CN111398171A - Detection device and detection method - Google Patents
Detection device and detection method Download PDFInfo
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- CN111398171A CN111398171A CN202010221903.8A CN202010221903A CN111398171A CN 111398171 A CN111398171 A CN 111398171A CN 202010221903 A CN202010221903 A CN 202010221903A CN 111398171 A CN111398171 A CN 111398171A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M9/00—Aerodynamic testing; Arrangements in or on wind tunnels
- G01M9/06—Measuring arrangements specially adapted for aerodynamic testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
Abstract
The invention discloses a detection device and a detection method. The control module is respectively connected with the light source module, the light path module and the signal processing module and is used for controlling and adjusting the light source module, the light path module and the signal processing module. The detection device is applied to a wind tunnel environment experiment, in the environment experiment, oxidation ablation products and a phase change process of a sample to be detected under the action of high-temperature and high-speed airflow are detected through laser, the surface temperature of the sample to be detected cannot be influenced by laser measurement, extra damage to the surface of the sample to be detected cannot be caused, the precision is high, the measurement range is large, the detection time is short, and the spatial resolution is high. The detection device controls and adjusts the light source module, the light path module and the signal processing module through the control module, so that the detection device can effectively eliminate the influence of the black body radiation background and other interference factors while detecting, and the accuracy of a measurement result is ensured.
Description
Technical Field
The invention belongs to the technical field of spectrum detection, and particularly relates to a detection device and a detection method.
Background
In the development of thermal protection materials, wind tunnel experiments are an important and common test means for the service performance of materials. The thermal protection performance of the material needs to be detected and evaluated on line in a wind tunnel environment, the existing detection system mainly centers on the measurement of parameters such as surface temperature, ablation rate, high-temperature thermal deformation, strain and the like of the material, and the measurement of oxidation ablation and phase change of the material under the action of high-temperature and high-speed airflow is easily interfered by black body radiation and the like to cause distortion of a measurement result when the existing detection system is used for detecting on line.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art.
In order to solve the technical problems, the technical scheme adopted by the invention is to provide a detection device, which comprises a light source module, a light path module, a signal processing module and a control module; the control module is connected with the light source module, the light path module and the signal processing module and is used for controlling the light source module, the light path module and the signal processing module; wherein the content of the first and second substances,
the light source module comprises a pulse laser, and the pulse laser is used for generating pulse laser and transmitting the pulse laser to the light path module;
the light path module is used for receiving and adjusting the pulse laser to obtain a target circular beam which can be focused on a sample to be detected, filtering the scattered target circular beam, and sending the filtered beam to the signal processing module;
the signal processing module is used for receiving and processing the light beam subjected to the filtering processing to obtain spectral data, and the signal processing module sends the spectral data to the control module;
the control module is further configured to receive and analyze the spectral data.
In the above device, the optical path module comprises an attenuation component, a beam expanding and shaping component and a collection component; wherein the content of the first and second substances,
the attenuation component is used for receiving and adjusting the pulse laser from the pulse laser and transmitting the adjusted pulse laser to the beam expanding and shaping component;
the beam expanding and shaping component is used for receiving and expanding the adjusted pulse laser to obtain the target circular beam and transmitting the target circular beam to the collecting component;
the collecting component is used for receiving the target circular light beam and focusing the target circular light beam to the sample to be detected, receiving the scattered target circular light beam from the sample to be detected, filtering the scattered target circular light beam, and transmitting the filtered light beam to the signal processing module.
In the above apparatus, the attenuation module comprises a glan laser prism and a rotatable half-wave plate; wherein the content of the first and second substances,
the half wave plate is used for receiving the pulse laser from the pulse laser, changing the polarization angle of the pulse laser and sending the changed pulse laser to the Glan laser prism;
the Glan laser prism is used for receiving the changed pulse laser, splitting the changed pulse laser into beams to obtain horizontal polarized light and sending the horizontal polarized light to the beam expanding and shaping assembly.
In the above apparatus, the beam expanding and shaping component comprises a diaphragm, a movable first concave lens and a movable first convex lens; wherein the content of the first and second substances,
the diaphragm is used for receiving the horizontal polarized light from the Glan laser prism, filtering the horizontal polarized light to obtain a first circular light beam, and sending the first circular light beam to the first concave lens;
the first concave lens is used for receiving and dispersing the first circular light beam to obtain a second circular light beam and sending the second circular light beam to the first convex lens;
the first convex lens is used for receiving and adjusting the second circular light beam to obtain the target circular light beam, and sending the target circular light beam to the collecting assembly.
