CN111060516B - Multi-channel in-situ detection device and method for subsurface defects of optical element - Google Patents
Multi-channel in-situ detection device and method for subsurface defects of optical element Download PDFInfo
- Publication number
- CN111060516B CN111060516B CN201911259313.8A CN201911259313A CN111060516B CN 111060516 B CN111060516 B CN 111060516B CN 201911259313 A CN201911259313 A CN 201911259313A CN 111060516 B CN111060516 B CN 111060516B
- Authority
- CN
- China
- Prior art keywords
- detection
- optical element
- detected
- confocal
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
Landscapes
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
A multi-channel in-situ detection device and a detection method for subsurface defects of optical elements are used for detecting the defects of the optical elements such as glass and the like. The device comprises a fluorescence confocal imaging system, a fluorescence lifetime imaging system and a photothermal absorption imaging system, and can realize the in-situ test of the geometrical morphology of the subsurface micro-nano defect, the photoluminescence and the photothermal absorption characteristics of the optical element at one time. The device has the characteristics of compact structure, strong detection universality and high stability, and is suitable for high-sensitivity nondestructive detection of subsurface defects.
Description
Technical Field
The invention relates to an optical element, in particular to a multi-channel in-situ detection device and a multi-channel in-situ detection method for subsurface defects of the optical element.
Background
The optical element processing inevitably results in different levels of defects on the subsurface. The introduction of defects reduces the band gap width of the material, sub-band gap absorption (multiphoton absorption) is generated under the action of strong laser, the number of conduction band free electrons is sharply increased under the combined action of multiphoton ionization and avalanche ionization, the collision lattice generates heat, and when the energy deposition level exceeds the thermodynamic tolerance limit of the material, damage is caused, so that the performance of the optical element is reduced and even fails. Therefore, the development of the detection technology research of the subsurface defect of the optical element has very important significance for improving the laser damage resistance of the optical element.
The confocal microscopy technology can effectively avoid the interference of points outside a focal plane, only the focal plane is accurately imaged, and the high-resolution three-dimensional imaging of the geometrical morphology of the defect is realized by the movement of a scanning point on a sample. The fluorescence lifetime imaging technology is the combination of time-resolved fluorescence spectroscopy and fluorescence microscopy, and the fluorescence lifetime emitted by target fluorescence is calculated to serve as the contrast of an image, so that the biophysical parameters in a microenvironment where the target is located are quantitatively measured, and the fluorescence radiation/non-radiation transition process after the defect absorbs laser energy can be reflected. The photothermal absorption detection technology obtains weak surface absorption by detecting thermal deformation generated after the surface of the optical material is heated by pumping light, and the method has high detection sensitivity and can be used for measuring the photothermal absorption characteristics of defects. However, defect-induced laser damage is a very complex physical process, which is closely related to the geometrical morphology, photoluminescence and photothermal absorption characteristics of defects, and the previous single technical means cannot provide enough defect physical image information, so that the detection sensitivity is low, and the measurement result is greatly influenced by scattering. And when several methods are adopted for independent measurement at the same time, the influence caused by the change of the measurement environment cannot be avoided, and the accurate positioning and resetting of the same micro-nano defect are difficult to realize.
Disclosure of Invention
The invention aims to overcome the defects and provides a multichannel in-situ detection device and a detection method for subsurface defects of an optical element. The device has the characteristics of compact structure, strong detection universality and high stability, and is suitable for high-sensitivity nondestructive detection of subsurface defects.
The technical solution of the invention is as follows:
a multi-channel in-situ detection device for optical element subsurface defects is characterized by comprising a confocal test light path, a fluorescence life test light path and a photo-thermal absorption pumping light path which are designed in a common light path:
the short-pulse laser light source comprises a dichroic mirror, a confocal module, a microscopic amplification system and a sample table in sequence along the propagation direction of a light beam of the short-pulse laser light source, wherein the sample table is used for arranging an optical element to be detected;
the microscopic amplification system, the confocal module, the dichroic mirror and the light splitting system are sequentially arranged along the fluorescent output direction of the optical element to be detected, the light splitting system divides the fluorescent light into reflected light and transmitted light, the confocal detection system is arranged in the direction of the reflected light, and the fluorescent service life detection system is arranged in the direction of the transmitted light;
the device comprises a pump laser light source, a light beam adjusting module, a light splitting system, an optical chopper, a rotatable reflector and a light trap which are sequentially arranged along the light beam propagation direction of the pump laser light source, wherein the rotatable reflector can be arranged in the light path of the microscopic amplification system, and a power monitoring module is arranged in the reflected light direction of the light splitting system;
a detection laser light source is arranged obliquely above one side of the optical element to be detected, detection laser output by the detection laser light source irradiates the optical element to be detected through a focusing lens, and a photo-thermal absorption detection system is arranged obliquely above the other side of the optical element to be detected;
the fluorescence lifetime detection system and the short pulse laser light source are connected with the time-dependent single photon counting module, the multichannel control system is connected with the fluorescence lifetime detection system, the confocal detection system and the photothermal absorption detection system, and the output end of the multichannel control system is connected with the input end of the data processing system.
