CN103231166A - Pneumatic servo focusing mechanism - Google Patents

Pneumatic servo focusing mechanism Download PDF

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Publication number
CN103231166A
CN103231166A CN2012103375151A CN201210337515A CN103231166A CN 103231166 A CN103231166 A CN 103231166A CN 2012103375151 A CN2012103375151 A CN 2012103375151A CN 201210337515 A CN201210337515 A CN 201210337515A CN 103231166 A CN103231166 A CN 103231166A
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China
Prior art keywords
speculum
adjusting mechanism
microscope base
pneumatic servo
mount pad
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CN2012103375151A
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Chinese (zh)
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CN103231166B (en
Inventor
沈晖
龚张平
施志虎
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SUZHOU LEAD LASER TECHNOLOGY CO LTD
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SUZHOU LEAD LASER TECHNOLOGY CO LTD
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Publication of CN103231166A publication Critical patent/CN103231166A/en
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Abstract

The invention discloses a pneumatic servo focusing mechanism, which comprises a mounting seat, a lens seat, a reflecting mirror and a laser focusing device, wherein a light-in passage and a light-out passage are arranged on the mounting seat; the lens seat is embedded into the mounting seat; the reflecting mirror is fixed on the lens mirror; a pressure cavity is formed in the reflecting mirror and is communicated with the outside through a pressure interface; and the side wall, facing towards the inner side of the mounting seat, of the pressure cavity is a lens film the curvature factor of which is changed under action of the pressure; and through the lens film, the light beams in the light-in passage can be reflected to shine into a light beam passage of the laser focusing device through the light-out passage. According to the invention, the quick focusing of the reflecting mirror is realized through changing the curvature factor of the lens film due to pressure, and therefore the focusing mechanism has the advantages of simple structure, convenience in use and low processing and manufacturing expenses.