In the above device, the collecting member includes a right-angle prism,
The focusing lens, the lens group, the optical filter and the optical fiber coupling mirror; wherein the content of the first and second substances,
the right-angle prism is used for receiving the target circular light beam from the first convex lens and reflecting the target circular light beam to the focusing lens;
the focusing lens is used for receiving the target circular light beam and focusing the target circular light beam to a sample to be detected, and the focusing lens receives the target circular light beam scattered by the sample to be detected and sends the scattered target circular light beam to the lens group;
the lens group is used for receiving and adjusting the scattered target circular light beam to obtain a parallel light beam and sending the parallel light beam to the optical filter;
the optical filter is used for receiving the parallel light beams, filtering the parallel light beams and retaining Raman scattering light, and the optical filter sends the Raman scattering light to the optical fiber coupling mirror;
the optical fiber coupling mirror is used for receiving the Raman scattering light and focusing the Raman scattering light to an optical fiber port, and the optical fiber coupling mirror transmits the Raman scattering light to the signal processing module through an optical fiber.
In the above apparatus, the signal processing module includes a spectrometer and a detector; wherein the content of the first and second substances,
the spectrometer is used for receiving and decomposing the Raman scattering light from the fiber coupling mirror to obtain a spectral line, and the fiber coupling mirror is connected with a light inlet of the spectrometer through an optical fiber;
the detector is used for detecting the spectral lines to obtain the spectral data and sending the spectral data to the control module, and the detector is connected with a light outlet of the spectrometer.
In the above device, the control module includes an upper computer, the upper computer is connected to and adjusts the pulse laser, the half-wave plate, the first concave lens, the first convex lens, the spectrometer and the detector, and receives and analyzes the spectral data from the detector.
In the above device, the control module further comprises a timing controller, and the timing controller is connected to and adjusts the pulse laser and the detector, so that the pulse timing of the pulse laser is synchronized with the shutter timing of the detector.
The invention also provides a detection method, which is applied to a detection device, the detection device comprises a light source module, a light path module, a signal processing module and a control module, the control module is respectively connected with the light source module, the light path module and the signal processing module and is used for controlling and adjusting the light source module, the light path module and the signal processing module, and the method comprises the following steps:
the light source module generates pulse laser and transmits the pulse laser to the light path module;
the light path module receives the pulse laser and adjusts the pulse laser to obtain a target circular beam;
the light path module focuses the target circular light beam to a sample to be detected;
the light path module collects and adjusts the target circular light beam scattered by the sample to be detected to obtain a parallel light beam, and the light path module performs filtering processing on the parallel light beam and retains Raman scattering light;
the optical path module sends the Raman scattering light to the signal processing module;
the signal processing module receives the Raman scattering light and processes the Raman scattering light to obtain corresponding spectral data;
the signal processing module sends the spectrum data to the control module;
the control module receives the spectral data and analyzes the spectral data.
In the above method, the step of receiving the pulse laser by the optical path module and adjusting the pulse laser to obtain the target circular beam further includes: the light path module changes the polarization angle of the pulse laser and splits the changed pulse laser to obtain horizontal polarized light; the light path module filters the horizontal polarized light and reserves a first circular light beam with uniform intensity; the light path module diverges and adjusts the retained first circular light beam to obtain the target circular light beam.
The detection device is applied to a wind tunnel environment experiment, in the environment experiment, the phase change process of a sample to be detected under the action of high-temperature and high-speed airflow is detected by laser, the surface temperature of the sample to be detected is not influenced by laser measurement, the surface of the sample to be detected is not damaged additionally, the precision is high, the measurement range is large, the detection time is short, and the spatial resolution is high. The detection device controls and adjusts the light source module, the light path module and the signal processing module through the control module, so that the detection device can effectively eliminate the influence of the black body radiation background and other interference factors while detecting, and the accuracy of a measurement result is ensured.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a block diagram showing the overall structure of a detecting apparatus according to an embodiment of the present invention;
FIG. 2 is a block diagram of a light source module according to an embodiment of the present invention;
FIG. 3 is a block diagram of an optical circuit module according to an embodiment of the present invention;
FIG. 4 is a block diagram of a signal processing module according to an embodiment of the present invention;
FIG. 5 is a block diagram of a control module according to an embodiment of the present invention;
FIG. 6 is a light path diagram of the detecting device in practical use according to the embodiment of the present invention;
FIG. 7 is a flow chart of a detection method according to an embodiment of the present invention;
FIG. 8 is a further flow chart of a detection method in an embodiment of the present invention;
fig. 9 is a phase change state diagram of a sample to be detected obtained by using the detection apparatus and the detection method in the embodiment of the invention.
