CN103373803A - Glass plate manufacturing method - Google Patents

Glass plate manufacturing method Download PDF

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Publication number
CN103373803A
CN103373803A CN2013100340028A CN201310034002A CN103373803A CN 103373803 A CN103373803 A CN 103373803A CN 2013100340028 A CN2013100340028 A CN 2013100340028A CN 201310034002 A CN201310034002 A CN 201310034002A CN 103373803 A CN103373803 A CN 103373803A
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Prior art keywords
sheet glass
glass
roller
stationary roll
glass substrate
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CN2013100340028A
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CN103373803B (en
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苅谷浩幸
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Avanstrate Inc
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Avanstrate Inc
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Abstract

The invention provides a glass plate manufacturing method, which can obtain warpage in high precision and can be realized under a condition that the designed temperature distribution is reappeared. In a glass plate manufacturing method based on overflowing downward pulling manner, a fixing roller and a moving roller form a roller pair capable of stretching thin plate glass flowing downward from a formed body downwards to apply a first stress to the fixing roller toward the thin plate glass side, the fixing roller applying force to the thin plate glass side by means of the first stress is specified by a specifying member in a manner of stopping at a preset position, a second stress is applied to the moving roller toward the thin plate glass side, and the first stress is configured to be greater than the second stress.

Description

The manufacture method of glass substrate
Technical field
The present invention relates to make the manufacture method of the glass substrate of glass substrate.
Background technology
The flat-panel monitors such as liquid-crystal display or plasma display (below, be called " FPD ".) in the employed glass substrate, adopting thickness for example is the thin glass plate of 0.5~0.7mm.This FPD is the size of 300 * 400mm when the 1st generation for example with glass substrate, but becomes the size of 2850 * 3050mm when the 10th generation.
In order to make the FPD glass substrate of large like this size, often use overflow downdraw.Overflow downdraw comprises: by in forming furnace, make melten glass overflow from the top of molding (overflow) thus the operation of sheet glass (plate glass) that below molding, be shaped; With the refrigerating work procedure that sheet glass is annealed in annealing furnace.In annealing furnace, introduce between the paired roller sheet glass and conveyance downwards, thus sheet glass is drawn into desirable thickness, simultaneously sheet glass is annealed.Then, sheet glass is cut into predetermined size and send into subsequent processing.
Patent documentation 1 discloses the manufacture method of the glass substrate that adopts such overflow downdraw.At patent documentation 1(particularly with reference to 0018~0023 section) in a pair of draw roll is disclosed, the sheet glass that this a pair of draw roll clamping overflows from molding is also drop-down downwards.And this a pair of draw roll moves by cylinder along continuous straight runs between progressive position and going-back position.That is, when using this draw roll, it is advanced seize on both sides by the arms, when not using this draw roll, make it retreat release.
Patent documentation 1: Japanese kokai publication hei 5-193964 communique
In addition, so that warpage, strain satisfy the mode of certain quality benchmark the melten glass that overflows from molding is cooled off (annealing).Specifically, so that the mode streamwise that warpage and strain the become predetermined value temperature distribution of the width of design sheet glass in advance.That is, carry out temperature treatment in the mode that becomes the temperature distribution that designs in advance, can produce thus the warpage of imagining in advance, the glass substrate of strain value.Thus, can produce the glass substrate about the quality benchmark of warpage and strain that satisfies client side.Therefore, adopt refrigerating unit or well heater etc. to carry out strict temperature treatment, so that sheet glass becomes the temperature distribution that designs.
; in annealing operation; even strictly carry out temperature treatment in the mode that becomes the temperature distribution that designs as described above; but because other major reason; so that the warpage of the glass substrate that produces, strain depart from the in advance value of imagination; consequently, there is the situation that does not satisfy the quality benchmark.For example, in the right inappropriate situation of configuration of the draw roll that is used for drop-down above-mentioned sheet glass, can apply unsuitable stress to sheet glass, thereby make sheet glass crooked to inappropriate direction and stretch by force.In addition, because roller weares and teares gradually, therefore need to suitably re-start configuration (readjusting of roller position).If not so accurately with above-mentioned draw roll configuration not in position, just can't not obtain to have the glass substrate of desirable (imagining in advance) warp value.
