, this is also because: as described above, in order to improve the quality of the glass sheet, it is particularly preferable to reduce the temperature fluctuation in the forming furnace 40 and the annealing furnace 50.
Examples
Examples of the present invention are explained below.
(example 1)
The air pressure in the furnace outer space S4 was controlled so that the difference between the air pressure in the furnace outer space S4 and the air pressure P2 outside the building B was 5 Pa. Then, a glass plate for a liquid crystal display having a thickness of 0.7mm and a size of 2200mm × 2500mm was produced. The content of each component of the glass sheet is as follows.
SiO260% by mass
Al2O319.5% by mass
B2O310% by mass
CaO5 mass%
SrO5 mass%
SnO20.5% by mass
(example 2)
A glass plate for a liquid crystal display was produced in the same manner as in example 1, except that the difference between the atmospheric pressure P1 in the furnace external space S4 and the atmospheric pressure P2 outside the building B was 20 Pa.
(example 3)
A glass plate for a liquid crystal display was produced in the same manner as in example 1 except that the difference between the atmospheric pressure P1 in the furnace external space S4 and the atmospheric pressure P2 outside the building B was 35 Pa.
(example 4)
A glass plate for a liquid crystal display was produced in the same manner as in example 1, except that the difference between the atmospheric pressure P1 in the furnace external space S4 and the atmospheric pressure P2 outside the building B was 50 Pa.
Comparative example 1
The same method as in example 1 was used to produce a glass plate for a liquid crystal display except that the difference between the air pressure P1 in the space S4 outside the furnace and the air pressure P2 outside the building B was-5 Pa (i.e., the air pressure P2 outside the building B was higher than the air pressure in the space S4 outside the furnace)
Then, the unevenness of thermal shrinkage of the produced glass plate for a liquid crystal display was measured by the above-described method (the method described in the preferred embodiment of (7) glass plate) under the conditions as described above. Further, the surface of the glass plate for a liquid crystal display was visually observed, and the case where no damage was confirmed was OK, and the case where damage was confirmed was NG, thereby performing evaluation. The following table 1 shows the measurement results of examples 1 to 4 and comparative example 1.
[ Table 1]
As described above, as long as it is 0<By controlling the gas pressure in the furnace external space S4 in the manner of P1 to P2, the occurrence of damage on the surface of the glass sheet can be suppressed. In addition, as long as it is 0<When the gas pressure in the furnace external space S4 is controlled so as to be P1-P2. ltoreq.40 Pa, variation in the heat shrinkage rate can be further suppressed. In addition, even if the content (mass%) of each component of the glass plate is SiO261%、Al2O319.5%、B2O310%、CaO9%、SnO20.3%、R20.2% of O, the same results as described above were obtained.
Description of the symbols
40 forming furnace
50 annealing furnace
100 glass plate manufacturing device
310 shaped body
B building
MG molten glass
Claims (15)
1. A method for manufacturing a glass sheet, comprising:
a melting step of melting a glass raw material to form molten glass;
a supply step of supplying the molten glass to a molded body disposed in a molding space surrounded by a wall of a molding furnace, that is, a wall of the molding furnace;
a molding step of molding a sheet glass from a molten glass in the molded body by a down-draw method;
an annealing step of annealing the sheet glass in an annealing space surrounded by an annealing furnace wall, which is a furnace wall of an annealing furnace, the annealing space being a space located below the molding space; and
a cutting step of cutting the annealed sheet glass in a cutting space located below the annealing furnace,
performing air pressure control so that an air pressure of a furnace external space, which is located above the cutting space within the building space defined by an inner wall surface of the building, an outer surface of the forming furnace wall, and an outer surface of the annealing furnace wall, is greater than an air pressure of an outer side of the building in which the forming space, the annealing space, and the cutting space are accommodated; wherein,
in the air pressure control step, the air pressure in the furnace external space is controlled so that a relationship of 0< P1-P2 ≦ 40Pa is satisfied when the air pressure in the furnace external space is P1 and the air pressure outside the building is P2.