Detailed Description
In the description of the present invention, a plurality of means is two or more, and greater than, less than, more than, etc. are understood as excluding the present number, and greater than, less than, etc. are understood as including the present number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
The invention provides a detection device and a detection method, which are used for solving the problem that the existing detection system is easy to be interfered by black body radiation and the like in the processes of detecting the oxidation ablation and the phase change of a sample to be detected under the action of high-temperature and high-speed airflow on line, so that the measurement result is distorted.
The following describes a detection apparatus and a detection method according to the present invention in detail with reference to preferred examples and drawings thereof.
An embodiment of the present invention provides a detection apparatus, as shown in fig. 1, the detection apparatus includes a light source module 1, a light path module 2, a signal processing module 3, and a control module 4, where the control module 4 establishes line connections with the light source module 1, the light path module 2, and the signal processing module 3, respectively, to control and adjust the light source module 1, the light path module 2, and the signal processing module 3. The light source module 1 generates pulse laser and transmits the pulse laser to the light path module 2; the light path module 2 receives and adjusts the pulse laser to obtain a target circular beam, focuses the target circular beam on a sample to be detected, scatters the target circular beam by the sample to be detected, the light scattered by the sample to be detected is scattered light, the light path module 2 collects the scattered light and filters the scattered light, and the light path module 2 sends the filtered scattered light to the signal processing module 3; the signal processing module 3 receives and processes the filtered scattered light to obtain corresponding spectral data, and the signal processing module 3 sends the spectral data to the control module 4; the control module 4 receives and analyzes the spectral data to obtain phase change information of the sample to be measured.
In a further embodiment of the present invention, as shown in fig. 2, the light source module 1 includes a semiconductor laser 11 and a pulse laser 12. The semiconductor laser 11 is used to generate seed laser light, and the seed laser light is injected into the pulse laser 12 through an optical fiber. The pulse laser 12 is used for generating pulse laser light and emitting the pulse laser light to the optical path module 2.
The seed laser generated by the semiconductor laser 11 is a continuous laser with an ultra-narrow line width, and the seed laser and the pulse laser 12 work synchronously through a corresponding control circuit. The effect of the synchronous operation of the seed laser and the pulse laser 12 is that after the seed laser is injected into the pulse laser 12, the monochromaticity of the pulse laser output by the pulse laser 12 is greatly improved, and the energy is more stable. If the seed laser and the pulse laser 12 work asynchronously, the seed laser does not work in the process of outputting the pulse laser by the pulse laser 12, so that the quality of the pulse laser output by the pulse laser 12 is poor.
In the present embodiment, the semiconductor laser 11 is preferably a narrow linewidth distributed feedback laser, which outputs seed laser light with a wavelength of 1064 nm; the pulse laser 12 is preferably an yttrium aluminum garnet crystal laser, and generates a line width of 0.003cm during seed laser injection-1The nanosecond pulse laser with the wavelength of 1064nm is converted into narrow-linewidth nanosecond pulse laser with the wavelength of 532nm through a frequency doubling crystal inside the yttrium aluminum garnet crystal laser.
In a further embodiment of the present invention, as shown in fig. 3, the optical path module 2 includes an attenuation component 21, a beam expanding and shaping component 22, and a collection component 23. The attenuation component 21 receives the pulse laser from the pulse laser 12, adjusts the energy of the pulse laser, and the attenuation component 21 transmits the adjusted pulse laser to the beam expanding and shaping component 22; the beam expanding and shaping component 22 receives and expands the adjusted pulse laser to obtain a target circular beam, and the beam expanding and shaping component 22 transmits the target circular beam to the collecting component 23; the collecting assembly 23 receives the target circular beam and focuses the target circular beam to the sample to be measured, the sample to be measured scatters the target circular beam, the collecting assembly 23 collects the scattered light and performs filtering processing on the scattered light, and the collecting assembly 23 transmits the filtered scattered light to the signal processing module 3. In practical use, a user can adjust the beam expanding and shaping component 22 and the collecting component 23 according to experimental environment conditions, so as to realize laser focusing of the light path module 2 in a range from 0.5m to 3m and realize spatial resolution of the light path module 2 in a range from 1mm to 10 mm.