In addition, in above-mentioned patent documentation 1, put down in writing before the draw roll that utilizes cylinder to make to retreat and then the technology of (drop-down) sheet glass that stretches, but how record does not specifically carry out the location of roller.
Summary of the invention
Therefore, the object of the present invention is to provide a kind of manufacture method of glass substrate, it can obtain the planeness (amount of warpage) of the glass substrate that can realize accurately in the situation that the temperature distribution that designs is reproduced.
The present inventor recognizes: the stationary roll that is disposed by the mode with the clamping sheet glass and mobile rollers are configured for the roller that will stretch from molding overflow and the sheet glass that flows down pair downwards, the position of stationary roll can be positioned accurately the appropriate location be scheduled to, and can easily adjust the position of stationary roll, thus, in long-term manufacturing, can not apply inappropriate (irrational) power to sheet glass yet, thereby can realize above-mentioned problem, and the present inventor has expected the invention of following structure.
(structure 1 of the present invention)
A kind of manufacture method of glass substrate, wherein, make melten glass from the molding overflow and the shaping sheet glass, when utilizing roller that the described sheet glass that will flow down from described molding is stretched downwards, this sheet glass is annealed, the manufacture method of described glass substrate is characterised in that, described roller consists of stationary roll and the mobile rollers that is disposed by the mode with the described sheet glass of clamping, give the 1st power to described stationary roll to described sheet glass side, limited by confining member in the mode that stops at preposition by the described stationary roll of the 1st power to the described sheet glass side application of force, give the 2nd power to described mobile rollers to described sheet glass side
Described the 1st power is set as larger than described the 2nd power.
(structure 2 of the present invention)
Manufacture method according to the glass substrate described in the structure 1 is characterized in that, in order to reduce the warpage of described sheet glass, utilizes described confining member to limit described stationary roll carries out location from described stationary roll to the progressive position of described sheet glass side.
(structure 3 of the present invention)
Manufacture method according to the glass substrate described in the structure 2, it is characterized in that, the direction that flows down along described sheet glass possesses multistage described roller pair, so that the mode that multistage roller is in a straight line to the position of the core of separately described stationary roll is carried out the location of each described stationary roll.
(structure 4 of the present invention)
Manufacture method according to the glass substrate described in the structure 2 is characterized in that, possesses multistage described roller pair along the direction that flows down of described sheet glass, adjusts multistage roller to the position of separately described stationary roll according to the warpage of the sheet glass that produces.
(structure 5 of the present invention)
Manufacture method according to the described glass substrate of arbitrary structure in the structure 1 to 4, it is characterized in that, while the temperature distribution streamwise of the width of the described sheet glass that forms when utilizing described roller to anneal to the described sheet glass that flows down from described molding is stretched downwards is controlled to predetermined setting.
(structure 6 of the present invention)
Manufacture method according to the described glass substrate of arbitrary structure in the structure 1 to 5, it is characterized in that, use and give temperature distribution to described sheet glass along the width of described sheet glass along the thermal source of the width setting of described sheet glass and anneal.
According to the present invention, in annealing operation, the stationary roll that is disposed by the mode with the clamping sheet glass and mobile rollers are configured for the roller that will stretch from molding overflow and the sheet glass that flows down pair downwards, the position of stationary roll can be positioned accurately the appropriate location be scheduled to, and can easily adjust the position of stationary roll, therefore, in long-term manufacturing, can not apply inappropriate (irrational) power to sheet glass yet, thus can obtain accurately to imagine in advance desirable, the planeness (amount of warpage) of the glass substrate that namely can in the situation that pre-designed temperature distribution is reproduced, realize.
Description of drawings
Fig. 1 is the figure of an example of flow process that the manufacture method of glass substrate of the present invention is shown.
Fig. 2 be schematically illustrated for carrying out the present invention the melting operation so that the figure of an example of the device of cutting action.
Fig. 3 is the summary side-view of building mortion shown in Figure 2.
Fig. 4 is for the figure that the heater unit that uses in the control of temperature distribution of the present invention is described.
Fig. 5 is be used to the figure that a plurality of temperature distribution of the present invention are described.
Fig. 6 is the side-view of major portion of the 1st embodiment that the control method of the roller configuration among the present invention is shown.
Fig. 7 is the side-view of major portion of the 2nd embodiment that the control method of the roller configuration among the present invention is shown.
