CN103257141A - Device for synchronously monitoring pumping facula and sample surface microstructure and adjusting method - Google Patents
Device for synchronously monitoring pumping facula and sample surface microstructure and adjusting method Download PDFInfo
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- CN103257141A CN103257141A CN2013101563061A CN201310156306A CN103257141A CN 103257141 A CN103257141 A CN 103257141A CN 2013101563061 A CN2013101563061 A CN 2013101563061A CN 201310156306 A CN201310156306 A CN 201310156306A CN 103257141 A CN103257141 A CN 103257141A
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Abstract
The invention relates to a device for synchronously monitoring pumping facula and a sample surface microstructure and an adjusting method. The device comprises a laser source, an isolator, a lens, a rotary base, a splitting slice, an attenuation slice, a CCD (Charge Coupled Device) image sensor, a sample stage, a two-dimensional step motor, a first reflector, a second reflector, a third reflector and an optical garbage can, wherein the splitting slice is fixed on the rotary base, and the sample stage is fixed on the two-dimensional step motor; the laser emitted by the laser source sequentially passes by the isolator, the lens and the splitting slice along the horizontal direction to focus on the sample stage, the attenuation slice and the CCD image sensor are sequentially arranged in a direction vertical to the laser below the splitting slice, the laser vertically passes by the first reflector, the second reflector and the third reflector upwards in sequence after being reflected by the splitting slice and is reflected to the back surface of the sample, and the optical garbage can is a movable element and is used for shielding the light path. The optical garbage is moved and the direction of the splitting slice is adjusted to monitor the pumping facula and reflection and transmission type sample surface microstructures, the structure is simple and the operation is easy.
Description
Technical field
The present invention relates to a kind of process monitoring technology, particularly device and the method for adjustment of a kind of synchronous monitoring pump spot and sample surfaces microstructure.
Background technology
Fine structure material is to make material surface have the material of the accurate peak structure pattern of micron dimension by means such as chemical physics, this fine structure material is owing to have high the absorption, infrared band had optical physics character such as fine response be widely used in aspects such as the energy, sensor.The preparation of fine structure material has become many ambit scholars such as physics, chemistry, electronics institute Focal Point of Common Attention with research.The material of this surperficial micro-structure all has important potential using value in fields such as remote sensing, optical communication, solar cell, infrared sensor and microelectronics.Fine structure material and preparation of devices thereof have become one of main direction of present Information Technology Development.
At present, the preparation system of this surperficial micro-structure material is all fairly simple usually, do not possess the function of monitoring pump spot and sample surfaces microstructure simultaneously, the forming process that can not monitor the surface micro-structure in the material preparation process effectively can not guarantee that the pump spot of laser keeps normal always in preparation process.
The method of overview pump spot, be placed in the light path with CCD exactly and observe, and in the process of experiment, can't pump spot be observed, when laser instrument changes to some extent, can only end experiment puts CCD into and observes pump spot in the light path, very loaded down with trivial details, very unfavorable to the continuity of experiment.And the method for general observing samples surface micro-structure, be after sample machines, sample is taken out, by instruments such as scanning electron microscope its surface micro-structure is observed again, but can't in experimentation, the microstructure to sample carry out real-time observation, sample takes out, and it is also unknown whether its microstructure changes to some extent.
Generally speaking, the system for preparing surperficial micro-structure material at present is too simple, if laser instrument changes to some extent in experiment, needs to observe its pump spot, and the adjustment of experimental provision is very loaded down with trivial details, and very unfavorable to the continuity of experiment; And at present can't be in the process of experiment the surface micro-structure of observing samples, the forming process of its surface micro-structure is not recorded intuitively and observes.Based on various not convenience experimentally, the device that does not also have at present to monitor pump spot and sample surfaces microstructure synchronously occurs.
Summary of the invention
The system that The present invention be directed to the surperficial micro-structure material of preparation is too simple, production control is if need to observe pump spot and sample surfaces microstructure very loaded down with trivial details problem then, device and the method for adjustment of a kind of synchronous monitoring pump spot and sample surfaces microstructure have been proposed, adopt CCD, the beam splitting chip that has rotating base and three catoptrons, by regulating the rotation beam splitting chip, can realize monitoring the rapid and convenient conversion between pump spot and monitoring reflection-type and the transmission-type material surface microstructure experimental provision.