It should be noted that, when the detection device of the embodiment of the present invention is used to detect a sample to be detected, the size range of the sample to be detected that is effectively detected is the spatial resolution of the detection device, and the spatial resolution represents the resolution capability of the detection device to different areas of the sample to be detected.
Further, the attenuation module 21 includes a glan laser prism 212 and a rotatable half wave plate 211. Wherein, the half wave plate 211 receives the pulse laser from the pulse laser 12 and changes the polarization angle of the pulse laser, and the half wave plate 211 sends the changed pulse laser to the glan laser prism 212; the glan laser prism 212 receives the changed pulse laser light and splits the changed pulse laser light to obtain horizontally polarized light; the glan laser prism 212 transmits the horizontally polarized light to the beam expanding and shaping assembly 22.
In one embodiment, the glan laser prism 212 acts as an analyzer that splits the altered pulsed laser light into transmitted horizontally polarized light (e-light) and reflected vertically polarized light. The half wave plate 211 changes the polarization angle of the pulsed laser to adjust the proportion of the horizontally polarized light in the pulsed laser, thereby controlling the energy of the transmitted light passing through the glan laser prism 212, that is, the energy of the horizontally polarized light passing through the glan laser prism 212.
In the present embodiment, the half-wave plate 211 is mounted on the electric rotating frame, the glan laser prism 212 is mounted on the fixed mirror frame, and the control module 4 controls the electric rotating frame to rotate to adjust the angle of the half-wave plate 211 relative to the pulse laser 12 and the angle relative to the glan laser prism 212, so as to adjust the proportion of the horizontally polarized light in the pulse laser, and realize continuous adjustability of the energy of the horizontally polarized light transmitted through the glan laser prism 212.
Further, the beam expanding and shaping assembly 22 includes a diaphragm 221, a movable first concave lens 222, and a movable first convex lens 223. Wherein, the diaphragm 221 receives the horizontally polarized light from the glan laser prism 212 and filters the horizontally polarized light to obtain a first circular beam, and the diaphragm 221 sends the first circular beam to the first concave lens 222; the first concave lens 222 receives and diverges the first circular light beam to obtain a second circular light beam, and sends the second circular light beam to the first convex lens 223; the first convex lens 223 receives and adjusts the second circular beam to obtain the target circular beam, and the first convex lens 223 transmits the target circular beam to the collecting assembly 23.
In one embodiment, the stop 221 is an entity that limits the light beam in the optical system, and may be the edge of a lens, a frame, or a specially configured screen with holes. The diaphragm 221 filters the horizontally polarized light, and filters stray light generated by the pulse laser 12 and the attenuation module 21, and simultaneously filters a portion with weak edge energy of the laser beam, so as to obtain a first circular beam with clear edge and uniform intensity.
In this embodiment, the first concave lens 222 is preferably a plano-concave lens, the diaphragm 221 is mounted on a fixed support, the first concave lens 222 and the first convex lens 223 are mounted on an electric translation stage, the control module 4 controls the electric translation stage, the relative distance between the first concave lens 222 and the first convex lens 223 is adjusted through the electric translation stage, the divergence angle of the target circular beam can be changed, and then the size of a laser spot focused on a sample to be detected is changed, so that the adjustment of the spatial resolution of the detection device is realized.
Further, the collecting assembly 23 includes a right-angle prism 231, a focusing lens 232, a lens group 233, a filter 234, and a fiber coupling mirror 235. Wherein, the right-angle prism 231 receives the target circular beam from the first convex lens 223 and reflects the target circular beam to the focusing lens 232; the focusing lens 232 receives the target circular light beam and focuses the target circular light beam to a sample to be detected, the sample to be detected scatters the target circular light beam, and the focusing lens 232 collects scattered light and sends the scattered light to the lens group 233; the lens group 233 receives and modulates the scattered light to obtain a parallel light beam, and the lens group 233 sends the parallel light beam to the optical filter 234; the optical filter 234 receives the parallel light beams, performs filtering processing on the parallel light beams, retains raman scattering light, and transmits the raman scattering light to the fiber coupling mirror 235; the fiber coupling mirror 235 receives the raman scattered light and focuses the raman scattered light to the fiber port, and the fiber coupling mirror 235 transmits the raman scattered light to the signal processing module 3 through the optical fiber.