Description

The pneumatic servo focus adjusting mechanism
Technical field
The present invention relates to a kind of focus adjusting mechanism, particularly a kind of pneumatic servo focus adjusting mechanism.
Background technology
Laser process equipment utilizes that high energy laser beam cuts at material or material surface, welds, engraving, heat treatment etc.The laser beam that laser instrument sends arrives focus lamp after optic path, light beam is focused on, and focus place energy density is very big.Different processing technologys requires the focus of laser beam with respect to the position difference of material surface, so laser process equipment must possess the function of the position of adjusting focus.
In the present laser process equipment, the mode of adjusting the focal position mainly contains two kinds: manual focusing (turn is positioned at the electric capacity of front end on the laser Machining head with the distance of dynamic sensor with respect to focus lamp) and servomotor automatic focusing (being moved up and down by the driven by servomotor focus lamp).The shortcoming of manual adjusting style is that adjustment efficient is low, inconvenient operation is also dangerous, and servo automatic adjustment is complex structure, cost height then.
Summary of the invention
In order to overcome above-mentioned defective, the invention provides a kind of pneumatic servo focus adjusting mechanism, this pneumatic servo focus adjusting mechanism is simple in structure, easy to adjust, low cost of manufacture.
The present invention for the technical scheme that solves its technical problem and adopt is: a kind of pneumatic servo focus adjusting mechanism, comprise mount pad, microscope base, speculum and laser focusing device, described mount pad is provided with one and advances optical channel and and go out optical channel, microscope base is embedded on the mount pad, speculum is fixed on the microscope base, the inner pressure chamber that forms of speculum, this pressure chamber is communicated with extraneous source of the gas by pressure interface, the sidewall of speculum pressure chamber towards mount pad inside is the eyeglass film that curvature can change that is stressed, and this eyeglass film can be injected the beam reflection of advancing in the optical channel in the beam channel of laser focusing device by going out optical channel.
As a further improvement on the present invention, the eyeglass film sidewall in the described speculum is provided with sensor, and described sensor can detect eyeglass film deflection.
As a further improvement on the present invention, described sensor is a metal strain plate.
As a further improvement on the present invention, the pressure interface place of described speculum pressure chamber is provided with a servo proportion, also is provided with a control system, and sensor is messaging in control system, and the adjustment of control system control servo valve enters the gas pressure of pressure chamber.
As a further improvement on the present invention, described speculum is provided with the cooling that is interconnected but import, outlet and the cooling duct of medium circulation.
As a further improvement on the present invention, laser focusing device comprises a cavity, is provided with a passage that supplies light beam to pass through in this cavity, is embedded with a condenser lens in this passage.
As a further improvement on the present invention, the axial both sides of the condenser lens of described laser focusing device are respectively equipped with at least one protective glasses.
As a further improvement on the present invention, the enterprising optical channel of described mount pad with go out optical channel and be mutually vertical setting, be installed on the microscope base to mirror tilt, microscope base is fixed on the mount pad by two micrometer adjusting screws and a hold-down screw, hold-down screw of two micrometer adjusting screws lays respectively at the place, three angles of square microscope base, and two micrometer adjusting screws are positioned on the diagonal of microscope base.
The invention has the beneficial effects as follows: the present invention makes eyeglass film curvature change to realize the quick focusing of speculum by air pressure, and it is simple in structure, and is easy to use, and the processing and manufacturing expense is low.
Description of drawings
Fig. 1 is structural principle schematic diagram of the present invention;
Fig. 2 is stereogram of the present invention.
The specific embodiment
Embodiment: a kind of pneumatic servo focus adjusting mechanism, comprise mount pad 4, microscope base 2, speculum 3 and laser focusing device, described mount pad 4 is provided with one and advances optical channel and and go out optical channel, microscope base 2 is embedded on the mount pad 4, speculum 3 is fixed on the microscope base 2, the speculum 3 inner pressure chambers 301 that form, this pressure chamber 301 is communicated with extraneous source of the gas by pressure interface 30, the sidewall of speculum 3 pressure chambers 301 towards mount pad 4 inside is the eyeglass film 305 that curvature can change that is stressed, this eyeglass film 305 can be injected the beam reflection of advancing in the optical channel in the beam channel of laser focusing device by going out optical channel, laser beam 1 enters laser focusing device and focuses on focus after eyeglass film 305 reflections of speculum 3, carry out laser cutting then, pressed gas is entered in the pressure chamber 301 by pressure interface 30, pressure makes eyeglass film 305 that little deformation take place, thereby the curvature of the reflecting surface of eyeglass film 305 is changed, by regulating the pressure of gas in the pressure chamber 301, can obtain different curvature, reflecting surface can be rendered as the plane, protruding sphere, concave spherical surface.Supposing that incident beam is directional light, behind plane reflection, still is collimated light beam, after protruding spheric reflection, is divergent beams, after concave spherical surface is dispersed, is converging beam.Correspondingly, after focus lamp focusing, the focal position is also different.This has just realized adjusting the focal position by gas pressure, has satisfied different processing technologys to the demand of the focal position of laser beam.
Eyeglass film 305 sidewalls in the described speculum 3 are provided with sensor, and described sensor can detect eyeglass film 305 deflections, and this sensor detects the dependent variable of eyeglass film 305, thereby converse the curvature variable quantity of reflecting surface.
Described sensor is a metal strain plate.
Pressure interface 30 places of described speculum 3 pressure chambers 301 are provided with a servo proportion, also be provided with a control system, sensor is messaging in control system, the adjustment of control system control servo valve enters the gas pressure of pressure chamber 301, thereby the automated intelligent of realizing the curvature of reflecting surface is regulated, and it is accurately adjustable making the gas pressure that enters into pressure chamber 301.
Described speculum 3 is provided with the cooling that is interconnected but import, outlet and the cooling duct of medium circulation, and the laser beam with high-energy-density shines speculum 3 for a long time and can cause its distortion, influences its life-span, even the scaling loss eyeglass.So need lower the temperature to speculum 3, cooling agent enters speculum 3 by import, through the cooling duct in the speculum 3, flow out from outlet, realize the cooling to speculum 3.
Described laser focusing device comprises a cavity 8, is provided with a passage that supplies light beam to pass through in this cavity 8, is embedded with a condenser lens 6 in this passage.
The condenser lens 6 axial both sides of described laser focusing device are respectively equipped with at least one protective glasses 5; the protective glasses 5 on condenser lens 6 tops can stop the pollution of chip and the grease of movement parts in its upper optical path; the protective glasses 5 of condenser lens 6 bottoms can stop from workpiece slag and metallic vapour splash; effectively protect the not contaminated and damage of condenser lens 6, effectively prolonged the service life of condenser lens 6.
Described mount pad 4 enterprising optical channels with go out optical channel and be mutually vertical setting, speculum 3 is mounted obliquely within on the microscope base 2, microscope base 2 is fixed on the mount pad 4 by two micrometer adjusting screws and a hold-down screw, hold-down screw of two micrometer adjusting screws lays respectively at the place, three angles of square microscope base 2, and two micrometer adjusting screws are positioned on the diagonal of microscope base 2, regulate micrometer adjusting screw, microscope base 2 will change with respect to the position of mount pad 4, thereby realizes the attitude adjustment to deformable curvature mirrors 3 relative incoming laser beams.