Technical scheme of the present invention is: the device of a kind of synchronous monitoring pump spot and sample surfaces microstructure comprises LASER Light Source, isolator, lens, rotating base, beam splitting chip, attenuator, ccd image sensor, sample platform, planar stepping motor, first catoptron, second catoptron, the 3rd catoptron, light dustbin; Beam splitting chip is fixed on the rotating base, can be with the rotating base anglec of rotation, and the sample platform is fixed on the two-dimentional motor; The laser along continuous straight runs that LASER Light Source is sent focuses on the sample platform through isolator, lens, beam splitting chip successively, the beam splitting chip below, arrange attenuator and ccd image sensor successively with the laser vertical direction, the light reflected back sample back side after the beam splitting chip reflector laser is vertically upward successively through first catoptron, second catoptron, the 3rd catoptron, the light dustbin is moving member, is used for blocking light path.
About described two-dimentional motor is selected for use and the planar stepping motor that moves up and down.
Monitor the apparatus regulating method of pump spot and sample surfaces microstructure synchronously, comprise the device of synchronous monitoring pump spot and sample surfaces microstructure, specifically comprise following set-up procedure:
1) monitoring pump spot: the rotation rotating base goes to beam splitting chip with incident laser to be located in angle of 45 degrees, before the light dustbin is placed on the sample platform, laser passes through beam splitting chip, part light beam is reflected and enters ccd image sensor through attenuator, catch pump spot by the ccd image sensor monitoring, another part light beam sees through beam splitting chip and enters in the light dustbin;
2) surface micro-structure of reflection-type material monitoring: the rotation rotating base goes to beam splitting chip with incident laser and becomes 135 degree angles, keeps off directly over beam splitting chip, before first catoptron with the light dustbin; Laser is by beam splitting chip, and a part of light beam sees through beam splitting chip and beats on the sample on the sample platform; Part laser is reflected, and enters ccd image sensor through attenuator again after the beam splitting chip reflection, by ccd image sensor monitoring sample surface micro-structure; Another part light beam will enter isolator through beam splitting chip;
3) surface micro-structure of transmission-type material monitoring: shift out the light dustbin, the rotation rotating base goes to beam splitting chip with incident laser and becomes 135 to spend angles, laser passes through beam splitting chip, part light beam sees through beam splitting chip and beats on the sample on the sample platform, another part light beam then is reflected on first catoptron, again through second catoptron and the 3rd catoptron, this part beam reflection is to the back side of sample the most at last, see through sample and entered ccd image sensor by the beam splitting chip reflection through attenuator again, by ccd image sensor monitoring sample surface micro-structure, unnecessary light enters isolator.
Beneficial effect of the present invention is: the present invention monitors device and the method for adjustment of pump spot and sample surfaces microstructure synchronously, constitutes simply, easily operation.In actual mechanical process, only need adjust the position of beam splitting chip according to the actual experiment situation, just can realize monitoring the adjustment of pump spot and sample surfaces microstructure experimental provision, thereby realize the quick conversion between monitoring pump spot and reflection and the transmission-type sample surfaces microstructure experimental provision.
Description of drawings
Fig. 1 monitors pump spot and sample surfaces micro-structural device structural representation synchronously for the present invention;
Fig. 2 monitors the apparatus structure synoptic diagram of pump spot for the present invention;
Fig. 3 monitors the apparatus structure synoptic diagram of reflection-type material surface microstructure for the present invention;
Fig. 4 monitors the apparatus structure synoptic diagram of transmission-type material surface microstructure for the present invention.
Embodiment
Monitor pump spot and sample surfaces micro-structural device structural representation as shown in Figure 1 synchronously, by LASER Light Source 1, isolator 2, lens 3, rotating base 4, beam splitting chip 5, attenuator 6, ccd image sensor 7, sample platform 8, planar stepping motor 9, the first catoptrons 10, second catoptron, 11, the three catoptrons 12.Wherein, first catoptron, 10, the second catoptrons 11 and the 3rd catoptron 12 are used for the light path of monitoring transmission-type material, then do not need this three catoptrons in the light path of monitoring reflection-type material; Focus on the sample that is installed on the sample platform 8 behind the laser scioptics 3 that LASER Light Source 1 is sent; Beam splitting chip 5 is fixed on the rotating base 4, and sample platform 8 is fixed on the two-dimentional motor 9, about two-dimentional motor 9 is selected for use and the planar stepping motor that moves up and down.