In one embodiment, the right angle prism 231, the focusing lens 232, the lens group 233, the optical filter 234 and the fiber coupling mirror 235 are fixedly installed in the birdcage optical path, that is, the right angle prism 231, the focusing lens 232, the lens group 233, the optical filter 234 and the fiber coupling mirror 235 are coaxially arranged. The right-angle prism 231 is disposed between the focusing lens 232 and the lens group 233, and the size of the right-angle prism 231 is much smaller than the size of the focusing lens 232 and the lens group 233, without affecting the transmission of the scattered light between the focusing lens 232 and the lens group 233. The round target light beam is reflected by the right-angle prism 231 and then irradiates a sample to be detected through the focusing lens 232, the sample to be detected scatters the round target light beam, the scattered light comprises Rayleigh scattered light and Raman scattered light, the focusing lens 232 collects the scattered light again, the collected scattered light is adjusted into parallel light beams through the lens group 233, the parallel light beams are filtered by the optical filter 234, the Rayleigh scattered light is filtered, and the Raman scattered light is retained.
In this embodiment, the focusing lens 232 serves as both a focusing lens for the incident laser beam of the sample to be measured and a collecting lens for the scattered light, and forms a back scattering optical path. The focusing lens 232 is preferably a 2 inch diameter lens with a focal length of 500mm or 1000 mm; the filter 234 is preferably a long-pass filter 234 dedicated to laser light having a wavelength of 532 nm. The lens group 233 includes a second convex lens and a second concave lens, the scattered light is collected by the focusing lens 232 and converted into a near-parallel light beam, and the second convex lens focuses the near-parallel light beam and converts the near-parallel light beam into parallel light by the second concave lens. The fiber coupling mirror 235 is preferably a third convex lens, the collimation and diameter of the parallel light matching the operating parameters of the filter 234.
In a further embodiment of the invention, as shown in fig. 4, the signal processing module 3 comprises a spectrometer 31 and a detector 32. Wherein, the light inlet of the spectrometer 31 is connected to the fiber coupling mirror 235 through an optical fiber for receiving and decomposing the raman scattering light from the fiber coupling mirror 235 to obtain a spectral line; the detector 32 is connected to the light outlet of the spectrometer 31, and is configured to detect a spectral line to obtain spectral data, and send the spectral data to the control module 4.
In one embodiment, the spectrometer 31 can decompose the complex component laser light into spectral lines according to different wavelengths, and the detector 32 converts the spectral lines into spectral data according to the intensities of the laser light with different wavelengths. In the present embodiment, the detector 32 is preferably a time-resolved image intensifier camera (ICCD).
In a further embodiment of the present invention, as shown in fig. 5, the control module 4 includes an upper computer 41, the upper computer 41 is connected to and adjusts the pulse laser 12, the half-wave plate 211, the first concave lens 222, the first convex lens 223, the spectrometer 31 and the detector 32, and receives and analyzes the spectral data from the detector 32 to obtain the phase change information of the sample to be measured.
In one embodiment, the upper computer 41 can adjust the setting parameters of the pulse laser 12, the spectrometer 31 and the detector 32, control the rotation angle of the electric rotating frame, and adjust the position of the electric translation stage, that is, the upper computer 41 can control the rotation angle of the half-wave plate 211 and adjust the relative distance between the first concave lens 222 and the first convex lens 223. In this embodiment, the upper computer 41 is preferably a computer (PC), and the computer receives the spectral data from the detector 32 and analyzes the spectral data to obtain the phase change information of the sample to be measured.
Further, the control module 4 further includes a timing controller 42, and the timing controller 42 is connected to and adjusts the pulse laser 12 and the detector 32 so that the pulse timing of the pulse laser 12 is synchronized with the shutter timing of the detector 32.