2. The method for producing a glass sheet according to claim 1,
in the air pressure control step, when the air pressure in the cut space is P3 and the air pressure outside the building is P2, the air pressure in the cut space is further controlled so that a relationship of 0< P3-P2 ≦ 40Pa is satisfied.
3. The method for producing a glass sheet according to claim 2,
in the atmospheric pressure control step, the atmospheric pressure of the cutting space is controlled so that the atmospheric pressure of the annealing space is greater than the atmospheric pressure of the cutting space.
4. The method for producing a glass sheet according to claim 2 or 3,
in the atmospheric pressure control step, the atmospheric pressure in the furnace external space is controlled so as to increase as the atmospheric pressure in the furnace external space increases toward the upstream side in the flow direction of the sheet glass.
5. The method for producing a glass sheet according to claim 1 or 2,
in the annealing step, the annealing step is carried out,
in order to apply tension to the flow direction of the sheet glass at the widthwise central portion of the sheet glass,
at least in a temperature region where the temperature of the widthwise central portion of the sheet glass changes from the annealing point temperature of the glass plus a temperature of 150 ℃ to a temperature of minus 200 ℃ from the strain point temperature of the glass,
the temperature is controlled so that the cooling rate at the center in the width direction of the sheet glass is faster than the cooling rates at both ends in the width direction.
6. The method for producing a glass sheet according to claim 1 or 2,
in a region where the temperature of the central portion in the width direction of the sheet glass is equal to or higher than the softening point temperature of the glass, the temperature of the sheet glass is controlled so that the temperatures of both end portions in the width direction of the sheet glass are lower than the temperature of the central portion sandwiched between the both end portions and the temperature of the central portion is uniform,
and, in order to apply tension in the flow direction of the sheet glass to the central portion in the width direction of the sheet glass, the temperature of the sheet glass is controlled so that the temperature distribution in the width direction of the sheet glass decreases from the central portion to both end portions in a region where the temperature of the central portion of the sheet glass is lower than the softening point temperature of the glass and is equal to or higher than the strain point temperature of the glass,
in a temperature region where the temperature of the central portion of the sheet glass is the strain point temperature of the glass, the temperature of the sheet glass is controlled so as to eliminate a temperature gradient between the central portion and the both end portions in the width direction of the sheet glass.
7. The method for producing a glass sheet according to claim 1 or 2,
in order to apply tension in the flow direction of the sheet glass to the central portion in the width direction of the sheet glass, the temperature of the sheet glass is controlled so as to decrease from both end portions of the sheet glass to the central portion in a region where the temperature of the central portion of the sheet glass is lower than the strain point temperature of the glass.
8. The method for producing a glass sheet according to claim 1 or 2,
in the annealing step, the peripheral speed of a conveying roller provided downstream of a position where the temperature of the sheet glass is equal to or higher than the annealing point temperature of the glass is set to be 0.03% to 2% faster than the peripheral speed of a conveying roller provided in a temperature region where the temperature of the sheet glass is equal to or higher than the glass transition temperature and equal to or lower than the softening point temperature of the glass.
9. An apparatus for manufacturing a glass sheet, comprising:
a forming furnace in which a forming space for forming sheet glass from molten glass is surrounded by a forming furnace wall;
an annealing furnace located below the forming furnace, the annealing furnace being formed by surrounding an annealing space for annealing the sheet glass with an annealing furnace wall;
a cutting device disposed in a cutting space located below the annealing furnace, the cutting device being configured to cut the annealed sheet glass;
an air pressure control unit for performing air pressure control so that an air pressure of a furnace external space, which is located above the cutting space within a building space defined by an inner wall surface of the building, an outer surface of the forming furnace wall, and an outer surface of the annealing furnace wall, is greater than an air pressure of an outside of the building in which the forming space, the annealing space, and the cutting space are accommodated; wherein,
in the air pressure control step, the air pressure in the furnace external space is controlled so that a relationship of 0< P1-P2 ≦ 40Pa is satisfied when the air pressure in the furnace external space is P1 and the air pressure outside the building is P2.
