CN201044014Y - Device for real time monitoring laser luminous spot and light path automatically collimating - Google Patents
Device for real time monitoring laser luminous spot and light path automatically collimating Download PDFInfo
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- CN201044014Y CN201044014Y CNU2007200686929U CN200720068692U CN201044014Y CN 201044014 Y CN201044014 Y CN 201044014Y CN U2007200686929 U CNU2007200686929 U CN U2007200686929U CN 200720068692 U CN200720068692 U CN 200720068692U CN 201044014 Y CN201044014 Y CN 201044014Y
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Abstract
A device for detecting the laser spot in real time and automatically collimating optical path; the method is to utilize a single CCD camera to collect laser spots and a piezoelectric ceramic electric mirror rack to automatically collimate the optical path and a computer to treat the laser spot and implement real-time inspection. The utility model of the device can detect the laser spot of a frequency of 10Hz and the feedback frequency is about 1Hz and can thoroughly reduce and remove the spot drift whose tremble cycle is more than 1 s; the laser space stability is less than 0.5 mircoradian after being collimated; the utility model is characterized by simplified structure, high precision, fast speed and excellent efficiency.
Description
Technical field
The utility model relates to laser, it is the device of a kind of real time monitoring laser luminous spot and light path automatically collimating, carry out hot spot monitoring and the autocollimating optical system of light beam applicable to any needs, utilize the electronic mirror holder of piezoelectric ceramics to adjust the light path of optical system automatically, collimation back laser beam spatial stability＜0.5 microradian can be applicable to various precise and stable optical system of hot spot and the experimental study fields of needing.
Background technology
In the development of optical technology, for the stability of laser energy, the requirement of pulse width stability and spatial direction stability also constantly improves.The spatial direction stability of laser facula is extremely important for stablizing of system's output laser, and a lot of Physical Experiments, such as hollow optic fibre compression, optical parameter amplify, that carrier phase is stable etc. is all very high to the beam-pointing stability requirement, perhaps because the acquisition time of data is relatively long to the stability requirement of beam-pointing than higher.Yet variation of ambient temperature causes expanding with heat and contract with cold of mirror holder, experimental apparatus vibrations etc. cause the vibrations of experiment porch, factors such as the disturbance of air all influence the stability of laser facula in the system, and particularly when light path was longer, beam-pointing was usually because these former thereby shakinesses that become.Therefore, a kind ofly can monitor laser facula in real time and device that can the autocollimation laser beam all is very practical to many area researches, such light path autocollimation system can improve the precision of laser instrument operational efficiency and experiment when long.
At present in large scale laser instrument, automatic-aligning system has become essential important component, as the laser fusion device, during in order to ensure system's each run, can stablize, accurately pass prime amplifier, main amplifier, frequency multiplier, target chamber from the laser beam that oscillator sends, and accurately shine on the miniature pellet, laser aid has all disposed the light path automatically collimating system.In the laser system of this large-scale low-repetition-frequency, two CCD cameras of general using are measured its near field and far-field position, proofread and correct the light path of skew then with the mirror holder of step motor control.It is complicated that the structure of this colimated light system seems, and the feedback procedure of step motor control is comparatively blunt, need a few minutes just can finish a light path adjustment, the adjustment precision of light path is not high yet, laser system for high repetition frequency then can't meet the demands, be in the laser system of 1kHz in repetition frequency for example, stepper motor can not satisfy system requirements because run duration own is long at all.But, more and more higher requirement has been proposed but for precision, speed and the efficient of light path automatically collimating along with developing rapidly of laser technology.
Summary of the invention
In order to adapt to the requirement of high repetition frequency and high-precision laser system, in the design concept of inheriting above-mentioned low-repetition-frequency automatic-aligning system simultaneously, overcome the deficiency that exists in the above-mentioned technology formerly, the utility model proposes the device of a kind of real time monitoring laser luminous spot and light path automatically collimating, this device should have designs simplification, precision height, speed is fast and the characteristics of excellent in efficiency.