In one embodiment, in order to enable the detector 32 to accurately capture the laser light without signal acquisition during the blank time without laser light, the timing controller 42 is required to synchronize the operating timing of the two. The timing controller 42 will respectively send signal instructions to the pulse laser 12 and the detector 32, the pulse laser 12 and the detector 32 will have different response times after receiving the signal instructions at the same time, the pulse laser generated by the pulse laser 12 needs to be converted into a spectrum line and transmitted to the detector 32 after a period of time, in order to make the shutter time of the detector 32 accurately cover the nanosecond width of the pulse laser, the delay time before the detector 32 opens the shutter needs to be adjusted, after proper adjustment, the detector 32 starts to collect when the spectrum line reaches the detector 32, and when there is no spectrum line, the shutter of the detector 32 is closed. When the temperature of the sample to be detected is above about 800 ℃, the thermal radiation intensity generated by the sample to be detected is enough to generate great interference on spectrum detection, and the detection can be realized only when a spectral line exists and is not detected in a large amount of blank time without the spectral line by using time sequence control, so that excessive thermal radiation interference signals are prevented from being acquired by the detector 32.
In this embodiment, the timing controller 42 is preferably a Digital Delay Generator (DDG) that controls the shutter timing of the detector 32 to synchronize with the pulse timing of the pulse laser 12 with a delay that limits the shutter time for spectral line acquisition to the nanosecond range of the pulse laser width. By limiting the shutter time of the spectral line acquisition, the influence of black body radiation signals generated by the sample to be detected in a high-temperature state on spectral analysis can be effectively removed, the obtained information of the sample to be detected is more accurate and reliable, and the continuous measurement of the component structure change of the sample to be detected at different temperatures can be realized.
FIG. 6 is a light path diagram of the detecting device in practical use according to the embodiment of the present invention. The half wave plate 211 receives the pulse laser light from the light source module 1, changes the polarization angle of the pulse laser light, and then sends the changed pulse laser light to the glan laser prism 212. The glan laser prism 212 receives the changed pulse laser light and splits the changed pulse laser light to obtain horizontally polarized light, and the glan laser prism 212 transmits the horizontally polarized light to the diaphragm 221. The stop 221 receives the horizontally polarized light, filters it to obtain a first circular beam, and sends the first circular beam to the first concave lens 222. The first concave lens 222 receives and diverges the first circular light beam to obtain a second circular light beam, and sends the second circular light beam to the first convex lens 223. The first convex lens 223 receives and adjusts the second circular beam to obtain a target circular beam, and sends the target circular beam to the right angle prism 231. The right angle prism 231 receives the target circular beam from the first convex lens 223 and reflects the target circular beam to the focusing lens 232. The focusing lens 232 receives the target circular beam and focuses the target circular beam to the sample 5 to be measured, the sample 5 to be measured scatters the target circular beam, and the focusing lens 232 collects the scattered light and transmits the scattered light to the lens group 233. The lens group 233 receives and modulates the scattered light to obtain a parallel light beam, and the lens group 233 sends the parallel light beam to the filter 234. The filter 234 receives the parallel light beam and filters the parallel light beam to retain the raman scattered light, and the filter 234 transmits the raman scattered light to the fiber coupling mirror 235. The fiber coupling mirror 235 receives the raman scattered light and focuses the raman scattered light to the fiber port, and the fiber coupling mirror 235 transmits the raman scattered light to the signal processing module 3 through the optical fiber. The signal processing module 3 receives and processes the raman scattered light to obtain spectral data, and sends the spectral data to the control module 4.
To sum up, above-mentioned detection device detects the phase transition process of the sample that awaits measuring under the high-temperature high-speed air current effect through laser, and laser survey can not influence the surface temperature of the sample that awaits measuring, can not cause extra damage to the sample surface that awaits measuring, and the precision is high, measuring range is big, detection time is short, has higher spatial resolution. The detection device controls and adjusts the light source module, the light path module and the signal processing module through the control module, so that the detection device can effectively eliminate the influence of the black body radiation background and other interference factors while detecting, and the accuracy of a measurement result is ensured. The detection device adopts a back scattering type light path to collect laser signals, and only one side of the wind tunnel experiment cabin is needed to provide an experiment window through which a sample measurement point can be observed.
The detection device can effectively inhibit the interference of various factors, can be applied to experimental environments such as wind tunnels and the like to realize the online detection of the phase change process of a sample to be detected under the impact of high-temperature and high-speed airflow, can also be used for the online detection of spectra in high-temperature and low-temperature extreme environments in the production processes such as the ceramic calcining processing process, the metallurgical smelting process and the like, and can detect the phase and the temperature of materials in the production process in real time.