Claims (8)

1. pneumatic servo focus adjusting mechanism, it is characterized in that: comprise mount pad (4), microscope base (2), speculum (3) and laser focusing device, described mount pad (4) is provided with one and advances optical channel and and go out optical channel, microscope base (2) is embedded on the mount pad (4), speculum (3) is fixed on the microscope base (2), the inner pressure chamber (301) that forms of speculum (3), this pressure chamber (301) is communicated with extraneous source of the gas by pressure interface (30), speculum (3) pressure chamber (301) is the eyeglass film (305) that curvature can change that is stressed towards the inner sidewall of mount pad (4), and this eyeglass film (305) can be injected the beam reflection of advancing in the optical channel in the beam channel of laser focusing device by going out optical channel.
2. pneumatic servo focus adjusting mechanism according to claim 1 is characterized in that: eyeglass film (305) sidewall in the described speculum (3) is provided with sensor, and described sensor can detect eyeglass film (305) deflection.
3. pneumatic servo focus adjusting mechanism according to claim 2, it is characterized in that: described sensor is a metal strain plate.
4. pneumatic servo focus adjusting mechanism according to claim 3, it is characterized in that: the pressure interface (30) of described speculum (3) pressure chamber (301) locates to be provided with a servo proportion, also be provided with a control system, sensor is messaging in control system, and the adjustment of control system control servo valve enters the gas pressure of pressure chamber (301).
5. pneumatic servo focus adjusting mechanism according to claim 1 is characterized in that: described speculum (3) is provided with the cooling that is interconnected but import, outlet and the cooling duct of medium circulation.
6. pneumatic servo focus adjusting mechanism according to claim 1, it is characterized in that: laser focusing device comprises a cavity (8), is provided with a passage that passes through for light beam in this cavity (8), is embedded with a condenser lens (6) in this passage.
7. pneumatic servo focus adjusting mechanism according to claim 5 is characterized in that: the condenser lens of described laser focusing device (6) axially is respectively equipped with at least one protective glasses (5) in both sides.
8. pneumatic servo focus adjusting mechanism according to claim 1, it is characterized in that: the enterprising optical channel of described mount pad (4) with go out optical channel and be mutually vertical setting, speculum (3) is mounted obliquely within on the microscope base (2), microscope base (2) is fixed on the mount pad (4) by two micrometer adjusting screws and a hold-down screw, hold-down screw of two micrometer adjusting screws lays respectively at the place, three angles of square microscope base (2), and two micrometer adjusting screws are positioned on the diagonal of microscope base (2).
CN201210337515.1A 2012-09-12 2012-09-12 Pneumatic servo focus adjusting mechanism Active CN103231166B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106094395A (en) * 2016-08-26 2016-11-09 马人欢 Lens type specially good effect pick-up lens
CN106094173A (en) * 2016-08-26 2016-11-09 马人欢 Reflection-type specially good effect pick-up lens
CN107096995A (en) * 2017-06-22 2017-08-29 奔腾激光(温州)有限公司 Laser cutting machine cutting head focusing system
CN115055807A (en) * 2022-06-22 2022-09-16 奔腾激光(武汉)有限公司 Focus-adjustable composite welding head for ultrahigh power