Technical solution of the present utility model is as follows:
A kind of real time monitoring laser luminous spot and light path automatically collimating device, comprise: electronic mirror holder of first piezoelectric ceramics and the electronic mirror holder of second piezoelectric ceramics that the 2 45 ° of total reflective mirror is housed that the one 45 ° of total reflective mirror is housed, one output end of driver connects the control end of electronic mirror holder of described first piezoelectric ceramics and the electronic mirror holder of second piezoelectric ceramics respectively, the input end of this driver connects the computer control output terminal, one treats that the collimated laser light light beam irradiates is on described the one 45 ° of total reflective mirror, be provided with first beam splitting chip between described the one 45 ° of total reflective mirror and the 2 45 ° of total reflective mirror and near on the light path of the one 45 ° of total reflective mirror, folded light beam direction at described the 2 45 ° of total reflective mirror is provided with first completely reflecting mirror, second beam splitting chip is set on the reflected light path of this first completely reflecting mirror, the folded light beam direction of this second beam splitting chip has second completely reflecting mirror, crossover location in the folded light beam of the folded light beam of second completely reflecting mirror and first beam splitting chip has a CCD camera, the output terminal of this CCD camera links to each other with described input end and computer, and described computing machine has image pick-up card and Monitoring and Controlling program.
Described Monitoring and Controlling program is to utilize up-to-date virtual instrument graphical programming software (LabView) to write, and is designated hereinafter simply as the LabView program.This LabView program comprises hot spot collection, computing and FEEDBACK CONTROL three parts.
The LabView program mainly is divided into hot spot collection, computing and three steps of FEEDBACK CONTROL: the laser facula of two reference point of CCD camera collection at first, the laser facula process signal wire transmits that collects is to the image pick-up card of computer, image pick-up card is converted to digital picture with analog image, and program is stored by the dynamic link libraries that calls image pick-up card and shown representation of laser facula; Then, the departure of the reference center position of two spot center of COMPUTER CALCULATION and setting, the Parameters Calculation such as driving precision in conjunction with light path, spot size and electronic adjustment rack go out step number and the direction that electronic mirror holder need be adjusted again; At last, computing machine sends driving command for the driver of electronic mirror holder and drives mirror holder, laser is come back on P1 and two reference point of P2, thereby make the light beam autocollimation of its back.
The hot spot collecting part of LabView program need call dynamic link libraries and drive image pick-up card.Invocation step is as follows: select library facility module (CallLibrary Function) in the module dialog box (Block Diagram) of LabView, click this modules configured (Configure) option, set library name (library name) and correlation parameter (parameter) in the dialog box that ejects, parameter is provided with the quality that correctness directly influences the image pick-up card output image.Program can be provided with brightness, figure place, saturation degree, colourity, buffer size of image etc. by the difference in functionality function that calls dynamic link libraries.After the series of parameters initialization, the calling graph picture is captured power function and is captured image to buffering, the light spot image of buffer area is directly called in the graphic processor of LabView again.Also image can be kept under the assigned catalogue, under assigned catalogue, read light spot image again, but delay the processing time like this.
The image calculation processing section of LabView program comprises: go small light spot, thresholding, smooth, the counterfeit chromatic graph demonstration in edge, the calculating of hot spot number, each spot center coordinate Calculation, centre coordinate and the calculating of reference coordinate drift value etc.In hot spot was gathered, the hot spot number should be 2, but because the CCD camera records may be that the reflection in other places or hot spot itself have little spuious hot spot and more than 2.Therefore in image processing program, at first need to remove the small light spot that may exist in the image; Then the laser facula that collects is carried out thresholding and handles, remove CCD camera and the The noise of hot spot own, threshold range can manual adjustments to obtain best light spot shape; The edge of level and smooth laser facula obtains the hot spot that the edge is smooth then; Last accurate Calculation glossing up geometric center.Two the spot center coordinates that calculate and the reference coordinate of setting are subtracted each other the drift value that has just obtained two spot center coordinates, with in the centre coordinate drift value incoming wave plotting table, just can monitor the situation of waving of spot center coordinate in real time again.Simultaneously, the hot spot that the CCD camera is recorded is presented on the interface in real time, utilizes counterfeit chromatic graph to come the mark laser facula, thereby can observe the laser facula pattern more intuitively.
The FEEDBACK CONTROL part of LabView program is the M1 that comes the electronic mirror holder of drive pressure electroceramics by Control Driver, and M2 realizes.The precision in the electronic mirror holder of piezoelectric ceramics each step under standard fine setting situation is 30nm, and growing tall of mirror holder is 54mm, so the rotation precision of mirror holder approaches 0.5urad.Before FEEDBACK CONTROL, parameter initialization and preservations such as first speed, acceleration, motor pattern to each interface of driver.When carrying out FEEDBACK CONTROL, the spot center drift value that the LabView program at first obtains according to previous calculations, the Parameters Calculation such as driving precision in conjunction with light path, spot size and electronic mirror holder go out step number and the direction that electronic mirror holder need be adjusted again; Then it is translated into steering order and send to driver; Driver sends the electronic mirror holder of electric signal drive pressure electroceramics according to instruction and finishes the light path adjustment, makes laser come back on P1 and two reference point of P2, realizes light beam autocollimation.