According to an embodiment of the present invention, there is provided a detection method applied to the detection apparatus, as shown in fig. 7, the detection method includes the following steps:
s100, generating pulse laser by a light source module, and transmitting the pulse laser to a light path module;
s110, the light path module receives the pulse laser and adjusts the pulse laser to obtain a target circular beam;
s120, focusing the target circular light beam to a sample to be detected by the light path module;
s130, the light path module collects and adjusts the target circular light beam scattered by the sample to be detected to obtain a parallel light beam, the light path module performs filtering processing on the parallel light beam and retains Raman scattering light, and the light path module sends the Raman scattering light to the signal processing module;
s140, the signal processing module receives the Raman scattering light and processes the Raman scattering light to obtain corresponding spectrum data, and the signal processing module sends the spectrum data to the control module;
s150, the control module receives the spectral data and analyzes the spectral data to obtain the phase change information of the sample to be detected.
In a further embodiment of the present invention, as shown in fig. 8, step S110 further includes:
s111, changing the polarization angle of the pulse laser by the light path module, and splitting the changed pulse laser into beams to obtain horizontal polarized light;
s112, filtering the horizontal polarized light by the light path module, and keeping a first circular light beam with uniform intensity;
s113, the light path module diverges the retained first circular light beam to obtain a second circular light beam;
and S114, adjusting the second circular light beam by the light path module to obtain a target circular light beam.
FIG. 9 shows a phase transition state diagram of a sample to be tested at different temperatures obtained by the above detection device and method, wherein the test environment is a coherent jet combustion wind tunnel, and the sample to be tested is selected from zirconium oxide (ZrO)2) The abscissa represents the wave number (reciprocal of wavelength) and the ordinate represents the count intensity of raman scattered light in the spectrometer.
The curve 3 shows the crystal structure state of the zirconia at 1100 ℃, the curve 4 shows the crystal structure state of the zirconia at 1500 ℃, in the process that the temperature of the zirconia is increased from 800 ℃ to 1500 ℃, the zirconia starts to generate phase change when the temperature is about 1000-1200 ℃, the intensity of a monoclinic phase spectrum peak is gradually reduced or disappears, a new spectrum peak appears, and the process shows that the zirconia is changed from the monoclinic phase crystal structure to a tetragonal phase crystal structure.
The curve 5 shows the crystal structure state of the zirconia at 1800 ℃, the curve 6 shows the crystal structure state of the zirconia at 2100 ℃, when the temperature of the zirconia rises from 1500 ℃ to 2100 ℃, the corresponding spectral peaks of four directions gradually disappear, widen, merge and the like when the temperature rises to above 2000 ℃, finally, two broad spectral peaks respectively located at 100-400 wave numbers and 500-700 wave numbers are formed, and the process shows that the phase of the zirconia is changed from the crystal structure of four directions to the crystal structure of a cubic phase.
The present embodiment has been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above-described embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present invention.
Claims (10)
1. A detection device comprises a light source module, a light path module, a signal processing module and a control module; the control module is connected with the light source module, the light path module and the signal processing module and is used for controlling the light source module, the light path module and the signal processing module; wherein the content of the first and second substances,
the light source module comprises a pulse laser, and the pulse laser is used for generating pulse laser and transmitting the pulse laser to the light path module;
the light path module is used for receiving and adjusting the pulse laser to obtain a target circular beam which can be focused on a sample to be detected, filtering the scattered target circular beam, and sending the filtered beam to the signal processing module;
the signal processing module is used for receiving and processing the light beam subjected to the filtering processing to obtain spectral data, and the signal processing module sends the spectral data to the control module;
the control module is further configured to receive and analyze the spectral data.
2. The apparatus of claim 1, wherein the optical path module comprises an attenuation component, a beam expanding shaping component, and a collection component; wherein the content of the first and second substances,
the attenuation component is used for receiving and adjusting the pulse laser from the pulse laser and transmitting the adjusted pulse laser to the beam expanding and shaping component;
the beam expanding and shaping component is used for receiving and expanding the adjusted pulse laser to obtain the target circular beam and transmitting the target circular beam to the collecting component;
the collecting component is used for receiving the target circular light beam and focusing the target circular light beam to the sample to be detected, receiving the scattered target circular light beam from the sample to be detected, filtering the scattered target circular light beam, and transmitting the filtered light beam to the signal processing module.