Monitor pump spot apparatus structure synoptic diagram as shown in Figure 2, by rotate rotating base 4 with beam splitting chip 5 go to A place, position (with incident laser in angle of 45 degrees), keep off before sample platform with light dustbin 13 this moment, laser is by beam splitting chip 5, part light beam is reflected and enters ccd image sensor 7 through attenuator 6, by CCD7 monitoring pump spot, another part light beam sees through beam splitting chip 5 and enters in the light dustbin 13.
Monitor reflection-type material surface micro-structural device structural representation as shown in Figure 3, by rotating rotating base 4 beam splitting chip 5 is gone to B place, position (becoming 135 degree angles with incident laser), keep off above beam splitting chip with light dustbin 13, laser is by beam splitting chip 5, part light beam sees through 5 dozens of beam splitting chips on the sample on the sample platform 8, and another part light beam then is reflected and enters in the light dustbin 13; Because sample is reflection-type, part laser is reflected, part light beam is entered ccd image sensor 7 by beam splitting chip 5 reflections through attenuator 6, by ccd image sensor 7 monitoring sample surfaces microstructures, another part light beam will enter isolator 2 through beam splitting chip 5, thereby avoid the interference of this part light beam to LASER Light Source 1.At this moment, as need observation pump spot, only need with beam splitting chip 5 go to A place, position (with incident laser in angle of 45 degrees), and keep off 13 before sample with the light dustbin, install remainder and need not any adjustment.
Monitor the apparatus structure synoptic diagram of transmission-type material surface microstructure as shown in Figure 4, by rotating rotating base 4 beam splitting chip 5 is gone to B place, position (becoming 135 degree angles with incident laser), laser is by beam splitting chip 5, part light beam sees through 5 dozens of beam splitting chips on the sample on the sample platform 8, another part light beam then is reflected on first catoptron 10, again through second catoptron 11 and the 3rd catoptron 12, this part beam reflection is to the back side of sample the most at last, because sample is the transmission-type sample, this part light beam will be entered ccd image sensor 7 by beam splitting chip 5 reflections through attenuator 6 again through sample, by CCD7 monitoring sample surfaces microstructure, same isolator 2 has been avoided the interference of remaining light beam to LASER Light Source 1.At this moment, as need observation pump spot, only need with beam splitting chip 5 go to A place, position (with incident laser in angle of 45 degrees), and keep off before sample with the light dustbin, the device remainder need not any adjustment, and the light splitting ratio of beam splitting chip can be adjusted voluntarily according to actual conditions and select for use.
In the example below, it is example that the device monitoring pump spot that uses monitoring pump spot and sample surfaces microstructure is synchronously monitored pump spot before with the preparation fine structure material, using the experiment of the device monitoring reflection-type sample surfaces microstructure of synchronous monitoring pump spot and sample surfaces microstructure is example with the preparation black silicon material, and using the experiment of the device monitoring transmission-type sample surfaces microstructure of monitoring pump spot and sample surfaces microstructure synchronously is example with preparation glass plate material.
Femto-second laser output center wavelength of light is 800 nm, and pulse width is 100 fs, and repetition frequency is 1 KHz, the focal length of lens is 1 m, and lens are 95 cm apart from the distance of sample platform, and spot radius is 75 μ m, beam splitting chip adopts 5% beam splitting chip, and concrete adjustment process is as follows:
Monitoring hot spot: before the preparation fine structure material, need to monitor whether pump spot is normal with definite laser instrument, rotate rotating base 4 with A place, beam splitting chip 5 transposition position, this moment, a part of light beam was entered ccd image sensor 7 by beam splitting chip 5 reflections through attenuator 6, can monitor pump spot by ccd image sensor 7, another part light beam sees through beam splitting chip 5 and enters light dustbin 13, by ccd image sensor 7 observation pump spots, if hot spot normally then can carry out subsequent experimental, if hot spot unusually then can check adjustment to the light path of front and the state of laser instrument.
Monitoring reflection-type material surface microstructure: silicon chip is installed on the sample platform 8, rotate rotating base 4 beam splitting chip 5 is gone to B place, position, the position of moving silicon chip by two-dimentional motor 9, laser sees through beam splitting chip 5 just can be at the required black silicon material of silicon chip sample preparation, and laser is entered in the light dustbin 13 by that part of light beam that beam splitting chip reflects.Simultaneously because silicon chip is a kind of reflection-type material, the laser part that is radiated on the silicon chip can be reflected back, the light beam that is reflected back can be entered ccd image sensor 7 through attenuator 6 by beam splitting chip 5 reflections again, just can monitor the surface micro-structure of its sample in the preparation black silicon material by ccd image sensor 7; In the process of preparation, as needing the observation pump spot, only need that beam splitting chip is adjusted back to position A and can pass through ccd image sensor 7 observation pump spots.