The short pulse laser light source is a picosecond or femtosecond high-repetition-frequency and high-power laser light source, is used for exciting the defects of the optical element to generate photoluminescence, and is used as a reference signal for counting time-related single photons;
the confocal module comprises a lens, a small hole and a lens, and the confocal system is formed by the confocal detection system, the microscopic amplification system and the sub-surface of the optical element to be measured and is used for realizing the high-resolution measurement of the three-dimensional morphology of the sub-surface defect.
The sample stage is connected with the high-precision three-dimensional electric translation stage and the piezoelectric ceramic Z-direction moving mechanism and is used for placing and adjusting the optical element to be measured.
The confocal detection system comprises a neutral filter, a focusing lens, a small hole and a detector, wherein the small hole is arranged on the focal plane of the focusing lens, and the detector is an avalanche photodiode or a photomultiplier tube.
The fluorescence lifetime detection system comprises a band-pass filter, a focusing lens and a high-speed response photoelectric detector, wherein the detection surface of the high-speed response photoelectric detector is positioned on the focal plane of the focusing lens, and the high-speed response photoelectric detector is an avalanche photodiode or a photomultiplier and is used for detecting fluorescence photon signals.
The pump laser light source is a continuous or quasi-continuous high-power laser light source and is used for carrying out pump heating on the optical element to be detected to generate photo-thermal deformation.
The beam adjusting module comprises a beam shaper and a beam power adjuster and is used for shaping and adjusting the power of the pump laser beam.
The photo-thermal absorption detection system comprises a lens, a diaphragm and a photoelectric detector, wherein the detection surface of the photoelectric detector is positioned on the focal plane of the lens group.
The multichannel in-situ detection method for the subsurface defect of the optical element to be detected by utilizing the multichannel in-situ detection device for the subsurface defect of the optical element comprises the following steps:
placing an optical element to be detected on the sample table;
adjusting the position and the angle of the optical element to be measured by using the sample stage to enable the sub-surface of the optical element to be measured to be positioned on the object space focal plane of the microscopic amplification system;
the rotatable reflector is unscrewed to excite the short pulse laser light source, the short pulse laser light source emits laser beams, the laser beams are reflected by the dichroic mirror and enter the microscopic amplification system through the confocal module to be converged to the position area of the subsurface defect point of the optical element to be detected, the excited fluorescence is collected by the microscopic amplification system, is reflected by the light splitting system through the confocal module and the dichroic mirror, enters the confocal detection system through the confocal module and the dichroic mirror, is scanned in three directions of XYZ through the sample stage, and the confocal detection system obtains the three-dimensional shape information of the detected defect point area and inputs the three-dimensional shape information into the data processing system through the multi-channel control system;
the confocal detection system has a transverse resolution sigmaxyThe wavelength of the excitation laser light source and the numerical aperture NA of the microscopic amplification system are determined according to the following formula,
σxy＝0.4λ/NA；
transmitting the other beam of fluorescent light beam by the light splitting system and then entering the fluorescent service life detection system, combining the fluorescent service life detection system with a time-related single photon counting module to obtain fluorescent service life information at a point to be detected, scanning in three directions of XYZ by the sample stage, obtaining fluorescent service life imaging three-dimensional shape information of a detected defect point area by the fluorescent service life detection system and inputting the information into the data processing system by the multi-channel control system;
the rotatable reflector is screwed in, the laser emitted by the pump laser source is converged to the subsurface defect point position area of the optical element to be detected through the micro-amplification system after the power adjustment, the shaping and the beam expansion of the pump laser beam and the frequency modulation of the pump laser beam are carried out through the beam power adjuster, the beam shaper and the optical chopper, the measured position area generates photothermal deformation under the heating of the pump laser, the detection light emitted by the detection laser source is converged to the photothermal deformation area through the focusing lens, the photothermal deformation can cause the emission change of the propagation characteristic of the detection laser beam to generate photothermal detection signals, the photothermal detection signals can obtain the photothermal absorption information of the subsurface defect point position area of the optical element to be detected to the pump light after the filtering and the photoelectric signal conversion are carried out through the photothermal absorption detection system, the data processing and the analysis are carried out through the sample platform for the scanning in three directions, the photothermal absorption detection system obtains photothermal absorption three-dimensional distribution information of a detected defect point region and inputs the photothermal absorption three-dimensional distribution information into the data processing system through the multi-channel control system;
sixthly, the data processing system processes the data of the confocal channel, the fluorescence life imaging channel and the photo-thermal absorption channel to obtain the geometric shape, the fluorescence characteristic and the photo-thermal absorption in-situ information of the detected defect point region on the subsurface of the optical element to be detected.