10. The apparatus for manufacturing glass sheets as defined in claim 9, wherein said air pressure control unit includes a blower for sending air from outside said building into the space outside said furnace.
11. The apparatus for manufacturing glass sheets as defined in claim 10, wherein the air pressure control unit includes a pressure sensor provided in the furnace exterior space for measuring the air pressure in the furnace exterior space, and the air pressure control unit further includes a control device for driving the blower based on a detection result of the pressure sensor so that the air pressure in the furnace exterior space is greater than the air pressure outside the building.
12. The apparatus for producing glass sheet according to any of claims 9 to 11, wherein,
further comprising a temperature adjusting unit in the annealing space,
in the temperature adjustment means, in order to apply tension to the sheet glass in the flow direction at the widthwise central portion of the sheet glass, the temperature control is performed so that the cooling rate at the widthwise central portion of the sheet glass is faster than the cooling rates at both widthwise end portions in a temperature region in which the temperature at least the widthwise central portion of the sheet glass changes from the annealing point temperature of the glass plus 150 ℃ to the temperature minus 200 ℃ from the strain point temperature of the glass.
13. The glass plate manufacturing apparatus according to claim 9 or 10,
a temperature adjusting unit is arranged in a furnace space formed by the forming space and the annealing space,
in the temperature adjustment means, in a region where the temperature of the central portion in the width direction of the sheet glass is equal to or higher than the softening point temperature of the glass, the temperature of the sheet glass is controlled so that the temperatures of both end portions in the width direction of the sheet glass are lower than the temperature of the central portion sandwiched between the both end portions and the temperature of the central portion is uniform,
in order to apply tension in the flow direction of the sheet glass to the central portion in the width direction of the sheet glass, the temperature of the sheet glass is controlled so that the temperature distribution in the width direction of the sheet glass decreases from the central portion to the both end portions in a region where the temperature of the central portion of the sheet glass is lower than the softening point temperature of the glass and is higher than or equal to the strain point temperature of the glass,
in a temperature region where the temperature of the central portion of the sheet glass is the strain point temperature of the glass, the temperature of the sheet glass is controlled so as to eliminate a temperature gradient between the central portion and the both end portions in the width direction of the sheet glass.
14. The glass plate manufacturing apparatus according to claim 9 or 10,
a temperature adjusting unit is arranged in the annealing space,
in the temperature adjustment means, in order to apply tension in the flow direction of the sheet glass to the central portion in the width direction of the sheet glass, the temperature of the sheet glass is controlled so as to decrease from both end portions of the sheet glass to the central portion in a region where the temperature of the central portion of the sheet glass is lower than the strain point temperature of the glass.
15. The glass plate manufacturing apparatus according to claim 9 or 10,
conveying rollers for conveying the sheet glass are arranged in the annealing space,
and a conveying roller which rotates, wherein the peripheral speed of the conveying roller arranged at the downstream side of the position where the temperature of the sheet glass is the annealing point temperature of the glass is faster by 0.03% -2% than the peripheral speed of the conveying roller arranged at the temperature region where the temperature of the sheet glass is higher than the glass transition temperature and lower than the softening point temperature of the glass.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011205568 | 2011-09-21 | ||
| JP2011-205568 | 2011-09-21 | ||