3. The apparatus of claim 2, wherein the attenuation module comprises a grazing laser prism and a rotatable half wave plate; wherein the content of the first and second substances,
the half wave plate is used for receiving the pulse laser from the pulse laser, changing the polarization angle of the pulse laser and sending the changed pulse laser to the Glan laser prism;
the Glan laser prism is used for receiving the changed pulse laser, splitting the changed pulse laser into beams to obtain horizontal polarized light and sending the horizontal polarized light to the beam expanding and shaping assembly.
4. The apparatus of claim 3, wherein the beam expanding shaping component comprises an aperture, a first movable concave lens, and a first movable convex lens; wherein the content of the first and second substances,
the diaphragm is used for receiving the horizontal polarized light from the Glan laser prism, filtering the horizontal polarized light to obtain a first circular light beam, and sending the first circular light beam to the first concave lens;
the first concave lens is used for receiving and dispersing the first circular light beam to obtain a second circular light beam and sending the second circular light beam to the first convex lens;
the first convex lens is used for receiving and adjusting the second circular light beam to obtain the target circular light beam, and sending the target circular light beam to the collecting assembly.
5. The apparatus of claim 4, wherein the collection assembly comprises a right angle prism, a focusing lens, a lens assembly, a filter, and a fiber coupled mirror; wherein the content of the first and second substances,
the right-angle prism is used for receiving the target circular light beam from the first convex lens and reflecting the target circular light beam to the focusing lens;
the focusing lens is used for receiving the target circular light beam and focusing the target circular light beam to a sample to be detected, and the focusing lens receives the target circular light beam scattered by the sample to be detected and sends the scattered target circular light beam to the lens group;
the lens group is used for receiving and adjusting the scattered target circular light beam to obtain a parallel light beam and sending the parallel light beam to the optical filter;
the optical filter is used for receiving the parallel light beams, filtering the parallel light beams and retaining Raman scattering light, and the optical filter sends the Raman scattering light to the optical fiber coupling mirror;
the optical fiber coupling mirror is used for receiving the Raman scattering light and focusing the Raman scattering light to an optical fiber port, and the optical fiber coupling mirror transmits the Raman scattering light to the signal processing module through an optical fiber.
6. The apparatus of claim 5, wherein the signal processing module comprises a spectrometer and a detector; wherein the content of the first and second substances,
the spectrometer is used for receiving and decomposing the Raman scattering light from the fiber coupling mirror to obtain a spectral line, and the fiber coupling mirror is connected with a light inlet of the spectrometer through an optical fiber;
the detector is used for detecting the spectral lines to obtain the spectral data and sending the spectral data to the control module, and the detector is connected with a light outlet of the spectrometer.
7. The apparatus of claim 6, wherein the control module comprises an upper computer that connects and adjusts the pulse laser, the half-wave plate, the first concave lens, the first convex lens, the spectrometer, and the detector, and receives and analyzes the spectral data from the detector.
8. The apparatus of claim 6, wherein the control module further comprises a timing controller coupled to and adjusting the pulse laser and the detector to synchronize a pulse timing of the pulse laser with a shutter timing of the detector.
9. A detection method is applied to a detection device, the detection device comprises a light source module, a light path module, a signal processing module and a control module, the control module is respectively connected with the light source module, the light path module and the signal processing module and is used for controlling and adjusting the light source module, the light path module and the signal processing module, and the method comprises the following steps:
the light source module generates pulse laser and transmits the pulse laser to the light path module;
the light path module receives the pulse laser and adjusts the pulse laser to obtain a target circular beam;
the light path module focuses the target circular light beam to a sample to be detected;
the light path module collects and adjusts the target circular light beam scattered by the sample to be detected to obtain a parallel light beam, and the light path module performs filtering processing on the parallel light beam and retains Raman scattering light;
the optical path module sends the Raman scattering light to the signal processing module;
the signal processing module receives the Raman scattering light and processes the Raman scattering light to obtain corresponding spectral data;
the signal processing module sends the spectrum data to the control module;
the control module receives the spectral data and analyzes the spectral data.
10. The method of claim 9, wherein the step of the optical path module receiving the pulsed laser light and adjusting the pulsed laser light to obtain the target circular beam further comprises: the light path module changes the polarization angle of the pulse laser and splits the changed pulse laser to obtain horizontal polarized light; the light path module filters the horizontal polarized light and reserves a first circular light beam with uniform intensity; the light path module diverges and adjusts the retained first circular light beam to obtain the target circular light beam.
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