The short pulse laser light source is a picosecond or femtosecond high-repetition-frequency and high-power laser light source, is used for exciting the defects of the optical element to generate photoluminescence, and is used as a reference signal for counting time-related single photons;
the dichroic mirror is used for separating the wavelength of the excitation laser light source from the fluorescence wavelength;
the microscopic amplification system is used for amplifying a test area of the sub-surface of the optical element to be tested;
the light splitting system is arranged behind the dichroic mirror and is used for separating the fluorescence transmitted through the dichroic mirror, reflected light enters the confocal detection system, and transmitted light enters the fluorescence life detection system;
the high-speed response photoelectric detector is an avalanche photodiode or a photomultiplier and is used for detecting a fluorescence photon signal;
the time correlation single photon counting module is used for counting the fluorescence lifetime information of the measuring point;
the optical chopper is used for modulating the frequency of the pump laser beam;
the rotatable reflector is used for reflecting the pump laser to enter the microscopic amplification system, and the optical trap is used for absorbing the pump laser to ensure the safety of personnel and equipment;
the multi-channel control system is used for controlling and data communication of three channels of the fluorescence life detection system, the confocal detection system and the photothermal absorption detection system, and the data processing system is used for storing, processing and displaying three-channel data image information;
compared with the original independent confocal technology, fluorescence lifetime imaging technology and photothermal absorption technology, the invention has the following advantages,
1. the confocal module, the fluorescence scattering module and the photo-thermal absorption pumping module adopt a system common light path design, and no light beam crosstalk exists among the sub-modules, so that the detection device has the characteristics of compact structure, strong detection universality and high stability, and is more suitable for high-sensitivity detection of subsurface defects.
2. The method can realize the in-situ test of the geometrical morphology, photoluminescence and photo-thermal absorption characteristics of the subsurface micro-nano defects of the optical element at one time, does not need complex in-situ marking and positioning procedures, and also avoids the influence of different multi-system measuring environments on the measuring result.
Drawings
FIG. 1 is a schematic optical path diagram of a multi-channel in-situ detection device for subsurface defects of an optical element according to the present invention;
Detailed Description
The present invention will be further described with reference to the following examples and drawings, but the scope of the present invention should not be limited by these examples.
Referring to fig. 1, fig. 1 is a schematic light path diagram of a multi-channel in-situ detection apparatus for subsurface defects of an optical element according to the present invention, and it can be seen from the figure that the multi-channel in-situ detection apparatus for subsurface defects of an optical element according to the present invention comprises a confocal test light path, a fluorescence lifetime test light path, and a photo-thermal absorption pump light path, which are designed in a common light path:
the short-pulse laser light source 8 comprises a dichroic mirror 7, a confocal module 9, a microscopic amplification system 19 and a sample table 22 in sequence along the propagation direction of a light beam of the short-pulse laser light source 8, wherein the sample table 22 is used for arranging an optical element 21 to be detected;
the microscopic amplification system 19, the confocal module 9, the dichroic mirror 7 and the light splitting system 3 are sequentially arranged along the fluorescence output direction of the optical element to be detected 21, the light splitting system 3 divides the fluorescence into reflected light and transmitted light, the confocal detection system 4 is arranged in the reflected light direction, and the fluorescence life detection system 1 is arranged in the transmitted light direction;
the device comprises a pump laser light source 16, and a light beam adjusting module 15, a light splitting system 13, an optical chopper 12, a rotatable reflector 11 and a light trap 10 which are sequentially arranged along the light beam propagation direction of the pump laser light source 16, wherein the rotatable reflector 11 can be arranged in the light path of a microscopic amplification system 19, and a power monitoring module 14 is arranged in the reflected light direction of the light splitting system 13;
a detection laser light source 17 is arranged obliquely above one side of the optical element to be detected 21, detection laser output by the detection laser light source 17 irradiates the optical element to be detected 21 through a focusing lens 18, and a photo-thermal absorption detection system 20 is arranged obliquely above the other side of the optical element to be detected 21;
the fluorescence lifetime detection system 1 and the short pulse laser light source 8 are connected with the time-related single photon counting module 2, the multichannel control system 5 is connected with the fluorescence lifetime detection system 1, the confocal detection system 4 and the photo-thermal absorption detection system 20, and the output end of the multichannel control system 5 is connected with the input end of the data processing system 6.
The short pulse laser light source 8 is a picosecond or femtosecond high-repetition-frequency and high-power laser light source, is used for exciting optical element defects to generate photoluminescence, and is used as a reference signal for time-related single photon counting;
the confocal module 9 comprises a lens 901, a small hole 902 and a lens 902, and forms a confocal system with the sub-surface of the confocal detection system 4, the microscopic amplification system 19 and the optical element 21 to be measured, so as to realize the high-resolution measurement of the three-dimensional topography of the sub-surface defect.
The sample stage 22 is connected with the high-precision three-dimensional electric translation stage and the piezoelectric ceramic Z-direction moving mechanism, and is used for placing and adjusting the optical element 21 to be measured.