Monitoring transmission-type material surface microstructure: glass plate is installed on the sample platform 8, rotate rotating base 4 beam splitting chip 5 is gone to B place, position, by the position that two-dimentional motor moves glass plate, laser sees through beam splitting chip 5 just can be at the required material of glass sheet sample preparation.That part of light beam that laser is reflected by beam splitting chip 5 is through the back side of three mirror reflects to sample, because glass plate is the transmission-type material, this part light beam can be entered ccd image sensor 7 through attenuator 6 by beam splitting chip 5 reflections again, just can monitor its surface micro-structure by ccd image sensor 7; In the process of preparation, can at any time beam splitting chip 5 be recalled to position A observation pump spot.
Claims (3)
1. a device of monitoring pump spot and sample surfaces microstructure synchronously is characterized in that, comprises LASER Light Source, isolator, lens, rotating base, beam splitting chip, attenuator, ccd image sensor, the sample platform, planar stepping motor, first catoptron, second catoptron, the 3rd catoptron, the light dustbin; Beam splitting chip is fixed on the rotating base, can be with the rotating base anglec of rotation, and the sample platform is fixed on the two-dimentional motor; The laser along continuous straight runs that LASER Light Source is sent focuses on the sample platform through isolator, lens, beam splitting chip successively, the beam splitting chip below, arrange attenuator and ccd image sensor successively with the laser vertical direction, the light reflected back sample back side after the beam splitting chip reflector laser is vertically upward successively through first catoptron, second catoptron, the 3rd catoptron, the light dustbin is moving member, is used for blocking light path.
2. according to the device of the described synchronous monitoring pump spot of claim 1 and sample surfaces microstructure, it is characterized in that, about described two-dimentional motor is selected for use and the planar stepping motor that moves up and down.
3. monitor the apparatus regulating method of pump spot and sample surfaces microstructure synchronously, comprise the device of synchronous monitoring pump spot and sample surfaces microstructure, it is characterized in that, specifically comprise following set-up procedure:
1) monitoring pump spot: the rotation rotating base goes to beam splitting chip with incident laser to be located in angle of 45 degrees, before the light dustbin is placed on the sample platform, laser passes through beam splitting chip, part light beam is reflected and enters ccd image sensor through attenuator, catch pump spot by the ccd image sensor monitoring, another part light beam sees through beam splitting chip and enters in the light dustbin;
2) surface micro-structure of reflection-type material monitoring: the rotation rotating base goes to beam splitting chip with incident laser and becomes 135 degree angles, keeps off directly over beam splitting chip, before first catoptron with the light dustbin; Laser is by beam splitting chip, and a part of light beam sees through beam splitting chip and beats on the sample on the sample platform; Part laser is reflected, and enters ccd image sensor through attenuator again after the beam splitting chip reflection, by ccd image sensor monitoring sample surface micro-structure; Another part light beam will enter isolator through beam splitting chip;
3) surface micro-structure of transmission-type material monitoring: shift out the light dustbin, the rotation rotating base goes to beam splitting chip with incident laser and becomes 135 to spend angles, laser passes through beam splitting chip, part light beam sees through beam splitting chip and beats on the sample on the sample platform, another part light beam then is reflected on first catoptron, again through second catoptron and the 3rd catoptron, this part beam reflection is to the back side of sample the most at last, see through sample and entered ccd image sensor by the beam splitting chip reflection through attenuator again, by ccd image sensor monitoring sample surface micro-structure, unnecessary light enters isolator.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113933496A (en) * | 2021-07-19 | 2022-01-14 | 安徽桐康医疗科技股份有限公司 | A calibrating device for fluorescence immunoassay quantitative analysis appearance |
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Patent Citations (6)
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| JP3659953B2 (en) * | 1993-05-13 | 2005-06-15 | オリンパス株式会社 | Surface defect inspection equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113933496A (en) * | 2021-07-19 | 2022-01-14 | 安徽桐康医疗科技股份有限公司 | A calibrating device for fluorescence immunoassay quantitative analysis appearance |
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