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Publication number Priority date Publication date Assignee Title
CN1189219A (en) * 1995-05-12 1998-07-29 雷纳德·A·歇尔查 Variable focus lens by small changes of equatorial lens diameter
CN2608997Y (en) * 2003-01-22 2004-03-31 张孟杰 Varifocus lens
CN101238395A (en) * 2005-06-21 2008-08-06 全球仿生光学有限责任公司 Lens
CN101506690A (en) * 2006-08-24 2009-08-12 新加坡科技研究局 Variable focus zoom lenses
CN202053025U (en) * 2011-04-14 2011-11-30 武汉三工光电设备制造有限公司 Laser focusing head with a micrometer
CN102500920A (en) * 2011-11-17 2012-06-20 奇瑞汽车股份有限公司 Cutting head
CN202763281U (en) * 2012-09-12 2013-03-06 苏州领创激光科技有限公司 Pneumatic servo focusing mechanism

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1189219A (en) * 1995-05-12 1998-07-29 雷纳德·A·歇尔查 Variable focus lens by small changes of equatorial lens diameter
CN2608997Y (en) * 2003-01-22 2004-03-31 张孟杰 Varifocus lens
CN101238395A (en) * 2005-06-21 2008-08-06 全球仿生光学有限责任公司 Lens
CN101506690A (en) * 2006-08-24 2009-08-12 新加坡科技研究局 Variable focus zoom lenses
CN202053025U (en) * 2011-04-14 2011-11-30 武汉三工光电设备制造有限公司 Laser focusing head with a micrometer
CN102500920A (en) * 2011-11-17 2012-06-20 奇瑞汽车股份有限公司 Cutting head
CN202763281U (en) * 2012-09-12 2013-03-06 苏州领创激光科技有限公司 Pneumatic servo focusing mechanism

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106094395A (en) * 2016-08-26 2016-11-09 马人欢 Lens type specially good effect pick-up lens
CN106094173A (en) * 2016-08-26 2016-11-09 马人欢 Reflection-type specially good effect pick-up lens
CN108761747A (en) * 2016-08-26 2018-11-06 常州爱上学教育科技有限公司 Pick-up lens for shooting special efficacy video and its working method
CN109031618A (en) * 2016-08-26 2018-12-18 常州爱上学教育科技有限公司 It can reduce the pick-up lens of later period special video effect production
CN106094395B (en) * 2016-08-26 2019-01-25 南昌同兴达精密光电有限公司 Lens type special efficacy pick-up lens
CN109031618B (en) * 2016-08-26 2021-11-23 常州爱上学教育科技有限公司 Camera lens capable of reducing video special effect production in later period
CN108761747B (en) * 2016-08-26 2022-10-14 常州爱上学教育科技有限公司 Camera lens for shooting special-effect video and working method thereof
CN107096995A (en) * 2017-06-22 2017-08-29 奔腾激光(温州)有限公司 Laser cutting machine cutting head focusing system
CN107096995B (en) * 2017-06-22 2019-12-13 奔腾激光(温州)有限公司 method for focusing cutting head of laser cutting machine
CN115055807A (en) * 2022-06-22 2022-09-16 奔腾激光(武汉)有限公司 Focus-adjustable composite welding head for ultrahigh power

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