The confocal detection system 4 comprises a neutral filter 401, a focusing lens 402, an aperture 403 and a detector 404, wherein the aperture 403 is disposed on the focal plane of the focusing lens 402, and the detector 404 is an avalanche photodiode or a photomultiplier tube.
The fluorescence lifetime detection system 1 comprises a band-pass filter 101, a focusing lens 102 and a high-speed response photodetector 103, wherein the detection surface of the high-speed response photodetector 103 is located at the focal plane of the focusing lens 102, and the high-speed response photodetector 103 is an avalanche photodiode or a photomultiplier tube and is used for detecting fluorescence photon signals.
The pump laser light source 16 is a continuous or quasi-continuous high-power laser light source, and is used for performing pump heating on the optical element 21 to be measured to generate photothermal deformation.
The beam adjusting module 15 includes a beam shaper 1501 and a beam power adjuster 1502 for shaping and power adjusting the pump laser beam.
The photothermal absorption detection system 20 comprises a lens 2001, a lens 2002, an aperture 2003 and a photodetector 2004, wherein a detection surface of the photodetector 2004 is located at a focal plane of the lens group.
The multichannel in-situ detection method for the subsurface defect of the optical element to be detected by utilizing the multichannel in-situ detection device for the subsurface defect of the optical element comprises the following steps:
placing an optical element 21 to be detected on a sample table 22;
adjusting the position and the angle of the optical element 21 to be measured by using the sample stage 22 to enable the sub-surface of the optical element 21 to be measured to be positioned on the object space focal plane of the microscopic amplification system 19;
the rotatable reflector 11 is unscrewed to excite the short pulse laser light source 8, the short pulse laser light source 8 emits laser beams, the laser beams are reflected by the dichroic mirror 7, enter the microscopic amplification system 19 through the confocal module 9 and are converged to the sub-surface defect point position area of the optical element 21 to be detected, the excited fluorescence is collected by the microscopic amplification system 19, passes through the confocal module 9, penetrates through the dichroic mirror 7, is reflected by the light splitting system 3, enters the confocal detection system 4, is scanned in three directions of XYZ through the sample stage 22, and the confocal detection system 4 obtains three-dimensional shape information of the detected defect point area and inputs the three-dimensional shape information into the data processing system 6 through the multi-channel control system 5;
the confocal detection system 4 has transverse resolution sigmaxyThe wavelength of the excitation laser light source (8) and the numerical aperture NA of the microscopic amplification system (19) are determined according to the following formula,
σxy＝0.4λ/NA；
transmitting the other beam of fluorescent light beam by the light splitting system 3 and then entering the fluorescent life detection system 1, combining the fluorescent life detection system 1 with the time-dependent single photon counting module 2 to obtain the fluorescent life information at the point to be detected, scanning in three directions of XYZ by the sample stage 22, obtaining the fluorescent life imaging three-dimensional shape information of the area of the detected defect point by the fluorescent life detection system 1 and inputting the information into the data processing system 6 by the multi-channel control system 5;
the rotatable reflector 11 is screwed in, the laser emitted by the pump laser source 16 is converged to the subsurface defect point position area of the optical element 21 to be detected through the microscopic amplification system 19 after the power adjustment, shaping, beam expansion and frequency modulation of the pump laser beam are carried out through the beam power adjuster 1502, the beam shaper 1501 and the optical chopper 12, the detected position area generates photothermal deformation under the heating of the pump laser, the detection light emitted by the detection laser source 17 is converged to the photothermal deformation area through the focusing lens 18, the photothermal deformation can cause the transmission change of the detection laser beam to generate photothermal detection signals, and the photothermal detection signals are filtered by the photothermal absorption detection system 20, subjected to photoelectric signal conversion and data processing and analysis to obtain the photothermal absorption information of the subsurface defect point position area of the optical element 21 to be detected on the pump light, XYZ three-direction scanning is carried out through a sample table 22, and the photothermal absorption detection system 20 obtains photothermal absorption three-dimensional distribution information of a detected defect point region and inputs the photothermal absorption three-dimensional distribution information into the data processing system 6 through the multichannel control system 5;
sixthly, the data processing system 6 processes the data of the confocal channel, the fluorescence lifetime imaging channel and the photo-thermal absorption channel to obtain the geometric shape, the fluorescence characteristic and the photo-thermal absorption in-situ information of the detected defect point region on the subsurface of the optical element 21 to be detected.