Label declaration
10,30: stationary roll;
20,50: mobile rollers;
15,41: retainer;
33,53: cylinder;
100: fusing device;
101: melt groove;
102: clarifying tank;
103: steel basin;
104: the 1 pipe arrangements;
105: the 2 pipe arrangements;
106: the 3 pipe arrangements;
200: building mortion;
201: forming furnace;
202: annealing furnace;
202a, 202b: top board;
210: molding;
212: groove;
213: lower end;
220: the atmosphere distance member;
230: cooling roller;
240: cooling unit;
242: the central part cooling unit;
242: the amount of cooling water adjustment unit;
244: the end cooling unit;
250a~250c: carrying roller;
270: heater unit;
270a~270e: well heater;
300: cutting unit.
Embodiment
Below, embodiments of the present invention are at length described.
(the whole summary of the manufacture method of glass substrate)
Fig. 1 is the figure that illustrates as the flow process of the manufacture method of the glass substrate of embodiments of the present invention.
The manufacture method of glass substrate mainly has melting operation (ST1), clarification operation (ST2), homogenizing operation (ST3), supplies with operation (ST4), forming process (ST5), refrigerating work procedure (ST6) and cutting action (ST7).In addition, the manufacture method of glass substrate has other operations such as grinding process, grinding step, matting, inspection operation and packaging process.Will be in packaging process stacked a plurality of glass plate conveyances are to the dealer (client) of order party.
Fig. 2 is the figure of schematically illustrated device be used to melting operation (ST1)~cutting action (ST7).As shown in Figure 2, this device mainly has fusing device 100, building mortion 200 and cutting unit 300.Fusing device 100 has the groove 101 of melting, clarifying tank 102, steel basin 103, the 1st pipe arrangement 104, the 2nd pipe arrangement 105 and the 3rd pipe arrangement 106.For building mortion 200, narrate in the back.
In melting operation (ST1), utilize not shown flame and electric heater to being supplied to the frits that melt in the groove 101 and heating and making its melting, obtain thus melten glass MG.Clarification operation (ST2) is carried out in clarifying tank 102, by the clarifying tank 102 interior melten glass MG that supply with by the 1st pipe arrangement 104 from melting groove 101 are heated, thus, so that the oxygen that contains among the melten glass MG or SO 2Bubble grow up owing to the redox reaction of finings and float to liquid level and discharge, perhaps so that the gaseous constituent in the bubble be absorbed among the melten glass MG, thereby make bubble collapse.
In homogenizing operation (ST3), utilize agitator 103a to stir from clarifying tank 102 and be supplied to melten glass MG in the steel basin 103 by the 2nd pipe arrangement 105, carry out thus the homogenizing of glass ingredient.
In supplying with operation (ST4), melten glass MG is supplied to building mortion 200 from steel basin 103 by the 3rd pipe arrangement 106.
In building mortion 200, form operation (ST5) and refrigerating work procedure (ST6).
In forming process (ST5), make melten glass MG be configured as sheet glass SG(with reference to Fig. 3), form flowing of sheet glass SG.In the present embodiment, adopt the overflow downdraw of having utilized molding 210 described later.In this case, the flow direction of sheet glass SG (Z direction among the figure) is vertical below.In refrigerating work procedure (ST6), the sheet glass SG that is shaped and flows is cooled as follows: become desirable thickness, and can not produce because cooling off caused warpage, strain.
In cutting action (ST7), in cutting unit 300, will be cut into predetermined length from the sheet glass SG that building mortion 200 is supplied with, obtain thus tabular glass substrate G.
Then, after the grinding of the end face that has carried out glass substrate G is ground, carry out the cleaning of glass substrate G, and then, checked whether have the unusual defective such as bubble and brush line after, the glass substrate G of passed examination product is packed as the finished product.
The glass substrate G that makes in the present embodiment is fit to be applied to for example liquid crystal display glass substrate, OLED display glass substrate, cover plate.Glass substrate or the cover plate of the cover plate that also this glass substrate can be used as indicating meter or the housing of other portable terminal device etc. in addition,, touch panel, solar cell.Particularly, be suitable for using the liquid crystal display glass substrate of multi-crystal TFT.
In addition, the thickness of glass substrate G for example is 0.1mm~1.5mm.Be preferably 0.1mm~1.2mm, be more preferably 0.3mm~1.0mm, more preferably 0.3mm~0.8mm is particularly preferably 0.3mm~0.5mm.