Need to prove, in the monitoring light path that facular model and spot center are waved, the CCD camera can be placed on the mirror holder back, detect by the very weak laser of measuring the eyeglass transmission, this not putting can influence system light path.If laser facula is bigger than effective test surface of CCD camera, can adds a positive lens in CCD camera front and focus on to contract and restraint on the CCD camera; Equally, can utilize a negative lens to expand bundle if laser facula is too little.
The concrete use step of above-mentioned real time monitoring laser luminous spot and light path automatically collimating device is as described below:
(1) puts up device according to above-mentioned requirements, and write watchdog routine.
(2) at first manual adjustment laser beam 1 makes it be parallel to optical table, and accurately gets to the optical element center.
(3) start computer, open software, observe the laser facula that the CCD camera collection arrives, finely tune first beam splitting chip 9 and second beam splitting chip 10, make two hot spots be presented at monitoring window central authorities symmetrically.
(4) regulate the threshold range that hot spot is handled, obtain best light spot shape.
(5) be provided with and optimize the parameter such as speed, acceleration, motor pattern of each interface of driver as required.
(6) operation monitoring program, beginning is monitoring laser facula and autocollimation laser beam in real time.
Collimation ultimate principle of the present utility model is: cause in the light path that the factor of optical axis drift can be summed up as the imbalance of optical axis, that is to say and can think that the alignment of all optical elements is fine that the light beam of incident has taken place that the angle is moved and translation.The imbalance of optical axis can be changed by two catoptrons and obtains behind its inclination angle correcting, though the optical axis of i.e. incident has taken place that the angle is moved and translation, through the optical axis of outgoing behind two catoptrons and desirable optical axis coincidence.The light path automatically collimating system generally is located at the hot spot sampling system two positions separated by a distance in the light path, according to the principle of " 2 decision straight lines that do not overlap ", adjusts light path.
Compare with technology formerly, the utility model simplifies the structure significantly, has improved precision, speed and efficient, has following outstanding feature:
(1) the utility model utilizes single CCD camera monitoring laser facula, utilize the alternative electronic mirror holder of stepper motor of technology formerly of the electronic mirror holder of high-precision piezoelectric ceramics to adjust the skew light path, and the software of writing a cover measurement-calculating-FEEDBACK CONTROL is monitored hot spot and autocollimation light path in real time, the about 10Hz of frequency of monitoring hot spot, the about 1Hz of FEEDBACK CONTROL frequency, can reduce and eliminate the shake cycle fully waves at the hot spot more than 1 second.Device is simple, regulates simply, and compact conformation, and can be integrated in a 0.5m
2The experiment flat board on.And technical pattern complexity formerly is difficult for miniaturization.
(2) the utility model adopts the Piezoelectric Ceramic mirror holder, and response is fast, the efficient height, and also it is also high to adjust precision.And formerly technology adopts the step motor drive mirror holder, low-response, and efficient is low, and it is also not high to adjust precision.
(3) the about 10Hz of hot spot monitoring frequency of the present utility model, the about 1Hz of FEEDBACK CONTROL frequency, can reduce and eliminate the shake cycle fully waves at the hot spot more than a second, because temperature, influences such as air turbulence are slow variable effects, cycle is between 1 second to 20 seconds, so this device can effectively reduce these and changes the hot spot that causes slowly and wave.And formerly Technology Need a few minutes just can finish a light path adjustment, minute can't finish adjustment for the shake cycle with interior variation.
(4) the utility model adopts the up-to-date measurement control LabView that develops software to write, and program can monitor facular model in real time and the spot center drift changes.And formerly the watchdog routine of technology can not be monitored facular model in real time, and program interface is not directly perceived.
Description of drawings
Fig. 1 is real time monitoring laser luminous spot of the present utility model and light path automatically collimating device synoptic diagram.
Embodiment
The utility model is described in further detail below in conjunction with embodiment and accompanying drawing, but should not limit protection domain of the present utility model with this.