Examples
The short pulse laser light source 8 provides picosecond high repetition frequency laser pulses with the wavelength of 375nm, is used for exciting the defects of the optical elements to generate photoluminescence, and is connected into the time-dependent single photon counting module 2 as an excitation signal; the dichroic mirror 7 is a long-pass dichroic mirror, has high reflection on laser with the wavelength lower than 375nm and high transmission on laser with the wavelength higher than 375nm, and separates the wavelength of an excitation laser light source from the wavelength of fluorescence;
the confocal module 9 comprises a lens 901, a pinhole 902 and a lens 902, and forms a confocal system with the confocal detection system 4, the microscopic amplification system 19 and the sub-surface of the optical element 21 to be measured, so as to realize the high-resolution measurement of the geometrical morphology of the sub-surface defects, the diameter of the pinhole 902 is 10 μm, and the lateral resolution σ of the confocal detection system is σxyThe wavelength of the excitation laser light source 8 and the numerical aperture NA of the microscopic amplification system 19 are determined according to the following formula,
σxy＝0.4λ/NA；
the sample stage 22 is connected with the high-precision three-dimensional electric translation stage and the piezoelectric ceramic Z-direction moving mechanism and is used for placing and adjusting the optical element 21 to be measured;
the light splitting system 3 is a 50:50 light splitting mirror, the fluorescence which penetrates through the dichroic mirror 7 is reflected by 50% and then enters the confocal detection system 4, and the fluorescence which is transmitted by 50% enters the fluorescence life detection system 1;
the fluorescence lifetime detection system 1 comprises a band-pass filter 101, a focusing lens 102 and a high-speed response photoelectric detector 103, wherein the band-pass filter 101 is selected according to a fluorescence spectrum corresponding to characteristic defects, and can be a (400nm-500nm)/(500nm-660nm)/(660nm-800nm) band-pass filter, and the high-speed response photoelectric detector 103 is an avalanche photodiode or a photomultiplier and is used for detecting a fluorescence single photon signal; the time-dependent single photon counting module 2 takes a laser pulse signal as a reference signal, takes a fluorescence photon signal detected by an avalanche photodiode or a photomultiplier as a photon event end signal, sets a certain residence time at each scanning point, continuously counts the time interval between an excitation signal and the fluorescence signal during the residence time, and obtains fluorescence lifetime information of the scanning point after statistical fitting;
the pump laser light source 16 is a quasi-continuous high-power laser light source with the light source wavelength of 355nm and is used for performing pump heating on an optical element sample to generate photothermal deformation; the beam adjusting module 15 includes a beam shaper 1501 and a beam power adjuster 1502, and is configured to shape a pump laser beam into a flat-top spot, and adjust laser power to ensure that the laser power can cause photothermal deformation of a measurement region but irreversible damage cannot occur.
The power meter 14 is used for monitoring the pump light power in real time; the optical chopper 12 is used for modulating the frequency of the pump laser beam and using the modulated signal as a reference signal of the phase-locked amplifier. The detection light emitted by the detection laser light source 17 is converged to the position of a sample to be detected through the focusing lens 18, and the reflected light enters the photo-thermal absorption detection system 20. The detection light changes in propagation characteristics after passing through the photo-thermal deformation region to generate a photo-thermal signal, and the photo-thermal absorption characteristics of the measured position region can be obtained by extracting and detecting the photo-thermal alternating current signal through a phase-locked integral amplification technology;
the optical trap 10 is used for absorbing the pump laser and ensuring the safety of personnel and equipment.
Experiments show that the method can realize in-situ test of the geometrical morphology, photoluminescence and photo-thermal absorption characteristics of the subsurface micro-nano defects of the optical element at one time. The device has the characteristics of compact structure, strong detection universality and high stability, and is suitable for high-sensitivity nondestructive detection of subsurface defects.
Claims (10)
1. Multichannel normal position detection device of optical element subsurface defect, its constitution includes confocal test light path, fluorescence life test light path, the light and heat absorption pumping light path of common light path design:
the device comprises a short pulse laser light source (8), a dichroic mirror (7), a confocal module (9), a microscopic amplification system (19) and a sample table (22) are sequentially arranged along the propagation direction of a light beam of the short pulse laser light source (8), and the sample table (22) is used for arranging an optical element (21) to be detected;
the microscopic amplification system (19), the confocal module (9), the dichroic mirror (7) and the first light splitting system (3) are sequentially arranged along the fluorescent output direction of the optical element to be detected (21), the first light splitting system (3) splits the fluorescent light into reflected light and transmitted light, the confocal detection system (4) is arranged in the direction of the reflected light, and the fluorescent life detection system (1) is arranged in the direction of the transmitted light;
the device comprises a pump laser light source (16), and a light beam adjusting module (15), a second light splitting system (13), an optical chopper (12), a rotatable reflector (11) and a light trap (10) which are sequentially arranged along the light beam propagation direction of the pump laser light source (16), wherein the rotatable reflector (11) can be arranged in the light path of the microscopic amplification system (19), and a power monitoring module (14) is arranged in the reflected light direction of the second light splitting system (13);
a detection laser light source (17) is arranged above one side of the optical element to be detected (21) in an inclined mode, detection laser light output by the detection laser light source (17) is irradiated on the optical element to be detected (21) through a first focusing lens (18), and a photo-thermal absorption detection system (20) is arranged above the other side of the optical element to be detected (21) in an inclined mode;
the fluorescence lifetime detection system (1) and the short pulse laser light source (8) are connected with the time-related single photon counting module (2), the multichannel control system (5) is connected with the fluorescence lifetime detection system (1), the confocal detection system (4) and the output end of the photothermal absorption detection system (20), and the output end of the multichannel control system (5) is connected with the input end of the data processing system (6).