In addition, the length of the width of glass substrate G is 500mm~3500mm for example, is preferably 1000mm~3500mm, is more preferably 2000mm~3500mm.On the other hand, the longitudinally length of glass substrate G is 500mm~3500mm for example also, is preferably 1000mm~3500mm, is more preferably 2000mm~3500mm.
(composition of glass substrate)
About the glass that in glass substrate G, uses, such as adopting borosilicate glass, alumina silicate glass, aluminium borosilicate glass, soda-lime glass, contain alkali silicate glass, contain the alkali alumina silicate glass, containing alkali aluminum germanate glass etc.And, can be applied to glass of the present invention and be not limited to above-mentioned glass.
Glass about glass substrate G forms, and can exemplify out for example following composition.The containing ratio of composition shown below is expressed as quality %.The non-alkali glass that preferably contains following composition:
SiO 2:50~70%,
Al 2O 3:0~25%,
B 2O 3:1~15%,
MgO:0~10%,
CaO:0~20%,
SrO:0~20%,
BaO:0~10%,
RO:5~30%(wherein, R is among Mg, Ca, Sr and the Ba, the contained all the components of glass substrate).
And, be non-alkali glass in the present embodiment, but glass substrate G contains the alkali-metal micro-alkali-containing glass of trace.Containing in the alkali-metal situation R' 2The total content of O is more than 0.10%, below 0.5%, is preferably more than 0.20%, (wherein, R' is select from Li, Na and K at least a, is the composition that glass substrate G contains) below 0.5%.Certainly, R' 2The total content of O also can be less than 0.10%.In addition, melt easily in order to make glass, from reducing the viewpoint of resistivity, the content of the ferric oxide in the glass is that 0.01~0.2%(is preferably 0.01~0.08%) be more preferably.The content of the stannic oxide that adds as finings in addition, is that 0.01~1%(is preferably 0.01~0.5%) be more preferably.
(explanation of building mortion)
Fig. 3 is the side-view of structure that the building mortion 200 of glass substrate G is shown.
Building mortion 200 comprises the forming furnace 201 that forms operation (ST5) and the annealing furnace 202 that carries out refrigerating work procedure (ST6).
In the refrigerating work procedure (ST6) of carrying out in the present embodiment, for warpage and the strain that reduces glass substrate G, use is carried out anneal along cooling unit and the heater unit of width (horizontal direction in the building mortion 200 shown in Figure 2) setting of the sheet glass SG that is shaped to sheet glass SG in forming process (ST5), in described anneal, along the width of sheet glass SG give temperature distribution and on one side cool off on one side.
The furnace wall that forming furnace 201 and annealing furnace 202 are made of refractory bodies such as refractory brick, refratory insulating brick or fiber-like lagging materials surrounds and consists of.Forming furnace 201 is arranged on vertical top with respect to annealing furnace 202.In the furnace interior space that the furnace wall of be formed stove 201 and annealing furnace 202 surrounds, be provided with molding 210, atmosphere distance member 220, cooling roller 230, cooling unit 240, a plurality of carrying rollers that comprise carrying roller 250a~250c and a plurality of temperature adjustment device.
As shown in Figure 2, molding 210 will be configured as sheet glass SG from the melten glass MG that fusing device 100 flow through by the 3rd pipe arrangement 106.Thus, the sheet glass SG's below building mortion 200 interior formation vertically flows.Molding 210 is the elongated structures that are made of refractory brick etc., and as shown in Figure 3, the cross section of molding 210 forms wedge shape.Be provided with groove 212 on the top of molding 210, described groove 212 becomes the stream of guiding melten glass MG.Groove 212 is connected with the 3rd pipe arrangement 106 at the supplying opening place that is located at molding 210, flows through the melten glass MG that comes by the 3rd pipe arrangement 106 and flows along groove 212.The degree of depth of groove 212 is more shallow the closer to the downstream of flowing of melten glass MG, thereby so that melten glass MG overflow towards vertical below from groove 212.
The sidewall of melten glass MG along molding 210 both sides that overflows from groove 212 flows down.The melten glass MG that flows at sidewall is shown in the lower end 213(of molding 210 Fig. 3) converge, a sheet glass SG is shaped.Sheet glass SG to sheet glass SG shown in Figure 3 flow down direction, be that the Z direction flows.And the temperature of the sheet glass SG of the tight below of the lower end 213 of molding 210 is and 10 5.7~10 7.5The suitable temperature (for example 1000~1130 ℃) of viscosity of pool.