See also Fig. 1 earlier, Fig. 1 is for implementing the real time monitoring laser luminous spot and the light path automatically collimating device synoptic diagram of the utility model method.As seen from the figure, the utility model real time monitoring laser luminous spot and autocollimation device, be characterised in that and comprise: electronic mirror holder 2 of first piezoelectric ceramics and the electronic mirror holder 3 of second piezoelectric ceramics with the 2 45 ° of total reflective mirror M2 with the one 45 ° of total reflective mirror M1, the output terminal of one driver 4 connects the control end of electronic mirror holder 2 of described first piezoelectric ceramics and the electronic mirror holder 3 of second piezoelectric ceramics respectively, the input end of this driver 4 connects computing machine 6 control output ends, one treats that collimated laser light light beam 1 is radiated on described the one 45 ° of total reflective mirror M1, be provided with first beam splitting chip 9 between described the one 45 ° of total reflective mirror M1 and the 2 45 ° of total reflective mirror M2 and near on the light path of the 2 45 ° of total reflective mirror M2, folded light beam direction at described the 2 45 ° of total reflective mirror M2 is provided with first completely reflecting mirror (7), second beam splitting chip 10 is set on the reflected light path of this first completely reflecting mirror 7, the folded light beam direction of this second beam splitting chip 10 has second completely reflecting mirror 8, crossover location in the folded light beam of the folded light beam of second completely reflecting mirror 8 and first beam splitting chip 9 has a CCD camera 5, the output terminal of this CCD camera 5 links to each other with the input end of described computing machine 6, and described computing machine 6 is equipped with image pick-up card and Monitoring and Controlling program.
The present embodiment device is to realize the autocollimation of laser beam and stable according to 2 definite straight line ultimate principles.As Fig. 1, the one 45 ° of total reflective mirror M1 and the 2 45 ° of total reflective mirror M2 are two adjustment points, need be separated by a distance, and about about 1m.P1 and P2 are two reference point, and P1 point position is regulated by M1, and P2 point position is regulated by M2.Wherein the P1 point is very near from the M2 eyeglass, therefore can be similar to and think that it is just on M2.It should be noted that in the adjustment process of M1, also can influence the coordinate drift that P2 is ordered, so M2 also needs to compensate the influence that M1 drives in the driving process.Distance is for all influencing the lasting accuracy of system apart from pixel size, spot size, facula measurement and data processing etc. for L2, CCD camera between L1, M2 and P2 between M1 and P1.L1 and L2 are big more, hot spot is big more and pixel is many more, and then the hot spot lasting accuracy is high more.
The repetition frequency for the treatment of collimated laser light light beam 1 of present embodiment is 1kHz, and centre wavelength is 800nm.The electronic mirror holder of piezoelectric ceramics that the electronic mirror holder 3 of the electronic mirror holder 2 of first piezoelectric ceramics and second piezoelectric ceramics adopts the U.S. new focus company (New FocusInc.) to produce, the iPico driver that driver 4 adopts the U.S. new focus company to produce, CCD camera 5 adopts the black-white CCD camera, effectively surveying size is 7.95mm * 6.45mm, single pixel size is 8.6um * 8.3um, and image pick-up card adopts the CG410 integrated circuit board of company of Daheng.Wherein computing machine 6 can connect control iPico driver 4 by the RS232 string line, also can use the netting twine access network, controls iPico driver 4 by network, specifically connects control mode and develops handbook with reference to company, selects decision as required.Driver 4 connects the two-dimensional direction of control electronic mirror holder 2 of first piezoelectric ceramics and the electronic mirror holder 3 of second piezoelectric ceramics by four RS485 control lines.
The Monitoring and Controlling program is programmed with LabView software, the dynamic link libraries that the hot spot collecting part of program calls company of Daheng to be provided drives the CG410 image pick-up card, the dynamic link libraries parameter that provides with reference to company of Daheng exploitation handbook that is provided with of each parameter is provided with explanation, after the series of parameters initialization, the calling graph picture is captured power function and is captured image to buffering, the light spot image of buffer area is directly called in the graphic processor of LabView again.In image processing program, at first utilize the small light spot function (remove small particles) of going of image module (vision) to remove the small light spot that may exist in the image; Then utilize the threshold function (IMAQ Threshold) of image module that the laser facula that collects is carried out the thresholding processing; Utilize the edge of the next level and smooth laser facula of morphological function (IMAQMorphology) of image module then, obtain the hot spot that the edge is smooth; Utilize hot spot analytic function (IMAQ Particle Analysis) the accurate Calculation glossing up geometric center of image module at last.Two the spot center coordinates that calculate and the reference coordinate of setting are subtracted each other the drift value that has just obtained two spot center coordinates, again with in the centre coordinate drift value incoming wave plotting table, just can monitor the situation of waving of spot center coordinate in real time, thereby utilize counterfeit chromatic graph to come the mark laser facula can observe the laser facula pattern more intuitively.The FEEDBACK CONTROL part, realize by the electronic mirror holder of control iPico driver drives piezoelectric ceramics, parameter initialization and preservations such as first speed, acceleration, motor pattern to each interface of driver, the Parameters Calculation such as spot center drift value that obtain according to previous calculations go out step number and the direction that electronic mirror holder needs are adjusted again; Then it being translated into MCL (MotionControl Language, concrete instruction syntax is with reference to the exploitation handbook of New focus company) instructs and calls serial communication module (serial) the MCL instruction is sent to driver; Driver is finished the light path adjustment according to the electronic mirror holder of MCL instruction transmission electric signal drive pressure electroceramics.