2. The multi-channel in-situ detection apparatus for subsurface defects in optical elements as claimed in claim 1, wherein said short pulse laser source (8) is a picosecond or femtosecond high repetition frequency, high power laser source for exciting photoluminescence in the defects of optical elements and serving as a reference signal for time-dependent single photon counting.
3. The multi-channel in-situ detection device for the subsurface defect of the optical element as claimed in claim 1, wherein the confocal module (9) comprises a first lens (901), a second aperture (902), and a second lens (903), and the confocal module, the confocal detection system (4), the micro-magnification system (19), and the subsurface of the optical element (21) to be detected form a confocal system for realizing the high-resolution measurement of the three-dimensional topography of the subsurface defect.
4. The multi-channel in-situ detection device for the subsurface defect of the optical element as claimed in claim 1, wherein the sample stage (22) is connected with a high-precision three-dimensional electric translation stage and a piezoelectric ceramic Z-direction moving mechanism for placing and adjusting the optical element (21) to be detected.
5. The apparatus for multi-channel in-situ detection of subsurface defects in optical elements as claimed in claim 1, wherein said confocal detection system (4) comprises a neutral filter (401), a second focusing lens (402), a first aperture (403), a detector (404), said first aperture (403) being disposed above a focal plane of said second focusing lens (402), said detector (404) being an avalanche photodiode or a photomultiplier tube.
6. The apparatus for multi-channel in-situ detection of subsurface defects in optical elements as claimed in claim 1, wherein said fluorescence lifetime detection system (1) comprises a band-pass filter (101), a focusing lens (102) and a high-speed response photodetector (103), a detection surface of said high-speed response photodetector (103) being located at a focal plane of said focusing lens (102), said high-speed response photodetector (103) being an avalanche photodiode or a photomultiplier tube for detecting fluorescence photon signals.
7. The multi-channel in-situ detection apparatus for subsurface defects of optical elements as claimed in claim 1, wherein said pump laser source (16) is a continuous or quasi-continuous high power laser source for pumping and heating the optical element (21) to be detected to generate photothermal deformation.
8. The apparatus for multi-channel in-situ detection of subsurface defects in optical elements as claimed in claim 1 wherein said beam conditioning module (15) comprises a beam shaper (1501), a beam power conditioner (1502) for shaping and power conditioning the pump laser beam.
9. The apparatus for multi-channel in-situ detection of subsurface defects in optical elements as claimed in claim 1, wherein said photothermal absorption detection system (20) comprises a third lens (2001), a fourth lens (2002), an optical stop (2003) and a photodetector (2004), a detection surface of said photodetector (2004) being located at a focal plane of a lens assembly.
10. A multi-channel in-situ detection method for the subsurface defect of the optical element to be detected by using the multi-channel in-situ detection device for the subsurface defect of the optical element as claimed in claim 1, wherein the method comprises the following steps:
placing an optical element (21) to be detected on the sample table (22);
adjusting the position and the angle of the optical element (21) to be measured by using the sample stage (22) to enable the sub-surface of the optical element (21) to be measured to be positioned on the object space focal plane of the microscopic amplification system (19);
the rotatable reflector (11) is unscrewed to trigger the short pulse laser light source (8), the short pulse laser light source (8) emits laser beams, the laser beams are reflected by the dichroic mirror (7), enter the microscopic amplification system (19) through the confocal module (9) and are converged in a sub-surface defect point position area of the optical element to be detected (21), excited fluorescence is collected by the microscopic amplification system (19), passes through the confocal module (9), penetrates through the dichroic mirror (7), is reflected by the first light splitting system (3) to enter the confocal detection system (4), and is scanned in three directions of XYZ through the sample table (22), and the confocal detection system (4) obtains three-dimensional shape information of the detected defect point area and inputs the three-dimensional shape information into the data processing system (6) through the multi-channel control system (5);
the confocal detection system (4) has a transverse resolution sigmaxyThe wavelength of the short pulse laser source (8) and the numerical aperture NA of the microscopic amplification system (19) are determined according to the following formula,
σxy＝0.4λ/NA；