Near below the lower end 213 of molding 210, be provided with atmosphere distance member 220.Atmosphere distance member 220 is heat insulating members of pair of plate-shaped, and its mode that clips sheet glass SG with the both sides from thickness direction (directions X the figure) is located at the both sides of the thickness direction of sheet glass SG.Between sheet glass SG and atmosphere distance member 220, so that atmosphere distance member 220 is not provided with the gap with the degree that sheet glass SG contacts.Atmosphere distance member 220 is spaced apart with the internal space of forming furnace 201, cuts off thus the movement of the heat between the furnace interior space of the furnace interior space of top of atmosphere distance member 220 and below.
Below atmosphere distance member 220, be provided with the cooling roller 230 of air-cooled type.As shown in Figure 3, cooling roller 230 mode that clips sheet glass SG with the both sides from thickness direction is located at the both sides of the thickness direction of sheet glass SG.And preferably, cooling roller 230 cools off, until the temperature at the width both ends of sheet glass SG is reduced to and about 10 9.0The suitable temperature (for example below 900 ℃) of viscosity that pool is above.
Below atmosphere distance member 220, be provided with cooling unit 240.Cooling unit 240 is made of a plurality of refrigerating units.
The zone that is clipped by top board 202a and top board 202b below top board 202a is provided with temperature adjustment device.In this zone, be respectively equipped with carrying roller 250a in the both sides of the thickness direction of sheet glass SG.And in this zone, being respectively equipped with thermal source in the both sides of the thickness direction of sheet glass SG is that heater unit 270 is used as temperature adjustment device.Heater unit 270 has a plurality of well heaters, and described a plurality of well heaters are along the width setting of sheet glass, so that the temperature distribution of the width of control sheet glass SG.Well heater can be adjusted respectively and add heat.
With top board 202b below in the zone that clips of adjacent top board (not shown) and top board 202b, also be provided with the temperature adjustment device that uses other heater unit 270.
Fig. 4 is be used to the figure that above-mentioned heater unit 270 is described.And, in Fig. 4, omitted the diagram of carrying roller 250a.
Heater unit 270 is divided into 5 well heater 270a~270e along the width of sheet glass SG, and each well heater 270a~270e generates heat respectively.Well heater 270a~270e possesses such as thermals source such as chromium class line with heating functions.Constitute can adjust separately 5 well heater 270a~270e separately add heat.
Utilize that above-mentioned cooling roller 230, cooling unit 240 and heater unit 270 are following to be cooled off sheet glass SG like that, so that it has the temperature distribution corresponding with pre-designed temperature distribution.Fig. 5 is be used to the figure that a plurality of temperature distribution of the present invention are described.
In adhesive region, for example designed the 1st temperature distribution P1.The 2nd temperature distribution P2, the 3rd temperature distribution P3 and the 4th temperature distribution P4 in the visco-elasticity zone, have for example been designed.
The 1st temperature distribution P1 is such temperature distribution: the end of the width of sheet glass is lower than the temperature of the middle section that is clipped by the end, and the temperature of middle section becomes even.By the 1st temperature distribution P1, can in the contraction that suppresses width, make the thickness of slab of sheet glass even.
The 2nd temperature distribution P2 is that the temperature of width of sheet glass is from central part such temperature distribution of successively decreasing towards the end.The 3rd temperature distribution P3 and the 2nd temperature distribution P2 are same, be the temperature of width of sheet glass from central part such temperature distribution of successively decreasing towards the end, but its thermograde is less than the 2nd temperature distribution P2.The 4th temperature distribution P4 is such temperature distribution: near the temperature province strain point of glass, the end of the width of sheet glass and the thermograde of central part further reduce, and become roughly even.By the 2nd temperature distribution P2, the 3rd temperature distribution P3 and the 4th temperature distribution P4, can reduce warpage and strain (unrelieved stress).And the middle section of sheet glass is to comprise the zone that makes the uniform object part of thickness of slab, and the end of sheet glass is included in the zone of the object part that cuts after the manufacturing.
As discussed above, the melten glass that overflows from molding is implemented above-mentioned annealing operation, to avoid warpage and strain.In this annealing operation, as mentioned above, in order not produce warpage, streamwise is designed with the temperature distribution of the width of sheet glass in advance, and the temperature distribution that designs for sheet glass is become utilizes refrigerating unit and well heater etc. to carry out strict temperature treatment.; in this annealing operation; even strictly carry out temperature treatment in the mode that becomes the temperature distribution that designs as described above; but other major reason, the example described above for the inappropriate situation of the right configuration of the carrying roller of drop-down sheet glass under; also can apply inappropriate stress to sheet glass; consequently, produce warpage at the glass substrate that produces, thereby can't obtain to have the in advance glass substrate of the warp value of imagination.In addition, because roller weares and teares gradually, therefore need to suitably re-start configuration (readjusting of roller position).If not so accurately with above-mentioned carrying roller configuration not in position, just can't not obtain to have the glass substrate of desirable (imagining in advance) warp value.
Therefore, in the present invention, it is characterized in that, the stationary roll that is disposed by the mode with the clamping sheet glass and mobile rollers are configured for the roller that will stretch from molding overflow and the sheet glass that flows down pair downwards, the position of stationary roll can be positioned at predetermined appropriate location accurately, and can easily adjust, thus, in long-term manufacturing, can not apply inappropriate (irrational) power to sheet glass yet, thereby can solve above-mentioned problem.Below, describe based on embodiment.
[the 1st embodiment]
Fig. 6 is the side-view that the major portion of the 1st embodiment that the control method of the roller configuration among the present invention relates to is shown.
The roller that is made of stationary roll shown here 10 and mobile rollers 20 is to being equivalent to the carrying roller 250a~250c in the aforesaid building mortion 200 shown in Figure 3.Therefore, above-mentioned roller to clamping in the annealing furnace of building mortion from above flow through the sheet glass that comes, on one side sheet glass is pulled out conveyance downwards on one side.
Above-mentioned stationary roll 10 is installed in the end (lower end) that the arm 11 that is roughly く word shape is observed in the side.Above-mentioned arm 11 constitutes, so that above-mentioned stationary roll 10 can rotate in the mode of drawing circular arc as the axle center take fulcrum 12.
The roll shaft 10a that above-mentioned stationary roll 10 is installed rotates to pre-determined direction (counter clockwise direction among the figure) by means of not shown drive source.Usually, the material of carrying roller is lagging material, and the material of roll shaft is metal, also uses in the present embodiment same material.
The other end at above-mentioned arm 11 is equipped with weight (counterweight) 2, by the load of this weight 2, gives predetermined power to stationary roll 10 towards sheet glass SG side.This power can be by putting on above-mentioned arm 11 the load of the other end adjust, specifically, adjust by quantity or the installation site of weight 2.
In addition, at the housing of roll shaft 10a of the above-mentioned stationary roll 10 of supporting fastening parts 13 are installed, to having carried out threading in the fastening parts 13, in order to screw 14 can be fastened in these fastening parts 13.And, the end of screw 14 and retainer 15 butts that are fixed on the predetermined position.Therefore, because the load of above-mentioned weight 2 and be constrained at preposition and stop to the stationary roll 10 of sheet glass SG side application of force end and retainer 15 butts by above-mentioned screw 14, therefore, can utilize the progressive position of retainer restriction and location stationary roll 10.If change the amount of being screwed into of above-mentioned screw 14, the then relative position change of above-mentioned fastening parts 13 and screw 14, position that therefore can also inching stationary roll 10.And, by unloading above-mentioned weight 2, can make arm 11 to counterclockwise rotation, thus mobile to the direction that above-mentioned stationary roll 10 is kept out of the way (leaving the direction of sheet glass SG).
On the other hand, above-mentioned mobile rollers 20 is installed in the side and is viewed as a roughly end (lower end) of the arm 21 of く word shape, and above-mentioned arm 21 constitutes, so that above-mentioned mobile rollers 20 can be rotated in fulcrum 22 is drawn circular arc as the axle center mode.
The other end at above-mentioned arm 21 is equipped with weight (counterweight) 2, by the load of this weight 2, gives predetermined power to mobile rollers 20 towards sheet glass SG side.This power can be by putting on above-mentioned arm 21 the load of the other end adjust, specifically, can adjust by quantity or the installation site of weight 2.
Above-mentioned mobile rollers 20 is rotated to pre-determined direction (counter clockwise direction among the figure) by means of not shown drive source.If it is larger than the reactive force that puts on stationary roll 10 (thrust) to put on the reactive force (thrust) of mobile rollers 20, then stationary roll 10 is advanced to the direction of keeping out of the way from the sheet glass face, therefore need to adjust the load based on above-mentioned weight 2, so that the predetermined power that the predetermined force rate that stationary roll 10 is given towards sheet glass SG side is given towards sheet glass SG side mobile rollers 20 is large.
According to present embodiment, the stationary roll 10 that is disposed by the mode with the clamping sheet glass and mobile rollers 20 are configured for the roller that will stretch from molding overflow and the sheet glass that flows down pair downwards, the appropriate location that the position of stationary roll can be positioned accurately to be scheduled to, namely be used for vertically pulling out the reference position of sheet glass, and can easily be fixed the position adjustment of roller.On the other hand, also give predetermined power to mobile rollers towards sheet glass by the load based on weight, and the power of giving mobile rollers is the power of clamping sheet glass itself, therefore, can adjust load based on weight to apply the power that can not cause glass breakage and can keep glass.That is, as long as so that mobile rollers is driven in the mode of stationary roll adjusts, the roller position of described stationary roll is positioned preposition accurately.In addition, because wearing and tearing of roller etc. and need to being fixed in the situation about readjusting of roller position by regulating the amount of being screwed into of above-mentioned screw 14, can easily be carried out inching to the stationary roll position.
Therefore, in long-term manufacturing, can not apply inappropriate (irrational) power to sheet glass yet, thereby can stably produce according to the temperature distribution that designs the glass substrate of the desirable planeness (amount of warpage) with imagination.
In addition, in annealing operation, usually, possess multistage above-mentioned roller pair along the direction that flows down of sheet glass, can be with multistage roller to the position configuration precedent of the core of separately described stationary roll as being in a straight line.In addition, also can suitably adjust according to the warpage of the sheet glass that produces the core position of each stationary roll of each layer.According to present embodiment, because can high precision and easily carry out the location of the stationary roll of each layer, therefore can suitably dispose multistage roller pair.
[the 2nd embodiment]
Fig. 7 is the side-view that the major portion of the 2nd embodiment that the control method of the roller configuration among the present invention relates to is shown.
In the present embodiment, utilize cylinder that stationary roll and mobile rollers are advanced or retreat (keeping out of the way).
In the present embodiment, be provided with the housing 32 for built-in bearing in the bottom of bearing 31 of the roll shaft 30a of supporting stationary roll 30, the action axle 34 of cylinder 33 is installed at this housing 32.Bearing in the above-mentioned housing 32 engages with track component 40.Therefore, by cylinder 33 action above-mentioned housing 32 along continuous straight runs on track component 40 is moved, accompany therewith, above-mentioned stationary roll 30 is towards sheet glass SG advance (or retreating).At this moment, the progressive position of the stationary roll retainer 41 that is installed in above-mentioned track component 40 is limited in preposition (that is, be used for reference position that sheet glass is vertically pulled out).
On the other hand, about mobile rollers 50 sides, also be provided with the housing 52 for built-in bearing in the bottom of bearing 51 of the roll shaft 50a of supporting mobile rollers 50, the action axle 54 of cylinder 53 is installed at this housing 52.Bearing in the above-mentioned housing 52 similarly engages with track component 40 with the stationary roll side.Therefore, by cylinder 53 action above-mentioned housing 52 along continuous straight runs on track component 40 is moved, accompany therewith, above-mentioned mobile rollers 50 is towards sheet glass SG advance (or retreating).In addition, need to adjust the power of giving by cylinder, so that the predetermined power that the predetermined force rate that stationary roll 30 is given towards sheet glass SG side is given towards sheet glass SG side mobile rollers 50 is large.