| PCT/JP2012/006024 WO2013042379A1 (en) | 2011-09-21 | 2012-09-21 | Method for manufacturing glass sheet, and apparatus for manufacturing glass sheet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103261106A CN103261106A (en) | 2013-08-21 |
| CN103261106B true CN103261106B (en) | 2016-05-18 |
Family
ID=47914166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280003961.7A Active CN103261106B (en) | 2011-09-21 | 2012-09-21 | The manufacture method of glass plate and device for producing glass sheet |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5848329B2 (en) |
| CN (1) | CN103261106B (en) |
| TW (1) | TWI600622B (en) |
| WO (1) | WO2013042379A1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201446667A (en) * | 2013-04-05 | 2014-12-16 | Nippon Electric Glass Co | Glass substrate and gradual cooling method thereof |
| JP6007277B2 (en) * | 2014-03-31 | 2016-10-12 | ＡｖａｎＳｔｒａｔｅ株式会社 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
| CN104944748B (en) * | 2014-03-31 | 2017-10-20 | 安瀚视特控股株式会社 | The manufacture method of glass substrate and the manufacture device of glass substrate |
| JP6346485B2 (en) * | 2014-03-31 | 2018-06-20 | ＡｖａｎＳｔｒａｔｅ株式会社 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
| CN105392741B (en) * | 2014-06-30 | 2018-04-10 | 安瀚视特控股株式会社 | The manufacture method and sheet glass manufacturing apparatus of plate glass |
| CN114394736B (en) * | 2021-12-20 | 2023-12-12 | 彩虹显示器件股份有限公司 | Device and method for controlling bending degree of substrate glass molding |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010169306A (en) * | 2009-01-22 | 2010-08-05 | Dai-Dan Co Ltd | Air supply device |
| CN101821209A (en) * | 2007-12-25 | 2010-09-01 | 日本电气硝子株式会社 | Process and apparatus for producing glass plate |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10291827A (en) * | 1997-04-16 | 1998-11-04 | Hoya Corp | Production of glass pane and apparatus for production therefor |
| JP3547642B2 (en) * | 1999-04-27 | 2004-07-28 | 三建設備工業株式会社 | Self-powered differential pressure holding damper |
| JP3586142B2 (en) * | 1999-07-22 | 2004-11-10 | エヌエッチ・テクノグラス株式会社 | Glass plate manufacturing method, glass plate manufacturing apparatus, and liquid crystal device |
| JP2004233021A (en) * | 2003-02-03 | 2004-08-19 | Namiki Precision Jewel Co Ltd | Clean room exhausting system |
| JP4370186B2 (en) * | 2004-02-18 | 2009-11-25 | 三菱重工業株式会社 | Thin film solar cell manufacturing system |
| WO2009081740A1 (en) * | 2007-12-25 | 2009-07-02 | Nippon Electric Glass Co., Ltd. | Process and apparatus for producing glass plate |
-
2012
- 2012-09-21 WO PCT/JP2012/006024 patent/WO2013042379A1/en active Application Filing
- 2012-09-21 TW TW101134863A patent/TWI600622B/en active
- 2012-09-21 JP JP2013509383A patent/JP5848329B2/en active Active
- 2012-09-21 CN CN201280003961.7A patent/CN103261106B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101821209A (en) * | 2007-12-25 | 2010-09-01 | 日本电气硝子株式会社 | Process and apparatus for producing glass plate |
| JP2010169306A (en) * | 2009-01-22 | 2010-08-05 | Dai-Dan Co Ltd | Air supply device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103261106A (en) | 2013-08-21 |
| JP5848329B2 (en) | 2016-01-27 |
| TW201317186A (en) | 2013-05-01 |
| WO2013042379A1 (en) | 2013-03-28 |
| TWI600622B (en) | 2017-10-01 |
| JPWO2013042379A1 (en) | 2015-03-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI402223B (en) | Manufacture method of glass plate and manufacturing apparatus for glass plate | |
| US8322160B2 (en) | Process and apparatus for producing glass sheet | |
| TWI422539B (en) | Manufacturing method and apparatus for glass plate | |
| TWI417255B (en) | A manufacturing method of a glass plate and a manufacturing apparatus for a glass plate | |
| JP5574454B2 (en) | Manufacturing method of glass substrate | |
| CN103261106B (en) | The manufacture method of glass plate and device for producing glass sheet | |
| JP5260794B2 (en) | Glass plate manufacturing method and glass plate manufacturing apparatus | |
| KR20130050936A (en) | Method and apparatus of making glass substrate | |
| WO2009081740A1 (en) | Process and apparatus for producing glass plate | |
| CN103373803A (en) | Glass plate manufacturing method | |
| WO2009081741A1 (en) | Process and apparatus for producing glass plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |