CN103212755B - Method for processing rotary parts by using water electrode and air plasmas - Google Patents
Method for processing rotary parts by using water electrode and air plasmas Download PDFInfo
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- CN103212755B CN103212755B CN201310177034.3A CN201310177034A CN103212755B CN 103212755 B CN103212755 B CN 103212755B CN 201310177034 A CN201310177034 A CN 201310177034A CN 103212755 B CN103212755 B CN 103212755B
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Abstract
The invention provides a method for processing rotary parts by using water electrode and air plasmas and belongs to the technical field of processing rotary parts of silicon-based materials such as silicon carbide and fused quartz by using plasmas. The method provided by the invention is used for solving the problems of uneven discharge, thermal deformation of workpieces and the like. The method comprises the following steps of: step 1, connecting the upper end face of a rotary forming electrode to a rotating shaft, wherein the rotary forming electrode is circular and outwards convex; step 2, dipping the outer surface of the part to be processed in electrolyte aqueous solution in a water tank; step 3, closing the rotary forming electrode to the surface to be processed of the part to be processed; step 4, preheating a radio-frequency power source and mixing a plasma gas source; step 5, putting the rotary forming electrode in rotary motion and starting the radio-frequency power source; step 6, controlling the movement locus of the rotary forming electrode and staying time on the surface of the part; and step 7, taking out the part to be processed. With the application of the water electrode in the method provided by the invention, the electrode is fitted with the surface of the workpiece without clearance and discharges evenly, and as a result, the processing accuracy is guaranteed and the processing stability is improved.
Description
Technical field
The invention belongs to plasma process carborundum or melt the technical fields of silica-base material slewing parts such as quartz.
Background technology
At present, silica-base material, as carborundum, melts quartz etc., due to advantages such as its hardness is high, fragility large, stable chemical natures, in the high-precision part extensive use of Aero-Space, military affairs, the energy, chip manufacturing.And slewing parts occupies great ratio in silica-base material part, as half spherical top harmonic oscillator, deep camber aspherics lens, optically focused non-spherical lens etc.But due to the unworkability of silica-base material, traditional dependence mechanical stress removes the method for material, as superfine grinding, small tool polishing, there is process-cycle length, finished surface and sub-surface and there is the problems such as damage, the requirement that part need have super-smooth surface cannot be met.In recent years, the new atmosphere plasma processing mode proposed, owing to belonging to contactless chemical process, can solve the problem to a great extent.But current atmosphere plasma processing, the solid electrode adopting solid shape size more, be difficult to ensure to fit closely with outer surface of workpiece, this will cause gap in zones of different different, causes discharge instability, thus affects crudy; In addition, because atmosphere plasma processing belongs to chemical reaction, can discharge a large amount of heat man-hour adding, cause the thermal deformation of workpiece, these problems limit the application of atmosphere plasma processing all to a certain extent
Summary of the invention
The object of this invention is to provide a kind of water electrode atmosphere plasma processing rotary part method, current working (machining) efficiency be low in order to solve, the problem such as uneven, the workpiece thermal deformation of discharging.
Described object is realized by following scheme: a kind of described water electrode atmosphere plasma processing rotary part method, and its step method is:
Step one: the insulation of the upper surface of rotary forming electrode is connected in the vertical motion work rotating shaft of lowering or hoisting gear; Rotary forming electrode is rounded convex shape, the working surface diameter size 5mm-15mm less of the inner surface diameter size of part to be processed of rotary forming electrode; The center of rotary forming electrode has venthole, and venthole is communicated with the air guide of hybrid plasma source of the gas by tracheae; Rotary forming electrode is made to be connected the anode as atmospheric pressure plasma with the output of radio-frequency power supply;
Step 2: part to be processed is installed in the sink, and the outer surface of part to be processed is immersed in the electrolyte aqueous solution in tank, electrolyte aqueous solution is by the negative electrode of tank ground connection as atmospheric pressure plasma;
Step 3: make rotary forming electrode near the work surface of part to be processed, and make between them, to keep certain discharging gap, arcing distance scope is 5mm-15mm;
Step 4: preheating radio-frequency power supply and hybrid plasma source of the gas, preheating time is 5-10 minute; Then open hybrid plasma source of the gas, make the flow of plasma gas be 1 liter/min ~ 40 liters/min, the flow-rate ratio of reacting gas and plasma gas is 1: 10 ~ 1: 50; The flow-rate ratio of assist gas and reacting gas is 1: 10 ~ 1: 1;
Step 5: be full of plasma gas in the region between rotary forming electrode and the work surface of part to be processed, after the mist of reacting gas and assist gas, start the axis of rotation of lowering or hoisting gear, rotary forming electrode is made to do gyration, start radio-frequency power supply, progressively increase the power of radio-frequency power supply, power is made to reach 100W-400W, the reflection power simultaneously controlling radio-frequency power supply is zero, pass into mist continually and steadily in the process of radio-frequency power supply work, the region of discharge between the work surface of rotary forming electrode and part to be processed is made to produce stable plasma discharge,
Step 6: according to the requirement of removal amount, controls the movement locus of rotary forming electrode and the residence time at piece surface, processes with the atmosphere plasma of above-mentioned generation to piece surface;
Step 7: to be processed complete after, close the power supply of radio-frequency power supply, close hybrid plasma source of the gas, take out part to be processed, the degree of depth is removed to processing and measures, to judge whether to reach processing request.
The technical advantage of patent of the present invention:
1, the application of water electrode, electrode can be fitted with surface of the work, make electric discharge evenly, thus improve working (machining) efficiency, ensure that machining accuracy, water electrode, adopts conductive electrolyte aqueous solution, due to the flowable of the aqueous solution, its can be spontaneous the surface of solids being fitted in arbitrary shape, formed and the identical electrode of surface of the work face shape, therefore ensure that the uniformity of arcing distance, and then ensure that the uniformity of processing;
2, due to the thermal conductivity that water is good, effectively control the reaction heat effect in atmosphere plasma process, greatly reduce the thermal deformation of workpiece;
3, the processing method of patent of the present invention belongs to noncontact procession in essence, does not have machining contact stress, can not cause damage, can meet Element Design requirement to surface of the work and sub-surface.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present invention;
Fig. 2 is the position relationship structural representation in Fig. 1 between rotary forming electrode 1 and part to be processed 4.
Detailed description of the invention
Detailed description of the invention one: shown in composition graphs 1, Fig. 2, its step method is:
Step one: the insulation of the upper surface of rotary forming electrode 1 is connected on the vertical motion work rotating shaft 2-1 of lowering or hoisting gear 2; Rotary forming electrode 1 is rounded convex shape, the working surface diameter size 5mm-15mm less of the inner surface diameter size of part 4 to be processed of rotary forming electrode 1; The center of rotary forming electrode 1 has venthole 1-1, and venthole 1-1 is communicated with hybrid plasma source of the gas 5 air guide by tracheae 5-1; Rotary forming electrode 1 is made to be connected the anode as atmospheric pressure plasma with the output of radio-frequency power supply 3;
Step 2: part 4 to be processed is installed in tank 2-2, and the outer surface of part 4 to be processed is immersed in the electrolyte aqueous solution in tank 2-2, electrolyte aqueous solution is by the negative electrode of tank 2-2 ground connection as atmospheric pressure plasma;
Step 3: make rotary forming electrode 1 near the work surface of part 4 to be processed, and make to keep certain discharging gap between them, arcing distance scope is 5mm-15mm;
Step 4: preheating radio-frequency power supply 3 and hybrid plasma source of the gas 5, preheating time is 5-10 minute; Then open hybrid plasma source of the gas 5, make the flow of plasma gas be 1 liter/min ~ 40 liters/min, the flow-rate ratio of reacting gas and plasma gas is 1: 10 ~ 1: 50; The flow-rate ratio of assist gas and reacting gas is 1: 10 ~ 1: 1;
Step 5: be full of plasma gas in the region between rotary forming electrode 1 and the work surface of part to be processed 4, after the mist of reacting gas and assist gas, the rotating shaft 2-1 starting lowering or hoisting gear 2 rotates, rotary forming electrode 1 is made to do gyration, start radio-frequency power supply 3, progressively increase the power of radio-frequency power supply 3, power is made to reach 100W-400W, the reflection power simultaneously controlling radio-frequency power supply 3 is zero, pass into mist continually and steadily in the process that radio-frequency power supply 3 works, the region of discharge between the work surface of rotary forming electrode 1 and part to be processed 4 is made to produce stable plasma discharge,
Step 6: according to the requirement of removal amount, controls the movement locus of rotary forming electrode 1 and the residence time at piece surface, processes with the atmosphere plasma of above-mentioned generation to piece surface;
Step 7: to be processed complete after, close the power supply of radio-frequency power supply 3, close hybrid plasma source of the gas 5, take out part 4 to be processed, the degree of depth is removed to processing and measures, to judge whether to reach processing request.
The material of described rotary forming electrode 1 is aluminium, copper, iron.
Electrolyte aqueous solution 2-3 in described tank 2-2 carries out cooling down by outside liquid EGR.
The frequency of described radio-frequency power supply 3 is 13.56MHz, and peak power is 2KW.
Described hybrid plasma source of the gas 3 is ternary gas hybrid system, and gas supply flow is 20-100L/min.
Atmosphere plasma excited gas in described hybrid plasma source of the gas 5 can be the inert gas such as helium, argon gas; Reacting gas can be sulfur hexafluoride, carbon tetrafluoride, Nitrogen trifluoride etc.; Assist gas can be oxygen, hydrogen, nitrogen etc.
The material of described part to be processed 4 is carborundum or melts the silica-base materials such as quartz.
Operation principle: connected by radio-frequency power supply 3 output and turn the anode of shaped electrode 1 as atmospheric pressure plasma, electrolyte aqueous solution 2-3 is by the negative electrode of tank 2-2 ground connection as atmospheric pressure plasma, part 4 outer surface to be processed fully contacts with electrolyte aqueous solution 2-3 electrode, thered is provided to excite by hybrid plasma source of the gas 5 and produce the gas of plasma and be full of gap between plasma shaped electrode and part, output electric energy is provided by radio-frequency power supply 3, plasma is produced at the discharging gap turning shaped electrode 1 and part to be processed 4, simultaneous reactions gas is excited, there is chemical reaction in the surface producing the atom and part to be processed 4 with reactivity, and generate volatile product and taken away piece surface by the plasma electrode rotated, realize the not damaged rapid processing treating processing parts thus.
Claims (3)
1. water electrode atmosphere plasma processing rotary part method, is characterized in that its step method is:
Step one: the insulation of the upper surface of rotary forming electrode (1) is connected in the vertical motion work rotating shaft (2-1) of lowering or hoisting gear (2); Rotary forming electrode (1) is rounded convex shape, the working surface diameter size 5mm-15mm less of the inner surface diameter size of part to be processed (4) of rotary forming electrode (1); The center of rotary forming electrode (1) has venthole (1-1), and venthole (1-1) is communicated with hybrid plasma source of the gas (5) air guide by tracheae (5-1); Rotary forming electrode (1) is made to be connected the anode as atmospheric pressure plasma with the output of radio-frequency power supply (3);
Step 2: part to be processed (4) is installed in tank (2-2), and the outer surface of part to be processed (4) is immersed in the electrolyte aqueous solution in tank (2-2), electrolyte aqueous solution is by the negative electrode of tank (2-2) ground connection as atmospheric pressure plasma;
Step 3: make rotary forming electrode (1) near the work surface of part to be processed (4), and make to keep certain discharging gap between them, arcing distance scope is 5mm-15mm;
Step 4: preheating radio-frequency power supply (3) and hybrid plasma source of the gas (5), preheating time is 5-10 minute; Then open hybrid plasma source of the gas (5), make the flow of plasma gas be 1 liter/min ~ 40 liters/min, the flow-rate ratio of reacting gas and plasma gas is 1:10 ~ 1:50; The flow-rate ratio of assist gas and reacting gas is 1:10 ~ 1:1;
Step 5: be full of plasma gas in the region between rotary forming electrode (1) and the work surface of part to be processed (4), after the mist of reacting gas and assist gas, the rotating shaft (2-1) starting lowering or hoisting gear (2) is rotated, rotary forming electrode (1) is made to do gyration, start radio-frequency power supply (3), progressively increase the power of radio-frequency power supply (3), power is made to reach 100W-400W, the reflection power simultaneously controlling radio-frequency power supply (3) is zero, pass into mist continually and steadily in the process that radio-frequency power supply (3) works, the region of discharge between the work surface of rotary forming electrode (1) and part to be processed (4) is made to produce stable plasma discharge,
Step 6: according to the requirement of removal amount, controls the movement locus of rotary forming electrode (1) and the residence time at piece surface, processes with the atmosphere plasma of above-mentioned generation to piece surface;
Step 7: to be processed complete after, close radio-frequency power supply (3) power supply, close hybrid plasma source of the gas (5), take out part to be processed (4), to processing remove the degree of depth measure, to judge whether to reach processing request.
2. water electrode atmosphere plasma processing rotary part method according to claim 1, is characterized in that the material of described rotary forming electrode (1) is aluminium, copper, iron.
3. water electrode atmosphere plasma processing rotary part method according to claim 1, is characterized in that the atmosphere plasma excited gas in described hybrid plasma source of the gas (5) is helium, argon gas; Reacting gas is sulfur hexafluoride, carbon tetrafluoride, Nitrogen trifluoride; Assist gas is oxygen.
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| CN201310177034.3A CN103212755B (en) | 2013-05-14 | 2013-05-14 | Method for processing rotary parts by using water electrode and air plasmas |
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| CN111805022A (en) * | 2020-06-04 | 2020-10-23 | 南方科技大学 | Plasma-assisted electrolytic machining method and device for implementing same |
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| WO1994016854A1 (en) * | 1993-01-19 | 1994-08-04 | Ingenerny Tsentr 'plazmodinamika' | Process for treating the surface of an article and facility for carrying this out |
| JP2003113500A (en) * | 2001-10-03 | 2003-04-18 | Toshiba Corp | Electrolytic polishing method |
| CN102335789A (en) * | 2011-11-11 | 2012-02-01 | 沈阳黎明航空发动机(集团)有限责任公司 | Device and method for removing re-melting layers on inner walls of air film holes of blades |
| CN102489797A (en) * | 2011-11-11 | 2012-06-13 | 沈阳黎明航空发动机(集团)有限责任公司 | Machining device and method for polishing blade profile of integrated bladed disk |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009000237A1 (en) * | 2009-01-15 | 2010-07-22 | Robert Bosch Gmbh | Method for producing holes |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994016854A1 (en) * | 1993-01-19 | 1994-08-04 | Ingenerny Tsentr 'plazmodinamika' | Process for treating the surface of an article and facility for carrying this out |
| JP2003113500A (en) * | 2001-10-03 | 2003-04-18 | Toshiba Corp | Electrolytic polishing method |
| CN102335789A (en) * | 2011-11-11 | 2012-02-01 | 沈阳黎明航空发动机(集团)有限责任公司 | Device and method for removing re-melting layers on inner walls of air film holes of blades |
| CN102489797A (en) * | 2011-11-11 | 2012-06-13 | 沈阳黎明航空发动机(集团)有限责任公司 | Machining device and method for polishing blade profile of integrated bladed disk |
Non-Patent Citations (1)
| Title |
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| 微结构光学零件的大气等离子体数控加工;李娜等;《光学 精密工程》;20130430;第21卷(第4期);第934－940页 * |
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