transmitting another beam of fluorescent light beam by the first light splitting system (3) and then entering the fluorescent life detection system (1), combining the fluorescent life detection system (1) with the time-dependent single photon counting module (2) to obtain the fluorescent life information of the point to be detected, scanning in three directions of XYZ by the sample stage (22), obtaining the fluorescent life imaging three-dimensional morphological information of the detected defect point area by the fluorescent life detection system (1) and inputting the information into the data processing system (6) by the multi-channel control system (5);
the rotatable reflector (11) is screwed in, laser emitted by the pump laser source (16) is converged to a subsurface defect point position area of the optical element (21) to be detected through the microscopic amplification system (19) after power adjustment, shaping, beam expansion and frequency modulation are carried out on the pump laser beam by the beam power adjuster (1502), the beam shaper (1501) and the optical chopper (12), the detected position area generates photothermal deformation under the heating of the pump laser, detection light emitted by the detection laser source (17) is converged to the photothermal deformation area through the first focusing lens (18), the photothermal deformation can cause the transmission characteristic of the detection laser beam to change to generate photothermal detection signals, and the photothermal detection signals are filtered by the photothermal absorption detection system (20), subjected to photoelectric signal conversion and data processing and analysis to obtain photothermal absorption information of the pump light by the subsurface defect point position area of the optical element (21) to be detected, XYZ three-direction scanning is carried out through a sample table (22), and the photothermal absorption detection system (20) obtains photothermal absorption three-dimensional distribution information of a detected defect point region and inputs the photothermal absorption three-dimensional distribution information into the data processing system (6) through the multi-channel control system (5);
sixthly, the data processing system (6) processes data of the confocal channel, the fluorescence life imaging channel and the photo-thermal absorption channel to obtain the geometric shape, the fluorescence characteristic and the photo-thermal absorption in-situ information of the detected defect point region on the subsurface of the optical element (21) to be detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911259313.8A CN111060516B (en) | 2019-12-10 | 2019-12-10 | Multi-channel in-situ detection device and method for subsurface defects of optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911259313.8A CN111060516B (en) | 2019-12-10 | 2019-12-10 | Multi-channel in-situ detection device and method for subsurface defects of optical element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111060516A CN111060516A (en) | 2020-04-24 |
| CN111060516B true CN111060516B (en) | 2022-03-08 |
Family
ID=70300535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911259313.8A Active CN111060516B (en) | 2019-12-10 | 2019-12-10 | Multi-channel in-situ detection device and method for subsurface defects of optical element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111060516B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112229606A (en) * | 2020-09-24 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Multi-mode in-situ defect measuring device and method for optical element |
| CN112697722A (en) * | 2020-12-02 | 2021-04-23 | 武汉理工大学 | Transmission type multipurpose multivariable coupling in-situ optical absorption testing device and method |
| CN113607750B (en) * | 2021-08-05 | 2022-06-14 | 浙江大学 | Device and method for detecting subsurface defect of optical element |
| CN113720861A (en) * | 2021-09-16 | 2021-11-30 | 中国科学院微电子研究所 | Sub-surface defect detection method of transparent sample |
| CN114280017B (en) * | 2021-12-10 | 2024-04-23 | 清华大学 | Micromechanical interface nano-level defect detection device |
| CN114235836A (en) * | 2021-12-16 | 2022-03-25 | 深圳市壹倍科技有限公司 | System for detecting semiconductor defects |
| CN116754565B (en) * | 2023-08-04 | 2024-04-26 | 哈尔滨工业大学 | Automatic focusing detection method for optical element full-caliber surface micro-defect photo-induced fluorescence detection |
| CN117012663B (en) * | 2023-08-24 | 2024-06-11 | 上海优睿谱半导体设备有限公司 | Wafer defect detection system and method |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5479252A (en) * | 1993-06-17 | 1995-12-26 | Ultrapointe Corporation | Laser imaging system for inspection and analysis of sub-micron particles |
| CA2559324A1 (en) * | 2004-03-11 | 2005-09-22 | Nano-Or Technologies (Israel) Ltd. | Methods and apparatus for wavefront manipulations and improved 3-d measurements |
| CN101819163A (en) * | 2010-06-03 | 2010-09-01 | 成都精密光学工程研究中心 | Detection device of subsurface defect of optical element and method thereof |
| CN102498387A (en) * | 2009-09-22 | 2012-06-13 | 赛博光学公司 | High speed, high resolution, three dimensional solar cell inspection system |
| CN104458691A (en) * | 2014-12-25 | 2015-03-25 | 合肥知常光电科技有限公司 | Photothermal-fluorescent double-mode spectrum detection device and detection method thereof |
| CN105738374A (en) * | 2016-04-21 | 2016-07-06 | 中国工程物理研究院激光聚变研究中心 | System and method for testing damage property of absorption defect of optical element |