In the present embodiment, the stationary roll 30 that is disposed by the mode with the clamping sheet glass and mobile rollers 50 are configured for the roller that will stretch from molding overflow and the sheet glass that flows down pair downwards, by the progressive position of retainer 41 restriction stationary rolls, thereby the appropriate location that the position of stationary roll can be positioned accurately to be scheduled to, namely be used for vertically pulling out the reference position of sheet glass.And can easily be fixed the location of roller.On the other hand, also give predetermined power to mobile rollers 50 towards sheet glass by cylinder, and the power of giving mobile rollers is the power of clamping sheet glass itself, therefore, pressure (pressure-regulating valve) that can be by cylinder etc. adjusts to give the power that can not cause glass breakage and can keep glass.That is, as long as so that mobile rollers is driven in the mode of stationary roll adjusts, the roller position of described stationary roll is positioned preposition accurately.In addition, because wearing and tearing of roller etc. and need to being fixed in the situation about readjusting of roller position by regulating above-mentioned retainer 41, can easily be carried out inching to the stationary roll position.
Therefore, in long-term manufacturing, can not apply inappropriate (irrational) power to sheet glass yet, thereby can stably produce according to the temperature distribution that designs the glass substrate of the desirable planeness (amount of warpage) with imagination.
[embodiment]
Below, by embodiment the present invention is described particularly.
Employing has been made glass substrate for the manufacturing installation of the present embodiment of the manufacture method of implementing glass substrate of the present invention.And aforesaid carrying roller (Fig. 3) is made of aforesaid embodiment shown in Figure 6, has adjusted the configuration of this roller.In addition, frit is mixed into following composition:
SiO 261%,
Al 2O 317%,
B 2O 311%,
CaO6%,
SrO3%,
BaO1%。
For each glass substrate that produces, 1 (8/day) of sampling in per 3 hours within the time in a week respectively to 56 sampling determination planenesses (amount of warpage), and calculate the mean value of each sampling respectively.
Consequently, utilize the planeness of the glass substrate that the manufacturing installation of the glass substrate of present embodiment produces to be low to moderate below the preset value, obtained good effect.In addition, the frequency that glass breakage occurs has also reduced.
And, about planeness, adopt laser displacement gauge to measure.
Thus, the effect of the manufacture method of glass substrate of the present invention is very clear and definite.
In the present embodiment, adopted the heater unit that possesses a plurality of well heaters as thermal source, but thermal source is not limited to the well heater as the pyrotoxin of radiate heat, also a plurality of high temperature air jet apparatus that hot blast is provided towards sheet glass SG can be set along the width of sheet glass SG.
More than, the manufacture method of glass substrate of the present invention at length is illustrated, but the present invention is not limited to above-mentioned embodiment, without departing from the spirit and scope of the present invention, can certainly carry out various improvement and change.

Claims (6)

1. the manufacture method of a glass substrate wherein, makes melten glass from the molding overflow and the shaping sheet glass is annealed to this sheet glass downwards when utilizing roller that the described sheet glass that will flow down from described molding is stretched,
The manufacture method of described glass substrate is characterised in that,
Described roller consists of stationary roll and the mobile rollers that is disposed by the mode with the described sheet glass of clamping,
Give the 1st power to described stationary roll to described sheet glass side, limited by confining member in the mode that stops at preposition by the described stationary roll of the 1st power to the described sheet glass side application of force,
Give the 2nd power to described mobile rollers to described sheet glass side,
Described the 1st power is set as larger than described the 2nd power.
2. the manufacture method of glass substrate according to claim 1 is characterized in that,
In order to reduce the warpage of described sheet glass, utilize described confining member to limit described stationary roll carries out location from described stationary roll to the progressive position of described sheet glass side.
3. the manufacture method of glass substrate according to claim 2 is characterized in that,
The direction that flows down along described sheet glass possesses multistage described roller pair, so that the mode that multistage roller is in a straight line to the position of the core of separately described stationary roll is carried out the location of each described stationary roll.
4. the manufacture method of glass substrate according to claim 2 is characterized in that,
The direction that flows down along described sheet glass possesses multistage described roller pair, adjusts multistage roller to the position of separately described stationary roll according to the warpage of the sheet glass that produces.
5. the manufacture method of each the described glass substrate according to claim 1~4 is characterized in that,
The temperature distribution streamwise of the width of the described sheet glass that forms when utilizing described roller to anneal to the described sheet glass that flows down from described molding is stretched downwards is controlled to predetermined setting.
6. the manufacture method of each the described glass substrate according to claim 1~5 is characterized in that,
Anneal with giving temperature distribution to described sheet glass along the width of described sheet glass along the thermal source of the width setting of described sheet glass.
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