The utility model device shows through on probation: waving of spot center coordinate presents certain quasi periodic, big fluctuating interval time is about 3 seconds, little fluctuating interval time is also more than 1 second, and a FEEDBACK CONTROL round-robin execution time is about 1 second, so the laser facula center is stabilized in the very little on every side scope in given reference position, thereby stabilized lasers beam-pointing well, collimation back laser beam spatial stability＜0.5urad has obtained satisfied result in experimental evaluation.
Claims (1)
1. real time monitoring laser luminous spot and light path automatically collimating device, be characterised in that and comprise: the electronic mirror holder of first piezoelectric ceramics (2) of the one 45 ° of total reflective mirror (M1) is housed and the electronic mirror holder of second piezoelectric ceramics (3) of the 2 45 ° of total reflective mirror (M2) is housed, the output terminal of one driver (4) connects the control end of electronic mirror holder of described first piezoelectric ceramics (2) and the electronic mirror holder of second piezoelectric ceramics (3) respectively, the input end of this driver (4) connects computing machine (6) control output end, one treats that collimated laser light light beam (1) is radiated on described the one 45 ° of total reflective mirror (M1), be provided with first beam splitting chip (9) between described the one 45 ° of total reflective mirror (M1) and the 2 45 ° of total reflective mirror (M2) and near on the light path of the one 45 ° of total reflective mirror (M1), folded light beam direction at described the 2 45 ° of total reflective mirror (M2) is provided with first completely reflecting mirror (7), second beam splitting chip (10) is set on the reflected light path of this first completely reflecting mirror (7), the folded light beam direction of this second beam splitting chip (10) has second completely reflecting mirror (8), crossover location in the folded light beam of the folded light beam of second completely reflecting mirror (8) and first beam splitting chip (9) has a CCD camera (5), the output terminal of this CCD camera (5) links to each other with the input end of described computing machine (6), and described computing machine (6) is equipped with image pick-up card and Monitoring and Controlling program.
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| Application Number | Priority Date | Filing Date | Title |
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| CNU2007200686929U CN201044014Y (en) | 2007-04-06 | 2007-04-06 | Device for real time monitoring laser luminous spot and light path automatically collimating |
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| CNU2007200686929U CN201044014Y (en) | 2007-04-06 | 2007-04-06 | Device for real time monitoring laser luminous spot and light path automatically collimating |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103257141A (en) * | 2013-05-02 | 2013-08-21 | 上海理工大学 | Device for synchronously monitoring pumping facula and sample surface microstructure and adjusting method |
| CN105140769A (en) * | 2015-09-28 | 2015-12-09 | 湖北航天技术研究院总体设计所 | Spectral-combined beam overlapping detection and adjustment device |
| CN106404152A (en) * | 2016-10-10 | 2017-02-15 | 宁波舜宇智能科技有限公司 | Laser used vibration measurement device and its adjustment method |
-
2007
- 2007-04-06 CN CNU2007200686929U patent/CN201044014Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103257141A (en) * | 2013-05-02 | 2013-08-21 | 上海理工大学 | Device for synchronously monitoring pumping facula and sample surface microstructure and adjusting method |
| CN103257141B (en) * | 2013-05-02 | 2015-08-26 | 上海理工大学 | The device of Simultaneous Monitoring pump spot and sample surfaces microstructure and method of adjustment |
| CN105140769A (en) * | 2015-09-28 | 2015-12-09 | 湖北航天技术研究院总体设计所 | Spectral-combined beam overlapping detection and adjustment device |
| CN106404152A (en) * | 2016-10-10 | 2017-02-15 | 宁波舜宇智能科技有限公司 | Laser used vibration measurement device and its adjustment method |
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Granted publication date: 20080402 |