| CN206348270U (en) * | 2017-01-11 | 2017-07-21 | 中国工程物理研究院激光聚变研究中心 | Quick three-dimensional detects the detection means of subsurface defect of optical element |
| CN107721196A (en) * | 2017-09-30 | 2018-02-23 | 中国人民解放军国防科技大学 | Method for removing surface chemical structure defects of fused quartz component |
| WO2018067885A1 (en) * | 2016-10-07 | 2018-04-12 | Kla-Tencor Corporation | Three-dimensional imaging for semiconductor wafer inspection |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9846122B2 (en) * | 2013-11-26 | 2017-12-19 | Nanometrics Incorporated | Optical metrology system for spectral imaging of a sample |
| US10595770B2 (en) * | 2016-10-19 | 2020-03-24 | The Regents Of The University Of California | Imaging platform based on nonlinear optical microscopy for rapid scanning large areas of tissue |
-
2019
- 2019-12-10 CN CN201911259313.8A patent/CN111060516B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5479252A (en) * | 1993-06-17 | 1995-12-26 | Ultrapointe Corporation | Laser imaging system for inspection and analysis of sub-micron particles |
| CA2559324A1 (en) * | 2004-03-11 | 2005-09-22 | Nano-Or Technologies (Israel) Ltd. | Methods and apparatus for wavefront manipulations and improved 3-d measurements |
| CN102498387A (en) * | 2009-09-22 | 2012-06-13 | 赛博光学公司 | High speed, high resolution, three dimensional solar cell inspection system |
| CN101819163A (en) * | 2010-06-03 | 2010-09-01 | 成都精密光学工程研究中心 | Detection device of subsurface defect of optical element and method thereof |
| CN104458691A (en) * | 2014-12-25 | 2015-03-25 | 合肥知常光电科技有限公司 | Photothermal-fluorescent double-mode spectrum detection device and detection method thereof |
| CN105738374A (en) * | 2016-04-21 | 2016-07-06 | 中国工程物理研究院激光聚变研究中心 | System and method for testing damage property of absorption defect of optical element |
| WO2018067885A1 (en) * | 2016-10-07 | 2018-04-12 | Kla-Tencor Corporation | Three-dimensional imaging for semiconductor wafer inspection |
| CN206348270U (en) * | 2017-01-11 | 2017-07-21 | 中国工程物理研究院激光聚变研究中心 | Quick three-dimensional detects the detection means of subsurface defect of optical element |
| CN107721196A (en) * | 2017-09-30 | 2018-02-23 | 中国人民解放军国防科技大学 | Method for removing surface chemical structure defects of fused quartz component |
Non-Patent Citations (2)
| Title |
|---|
| 全内反射技术检测大口径光学元件体内缺陷;杨菲菲等;《中国激光》;20170630;第44卷(第6期);第208-217页 * |
| 荧光成像技术探测熔石英元件亚表面缺陷;李洪路等;《激光与光电子学进展》;20180726;第124-128页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111060516A (en) | 2020-04-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111060516B (en) | Multi-channel in-situ detection device and method for subsurface defects of optical element | |
| CN103163106B (en) | Super-resolution fluorescent lifetime imaging method and device based on stimulated emission lost | |
| CN107192702B (en) | Spectroscopic pupil laser confocal CARS (coherent anti-Raman scattering) microspectroscopy testing method and device | |
| EP2593957A2 (en) | Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus | |
| CN110108677B (en) | Biological delay luminescence detection system | |
| CN111537478B (en) | Super-resolution optical microscopic imaging system based on frequency division multiplexing | |
| CN113008849B (en) | Ultraviolet-near infrared broadband micro-region photoluminescence spectrum testing device | |
| TW201702574A (en) | Measurement system of real-time spatial-resolved spectrum and time-resolved spectrum and measurement module thereof | |
| CN111504958B (en) | Method for detecting fluorescence defect of processing surface layer of soft and brittle optical crystal | |
| CN113960015A (en) | Multi-pulse induced spectroscopy method and device based on femtosecond plasma grating | |
| CN106092931B (en) | Laser flash photolysis instrument device capable of imaging and scanning | |
| JP2001194305A (en) | Device for fluorescence correlative spectroscopic analysis | |
| CN114460061A (en) | Time-gated Raman spectrum system and Raman spectrum correction method | |
| KR102143484B1 (en) | Dual mode microscope stystem | |
| CN104483105A (en) | Interpixel crosstalk detection system and method | |
| CN218917198U (en) | Multi-channel optical detection system for photoluminescence and automatic optical detection | |
| CN109781683B (en) | Optical system for synchronously performing time-resolved absorption, fluorescence and terahertz detection | |
| CN108195824B (en) | Laser-induced breakdown spectroscopy detection system | |
| CN216361769U (en) | Heavy metal detection system of single laser source, three-pulse LIBS and fluorescence spectrum | |
| CN114910457A (en) | Cathode fluorescence confocal micro-spectral imaging system and method | |
| CN115683337A (en) | Time-resolved micro-Raman spectrum acquisition system | |
| CN212341016U (en) | Breakdown spectrum detection system based on annular magnetic confinement technology | |
| CN110966929B (en) | Laser processing morphological performance time-resolved confocal spectrum measurement method and device | |
| CN111879756A (en) | Breakdown spectrum detection system and method based on annular magnetic confinement technology | |
| CN108333161B (en) | Pulse laser multiple round trip utilization device based on optical fiber and fluorescence signal detection method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |